JP2017112612A - マイクロドームアレイを使用した圧電トランスデューサ - Google Patents
マイクロドームアレイを使用した圧電トランスデューサ Download PDFInfo
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- JP2017112612A JP2017112612A JP2016244228A JP2016244228A JP2017112612A JP 2017112612 A JP2017112612 A JP 2017112612A JP 2016244228 A JP2016244228 A JP 2016244228A JP 2016244228 A JP2016244228 A JP 2016244228A JP 2017112612 A JP2017112612 A JP 2017112612A
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
- B06B1/0662—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element with an electrode on the sensitive surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0207—Driving circuits
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
- B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
- B06B1/0637—Spherical array
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0644—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using a single piezoelectric element
-
- G—PHYSICS
- G10—MUSICAL INSTRUMENTS; ACOUSTICS
- G10K—SOUND-PRODUCING DEVICES; METHODS OR DEVICES FOR PROTECTING AGAINST, OR FOR DAMPING, NOISE OR OTHER ACOUSTIC WAVES IN GENERAL; ACOUSTICS NOT OTHERWISE PROVIDED FOR
- G10K11/00—Methods or devices for transmitting, conducting or directing sound in general; Methods or devices for protecting against, or for damping, noise or other acoustic waves in general
- G10K11/18—Methods or devices for transmitting, conducting or directing sound
- G10K11/26—Sound-focusing or directing, e.g. scanning
- G10K11/32—Sound-focusing or directing, e.g. scanning characterised by the shape of the source
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
- H04R17/00—Piezoelectric transducers; Electrostrictive transducers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
- H10N30/2048—Membrane type having non-planar shape
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/704—Piezoelectric or electrostrictive devices based on piezoelectric or electrostrictive films or coatings
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/87—Electrodes or interconnections, e.g. leads or terminals
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B2201/00—Indexing scheme associated with B06B1/0207 for details covered by B06B1/0207 but not provided for in any of its subgroups
- B06B2201/70—Specific application
- B06B2201/76—Medical, dental
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Investigating Or Analyzing Materials By The Use Of Ultrasonic Waves (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
Abstract
Description
106、116、126、136、146、156 トランスデューサアレイ
110、120、130、140、150、160、170、180 ワイヤ
168、178 下位アレイ
202、242 振動素子
208、248 基部
210、250 圧電素子
212、252 基準電極
214、254 駆動電極
218、258 湾曲部分
220、260 平面部分
226、232、266、272 電気的相互接続部
228、268 アクティブ接続パッド
230、270 制御/感知回路
234、274 接地接続パッド
238、278 周囲部分
240、280 中心部分
302、322 圧電素子
303、333 伝播媒体
310、330 圧力波
412 移行領域
402 PZT層
404 電極層
502 トランスデューサアレイ
504 トランスデューサデバイス
506 振動素子
514 環状金属シール
516 基部
Claims (1)
- 圧電トランスデューサにおいて、
駆動電極と、基準電極と、該駆動電極および基準電極の間に配置された、圧電素子とを備えている振動素子、および、
基部であって、該基部の第1表面上で前記振動素子を支持し、かつ前記振動素子の前記駆動電極と前記基準電極とに電気的に接続されている集積回路を含んでいる、基部、
を備え、
前記駆動電極、前記基準電極、および前記圧電素子の夫々が、各柔軟部分と、該各柔軟部分に接続した各静止部分とを含むものであり、
前記駆動電極、前記基準電極、および前記圧電素子の、前記柔軟部分が、前記第1表面の同じエリアの上に懸架され、かつ前記駆動電極と前記基準電極との間に電圧が印加されていないときに、前記基部の前記第1表面に対して第1方向に湾曲しているものであり、
前記基準電極、前記駆動電極、および前記圧電素子の、前記柔軟部分が、前記駆動電極と前記基準電極との間に印加された駆動電圧に応じて偏向するものであり、
前記トランスデューサが、前記基部から前記振動素子を指し示す方向へと向いた露出外面を備え、かつ前記トランスデューサの該露出外面が、前記振動素子の外面、または前記振動素子の外面を覆っている柔軟なフィルムの外面、を含むものであり、さらに、
前記トランスデューサの前記露出外面が、前記基準電極、前記駆動電極、および前記圧電素子の、前記柔軟部分の偏向に合わせて偏向するものであることを特徴とする圧電トランスデューサ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201161443042P | 2011-02-15 | 2011-02-15 | |
US61/443,042 | 2011-02-15 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2013554545A Division JP6066422B2 (ja) | 2011-02-15 | 2012-02-14 | マイクロドームアレイを使用した圧電トランスデューサ |
Publications (3)
Publication Number | Publication Date |
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JP2017112612A true JP2017112612A (ja) | 2017-06-22 |
JP2017112612A5 JP2017112612A5 (ja) | 2017-08-03 |
JP6262837B2 JP6262837B2 (ja) | 2018-01-17 |
Family
ID=46636349
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
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JP2013554545A Active JP6066422B2 (ja) | 2011-02-15 | 2012-02-14 | マイクロドームアレイを使用した圧電トランスデューサ |
JP2016244228A Active JP6262837B2 (ja) | 2011-02-15 | 2016-12-16 | マイクロドームアレイを使用した圧電トランスデューサ |
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JP2013554545A Active JP6066422B2 (ja) | 2011-02-15 | 2012-02-14 | マイクロドームアレイを使用した圧電トランスデューサ |
Country Status (6)
Country | Link |
---|---|
US (5) | US9070861B2 (ja) |
EP (1) | EP2676459B1 (ja) |
JP (2) | JP6066422B2 (ja) |
KR (1) | KR20140005289A (ja) |
CN (2) | CN106269451B (ja) |
WO (1) | WO2012112540A2 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023042754A1 (ja) | 2021-09-14 | 2023-03-23 | 日清紡ホールディングス株式会社 | 圧電体デバイス |
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US9184369B2 (en) | 2008-09-18 | 2015-11-10 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
US9173047B2 (en) * | 2008-09-18 | 2015-10-27 | Fujifilm Sonosite, Inc. | Methods for manufacturing ultrasound transducers and other components |
JP2011076725A (ja) * | 2009-09-29 | 2011-04-14 | Fujifilm Corp | 圧電型mems素子およびその製造方法 |
KR102322776B1 (ko) | 2010-02-18 | 2021-11-04 | 마우이 이미징, 인코포레이티드 | 초음파 이미지를 구성하는 방법 및 이를 위한 다중-개구 초음파 이미징 시스템 |
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US20120206014A1 (en) | 2012-08-16 |
US10478857B2 (en) | 2019-11-19 |
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CN103493510B (zh) | 2016-09-14 |
WO2012112540A3 (en) | 2012-12-20 |
US9070862B2 (en) | 2015-06-30 |
CN106269451B (zh) | 2020-02-21 |
US20180297080A1 (en) | 2018-10-18 |
EP2676459A2 (en) | 2013-12-25 |
JP2014511055A (ja) | 2014-05-01 |
WO2012112540A2 (en) | 2012-08-23 |
US20120235539A1 (en) | 2012-09-20 |
JP6262837B2 (ja) | 2018-01-17 |
JP6066422B2 (ja) | 2017-01-25 |
EP2676459B1 (en) | 2022-03-30 |
US9070861B2 (en) | 2015-06-30 |
CN106269451A (zh) | 2017-01-04 |
US9919342B2 (en) | 2018-03-20 |
US10022750B2 (en) | 2018-07-17 |
US20150298173A1 (en) | 2015-10-22 |
KR20140005289A (ko) | 2014-01-14 |
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