JP2017066147A5 - - Google Patents
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- JP2017066147A5 JP2017066147A5 JP2016217206A JP2016217206A JP2017066147A5 JP 2017066147 A5 JP2017066147 A5 JP 2017066147A5 JP 2016217206 A JP2016217206 A JP 2016217206A JP 2016217206 A JP2016217206 A JP 2016217206A JP 2017066147 A5 JP2017066147 A5 JP 2017066147A5
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- JP
- Japan
- Prior art keywords
- group
- organic
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- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461946164P | 2014-02-28 | 2014-02-28 | |
| US61/946,164 | 2014-02-28 | ||
| US14/625,158 US9233990B2 (en) | 2014-02-28 | 2015-02-18 | Organoaminosilanes and methods for making same |
| US14/625,158 | 2015-02-18 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015038477A Division JP6046758B2 (ja) | 2014-02-28 | 2015-02-27 | 有機アミノシランおよびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017066147A JP2017066147A (ja) | 2017-04-06 |
| JP2017066147A5 true JP2017066147A5 (enExample) | 2017-12-28 |
Family
ID=52596806
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015038477A Active JP6046758B2 (ja) | 2014-02-28 | 2015-02-27 | 有機アミノシランおよびその製造方法 |
| JP2016217206A Pending JP2017066147A (ja) | 2014-02-28 | 2016-11-07 | 有機アミノシランおよびその製造方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015038477A Active JP6046758B2 (ja) | 2014-02-28 | 2015-02-27 | 有機アミノシランおよびその製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US9233990B2 (enExample) |
| EP (2) | EP2913334B1 (enExample) |
| JP (2) | JP6046758B2 (enExample) |
| KR (2) | KR101873565B1 (enExample) |
| CN (1) | CN104876957B (enExample) |
| TW (1) | TWI540138B (enExample) |
Families Citing this family (31)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10453675B2 (en) * | 2013-09-20 | 2019-10-22 | Versum Materials Us, Llc | Organoaminosilane precursors and methods for depositing films comprising same |
| KR102326396B1 (ko) | 2013-09-27 | 2021-11-12 | 레르 리키드 쏘시에떼 아노님 뿌르 레드 에렉스뿔라따시옹 데 프로세데 조르즈 클로드 | 아민 치환된 트리실릴아민 및 트리디실릴아민 화합물 |
| US9233990B2 (en) * | 2014-02-28 | 2016-01-12 | Air Products And Chemicals, Inc. | Organoaminosilanes and methods for making same |
| US9969756B2 (en) | 2014-09-23 | 2018-05-15 | L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés George Claude | Carbosilane substituted amine precursors for deposition of Si-containing films and methods thereof |
| US10354860B2 (en) * | 2015-01-29 | 2019-07-16 | Versum Materials Us, Llc | Method and precursors for manufacturing 3D devices |
| US9777025B2 (en) | 2015-03-30 | 2017-10-03 | L'Air Liquide, Société pour l'Etude et l'Exploitation des Procédés Georges Claude | Si-containing film forming precursors and methods of using the same |
| TWI716333B (zh) | 2015-03-30 | 2021-01-11 | 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 | 碳矽烷與氨、胺類及脒類之觸媒去氫耦合 |
| EP3310942B1 (en) * | 2015-06-16 | 2022-07-13 | Versum Materials US, LLC | Processes for depositing silicon-containing films |
| US11111256B2 (en) * | 2015-12-18 | 2021-09-07 | Jiangsu Nata Opto-Electronic Materials Co. Ltd. | High purity trisilylamine, methods of making, and use |
| US9701695B1 (en) * | 2015-12-30 | 2017-07-11 | American Air Liquide, Inc. | Synthesis methods for amino(halo)silanes |
| US10053775B2 (en) | 2015-12-30 | 2018-08-21 | L'air Liquide, Societé Anonyme Pour L'etude Et L'exploitation Des Procédés Georges Claude | Methods of using amino(bromo)silane precursors for ALD/CVD silicon-containing film applications |
| TWI724141B (zh) | 2016-03-23 | 2021-04-11 | 法商液態空氣喬治斯克勞帝方法硏究開發股份有限公司 | 形成含矽膜之組成物及其製法與用途 |
| US10464953B2 (en) * | 2016-10-14 | 2019-11-05 | Versum Materials Us, Llc | Carbon bridged aminosilane compounds for high growth rate silicon-containing films |
| US11735413B2 (en) | 2016-11-01 | 2023-08-22 | Versum Materials Us, Llc | Precursors and flowable CVD methods for making low-k films to fill surface features |
| JP7100036B2 (ja) * | 2016-12-27 | 2022-07-12 | ナタ セミコンダクター マテリアルズ カンパニー リミテッド | アミンとシランとの間の脱水素カップリング反応の触媒作用 |
| TWI784022B (zh) | 2017-07-31 | 2022-11-21 | 中國大陸商南大光電半導體材料有限公司 | 1,1,1-參(二甲胺基)二矽烷及其製備方法 |
| WO2019055393A1 (en) * | 2017-09-14 | 2019-03-21 | Versum Material Us, Llc | COMPOSITIONS AND METHODS FOR DEPOSITION OF FILMS CONTAINING SILICON |
| US20190211039A1 (en) * | 2017-12-08 | 2019-07-11 | Rohm And Haas Electronic Materials Llc | Hydrocarbyloxydisilanes |
| CN108084219B (zh) * | 2017-12-26 | 2020-09-15 | 浙江博瑞电子科技有限公司 | 一种二（二乙基氨基）硅烷合成方法 |
| KR102872468B1 (ko) * | 2018-05-23 | 2025-10-24 | 다우 실리콘즈 코포레이션 | 유기아미노실란의 제조 방법 |
| EP3902939A4 (en) * | 2019-02-05 | 2022-09-28 | Versum Materials US, LLC | CARBON DOPED SILICON OXIDE DEPOSIT |
| US20210017198A1 (en) | 2019-04-05 | 2021-01-21 | Versum Materials Us, Llc | Organoamino-Functionalized Cyclic Oligosiloxanes For Deposition Of Silicon-Containing Films |
| US11649560B2 (en) | 2019-06-20 | 2023-05-16 | Applied Materials, Inc. | Method for forming silicon-phosphorous materials |
| US11466037B2 (en) * | 2019-10-31 | 2022-10-11 | Nata Semiconductor Materials Co., Ltd. | Catalysis of dehydrocoupling reactions between amines and silanes |
| CN115443347A (zh) * | 2020-04-02 | 2022-12-06 | 弗萨姆材料美国有限责任公司 | 用于沉积含硅膜的有机氨基官能化环状低聚硅氧烷 |
| TWI797640B (zh) | 2020-06-18 | 2023-04-01 | 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 | 基於矽之自組裝單層組成物及使用該組成物之表面製備 |
| CN112210769B (zh) * | 2020-09-29 | 2023-04-25 | 合肥安德科铭半导体科技有限公司 | 一种低温高生长速率氧化硅薄膜的原子层沉积方法 |
| FR3126417B1 (fr) * | 2021-08-31 | 2024-06-21 | Elkem Silicones France Sas | Procédé d’hydrosilylation catalysé par un complexe de fer |
| CN115260223B (zh) * | 2022-09-26 | 2022-12-23 | 江苏南大光电材料股份有限公司 | 无氯催化剂于制备二异丙胺硅烷中的用途 |
| KR102858392B1 (ko) | 2023-07-18 | 2025-09-11 | 주식회사 한솔케미칼 | 2종의 실리콘 전구체 화합물을 이용하여 박막을 형성하는 방법 |
| KR20250085041A (ko) | 2023-12-04 | 2025-06-12 | (주)원익머트리얼즈 | 디알킬아미노디실란의 제조방법 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5736424Y2 (enExample) | 1973-01-17 | 1982-08-11 | ||
| JPS49110673A (enExample) | 1973-03-07 | 1974-10-22 | ||
| JPS519738B2 (enExample) * | 1973-03-07 | 1976-03-30 | ||
| US4965367A (en) * | 1989-10-16 | 1990-10-23 | Dow Corning Corporation | Process for preparation of silacyclobutanes |
| FR2739283B1 (fr) | 1995-09-29 | 1997-11-07 | Oreal | Composition topique contenant un polymere a greffons silicones et un polymere amphiphile a chaine grasse |
| US6072085A (en) | 1997-09-30 | 2000-06-06 | Massachusetts Institute Of Technology | Imine hydrosilylation, uses and reagents related thereto |
| FR2833944A1 (fr) * | 2001-12-20 | 2003-06-27 | Rhodia Chimie Sa | Procede de preparation d'amines par reduction d'imines |
| AU2003286709B8 (en) | 2002-10-28 | 2009-11-19 | Insight Equity A.P.X., Lp | Oxygen-containing heterocyclic fused naphthopyrans |
| US7875556B2 (en) | 2005-05-16 | 2011-01-25 | Air Products And Chemicals, Inc. | Precursors for CVD silicon carbo-nitride and silicon nitride films |
| US8530361B2 (en) | 2006-05-23 | 2013-09-10 | Air Products And Chemicals, Inc. | Process for producing silicon and oxide films from organoaminosilane precursors |
| KR101040325B1 (ko) | 2009-08-25 | 2011-06-10 | (주)디엔에프 | 알킬아미노실란의 제조방법 |
| US20120277457A1 (en) | 2010-10-12 | 2012-11-01 | Air Products And Chemicals, Inc. | Aminosilanes and methods for making same |
| US10453675B2 (en) | 2013-09-20 | 2019-10-22 | Versum Materials Us, Llc | Organoaminosilane precursors and methods for depositing films comprising same |
| US9233990B2 (en) * | 2014-02-28 | 2016-01-12 | Air Products And Chemicals, Inc. | Organoaminosilanes and methods for making same |
-
2015
- 2015-02-18 US US14/625,158 patent/US9233990B2/en active Active
- 2015-02-24 TW TW104105880A patent/TWI540138B/zh active
- 2015-02-27 EP EP15157000.9A patent/EP2913334B1/en active Active
- 2015-02-27 JP JP2015038477A patent/JP6046758B2/ja active Active
- 2015-02-27 KR KR1020150027946A patent/KR101873565B1/ko active Active
- 2015-02-27 EP EP18177680.8A patent/EP3395822B1/en active Active
- 2015-02-28 CN CN201510091650.6A patent/CN104876957B/zh active Active
- 2015-12-02 US US14/956,748 patent/US9758534B2/en active Active
-
2016
- 2016-11-07 JP JP2016217206A patent/JP2017066147A/ja active Pending
-
2017
- 2017-03-30 US US15/474,789 patent/US10294250B2/en active Active
-
2018
- 2018-06-26 KR KR1020180073562A patent/KR102201058B1/ko active Active
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