JP2017066147A5 - - Google Patents
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- JP2017066147A5 JP2017066147A5 JP2016217206A JP2016217206A JP2017066147A5 JP 2017066147 A5 JP2017066147 A5 JP 2017066147A5 JP 2016217206 A JP2016217206 A JP 2016217206A JP 2016217206 A JP2016217206 A JP 2016217206A JP 2017066147 A5 JP2017066147 A5 JP 2017066147A5
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- JP
- Japan
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Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461946164P | 2014-02-28 | 2014-02-28 | |
| US61/946,164 | 2014-02-28 | ||
| US14/625,158 US9233990B2 (en) | 2014-02-28 | 2015-02-18 | Organoaminosilanes and methods for making same |
| US14/625,158 | 2015-02-18 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015038477A Division JP6046758B2 (ja) | 2014-02-28 | 2015-02-27 | 有機アミノシランおよびその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017066147A JP2017066147A (ja) | 2017-04-06 |
| JP2017066147A5 true JP2017066147A5 (enExample) | 2017-12-28 |
Family
ID=52596806
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015038477A Active JP6046758B2 (ja) | 2014-02-28 | 2015-02-27 | 有機アミノシランおよびその製造方法 |
| JP2016217206A Pending JP2017066147A (ja) | 2014-02-28 | 2016-11-07 | 有機アミノシランおよびその製造方法 |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015038477A Active JP6046758B2 (ja) | 2014-02-28 | 2015-02-27 | 有機アミノシランおよびその製造方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (3) | US9233990B2 (enExample) |
| EP (2) | EP3395822B1 (enExample) |
| JP (2) | JP6046758B2 (enExample) |
| KR (2) | KR101873565B1 (enExample) |
| CN (1) | CN104876957B (enExample) |
| TW (1) | TWI540138B (enExample) |
Families Citing this family (32)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10453675B2 (en) * | 2013-09-20 | 2019-10-22 | Versum Materials Us, Llc | Organoaminosilane precursors and methods for depositing films comprising same |
| CN105849221B (zh) | 2013-09-27 | 2019-06-18 | 乔治洛德方法研究和开发液化空气有限公司 | 胺取代的三甲硅烷基胺和三-二甲硅烷基胺化合物 |
| US9233990B2 (en) * | 2014-02-28 | 2016-01-12 | Air Products And Chemicals, Inc. | Organoaminosilanes and methods for making same |
| CN107002236B (zh) * | 2014-09-23 | 2019-04-05 | 乔治洛德方法研究和开发液化空气有限公司 | 用于沉积含Si膜的碳硅烷取代的胺前体以及其方法 |
| US10354860B2 (en) * | 2015-01-29 | 2019-07-16 | Versum Materials Us, Llc | Method and precursors for manufacturing 3D devices |
| US9777025B2 (en) | 2015-03-30 | 2017-10-03 | L'Air Liquide, Société pour l'Etude et l'Exploitation des Procédés Georges Claude | Si-containing film forming precursors and methods of using the same |
| TWI716333B (zh) | 2015-03-30 | 2021-01-11 | 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 | 碳矽烷與氨、胺類及脒類之觸媒去氫耦合 |
| KR102307983B1 (ko) * | 2015-06-16 | 2021-09-30 | 버슘머트리얼즈 유에스, 엘엘씨 | 할라이도실란 화합물 및 조성물 및 이를 사용하여 규소-함유 막을 증착시키기 위한 공정 |
| EP3390411B1 (en) * | 2015-12-18 | 2020-09-30 | DDP Specialty Electronic Materials US 9, LLC | Method for making an organoaminosilane; a method for making a silylamine from the organoaminosilane |
| US10053775B2 (en) | 2015-12-30 | 2018-08-21 | L'air Liquide, Societé Anonyme Pour L'etude Et L'exploitation Des Procédés Georges Claude | Methods of using amino(bromo)silane precursors for ALD/CVD silicon-containing film applications |
| US9701695B1 (en) * | 2015-12-30 | 2017-07-11 | American Air Liquide, Inc. | Synthesis methods for amino(halo)silanes |
| TWI753794B (zh) | 2016-03-23 | 2022-01-21 | 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 | 形成含矽膜之組成物及其製法與用途 |
| US10464953B2 (en) * | 2016-10-14 | 2019-11-05 | Versum Materials Us, Llc | Carbon bridged aminosilane compounds for high growth rate silicon-containing films |
| US11735413B2 (en) * | 2016-11-01 | 2023-08-22 | Versum Materials Us, Llc | Precursors and flowable CVD methods for making low-k films to fill surface features |
| CN110099911B (zh) * | 2016-12-27 | 2021-11-23 | 南大光电半导体材料有限公司 | 胺与硅烷之间的脱氢偶联反应的催化 |
| TWI784022B (zh) * | 2017-07-31 | 2022-11-21 | 中國大陸商南大光電半導體材料有限公司 | 1,1,1-參(二甲胺基)二矽烷及其製備方法 |
| WO2019055393A1 (en) * | 2017-09-14 | 2019-03-21 | Versum Material Us, Llc | COMPOSITIONS AND METHODS FOR DEPOSITION OF FILMS CONTAINING SILICON |
| JP6788650B2 (ja) * | 2017-12-08 | 2020-11-25 | ダウ シリコーンズ コーポレーション | ヒドロカルビルオキシジシラン |
| CN108084219B (zh) * | 2017-12-26 | 2020-09-15 | 浙江博瑞电子科技有限公司 | 一种二（二乙基氨基）硅烷合成方法 |
| CN112041323B (zh) * | 2018-05-23 | 2024-01-05 | 美国陶氏有机硅公司 | 制备有机氨基硅烷的方法 |
| EP3902939A4 (en) * | 2019-02-05 | 2022-09-28 | Versum Materials US, LLC | DEPOSITION OF CARBON-DOped SILICON OXIDE |
| US20210017198A1 (en) | 2019-04-05 | 2021-01-21 | Versum Materials Us, Llc | Organoamino-Functionalized Cyclic Oligosiloxanes For Deposition Of Silicon-Containing Films |
| US11649560B2 (en) | 2019-06-20 | 2023-05-16 | Applied Materials, Inc. | Method for forming silicon-phosphorous materials |
| US11466037B2 (en) * | 2019-10-31 | 2022-10-11 | Nata Semiconductor Materials Co., Ltd. | Catalysis of dehydrocoupling reactions between amines and silanes |
| CN115443347A (zh) * | 2020-04-02 | 2022-12-06 | 弗萨姆材料美国有限责任公司 | 用于沉积含硅膜的有机氨基官能化环状低聚硅氧烷 |
| TWI797640B (zh) | 2020-06-18 | 2023-04-01 | 法商液態空氣喬治斯克勞帝方法研究開發股份有限公司 | 基於矽之自組裝單層組成物及使用該組成物之表面製備 |
| CN112210769B (zh) * | 2020-09-29 | 2023-04-25 | 合肥安德科铭半导体科技有限公司 | 一种低温高生长速率氧化硅薄膜的原子层沉积方法 |
| FR3126417B1 (fr) * | 2021-08-31 | 2024-06-21 | Elkem Silicones France Sas | Procédé d’hydrosilylation catalysé par un complexe de fer |
| CN115260223B (zh) * | 2022-09-26 | 2022-12-23 | 江苏南大光电材料股份有限公司 | 无氯催化剂于制备二异丙胺硅烷中的用途 |
| KR102858392B1 (ko) | 2023-07-18 | 2025-09-11 | 주식회사 한솔케미칼 | 2종의 실리콘 전구체 화합물을 이용하여 박막을 형성하는 방법 |
| KR20250085041A (ko) | 2023-12-04 | 2025-06-12 | (주)원익머트리얼즈 | 디알킬아미노디실란의 제조방법 |
| CN118122383A (zh) * | 2024-02-02 | 2024-06-04 | 湖北和远新材料有限公司 | 改性氧化石墨烯催化剂的制备方法及在制备二异丙胺基硅烷中的应用 |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5736424Y2 (enExample) | 1973-01-17 | 1982-08-11 | ||
| JPS49110673A (enExample) | 1973-03-07 | 1974-10-22 | ||
| JPS519738B2 (enExample) * | 1973-03-07 | 1976-03-30 | ||
| US4965367A (en) * | 1989-10-16 | 1990-10-23 | Dow Corning Corporation | Process for preparation of silacyclobutanes |
| FR2739283B1 (fr) | 1995-09-29 | 1997-11-07 | Oreal | Composition topique contenant un polymere a greffons silicones et un polymere amphiphile a chaine grasse |
| US6072085A (en) | 1997-09-30 | 2000-06-06 | Massachusetts Institute Of Technology | Imine hydrosilylation, uses and reagents related thereto |
| FR2833944A1 (fr) | 2001-12-20 | 2003-06-27 | Rhodia Chimie Sa | Procede de preparation d'amines par reduction d'imines |
| WO2004047674A2 (en) | 2002-10-28 | 2004-06-10 | Vision-Ease Lens, Inc. | Oxyge-containing heterocyclic fused naphthopyrans |
| US7875556B2 (en) | 2005-05-16 | 2011-01-25 | Air Products And Chemicals, Inc. | Precursors for CVD silicon carbo-nitride and silicon nitride films |
| US8530361B2 (en) | 2006-05-23 | 2013-09-10 | Air Products And Chemicals, Inc. | Process for producing silicon and oxide films from organoaminosilane precursors |
| KR101040325B1 (ko) | 2009-08-25 | 2011-06-10 | (주)디엔에프 | 알킬아미노실란의 제조방법 |
| US20120277457A1 (en) | 2010-10-12 | 2012-11-01 | Air Products And Chemicals, Inc. | Aminosilanes and methods for making same |
| US10453675B2 (en) | 2013-09-20 | 2019-10-22 | Versum Materials Us, Llc | Organoaminosilane precursors and methods for depositing films comprising same |
| US9233990B2 (en) * | 2014-02-28 | 2016-01-12 | Air Products And Chemicals, Inc. | Organoaminosilanes and methods for making same |
-
2015
- 2015-02-18 US US14/625,158 patent/US9233990B2/en active Active
- 2015-02-24 TW TW104105880A patent/TWI540138B/zh active
- 2015-02-27 EP EP18177680.8A patent/EP3395822B1/en active Active
- 2015-02-27 EP EP15157000.9A patent/EP2913334B1/en active Active
- 2015-02-27 KR KR1020150027946A patent/KR101873565B1/ko active Active
- 2015-02-27 JP JP2015038477A patent/JP6046758B2/ja active Active
- 2015-02-28 CN CN201510091650.6A patent/CN104876957B/zh active Active
- 2015-12-02 US US14/956,748 patent/US9758534B2/en active Active
-
2016
- 2016-11-07 JP JP2016217206A patent/JP2017066147A/ja active Pending
-
2017
- 2017-03-30 US US15/474,789 patent/US10294250B2/en active Active
-
2018
- 2018-06-26 KR KR1020180073562A patent/KR102201058B1/ko active Active
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