JP2017038125A5 - - Google Patents

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Publication number
JP2017038125A5
JP2017038125A5 JP2015156786A JP2015156786A JP2017038125A5 JP 2017038125 A5 JP2017038125 A5 JP 2017038125A5 JP 2015156786 A JP2015156786 A JP 2015156786A JP 2015156786 A JP2015156786 A JP 2015156786A JP 2017038125 A5 JP2017038125 A5 JP 2017038125A5
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JP
Japan
Prior art keywords
circuit
semiconductor
oscillation module
thin film
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015156786A
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English (en)
Japanese (ja)
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JP6724308B2 (ja
JP2017038125A (ja
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Priority to JP2015156786A priority Critical patent/JP6724308B2/ja
Priority claimed from JP2015156786A external-priority patent/JP6724308B2/ja
Publication of JP2017038125A publication Critical patent/JP2017038125A/ja
Publication of JP2017038125A5 publication Critical patent/JP2017038125A5/ja
Application granted granted Critical
Publication of JP6724308B2 publication Critical patent/JP6724308B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015156786A 2015-08-07 2015-08-07 発振モジュール、振動デバイス、電子機器、および移動体 Expired - Fee Related JP6724308B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2015156786A JP6724308B2 (ja) 2015-08-07 2015-08-07 発振モジュール、振動デバイス、電子機器、および移動体

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015156786A JP6724308B2 (ja) 2015-08-07 2015-08-07 発振モジュール、振動デバイス、電子機器、および移動体

Publications (3)

Publication Number Publication Date
JP2017038125A JP2017038125A (ja) 2017-02-16
JP2017038125A5 true JP2017038125A5 (fr) 2018-09-06
JP6724308B2 JP6724308B2 (ja) 2020-07-15

Family

ID=58047522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015156786A Expired - Fee Related JP6724308B2 (ja) 2015-08-07 2015-08-07 発振モジュール、振動デバイス、電子機器、および移動体

Country Status (1)

Country Link
JP (1) JP6724308B2 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6942983B2 (ja) * 2017-03-17 2021-09-29 セイコーエプソン株式会社 発振器、電子機器および移動体
JP7183699B2 (ja) * 2018-10-29 2022-12-06 セイコーエプソン株式会社 発振器、電子機器及び移動体
JP2021057744A (ja) * 2019-09-30 2021-04-08 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP7419877B2 (ja) * 2020-02-28 2024-01-23 セイコーエプソン株式会社 振動デバイス、電子機器および移動体
JP2021150699A (ja) * 2020-03-17 2021-09-27 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

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