JP2017034223A - 抵抗変化型メモリ - Google Patents
抵抗変化型メモリ Download PDFInfo
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- JP2017034223A JP2017034223A JP2016044397A JP2016044397A JP2017034223A JP 2017034223 A JP2017034223 A JP 2017034223A JP 2016044397 A JP2016044397 A JP 2016044397A JP 2016044397 A JP2016044397 A JP 2016044397A JP 2017034223 A JP2017034223 A JP 2017034223A
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- 230000015654 memory Effects 0.000 title claims abstract description 72
- 230000008859 change Effects 0.000 title claims abstract description 62
- 239000010410 layer Substances 0.000 claims abstract description 158
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 52
- 229910052802 copper Inorganic materials 0.000 claims abstract description 49
- 239000010949 copper Substances 0.000 claims abstract description 49
- 239000000758 substrate Substances 0.000 claims abstract description 17
- 239000002356 single layer Substances 0.000 claims abstract description 3
- 229910000881 Cu alloy Inorganic materials 0.000 claims description 18
- 239000000463 material Substances 0.000 claims description 11
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 4
- 230000008021 deposition Effects 0.000 claims description 4
- LLWPUIJZNPYLJJ-UHFFFAOYSA-N iridium oxocopper Chemical compound [Cu]=O.[Ir] LLWPUIJZNPYLJJ-UHFFFAOYSA-N 0.000 claims description 4
- -1 aluminum copper oxide Chemical compound 0.000 claims description 3
- IUYOGGFTLHZHEG-UHFFFAOYSA-N copper titanium Chemical group [Ti].[Cu] IUYOGGFTLHZHEG-UHFFFAOYSA-N 0.000 claims description 3
- XTYUEDCPRIMJNG-UHFFFAOYSA-N copper zirconium Chemical compound [Cu].[Zr] XTYUEDCPRIMJNG-UHFFFAOYSA-N 0.000 claims description 3
- FWZLXRFUDMNGDF-UHFFFAOYSA-N [Co].[Cu]=O Chemical compound [Co].[Cu]=O FWZLXRFUDMNGDF-UHFFFAOYSA-N 0.000 claims description 2
- FHKNFXAIEAYRKQ-UHFFFAOYSA-N [Cu].[Ir] Chemical compound [Cu].[Ir] FHKNFXAIEAYRKQ-UHFFFAOYSA-N 0.000 claims description 2
- XCEAGAJKBRACAD-UHFFFAOYSA-N [Cu].[Ru] Chemical compound [Cu].[Ru] XCEAGAJKBRACAD-UHFFFAOYSA-N 0.000 claims description 2
- ZWNQSJPQMSUVSE-UHFFFAOYSA-N [Cu].[Sn].[In] Chemical compound [Cu].[Sn].[In] ZWNQSJPQMSUVSE-UHFFFAOYSA-N 0.000 claims description 2
- GCYKKHRWVYGZMD-UHFFFAOYSA-N [Ru].[Cu]=O Chemical compound [Ru].[Cu]=O GCYKKHRWVYGZMD-UHFFFAOYSA-N 0.000 claims description 2
- DQHVWTUIQJAPJV-UHFFFAOYSA-N [Ta].O=[Cu] Chemical compound [Ta].O=[Cu] DQHVWTUIQJAPJV-UHFFFAOYSA-N 0.000 claims description 2
- WPPDFTBPZNZZRP-UHFFFAOYSA-N aluminum copper Chemical compound [Al].[Cu] WPPDFTBPZNZZRP-UHFFFAOYSA-N 0.000 claims description 2
- WUUZKBJEUBFVMV-UHFFFAOYSA-N copper molybdenum Chemical compound [Cu].[Mo] WUUZKBJEUBFVMV-UHFFFAOYSA-N 0.000 claims description 2
- YOCUPQPZWBBYIX-UHFFFAOYSA-N copper nickel Chemical compound [Ni].[Cu] YOCUPQPZWBBYIX-UHFFFAOYSA-N 0.000 claims description 2
- CIYRLONPFMPRLH-UHFFFAOYSA-N copper tantalum Chemical compound [Cu].[Ta] CIYRLONPFMPRLH-UHFFFAOYSA-N 0.000 claims description 2
- SBYXRAKIOMOBFF-UHFFFAOYSA-N copper tungsten Chemical compound [Cu].[W] SBYXRAKIOMOBFF-UHFFFAOYSA-N 0.000 claims description 2
- RGJBFEZXCLYYCZ-UHFFFAOYSA-N copper;indium;oxotin Chemical compound [Cu].[In].[Sn]=O RGJBFEZXCLYYCZ-UHFFFAOYSA-N 0.000 claims description 2
- PVGRIQYJDHKRFC-UHFFFAOYSA-N copper;oxomolybdenum Chemical compound [Cu].[Mo]=O PVGRIQYJDHKRFC-UHFFFAOYSA-N 0.000 claims description 2
- LDSIKPHVUGHOOI-UHFFFAOYSA-N copper;oxonickel Chemical compound [Ni].[Cu]=O LDSIKPHVUGHOOI-UHFFFAOYSA-N 0.000 claims description 2
- GQLSFFZMZXULSF-UHFFFAOYSA-N copper;oxotungsten Chemical compound [Cu].[W]=O GQLSFFZMZXULSF-UHFFFAOYSA-N 0.000 claims description 2
- CNQKHSOFVJVSIA-UHFFFAOYSA-N [Zr].[Cu]=O Chemical compound [Zr].[Cu]=O CNQKHSOFVJVSIA-UHFFFAOYSA-N 0.000 claims 1
- 229910045601 alloy Inorganic materials 0.000 claims 1
- 239000000956 alloy Substances 0.000 claims 1
- SLZVKEARWFTMOZ-UHFFFAOYSA-N copper;oxygen(2-);titanium(4+) Chemical group [O-2].[O-2].[O-2].[Ti+4].[Cu+2] SLZVKEARWFTMOZ-UHFFFAOYSA-N 0.000 claims 1
- 239000004020 conductor Substances 0.000 abstract 4
- 238000000034 method Methods 0.000 description 29
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 20
- 239000001301 oxygen Substances 0.000 description 20
- 229910052760 oxygen Inorganic materials 0.000 description 20
- 230000014759 maintenance of location Effects 0.000 description 11
- 239000010409 thin film Substances 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000005540 biological transmission Effects 0.000 description 6
- 230000007423 decrease Effects 0.000 description 6
- 238000009826 distribution Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 238000001755 magnetron sputter deposition Methods 0.000 description 5
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 4
- 238000000231 atomic layer deposition Methods 0.000 description 4
- 229910001431 copper ion Inorganic materials 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 238000005566 electron beam evaporation Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 4
- 239000010936 titanium Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 230000003247 decreasing effect Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 125000004430 oxygen atom Chemical group O* 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 229910000832 white gold Inorganic materials 0.000 description 3
- 239000010938 white gold Substances 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- CJNBYAVZURUTKZ-UHFFFAOYSA-N hafnium(iv) oxide Chemical compound O=[Hf]=O CJNBYAVZURUTKZ-UHFFFAOYSA-N 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- MNWRORMXBIWXCI-UHFFFAOYSA-N tetrakis(dimethylamido)titanium Chemical compound CN(C)[Ti](N(C)C)(N(C)C)N(C)C MNWRORMXBIWXCI-UHFFFAOYSA-N 0.000 description 2
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- MCMNRKCIXSYSNV-UHFFFAOYSA-N ZrO2 Inorganic materials O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- UNRNJMFGIMDYKL-UHFFFAOYSA-N aluminum copper oxygen(2-) Chemical compound [O-2].[Al+3].[Cu+2] UNRNJMFGIMDYKL-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003989 dielectric material Substances 0.000 description 1
- HTXDPTMKBJXEOW-UHFFFAOYSA-N dioxoiridium Chemical compound O=[Ir]=O HTXDPTMKBJXEOW-UHFFFAOYSA-N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 229910000457 iridium oxide Inorganic materials 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000033116 oxidation-reduction process Effects 0.000 description 1
- AHTAQEFZOWTMRP-UHFFFAOYSA-N oxocopper titanium Chemical compound [Ti].[Cu]=O AHTAQEFZOWTMRP-UHFFFAOYSA-N 0.000 description 1
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 230000002000 scavenging effect Effects 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 239000004408 titanium dioxide Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 239000011787 zinc oxide Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Classifications
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
- H10N70/24—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies
- H10N70/245—Multistable switching devices, e.g. memristors based on migration or redistribution of ionic species, e.g. anions, vacancies the species being metal cations, e.g. programmable metallization cells
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/20—Multistable switching devices, e.g. memristors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/011—Manufacture or treatment of multistable switching devices
- H10N70/021—Formation of switching materials, e.g. deposition of layers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/821—Device geometry
- H10N70/826—Device geometry adapted for essentially vertical current flow, e.g. sandwich or pillar type devices
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/841—Electrodes
- H10N70/8416—Electrodes adapted for supplying ionic species
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N70/00—Solid-state devices having no potential barriers, and specially adapted for rectifying, amplifying, oscillating or switching
- H10N70/801—Constructional details of multistable switching devices
- H10N70/881—Switching materials
- H10N70/883—Oxides or nitrides
- H10N70/8833—Binary metal oxides, e.g. TaOx
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Semiconductor Memories (AREA)
Abstract
Description
以下に、本実施形態の抵抗変化型メモリの特性について、実験的実施例に基づきより詳細に説明する。以下の各実験的実施例において、サンプル1は、図1に示す抵抗変化型メモリ100の構成を有し、サンプル2は、図2に示す抵抗変化型メモリ200の構成を有する。まず、サンプル1およびサンプル2の製造方法および適切なパラメータ条件について説明するが、本発明の抵抗変化型メモリの製造方法はこれに限定されない。
基板110として、RCA(アメリカのラジオ会社)洗浄ステップで洗浄したシリコン基板を用意した。そして、高温の炉心管を用いて、基板110上に200nm厚の二酸化ケイ素薄膜を成長させて誘電体層160とした。続いて、誘電体層160上に、15nm厚のチタン薄膜および30nm厚の白色金薄膜を電子ビーム蒸着法により成長させ、それぞれ導電層120aおよび導電層120bとして用いることとした。ここで、導電層120b(白色金薄膜)は、導電層120a(チタン薄膜)を介して誘電体層160に固定して接着することもできる。その後、テトラキス(ジメチルアミノ)チタン(Ti[N(CH3)2]4;TDMAT)を前駆体として用いて窒素プラズマと反応させ、堆積(deposition)温度250℃および作動圧力0.3トルの環境下で、導電層120cとして使用する10nm厚の窒化チタン薄膜を原子層堆積法により導電層120b上に成長させた。そして、プラズマ促進化学蒸着法により、抵抗スイッチング層130として使用する窒化ケイ素薄膜を導電層120c上に蒸着した。この蒸着は、堆積(deposition)温度300℃および作動圧力1.3トルの環境下で、シラン(SiH4)およびアンモニア(NH3)を反応ガスとして用い、反応速度を促進するアルゴン(Ar)プラズマを用いて行った。続いて、真空環境において、ACマグネトロンスパッタリング法により酸素雰囲気下で銅薄膜を抵抗スイッチング層130上に蒸着して、銅含有酸化物層140として使用する酸素ドープした銅薄膜を形成した。その後、酸素雰囲気を終了して、電子供給層150として使用するチタン銅合金薄膜を銅含有酸化物層140上に成長させて、サンプル1の製造を完了した。
サンプル2とサンプル1の相違点は、サンプル2の導電層120が2層構造である点である。具体的には、サンプル2において、導電層120は導電層120aおよび導電層120bを含む。さらに、サンプル2をリソグラフィ工程およびエッチング工程を介してパターニングし、面積2×2μm2のクロスバーパターンとした。さらに、サンプル2のその他の部材の蒸着方法、材料、および形成方法は、サンプル1におけるものと同様であるため、説明は省略する。
110:基板
120、120a、120b、120c:導電層
130:抵抗スイッチング層
140:銅含有酸化物層
150:電子供給層
160:誘電体層
Claims (10)
- 基板と、
前記基板上に設けた導電層と、
前記導電層上に設けた抵抗スイッチング層と、
前記抵抗スイッチング層上に設けた銅含有酸化物層と、
前記銅含有酸化物層上に設けた電子供給層と、を備える抵抗変化型メモリ。 - 前記導電層は単層構造または多層構造を含む、請求項1に記載の抵抗変化型メモリ。
- 前記導電層は厚さが1ナノメートル〜500ナノメートルである、請求項1または請求項2に記載の抵抗変化型メモリ。
- 前記抵抗スイッチング層は厚さが1ナノメートル〜100ナノメートルである、請求項1〜3のいずれか一項に記載の抵抗変化型メモリ。
- 前記抵抗スイッチング層の堆積温度範囲が100℃〜500℃である、請求項1〜4のいずれか一項に記載の抵抗変化型メモリ。
- 前記銅含有酸化物層の材料が、酸化チタン銅、酸化タンタル銅、酸化アルミニウム銅、酸化コバルト銅、酸化タングステン銅、酸化イリジウム銅、酸化ルテニウム銅、酸化ニッケル銅、酸化モリブデン銅、酸化ジルコニウム銅、または酸化インジウム錫銅を含む、請求項1〜5のいずれか一項に記載の抵抗変化型メモリ。
- 前記銅含有酸化物層は厚さが1ナノメートル〜100ナノメートルである、請求項1〜6のいずれか一項に記載の抵抗変化型メモリ。
- 前記電子供給層の材料が、チタン銅合金、窒化チタン銅、アルミニウム銅合金、タングステン銅合金、イリジウム銅合金、酸化イリジウム銅、ルテニウム銅合金、タンタル銅合金、窒化タンタル銅、ニッケル銅合金、モリブデン銅合金、ジルコニウム銅合金、または酸化インジウム錫銅を含む、請求項1〜7のいずれか一項に記載の抵抗変化型メモリ。
- 前記電子供給層は厚さが1ナノメートル〜1000ナノメートルである、請求項1〜8のいずれか一項に記載の抵抗変化型メモリ。
- 前記抵抗変化型メモリは、誘電体層をさらに備え、前記誘電体層は前記基板と前記導電層との間に設ける、請求項1〜9のいずれか一項に記載の抵抗変化型メモリ。
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CN112921299B (zh) * | 2021-01-20 | 2022-03-25 | 哈尔滨工业大学 | 一种锆包壳表面复合膜层的制备方法 |
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US20170040532A1 (en) | 2017-02-09 |
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