JP2017011017A - 半導体装置及び半導体装置の製造方法 - Google Patents
半導体装置及び半導体装置の製造方法 Download PDFInfo
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- JP2017011017A JP2017011017A JP2015122775A JP2015122775A JP2017011017A JP 2017011017 A JP2017011017 A JP 2017011017A JP 2015122775 A JP2015122775 A JP 2015122775A JP 2015122775 A JP2015122775 A JP 2015122775A JP 2017011017 A JP2017011017 A JP 2017011017A
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Abstract
【解決手段】半導体モジュール製造工程により製造される半導体装置(半導体モジュール20)は、半導体素子を収納する収納領域の周縁部に主面に垂直に設けられたガイドピン24と、当該周縁部に主面に垂直に設けられた接続端子25とを備える樹脂ケース21を有する。さらに、ガイドピン24が挿入される位置決め孔49と、接続端子25が挿入される保護孔48とを備える治具40が取り付けられている。これにより、接続端子25は、ガイドピン24により一端部と他端部とが樹脂ケース21に位置合わせされて固定された治具40により保護される。
【選択図】図8
Description
[第1の実施の形態]
まず、第1の実施の形態の半導体装置について、図1を用いて説明する。
半導体装置10は、内部に収納された半導体素子が樹脂で封止された半導体モジュール20と、当該半導体モジュール20に取り付けられたプリント基板30とを有する。
上記半導体モジュール20は、半導体素子として、例えば、IGBTと、FWDとによりインバータ回路が構成されて、樹脂により封止されている。また、P端子である主端子23cに、外部電源の高電位端子を接続し、N端子である主端子23bに、外部電源の低電位端子を接続して、半導体素子の主端子に電気的に接続される。そして、出力端子(U端子)である主端子23aに負荷(図示を省略)を接続する。さらに、プリント基板30のICチップ34からの所定の制御信号がゲート端子の接続端子25を経由して、半導体素子に印加される。これにより、半導体装置10は、インバータとして機能する。
図2は、第1の実施の形態の半導体装置の製造方法を示すフローチャートである。
なお、半導体装置の製造方法は、ステップS11〜S15が半導体モジュール製造工程と、ステップS16〜S18がプリント基板実装工程との2工程に分けられる。
[ステップS12] ガイドピン、接続端子等を含んで樹脂によりインサート成形された樹脂ケース21を用意する。
図3は、第1の実施の形態の樹脂ケースを示す図である。
なお、図3(A)は、樹脂ケース21の上面図、図3(B)は、樹脂ケース21の側面図である。
樹脂ケース21に対する治具の取り付けの説明の前に、接続端子25を保護するための治具40について、図4を用いて説明する。
なお、図4(A)は、治具40を構成する一対の板部41(例えば、第1板部),45(例えば、第2板部)の上面図、図4(B)は、重ね合せた板部41,45を固定する固定部材47の斜視図をそれぞれ示している。また、図4(C)は、板部41,45を重ね合せて構成される治具40の上面図を、図4(D)は、このような治具40の側面図をそれぞれ示している。
図4(C),(D)に示されるように、このような板部41に板部45を重ね合せて、板部41の溝部42,43を板部45で塞ぎ、溝部44,46に固定部材47を取り付けることで、保護孔48と位置決め孔49とが構成された治具40が組み立てられる。なお、固定部材47等で板部41,45同士が固定された個所を固定部とする。保護孔48と位置決め孔49は、それぞれ、樹脂ケース21に設けられた接続端子25とガイドピン24とに対応した形状をなしている。また、保護孔48と位置決め孔49との(図4(D)中)下側の入り口には、テーパが形成されている。なお、固定部材47は、板部41,45の下側から固定してもよいし、上側から固定してもよい。また、板部41,45の横から固定してもよい。
図5は、第1の実施の形態の樹脂ケースに対する治具の取り付けを示す図である。
図6は、第1の実施の形態の治具が取り付けられた半導体モジュールを示す図である。
[ステップS16] ステップS15で形成された半導体モジュール20に、プリント基板30を取り付ける。
図7は、第1の実施の形態のプリント基板を示す図である。
なお、図7(A)は、プリント基板30の上面図、図7(B)は、プリント基板30の側面図をそれぞれ表している。
図8は、第1の実施の形態の治具が取り付けられた半導体モジュールに対するプリント基板の取り付けを示す図である。
なお、図8では、固定部材47は、板部41,45の下側から固定している場合を示している。固定部材47は、この場合に限らず、板部41,45の上側から固定してもよい。また、板部41,45の横から固定してもよい。
このように半導体モジュール製造工程(ステップS11〜S15)により製造される半導体装置10(半導体モジュール20)は、半導体素子を収納する収納領域26の周縁部に上面に垂直に設けられたガイドピン24と、当該周縁部に上面に垂直に設けられた接続端子25とを備える樹脂ケース21を有する。さらに、樹脂ケース21に、ガイドピン24が挿入される位置決め孔49と、接続端子25が挿入される保護孔48とを備える治具40が取り付けられる。これにより、接続端子25は、ガイドピン24により一端部と他端部との2箇所が樹脂ケース21に位置合わせされて固定された治具40により保護される。このため、例えば、ステップS13以降の製造工程において、樹脂ケース21を取り扱う際に、接続端子25が直接接触されたり、または、外部から衝撃を受けたりすることが防止され、接続端子25の損傷の発生を防止することが可能となる。特に、半導体モジュール製造工程(ステップS11〜S15)と、プリント基板実装工程(ステップS16〜S18)とが異なる場所で実行される場合がある。この場合には、半導体モジュール製造工程で製造された半導体モジュール20を梱包して、プリント基板実装工程が実行される場所に搬送する必要がある。このような状況においても、接続端子25が治具40により保護されているために、梱包時や搬送時に接続端子25が直接接触されたり、衝撃を受けたりすることが防止されるために、接続端子25の損傷の発生を防止することが可能となる。なお、樹脂ケース21にガイドピン24を設けずに、接続端子25のみを設けて、治具40を接続端子25に取り付けるようにすることも可能である。
したがって、半導体装置10は、接続端子25が治具40により保護されることで、接続端子25の損傷の発生が防止されることから、信頼性の低下が抑制されるようになる。
第2の実施の形態では、第1の実施の形態とは別に3種類の治具について図9を用いて説明する。
なお、図9(A)は、別の治具(その1)の上面図を表している。図9(B)は、別の治具(その2)の上面図を、図9(C)は、別の治具(その2)の要部拡大上面図をそれぞれ表している。さらに、図9(D)は、別の治具(その3)の上面図を、図9(D)は、別の治具(その3)の要部拡大上面図をそれぞれ表している。
20 半導体モジュール
21 樹脂ケース
22 金属ベース
23a,23b,23c 主端子
24 ガイドピン
25 接続端子
26 収納領域
27,28a,28b,28c 端子
29 樹脂
30 プリント基板
31 絶縁板
32 ガイド孔
33 スルーホール
34 ICチップ
40,50,60,70 治具
41,45,51,55,61,65,71,75 板部
42,43,44,46,52,53,54,56,62,63,66,67,72,76 溝部
47 固定部材
48 保護孔
49 位置決め孔
58 ヒンジ
Claims (15)
- 半導体素子と、
前記半導体素子を収納するケースと、
前記半導体素子の主電極と電気的に接続され、前記ケースに設けられた接続端子と、
前記接続端子を保護するように保持し、前記接続端子の先端が突出する治具と、
を有することを特徴とする半導体装置。 - 前記治具は、第一板部、第二板部と、固定部とを備え、
前記第一板部または前記第二板部のいずれか一方に、前記接続端子が保持される保持部を有し、
前記固定部は、前記保持部に前記接続端子が保持されるように、前記第一板部と前記第二板部とを固定する、
ことを特徴とする請求項1に記載の半導体装置。 - 前記保持部は、溝である、
ことを特徴とする請求項1または2に記載の半導体装置。 - 前記保持部は、弾性部材で構成されている、
ことを特徴とする請求項1または2に記載の半導体装置。 - 前記接続端子を受け付けて取り付けられる受付部を備え、前記保持部の高さの位置で、前記接続端子の前記治具から突出する前記先端が前記受付部に取り付けられるプリント基板、
を有することを特徴とする請求項1乃至4のいずれかに記載の半導体装置。 - 前記半導体素子を収納する前記ケースの周縁部に設けられたガイドピン、
を有することを特徴とする請求項1乃至5のいずれかに記載の半導体装置。 - 前記接続端子は、前記ガイドピンに対して、一列に配置されている、
ことを特徴とする請求項6に記載の半導体装置。 - 接続端子を有するケースを用意する工程と、
前記接続端子を保護する治具を前記接続端子の先端が突出するように取り付ける治具取り付け工程と、
を有することを特徴とする半導体装置の製造方法。 - 前記接続端子の突出部分にプリント板を取り付ける工程を、
有することを特徴とする請求項8に記載の半導体装置の製造方法。 - 前記治具は、第一板部、第二板部と、前記第一板部または前記第二板部のいずれか一方に設けられた保持部とを備え、
前記治具取り付け工程は、前記保持部に前記接続端子が保持されるように、前記第一板部と前記第二板部とを固定する工程である、
ことを特徴とする請求項8または9に記載の半導体装置の製造方法。 - 前記プリント板の取り付け後に、前記接続端子から前記治具を取り外す治具取り外し工程、
を有することを特徴とする請求項9に記載の半導体装置の製造方法。 - 前記治具は、第一板部、第二板部と、
前記第一板部または前記第二板部のいずれか一方に設けられた保持部とを備え、
前記治具取り付け工程は、前記保持部に前記接続端子が保持されるように、前記第一板部と前記第二板部とを固定する工程である、
ことを特徴とする請求項11に記載の半導体装置の製造方法。 - 前記治具取り外し工程は、前記接続端子を保持している前記第一板部と前記第二板部とを分離して取り外す工程である、
ことを特徴とする請求項12に記載の半導体装置の製造方法。 - 前記治具取り付け工程の後に、
半導体素子を前記ケースに収納し、前記接続端子と前記半導体素子とを接続する工程、
を有することを特徴とする請求項8に記載の半導体装置の製造方法。 - 前記治具取り付け工程の前に、
半導体素子を前記ケースに収納し、前記接続端子と前記半導体素子とを接続する工程、
を有することを特徴とする請求項8に記載の半導体装置の製造方法。
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