JP2016536463A5 - - Google Patents
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- Publication number
- JP2016536463A5 JP2016536463A5 JP2016539356A JP2016539356A JP2016536463A5 JP 2016536463 A5 JP2016536463 A5 JP 2016536463A5 JP 2016539356 A JP2016539356 A JP 2016539356A JP 2016539356 A JP2016539356 A JP 2016539356A JP 2016536463 A5 JP2016536463 A5 JP 2016536463A5
- Authority
- JP
- Japan
- Prior art keywords
- target material
- carbon
- conductive target
- conductive
- material according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000013077 target material Substances 0.000 claims description 36
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 13
- 229910052799 carbon Inorganic materials 0.000 claims description 9
- 239000000843 powder Substances 0.000 claims description 8
- 150000002642 lithium compounds Chemical class 0.000 claims description 7
- 239000000203 mixture Substances 0.000 claims description 6
- 229910001386 lithium phosphate Inorganic materials 0.000 claims description 5
- TWQULNDIKKJZPH-UHFFFAOYSA-K trilithium;phosphate Chemical compound [Li+].[Li+].[Li+].[O-]P([O-])([O-])=O TWQULNDIKKJZPH-UHFFFAOYSA-K 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000002490 spark plasma sintering Methods 0.000 claims description 2
- 238000007731 hot pressing Methods 0.000 claims 2
- 239000012535 impurity Substances 0.000 claims 2
- HBBGRARXTFLTSG-UHFFFAOYSA-N Lithium ion Chemical compound [Li+] HBBGRARXTFLTSG-UHFFFAOYSA-N 0.000 claims 1
- 230000006835 compression Effects 0.000 claims 1
- 238000007906 compression Methods 0.000 claims 1
- 230000008021 deposition Effects 0.000 claims 1
- 239000003792 electrolyte Substances 0.000 claims 1
- 229910001416 lithium ion Inorganic materials 0.000 claims 1
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
- 239000002245 particle Substances 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 239000010439 graphite Substances 0.000 description 2
- 229910002804 graphite Inorganic materials 0.000 description 2
- 230000008595 infiltration Effects 0.000 description 2
- 238000001764 infiltration Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910018119 Li 3 PO 4 Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000012300 argon atmosphere Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000005488 sandblasting Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| AT2882013 | 2013-09-05 | ||
| ATGM288/2013 | 2013-09-05 | ||
| PCT/AT2014/000166 WO2015031920A1 (de) | 2013-09-05 | 2014-09-03 | Leitfähiges targetmaterial |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016536463A JP2016536463A (ja) | 2016-11-24 |
| JP2016536463A5 true JP2016536463A5 (https=) | 2020-01-23 |
| JP6657094B2 JP6657094B2 (ja) | 2020-03-04 |
Family
ID=52627596
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016539356A Active JP6657094B2 (ja) | 2013-09-05 | 2014-09-03 | 導電性ターゲット材料 |
Country Status (7)
| Country | Link |
|---|---|
| US (1) | US11081325B2 (https=) |
| EP (1) | EP3041809B1 (https=) |
| JP (1) | JP6657094B2 (https=) |
| KR (2) | KR20160051772A (https=) |
| CN (1) | CN105579419B (https=) |
| TW (1) | TWI611032B (https=) |
| WO (1) | WO2015031920A1 (https=) |
Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102014105531A1 (de) * | 2014-04-17 | 2015-10-22 | Schmid Energy Systems Gmbh | LiPON oder LiPSON Festelektrolyt-Schichten und Verfahren zur Herstellung solcher Schichten |
| CN106058305B (zh) * | 2016-08-12 | 2019-02-05 | 合肥国轩高科动力能源有限公司 | 一种用pld原位制备微型全固态薄膜锂离子电池的方法 |
| JP6627708B2 (ja) * | 2016-10-07 | 2020-01-08 | トヨタ自動車株式会社 | リチウムイオン二次電池、及び、リチウムイオン二次電池の製造方法 |
| JP6982779B2 (ja) * | 2017-04-25 | 2021-12-17 | トヨタ自動車株式会社 | 非水系二次電池の製造方法 |
| CN109553409A (zh) * | 2018-12-28 | 2019-04-02 | 有研工程技术研究院有限公司 | 一种固态电解质薄膜用Li3PO4靶材的制备方法和应用 |
| CN114094055A (zh) * | 2021-11-11 | 2022-02-25 | 杭州电子科技大学 | 一种磷化锂电极的制备方法 |
| CN114242947A (zh) * | 2021-12-22 | 2022-03-25 | 杭州电子科技大学 | 一种碳包覆磷化锂电极及其制备方法 |
| CN114314537B (zh) * | 2021-12-30 | 2023-08-15 | 杭州电子科技大学 | 一种磷化锂基复合材料的制备方法及其作为补锂材料的应用 |
| BE1030855B1 (nl) | 2022-09-09 | 2024-04-08 | Soleras Advanced Coatings Bv | Geleidend sputterdoel en methode om daarmee een laag af te zetten |
| CN121204607B (zh) * | 2025-11-26 | 2026-03-20 | 河北大学 | 一种LiPON固态电解质薄膜及其制备方法 |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1314884A (en) | 1970-05-28 | 1973-04-26 | Mullard Ltd | Manufacturing target electrodes for x-ray tubes |
| JPS583966B2 (ja) * | 1979-10-29 | 1983-01-24 | 日本黒鉛工業株式会社 | 高温パッキング用黒鉛圧縮成形体の製造方法 |
| KR100455700B1 (ko) * | 2001-11-27 | 2004-11-06 | 일진나노텍 주식회사 | 탄소 나노튜브를 이용하는 마이크로 전지 및 이를제조하는 방법 |
| JP2004234977A (ja) * | 2003-01-29 | 2004-08-19 | Matsushita Electric Ind Co Ltd | リチウム二次電池用正極材料およびその製造方法ならびにそれを用いたリチウム二次電池 |
| JP4641375B2 (ja) * | 2003-10-20 | 2011-03-02 | 日立マクセル株式会社 | オリビン型リン酸リチウムと炭素材料との複合体の製造方法 |
| KR20080071973A (ko) | 2005-10-13 | 2008-08-05 | 엔.브이. 베카에르트 에스.에이. | 스퍼터링에 의한 코팅 증착법 |
| US8197781B2 (en) | 2006-11-07 | 2012-06-12 | Infinite Power Solutions, Inc. | Sputtering target of Li3PO4 and method for producing same |
| KR101010716B1 (ko) | 2007-07-25 | 2011-01-24 | 지에스나노텍 주식회사 | 비전도성 타겟을 사용하는 스퍼터링에 의한 세라믹 박막의증착 방법 및 그를 위한 장치 |
| US8784512B2 (en) | 2007-08-13 | 2014-07-22 | University Of Virginia Patent Foundation | Thin film battery synthesis by directed vapor deposition |
| EP2225406A4 (en) | 2007-12-21 | 2012-12-05 | Infinite Power Solutions Inc | PROCEDURE FOR SPUTTER TARGETS FOR ELECTROLYTE FILMS |
| EP2135973A1 (en) | 2008-06-18 | 2009-12-23 | Centre National de la Recherche Scientifique | Method for the manufacturing of sputtering targets using an inorganic polymer |
| TWI440597B (zh) * | 2008-08-26 | 2014-06-11 | Basf Se | 於水熱條件下合成ＬｉＦｅＰＯ4 |
| EP2228854B1 (en) | 2009-03-12 | 2014-03-05 | Belenos Clean Power Holding AG | Nitride and carbide anode materials |
| JP5484928B2 (ja) | 2010-01-19 | 2014-05-07 | 株式会社オハラ | 全固体電池 |
| CN102206802B (zh) | 2010-03-29 | 2012-12-19 | 苏州晶纯新材料有限公司 | 全固态薄膜锂离子电池相关靶材及其制造方法 |
| KR101130302B1 (ko) | 2010-08-26 | 2012-03-22 | 한국기계연구원 | 스파크 플라즈마 소결에 의한 세라믹 분말 대량 합성용 금형 |
| JP2013122080A (ja) * | 2011-12-12 | 2013-06-20 | Ulvac Japan Ltd | スパッタリング装置 |
| CN103401016B (zh) * | 2013-08-05 | 2015-08-19 | 宁德时代新能源科技有限公司 | 高能量密度锂离子电池 |
-
2014
- 2014-08-05 TW TW103126722A patent/TWI611032B/zh active
- 2014-09-03 US US14/917,094 patent/US11081325B2/en active Active
- 2014-09-03 WO PCT/AT2014/000166 patent/WO2015031920A1/de not_active Ceased
- 2014-09-03 KR KR1020167005811A patent/KR20160051772A/ko not_active Ceased
- 2014-09-03 EP EP14789129.5A patent/EP3041809B1/de active Active
- 2014-09-03 CN CN201480048869.1A patent/CN105579419B/zh active Active
- 2014-09-03 KR KR1020217021416A patent/KR102389964B1/ko active Active
- 2014-09-03 JP JP2016539356A patent/JP6657094B2/ja active Active
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