JP2016535463A - 垂直コラムを有するオーバラップ形スタック化ダイパッケージ - Google Patents
垂直コラムを有するオーバラップ形スタック化ダイパッケージ Download PDFInfo
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Abstract
Description
上記導電性パッドに係合する球状部と、上記球状部から伸びる円柱部とを含む。
Claims (23)
- 上面を含むダイと、
前記上面から伸びるとともに、前記ダイに係合する場所以外では物質により全く囲まれていない導電性コラムとを備える、電子アセンブリ。 - 前記ダイが導電性パッドを含み、前記導電性コラムが前記ダイ上の前記導電性パッドから伸びる、請求項1に記載の電子アセンブリ。
- 前記導電性コラムが、前記導電性パッドに係合する球状部と、前記球状部から伸びる円柱部とを含む、請求項1又は2に記載の電子アセンブリ。
- 前記導電性コラムが前記上面から伸びる複数の導電性コラムの一部であり、前記導電性コラムが前記ダイに係合する場所以外では前記導電性コラムが物質により全く囲まれていない、請求項1から3に記載の電子アセンブリ。
- 前記複数の導電性コラムが、前記ダイの一方の端部の近くで一列に並べられる、請求項3又は4に記載の電子アセンブリ。
- 各電子アセンブリが、上面を有するダイと、前記上面から伸びる複数の導電性コラムであって、各導電性コラムが前記ダイに係合する場所以外では物質により全く囲まれていない前記複数の導電性コラムとを含む、電子アセンブリのスタックを備え、
前記電子アセンブリのスタックが、各電子アセンブリ上の前記複数の導電性コラムが別の電子アセンブリにより覆われないオーバラッピング構成で配置される、電子パッケージ。 - 各電子アセンブリにおける前記複数の導電性コラムが、前記の対応する複数の導電性コラムを含む前記のそれぞれのダイの一方の端部の近くで一列に並べられる、請求項6に記載の電子パッケージ。
- 前記電子アセンブリのスタックを囲むモールドを更に備える、請求項6又は7に記載の電子パッケージ。
- 前記モールドの一部分が、前記モールドの上面を通して前記導電性コラムを露出するように除去される、請求項6から8に記載の電子パッケージ。
- 前記モールドの前記上面に沿った導電性再配線層を更に備え、前記導電性再配線層が、前記複数の導電性コラムのそれぞれの露出された部分に係合する、請求項6から9に記載の電子パッケージ。
- 前記モールドの前記上面、又は前記複数の導電性コラムのいくつかの前記露出された部分に沿った前記導電性再配線層に係合するはんだバンプを更に備える、請求項6から10に記載の電子パッケージ。
- 追加の電子パッケージであって、反転されるとともに、当該電子パッケージ上のはんだバンプを前記追加の電子パッケージ上のはんだバンプと結合することにより当該電子パッケージと連結される前記追加の電子パッケージを更に備える、請求項6から11に記載の電子パッケージ。
- 導電性コラムをダイの上面に取り付けることにより電子アセンブリを形成するステップであって、前記導電性コラムが、前記上面から伸びるとともに、前記ダイに係合する場所以外では物質により全く囲まれていない、ステップを含む、方法。
- 導電性コラムをダイの上面に取り付ける前記ステップが、ワイヤボンディング技術を使用して導電性コラムをダイの上面に取り付けるステップを含む、請求項13に記載の方法。
- 電子アセンブリを形成する前記ステップが、複数の導電性コラムをダイの上面に取り付けるステップであって、前記導電性コラムが、前記上面から伸びるとともに、前記ダイに係合する場所以外では物質により全く囲まれていない、ステップを含む、請求項13又は14に記載の方法。
- 複数の導電性コラムをダイの上面に取り付ける前記ステップが、前記複数の導電性コラムを前記ダイの一方の端部の近くで一列に並べるステップを含む、請求項13から15に記載の方法。
- 電子パッケージを形成するために追加の電子アセンブリを前記電子アセンブリの上にスタックするステップを更に含み、各追加の電子アセンブリが、上面を有するダイと、前記上面から伸びる複数の導電性コラムであって、各導電性コラムが前記のそれぞれのダイに係合する場所以外では物質により全く囲まれていない前記複数の導電性コラムとを含み、前記電子アセンブリが、各電子アセンブリ上の前記複数の導電性コラムが別の電子アセンブリにより覆われないオーバラッピング構成で配置される、請求項13から16に記載の方法。
- 前記電子アセンブリのスタックを囲むモールドを形成するステップを更に含む、請求項17に記載の方法。
- 前記モールドの上面を通して前記導電性コラムを露出するように前記モールドの一部分を除去するステップを更に含む、請求項18に記載の方法。
- 前記モールドの前記上面に沿って導電性再配線層を形成するステップであって、前記導電性再配線層が前記複数の導電性コラムのそれぞれの露出された部分に係合する、ステップと、
前記導電性再配線層、又は前記複数の導電性コラムのいくつかの前記露出された部分に沿ってはんだバンプを形成するステップとを更に含む、請求項19に記載の方法。 - 前記電子パッケージを反転するステップと、
前記電子パッケージ上のはんだバンプを別の電子装置に取り付けるステップとを更に含む、請求項20に記載の方法。 - 第1のダイと、
前記第1のダイの表面上の第1の導電性コラムと、
前記第1のダイに隣接する第2のダイと、
前記第2のダイの表面上の第2の導電性コラムと、
前記第1のダイ及び前記第2のダイと、各それぞれの表面において、並びに各それぞれの第1の導電性コラム及び第2の導電性コラムにおいて接するモールド材料であって、前記第1の導電性コラム及び前記第2の導電性コラムのそれぞれと交差する特有のフローを示すとともに、必須である前記モールド材料とを備える、装置。 - 後続のダイと、前記後続のダイの表面上の後続の導電性コラムとを更に含み、前記モールド材料が、同様に、前記後続の導電性コラムと交差する特有の残留フローを示す、請求項22に記載の装置。
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