JP2016534344A5 - - Google Patents

Download PDF

Info

Publication number
JP2016534344A5
JP2016534344A5 JP2016535373A JP2016535373A JP2016534344A5 JP 2016534344 A5 JP2016534344 A5 JP 2016534344A5 JP 2016535373 A JP2016535373 A JP 2016535373A JP 2016535373 A JP2016535373 A JP 2016535373A JP 2016534344 A5 JP2016534344 A5 JP 2016534344A5
Authority
JP
Japan
Prior art keywords
frequency
signal
sample
specific
phase shift
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2016535373A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016534344A (ja
JP6616302B2 (ja
Filing date
Publication date
Priority claimed from EP13181506.0A external-priority patent/EP2840387A1/en
Application filed filed Critical
Publication of JP2016534344A publication Critical patent/JP2016534344A/ja
Publication of JP2016534344A5 publication Critical patent/JP2016534344A5/ja
Application granted granted Critical
Publication of JP6616302B2 publication Critical patent/JP6616302B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2016535373A 2013-08-23 2014-05-30 ホットスポット位置特定のためのロックインサーモグラフィ方法およびシステム Active JP6616302B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP13181506.0 2013-08-23
EP13181506.0A EP2840387A1 (en) 2013-08-23 2013-08-23 Lock-in thermography method and system for hot spot localization
PCT/EP2014/061232 WO2015024679A1 (en) 2013-08-23 2014-05-30 Lock-in thermography method and system for hot spot localization

Publications (3)

Publication Number Publication Date
JP2016534344A JP2016534344A (ja) 2016-11-04
JP2016534344A5 true JP2016534344A5 (enExample) 2017-08-17
JP6616302B2 JP6616302B2 (ja) 2019-12-04

Family

ID=49000875

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016535373A Active JP6616302B2 (ja) 2013-08-23 2014-05-30 ホットスポット位置特定のためのロックインサーモグラフィ方法およびシステム

Country Status (7)

Country Link
US (1) US20160202126A1 (enExample)
EP (1) EP2840387A1 (enExample)
JP (1) JP6616302B2 (enExample)
DE (1) DE112014003881T5 (enExample)
SG (1) SG11201600524YA (enExample)
TW (1) TWI563251B (enExample)
WO (1) WO2015024679A1 (enExample)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014218136B4 (de) * 2014-09-10 2019-07-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Thermographische Untersuchungseinrichtung sowie Verfahren zur zerstörungsfreien Untersuchung einer oberflächennahen Struktur an einem Prüfobjekt
CN104776918B (zh) * 2015-03-30 2018-06-08 中国人民解放军第二炮兵工程大学 一种相位提取方法
CN104916120B (zh) * 2015-06-12 2018-11-06 深圳市共进电子股份有限公司 一种智能红外发射设备的自动化生产测试系统及方法
EP3282249A1 (de) 2016-08-09 2018-02-14 Saint-Gobain Glass France Verfahren und vorrichtung zur detektion von gasen in kunststoffschichten durch lock-in-infrarotthermographie
JP2018096776A (ja) * 2016-12-12 2018-06-21 国立研究開発法人産業技術総合研究所 導電材料の内部構造、電流分布、抵抗分布を可視化する装置と方法
JP2019193417A (ja) * 2018-04-24 2019-10-31 学校法人日本大学 領域抽出装置
US10607104B1 (en) * 2019-01-31 2020-03-31 Raytheon Company System and method for detecting daytime solar glint using multi-band mid-wave infrared imagery
JP7554052B2 (ja) * 2020-01-31 2024-09-19 浜松ホトニクス株式会社 半導体故障解析装置
CN111665403B (zh) * 2020-04-29 2022-12-23 中国电子产品可靠性与环境试验研究所((工业和信息化部电子第五研究所)(中国赛宝实验室)) 层叠型电子元件的失效点定位方法、装置和系统
CN115552261A (zh) 2020-05-26 2022-12-30 浜松光子学株式会社 半导体器件检查方法及半导体器件检查装置
EP4148437B1 (en) * 2020-05-26 2025-12-03 Hamamatsu Photonics K.K. Semiconductor device inspection method and semiconductor device inspection device
CN111898333B (zh) * 2020-06-24 2021-12-10 北京智芯仿真科技有限公司 集成电路频率响应频率点提取与响应曲线计算方法及装置
ES2932781A1 (es) * 2021-07-19 2023-01-25 Consejo Superior Investigacion Metodo para la medida cuantitativa de temperatura
WO2023175710A1 (ja) * 2022-03-15 2023-09-21 日本電信電話株式会社 観察装置
CN114858285A (zh) * 2022-04-02 2022-08-05 电子科技大学 一种线性调频红外无损检测系统
CN115541653A (zh) * 2022-12-02 2022-12-30 山东大学 一种3d系统级封装器件的缺陷定位方法及系统
CN117538378B (zh) * 2023-11-24 2024-06-28 山东大学 一种基于方波热源的锁相热成像缺陷快速检测方法
CN119290952A (zh) * 2024-08-29 2025-01-10 北京微电子技术研究所 一种叠层封装半导体器件缺陷检测与定位方法、系统
JP7830606B1 (ja) 2024-10-07 2026-03-16 ネッチ ゲレーテバウ ゲーエムベーハー 熱物性値測定装置及び熱物性値測定方法
CN119827576B (zh) * 2024-11-25 2025-10-17 江苏大学 一种基于调频式红外热成像检测复合材料内部缺陷深度的方法
CN120992693A (zh) * 2025-10-22 2025-11-21 天津滨海雷克斯激光科技发展有限公司 一种基于脉冲激光的熔覆层表面及深层瑕疵检测方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4792683A (en) * 1987-01-16 1988-12-20 Hughes Aircraft Company Thermal technique for simultaneous testing of circuit board solder joints
JP2758488B2 (ja) * 1990-07-25 1998-05-28 周次 仲田 電子部品の接合部検査装置
DE19837889C1 (de) * 1998-08-20 2000-12-21 Siemens Ag Thermowellen-Meßverfahren
US6394646B1 (en) * 1999-04-16 2002-05-28 General Electric Company Method and apparatus for quantitative nondestructive evaluation of metal airfoils using high resolution transient thermography
US7709794B2 (en) * 2008-02-05 2010-05-04 Kla-Tencor Corporation Defect detection using time delay lock-in thermography (LIT) and dark field LIT
KR101716104B1 (ko) * 2010-06-08 2017-03-14 디씨지 시스템스 인코포레이티드 3-차원 핫 스팟 위치추정
EP2444795A1 (en) * 2010-10-22 2012-04-25 DCG Systems, Inc. Lock in thermal laser stimulation through one side of the device while acquiring lock-in thermal emission images on the opposite side

Similar Documents

Publication Publication Date Title
JP2016534344A5 (enExample)
JP6616302B2 (ja) ホットスポット位置特定のためのロックインサーモグラフィ方法およびシステム
EP2952884B1 (en) Method for examination of a sample by means of the lock-in thermography
Liu et al. Research on thermal wave processing of lock-in thermography based on analyzing image sequences for NDT
Chatterjee et al. A comparison of the pulsed, lock-in and frequency modulated thermography nondestructive evaluation techniques
Gong et al. Investigation of carbon fiber reinforced polymer (CFRP) sheet with subsurface defects inspection using thermal-wave radar imaging (TWRI) based on the multi-transform technique
TW463047B (en) Thermal resonance imaging method
WO2015027210A1 (en) Lit method and system for determining material layer parameters of a sample
JP2017176341A5 (enExample)
Lin et al. Fourier analysis on transient imaging with a multifrequency time-of-flight camera
US20150339830A1 (en) Method and system for the examination of a sample by means of thermography
KR101290137B1 (ko) 열화상을 이용한 결함 검출 장치 및 검출 방법
JP2011005042A5 (enExample)
Olafsson et al. Lock-in thermography using miniature infra-red cameras and integrated actuators for defect identification in composite materials
JP2016534347A (ja) Litでホットスポットを解像するための方法およびシステム
JP2015085013A5 (enExample)
Suresh et al. Subsurface detail fusion for anomaly detection in non-stationary thermal wave imaging
Liu et al. Study of inspection on metal sheet with subsurface defects using linear frequency modulated ultrasound excitation thermal-wave imaging (LFM-UTWI)
JP2014180492A5 (ja) 処理装置、被検体情報取得装置、処理方法、および表示制御方法
Dong et al. Infrared sequence transformation technique for in situ measurement of thermal diffusivity and monitoring of thermal diffusion
Chatterjee et al. Image enhancement in transient lock-in thermography through time series reconstruction and spatial slope correction
JP2014158548A5 (ja) 被検体情報取得装置および画像生成方法
Shuohan et al. Applications of chirp z transform and multiple modulation zoom spectrum to pulse phase thermography inspection
Rajic et al. An investigation of noise performance in optical lock-in thermography
Chatterjee et al. A novel pulse compression algorithm for frequency modulated active thermography using band-pass filter