TWI563251B - Lit method and system for hot spot localization - Google Patents

Lit method and system for hot spot localization

Info

Publication number
TWI563251B
TWI563251B TW103128993A TW103128993A TWI563251B TW I563251 B TWI563251 B TW I563251B TW 103128993 A TW103128993 A TW 103128993A TW 103128993 A TW103128993 A TW 103128993A TW I563251 B TWI563251 B TW I563251B
Authority
TW
Taiwan
Prior art keywords
hot spot
spot localization
lit method
lit
localization
Prior art date
Application number
TW103128993A
Other languages
English (en)
Other versions
TW201514482A (zh
Inventor
Christian Schmidt
Raiko Meinhardt-Wildegger
Frank Altmann
Falk Naumann
Rudolf Schlanger
Original Assignee
Dcg Systems Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dcg Systems Inc filed Critical Dcg Systems Inc
Publication of TW201514482A publication Critical patent/TW201514482A/zh
Application granted granted Critical
Publication of TWI563251B publication Critical patent/TWI563251B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/72—Investigating presence of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0066—Radiation pyrometry, e.g. infrared or optical thermometry for hot spots detection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/0096—Radiation pyrometry, e.g. infrared or optical thermometry for measuring wires, electrical contacts or electronic systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/309—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of printed or hybrid circuits or circuit substrates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/302—Contactless testing
    • G01R31/308—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation
    • G01R31/311—Contactless testing using non-ionising electromagnetic radiation, e.g. optical radiation of integrated circuits

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Investigating Or Analyzing Materials Using Thermal Means (AREA)
  • Radiation Pyrometers (AREA)
TW103128993A 2013-08-23 2014-08-22 Lit method and system for hot spot localization TWI563251B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP13181506.0A EP2840387A1 (en) 2013-08-23 2013-08-23 Lock-in thermography method and system for hot spot localization

Publications (2)

Publication Number Publication Date
TW201514482A TW201514482A (zh) 2015-04-16
TWI563251B true TWI563251B (en) 2016-12-21

Family

ID=49000875

Family Applications (1)

Application Number Title Priority Date Filing Date
TW103128993A TWI563251B (en) 2013-08-23 2014-08-22 Lit method and system for hot spot localization

Country Status (7)

Country Link
US (1) US20160202126A1 (zh)
EP (1) EP2840387A1 (zh)
JP (1) JP6616302B2 (zh)
DE (1) DE112014003881T5 (zh)
SG (1) SG11201600524YA (zh)
TW (1) TWI563251B (zh)
WO (1) WO2015024679A1 (zh)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102014218136B4 (de) * 2014-09-10 2019-07-18 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Thermographische Untersuchungseinrichtung sowie Verfahren zur zerstörungsfreien Untersuchung einer oberflächennahen Struktur an einem Prüfobjekt
CN104776918B (zh) * 2015-03-30 2018-06-08 中国人民解放军第二炮兵工程大学 一种相位提取方法
CN104916120B (zh) * 2015-06-12 2018-11-06 深圳市共进电子股份有限公司 一种智能红外发射设备的自动化生产测试系统及方法
EP3282249A1 (de) 2016-08-09 2018-02-14 Saint-Gobain Glass France Verfahren und vorrichtung zur detektion von gasen in kunststoffschichten durch lock-in-infrarotthermographie
JP2018096776A (ja) * 2016-12-12 2018-06-21 国立研究開発法人産業技術総合研究所 導電材料の内部構造、電流分布、抵抗分布を可視化する装置と方法
JP2019193417A (ja) * 2018-04-24 2019-10-31 学校法人日本大学 領域抽出装置
US10607104B1 (en) * 2019-01-31 2020-03-31 Raytheon Company System and method for detecting daytime solar glint using multi-band mid-wave infrared imagery
JP2021121785A (ja) * 2020-01-31 2021-08-26 浜松ホトニクス株式会社 半導体故障解析装置
CN111665403B (zh) * 2020-04-29 2022-12-23 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） 层叠型电子元件的失效点定位方法、装置和系统
WO2021241007A1 (ja) * 2020-05-26 2021-12-02 浜松ホトニクス株式会社 半導体デバイス検査方法及び半導体デバイス検査装置
US20230184825A1 (en) * 2020-05-26 2023-06-15 Hamamatsu Photonics K.K. Semiconductor device inspection method and semiconductor device inspection device
CN111898333B (zh) * 2020-06-24 2021-12-10 北京智芯仿真科技有限公司 集成电路频率响应频率点提取与响应曲线计算方法及装置
ES2932781A1 (es) * 2021-07-19 2023-01-25 Consejo Superior Investigacion Metodo para la medida cuantitativa de temperatura
WO2023175710A1 (ja) * 2022-03-15 2023-09-21 日本電信電話株式会社 観察装置
CN114858285A (zh) * 2022-04-02 2022-08-05 电子科技大学 一种线性调频红外无损检测系统
CN115541653A (zh) * 2022-12-02 2022-12-30 山东大学 一种3d系统级封装器件的缺陷定位方法及系统
CN117538378A (zh) * 2023-11-24 2024-02-09 山东大学 一种基于方波热源的锁相热成像缺陷快速检测方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002523739A (ja) * 1998-08-20 2002-07-30 シーメンス アクチエンゲゼルシヤフト 熱波測定方法
US20100073665A1 (en) * 2008-02-05 2010-03-25 Kla-Tencor Corporation Defect detection using time delay lock-in thermography (lit) and dark field lit
WO2011156527A1 (en) * 2010-06-08 2011-12-15 Dcg Systems, Inc. Three-dimensional hot spot localization
TW201229504A (en) * 2010-10-22 2012-07-16 Dcg Systems Inc Lock in thermal laser stimulation through one side of the device while acquiring lock-in thermal emission images on the opposite side

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4792683A (en) * 1987-01-16 1988-12-20 Hughes Aircraft Company Thermal technique for simultaneous testing of circuit board solder joints
JP2758488B2 (ja) * 1990-07-25 1998-05-28 周次 仲田 電子部品の接合部検査装置
US6394646B1 (en) * 1999-04-16 2002-05-28 General Electric Company Method and apparatus for quantitative nondestructive evaluation of metal airfoils using high resolution transient thermography

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002523739A (ja) * 1998-08-20 2002-07-30 シーメンス アクチエンゲゼルシヤフト 熱波測定方法
US20100073665A1 (en) * 2008-02-05 2010-03-25 Kla-Tencor Corporation Defect detection using time delay lock-in thermography (lit) and dark field lit
WO2011156527A1 (en) * 2010-06-08 2011-12-15 Dcg Systems, Inc. Three-dimensional hot spot localization
TW201229504A (en) * 2010-10-22 2012-07-16 Dcg Systems Inc Lock in thermal laser stimulation through one side of the device while acquiring lock-in thermal emission images on the opposite side

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Fernando Lopez Rodriguez et al,"NON-DESTRUCTIVE EVALUATION OF COMPOSITES MATERIALS BY PULSED-PHASE THERMOGRAPHY：DEPTH INVERSION",Proceedings of COBEM 2011,28 October 2011, http://www.abcm.org.br/app/webroot/anais/cobem/2011/PDF/257601.PDF *

Also Published As

Publication number Publication date
DE112014003881T5 (de) 2016-05-12
US20160202126A1 (en) 2016-07-14
EP2840387A1 (en) 2015-02-25
JP6616302B2 (ja) 2019-12-04
TW201514482A (zh) 2015-04-16
WO2015024679A1 (en) 2015-02-26
SG11201600524YA (en) 2016-02-26
JP2016534344A (ja) 2016-11-04

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