JP2016510925A5 - - Google Patents

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Publication number
JP2016510925A5
JP2016510925A5 JP2016500221A JP2016500221A JP2016510925A5 JP 2016510925 A5 JP2016510925 A5 JP 2016510925A5 JP 2016500221 A JP2016500221 A JP 2016500221A JP 2016500221 A JP2016500221 A JP 2016500221A JP 2016510925 A5 JP2016510925 A5 JP 2016510925A5
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JP
Japan
Prior art keywords
mass flow
fluid
feature
flow rate
controller
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2016500221A
Other languages
English (en)
Japanese (ja)
Other versions
JP2016510925A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2014/015461 external-priority patent/WO2014158375A1/en
Publication of JP2016510925A publication Critical patent/JP2016510925A/ja
Publication of JP2016510925A5 publication Critical patent/JP2016510925A5/ja
Pending legal-status Critical Current

Links

JP2016500221A 2013-03-12 2014-02-09 ターニングベーン Pending JP2016510925A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201361777212P 2013-03-12 2013-03-12
US61/777,212 2013-03-12
PCT/US2014/015461 WO2014158375A1 (en) 2013-03-12 2014-02-09 Turning vane

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018210633A Division JP6777712B2 (ja) 2013-03-12 2018-11-08 ターニングベーン

Publications (2)

Publication Number Publication Date
JP2016510925A JP2016510925A (ja) 2016-04-11
JP2016510925A5 true JP2016510925A5 (enExample) 2017-03-16

Family

ID=50190763

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2016500221A Pending JP2016510925A (ja) 2013-03-12 2014-02-09 ターニングベーン
JP2018210633A Active JP6777712B2 (ja) 2013-03-12 2018-11-08 ターニングベーン

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2018210633A Active JP6777712B2 (ja) 2013-03-12 2018-11-08 ターニングベーン

Country Status (4)

Country Link
US (1) US9399199B2 (enExample)
EP (1) EP2972127B1 (enExample)
JP (2) JP2016510925A (enExample)
WO (1) WO2014158375A1 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10077995B1 (en) * 2017-07-27 2018-09-18 The United States Of America As Represented By The Secretary Of The Navy Gas detection flow rate controller
WO2019031056A1 (ja) * 2017-08-09 2019-02-14 Ckd株式会社 流量計
US10927920B2 (en) * 2017-10-04 2021-02-23 Illinois Tool Works, Inc Passive damping system for mass flow controller
JP7262745B2 (ja) * 2018-12-27 2023-04-24 株式会社フジキン マスフローコントローラ
US11435764B1 (en) 2021-03-30 2022-09-06 Hitachi Metals, Ltd. Mass flow controller utilizing nonlinearity component functions

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US3254475A (en) 1963-07-30 1966-06-07 Farr Co Mist collector
JPS4917131B1 (enExample) * 1970-07-03 1974-04-27
US4372169A (en) * 1977-04-08 1983-02-08 Vortech Sciences, Inc. Vortex generating mass flowmeter
US4461173A (en) * 1982-05-17 1984-07-24 Sierra Instruments, Inc. Multirange flowmeter
JPS59129036U (ja) * 1983-02-21 1984-08-30 トヨタ自動車株式会社 空調空気の吹き出し装置
US4576054A (en) * 1983-07-12 1986-03-18 Lalin Hill S Dual mode gas sampler and pneumatic flow control system
US5197509A (en) * 1990-06-06 1993-03-30 Cheng Dah Y Laminar flow elbow system and method
JPH04136125A (ja) * 1990-09-26 1992-05-11 Mitsubishi Heavy Ind Ltd プレナムチャンバ方式の冷却装置
JPH04159120A (ja) * 1990-10-23 1992-06-02 Nissan Motor Co Ltd 自動車用空調装置のダクト装置
JPH0530909U (ja) * 1991-09-24 1993-04-23 山形日本電気株式会社 マスフローコントローラー
JPH05149467A (ja) * 1991-12-01 1993-06-15 Stec Kk 流体制御弁
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JPH0843155A (ja) * 1994-08-04 1996-02-16 Ricoh Co Ltd フルイディック流量計
US5944048A (en) * 1996-10-04 1999-08-31 Emerson Electric Co. Method and apparatus for detecting and controlling mass flow
DE19735373C1 (de) * 1997-08-14 1998-11-19 Siemens Ag Strömungswandler für einen Luftmasssenmesser
DE10015918A1 (de) * 2000-03-30 2001-10-04 Bosch Gmbh Robert Vorrichtung zur Bestimmung von zumindest einem Parameter eines in einer Leitung strömenden Mediums
US6845659B2 (en) 2002-07-19 2005-01-25 Celerity Group, Inc. Variable resistance sensor with common reference leg
DE10317166A1 (de) * 2003-04-15 2004-11-04 Abb Research Ltd. Gaszähleranordnung mit verbesserter Strömungsgeometrie
JP3977773B2 (ja) * 2003-05-26 2007-09-19 シーケーディ株式会社 流量制御装置
US7032383B2 (en) * 2003-09-10 2006-04-25 Caterpillar Inc. Connecting duct for fluid compression system
US7866337B2 (en) * 2005-07-08 2011-01-11 Entegris, Inc. Chemically inert flow controller with non-contaminating body
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US7905139B2 (en) * 2008-08-25 2011-03-15 Brooks Instrument, Llc Mass flow controller with improved dynamic
JP5209524B2 (ja) * 2009-02-05 2013-06-12 サーパス工業株式会社 流量計および流量コントローラ
JP4884547B2 (ja) 2010-04-04 2012-02-29 有限会社川野技研 案内羽根入り吹出エルボ
JP5874193B2 (ja) * 2011-04-21 2016-03-02 日立金属株式会社 流量制御装置および流量センサユニット
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US8746032B1 (en) * 2013-03-01 2014-06-10 Onicon, Inc. Flow metering system

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