JP2015510207A5 - - Google Patents

Download PDF

Info

Publication number
JP2015510207A5
JP2015510207A5 JP2014560998A JP2014560998A JP2015510207A5 JP 2015510207 A5 JP2015510207 A5 JP 2015510207A5 JP 2014560998 A JP2014560998 A JP 2014560998A JP 2014560998 A JP2014560998 A JP 2014560998A JP 2015510207 A5 JP2015510207 A5 JP 2015510207A5
Authority
JP
Japan
Prior art keywords
valve
fluid
flow rate
mass flow
controlling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014560998A
Other languages
English (en)
Japanese (ja)
Other versions
JP2015510207A (ja
JP6563656B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US2013/028902 external-priority patent/WO2013134141A2/en
Publication of JP2015510207A publication Critical patent/JP2015510207A/ja
Publication of JP2015510207A5 publication Critical patent/JP2015510207A5/ja
Application granted granted Critical
Publication of JP6563656B2 publication Critical patent/JP6563656B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014560998A 2012-03-07 2013-03-04 質量流量制御器の制御を改善するためのモデルを用いるためのシステムおよび方法 Active JP6563656B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261607944P 2012-03-07 2012-03-07
US61/607,944 2012-03-07
PCT/US2013/028902 WO2013134141A2 (en) 2012-03-07 2013-03-04 System and mehtod for using a model for improving control of a mass flow controller

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018100354A Division JP6691167B2 (ja) 2012-03-07 2018-05-25 流体の流量を制御するための質量流量制御器及び方法

Publications (3)

Publication Number Publication Date
JP2015510207A JP2015510207A (ja) 2015-04-02
JP2015510207A5 true JP2015510207A5 (enExample) 2016-04-21
JP6563656B2 JP6563656B2 (ja) 2019-08-21

Family

ID=49117492

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2014560998A Active JP6563656B2 (ja) 2012-03-07 2013-03-04 質量流量制御器の制御を改善するためのモデルを用いるためのシステムおよび方法
JP2018100354A Active JP6691167B2 (ja) 2012-03-07 2018-05-25 流体の流量を制御するための質量流量制御器及び方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2018100354A Active JP6691167B2 (ja) 2012-03-07 2018-05-25 流体の流量を制御するための質量流量制御器及び方法

Country Status (3)

Country Link
US (1) US9760096B2 (enExample)
JP (2) JP6563656B2 (enExample)
WO (1) WO2013134141A2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9557744B2 (en) 2012-01-20 2017-01-31 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US9471066B2 (en) 2012-01-20 2016-10-18 Mks Instruments, Inc. System for and method of providing pressure insensitive self verifying mass flow controller
US9846074B2 (en) 2012-01-20 2017-12-19 Mks Instruments, Inc. System for and method of monitoring flow through mass flow controllers in real time
US10031005B2 (en) 2012-09-25 2018-07-24 Mks Instruments, Inc. Method and apparatus for self verification of pressure-based mass flow controllers
WO2015123008A1 (en) * 2014-02-13 2015-08-20 Mks Instruments, Inc. System for and method of providing pressure insensitive self verifying mass flow controller
WO2017040100A1 (en) 2015-08-31 2017-03-09 Mks Instruments, Inc. Method and apparatus for pressure-based flow measurement in non-critical flow conditions
WO2017043648A1 (ja) * 2015-09-11 2017-03-16 日立金属株式会社 質量流量制御装置
US10705543B2 (en) * 2018-08-29 2020-07-07 Illinois Tool Works, Inc. Mass flow controller and controller algorithm
US10969797B2 (en) * 2018-08-29 2021-04-06 Illinois Tool Works, Inc. Mass flow valve controller and control method with set point filter and linearization system based on valve model
JP7531881B2 (ja) * 2020-03-24 2024-08-13 株式会社フジキン 流量制御システム、流量制御システムの制御方法、流量制御システムの制御プログラム
CN114488785B (zh) * 2021-08-09 2023-11-14 宁波大学 一种mfc致动器轨迹跟踪方法

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4432109C1 (de) * 1994-09-09 1996-03-21 Bizerba Gmbh & Co Kg Wägevorrichtung
US5911238A (en) * 1996-10-04 1999-06-15 Emerson Electric Co. Thermal mass flowmeter and mass flow controller, flowmetering system and method
US6389364B1 (en) * 1999-07-10 2002-05-14 Mykrolis Corporation System and method for a digital mass flow controller
JP3417391B2 (ja) 2000-09-07 2003-06-16 日立金属株式会社 流量制御方法
JP2002127003A (ja) * 2000-10-26 2002-05-08 Hiroshi Eda 姿勢制御装置付精密加工装置及び姿勢制御方法
JP4571322B2 (ja) * 2001-03-05 2010-10-27 佐藤 ▼壽▲芳 機械構造系の履歴を有する非線形復元力特性の解析方法
US6962164B2 (en) * 2001-04-24 2005-11-08 Celerity Group, Inc. System and method for a mass flow controller
US6766241B2 (en) * 2001-12-26 2004-07-20 Deere & Company Fuel injection control system
JP4219600B2 (ja) * 2002-02-28 2009-02-04 株式会社アドヴィックス 車両用ブレーキ液圧発生装置
WO2004010234A2 (en) 2002-07-19 2004-01-29 Celerity Group, Inc. Methods and apparatus for pressure compensation in a mass flow controller
US7054773B2 (en) * 2003-05-30 2006-05-30 Agilent Technologies, Inc. Dynamic model-based compensated tuning of a tunable device
JP2007108925A (ja) * 2005-10-12 2007-04-26 Toyota Motor Corp 姿勢制御システム
US7250738B1 (en) * 2006-07-12 2007-07-31 Chung-Yuan Christian University Nonlinear hysteresis control system
CN101802335B (zh) * 2007-04-24 2013-11-06 耶鲁安全公司 门关闭器组件
US7957921B2 (en) * 2008-02-19 2011-06-07 GM Global Technology Operations LLC Model-based estimation of battery hysteresis
US8671973B2 (en) * 2009-01-21 2014-03-18 Hitachi Metals, Ltd. Mass flow controller hysteresis compensation system and method
JP4802262B2 (ja) * 2009-02-17 2011-10-26 ジヤトコ株式会社 液圧制御装置
EP2478405A1 (en) * 2009-09-16 2012-07-25 BAE Systems Plc Compensating for hysteresis
EP2478421A1 (en) * 2009-09-16 2012-07-25 BAE Systems Plc Compensating for hysteresis
US8534135B2 (en) 2010-04-30 2013-09-17 Nanometrics Incorporated Local stress measurement
US20120197446A1 (en) * 2010-12-01 2012-08-02 Glaudel Stephen P Advanced feed-forward valve-control for a mass flow controller
EP2759692A4 (en) * 2011-09-20 2016-08-03 Toyota Motor Co Ltd DEVICE FOR CONTROLLING A COMBUSTION ENGINE

Similar Documents

Publication Publication Date Title
JP2015510207A5 (enExample)
JP2013529975A5 (ja) ポンプの圧力−流量特性を改変するための装置
WO2012166223A3 (en) Hydraulic control system having cylinder flow correction
MY169913A (en) A flow control device and method
EP3770518A3 (en) Valve control in an hvac system with sensors
WO2012002721A3 (en) Valve control system, bidet using the same, and valve control method
EP4509714A3 (en) Negative pressure wound therapy apparatus and methods
RU2013114986A (ru) Регулируемая система ограничения потока для использования в подземной скважине
JP2011071564A5 (enExample)
MX2011013565A (es) Valvula de control de fluidos para doble proposito.
WO2013134141A8 (en) System and method for using a model for improving control of a mass flow controller
MX2017016567A (es) Valvula de circulacion.
WO2014195842A3 (en) A device and a method for the preparation of hot liquid or steam
JP2019502058A5 (enExample)
SG11201906887YA (en) Membrane separation device and membrane separation method
WO2009064080A3 (en) Hot water system and the control method
JP2016526639A5 (enExample)
JP2013220288A5 (enExample)
IN2014DE01121A (enExample)
JP2016509167A5 (enExample)
WO2014044787A3 (de) Strangregulierarmatur
JP2018504315A5 (enExample)
RU2017117029A (ru) Способ стабилизации скорости вращения гидравлической машины с S-характеристиками и установка для преобразования гидравлической энергии в электрическую энергию
FR3009069B1 (fr) Dispositif de regulation du debit d'air dans une canalisation
JP2016175815A5 (enExample)