JP2016175815A5 - - Google Patents

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Publication number
JP2016175815A5
JP2016175815A5 JP2015059204A JP2015059204A JP2016175815A5 JP 2016175815 A5 JP2016175815 A5 JP 2016175815A5 JP 2015059204 A JP2015059204 A JP 2015059204A JP 2015059204 A JP2015059204 A JP 2015059204A JP 2016175815 A5 JP2016175815 A5 JP 2016175815A5
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JP
Japan
Prior art keywords
gas
flow rate
control device
helium
adsorption tower
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JP2015059204A
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English (en)
Japanese (ja)
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JP2016175815A (ja
JP6384960B2 (ja
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Priority to JP2015059204A priority Critical patent/JP6384960B2/ja
Priority claimed from JP2015059204A external-priority patent/JP6384960B2/ja
Priority to TW105106553A priority patent/TWI680791B/zh
Priority to KR1020160028236A priority patent/KR102446032B1/ko
Priority to CN201610150583.5A priority patent/CN105983296A/zh
Publication of JP2016175815A publication Critical patent/JP2016175815A/ja
Publication of JP2016175815A5 publication Critical patent/JP2016175815A5/ja
Application granted granted Critical
Publication of JP6384960B2 publication Critical patent/JP6384960B2/ja
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JP2015059204A 2015-03-23 2015-03-23 ヘリウムガスの精製方法および精製システム Active JP6384960B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2015059204A JP6384960B2 (ja) 2015-03-23 2015-03-23 ヘリウムガスの精製方法および精製システム
TW105106553A TWI680791B (zh) 2015-03-23 2016-03-03 氦氣之純化方法及純化系統
KR1020160028236A KR102446032B1 (ko) 2015-03-23 2016-03-09 헬륨 가스의 정제 방법 및 정제 시스템
CN201610150583.5A CN105983296A (zh) 2015-03-23 2016-03-16 氦气的提纯方法以及提纯系统

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015059204A JP6384960B2 (ja) 2015-03-23 2015-03-23 ヘリウムガスの精製方法および精製システム

Publications (3)

Publication Number Publication Date
JP2016175815A JP2016175815A (ja) 2016-10-06
JP2016175815A5 true JP2016175815A5 (enExample) 2018-02-01
JP6384960B2 JP6384960B2 (ja) 2018-09-05

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ID=57043939

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015059204A Active JP6384960B2 (ja) 2015-03-23 2015-03-23 ヘリウムガスの精製方法および精製システム

Country Status (4)

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JP (1) JP6384960B2 (enExample)
KR (1) KR102446032B1 (enExample)
CN (1) CN105983296A (enExample)
TW (1) TWI680791B (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108217616A (zh) * 2018-01-16 2018-06-29 中科睿凌江苏低温设备有限公司 一种用于低温超导磁体氦气液化的杂质气体分离筒
CN108355416A (zh) * 2018-04-19 2018-08-03 合肥硕朗自动化科技有限公司 一种用于真空箱检漏系统的氦气回收净化装置
CN109883623B (zh) * 2019-03-04 2021-06-22 浙江工业职业技术学院 一种基于真空箱检漏用的氦气回收净化装置
CN110748788A (zh) * 2019-10-18 2020-02-04 Tcl空调器(中山)有限公司 气体回收系统及气体回收方法
KR102667907B1 (ko) * 2023-11-29 2024-05-22 주식회사 케이와이테크 고순도 가스 정제 시스템, 이를 위한 제어 장치 및 제어 방법

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3564816A (en) 1968-12-30 1971-02-23 Union Carbide Corp Selective adsorption process
US3986849A (en) 1975-11-07 1976-10-19 Union Carbide Corporation Selective adsorption process
DE3716898A1 (de) * 1987-05-20 1988-12-15 Bergwerksverband Gmbh Verfahren und vorrichtung zur heliumanreicherung
US5707425A (en) * 1994-10-21 1998-01-13 Nitrotec Corporation Helium recovery from higher helium content streams
US5542966A (en) * 1994-10-21 1996-08-06 Nitrotec Corporation Helium recovery
US6699307B1 (en) * 2002-10-11 2004-03-02 H2Gen Innovations, Inc. High recovery PSA cycles and apparatus with reduced complexity
JP5372607B2 (ja) * 2009-05-29 2013-12-18 住友精化株式会社 ヘリウム精製方法およびヘリウム精製装置
JP5846641B2 (ja) * 2012-07-02 2016-01-20 住友精化株式会社 ヘリウムガスの精製方法および精製装置
JP6305938B2 (ja) * 2012-12-28 2018-04-04 大阪瓦斯株式会社 ガス精製装置
JP2014189480A (ja) * 2013-03-28 2014-10-06 Sumitomo Seika Chem Co Ltd 水素ガスの精製方法および精製装置

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