JP2021513147A5 - - Google Patents

Download PDF

Info

Publication number
JP2021513147A5
JP2021513147A5 JP2020541667A JP2020541667A JP2021513147A5 JP 2021513147 A5 JP2021513147 A5 JP 2021513147A5 JP 2020541667 A JP2020541667 A JP 2020541667A JP 2020541667 A JP2020541667 A JP 2020541667A JP 2021513147 A5 JP2021513147 A5 JP 2021513147A5
Authority
JP
Japan
Prior art keywords
mass flow
differential pressure
flow
absolute pressure
vacant space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2020541667A
Other languages
English (en)
Japanese (ja)
Other versions
JP2021513147A (ja
JP7216736B2 (ja
Filing date
Publication date
Priority claimed from US16/195,432 external-priority patent/US11073846B2/en
Application filed filed Critical
Publication of JP2021513147A publication Critical patent/JP2021513147A/ja
Publication of JP2021513147A5 publication Critical patent/JP2021513147A5/ja
Application granted granted Critical
Publication of JP7216736B2 publication Critical patent/JP7216736B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2020541667A 2018-01-30 2018-11-20 絶対圧及び差圧トランスデューサーを有する質量流量コントローラー Active JP7216736B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862624059P 2018-01-30 2018-01-30
US62/624,059 2018-01-30
US16/195,432 US11073846B2 (en) 2018-01-30 2018-11-19 Mass flow controller with absolute and differential pressure transducer
US16/195,432 2018-11-19
PCT/US2018/062127 WO2019152089A1 (en) 2018-01-30 2018-11-20 Mass flow controller with absolute and differential pressure transducer

Publications (3)

Publication Number Publication Date
JP2021513147A JP2021513147A (ja) 2021-05-20
JP2021513147A5 true JP2021513147A5 (enExample) 2022-01-04
JP7216736B2 JP7216736B2 (ja) 2023-02-01

Family

ID=67392855

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020541667A Active JP7216736B2 (ja) 2018-01-30 2018-11-20 絶対圧及び差圧トランスデューサーを有する質量流量コントローラー

Country Status (7)

Country Link
US (2) US11073846B2 (enExample)
EP (1) EP3746860B1 (enExample)
JP (1) JP7216736B2 (enExample)
KR (1) KR102691172B1 (enExample)
CN (1) CN111902786B (enExample)
TW (1) TWI796417B (enExample)
WO (1) WO2019152089A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102771309B1 (ko) 2019-04-25 2025-02-24 가부시키가이샤 후지킨 유량 제어 장치
US12240017B2 (en) * 2020-07-28 2025-03-04 Festo Se & Co. Kg Sorting method and sorting device
JP2022047815A (ja) * 2020-09-14 2022-03-25 アズビル株式会社 マスフローコントローラ
US11940307B2 (en) 2021-06-08 2024-03-26 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
DE102021130134A1 (de) * 2021-11-18 2023-05-25 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Vorrichtung zur Fluidbegrenzung und Vorrichtung zum Messen einer Eigenschaft eines Prozessfluids
US12000723B2 (en) 2022-02-18 2024-06-04 Mks Instruments, Inc. Method and apparatus for pressure based mass flow control
US12436049B2 (en) 2023-02-16 2025-10-07 Te Connectivity Solutions Gmbh Sensor die with a diaphragm
US12313483B2 (en) 2023-03-31 2025-05-27 Te Connectivity Solutions Gmbh Sensor having a plurality of diaphragms
US12449322B2 (en) 2023-04-05 2025-10-21 Te Connectivity Solutions Gmbh Sensor assembly
US20250130600A1 (en) * 2023-10-20 2025-04-24 Illinois Took Works Inc. Valve assembly and system used to control flow rate of a fluid
CN117148877B (zh) * 2023-11-01 2024-01-02 苏芯物联技术(南京)有限公司 一种高精度管道流量测量控制装置及设计方法

Family Cites Families (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0547617B1 (en) * 1991-12-18 1996-07-10 Pierre Delajoud Mass flow meter and method
US5868159A (en) * 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
GB2373054B (en) * 1999-05-26 2003-03-26 Cyber Instr Technology Llc Wide range gas flow system with real time flow measurement and correction
US6503280B2 (en) * 2000-12-26 2003-01-07 John A. Repicci Prosthetic knee and method of inserting
JP4864280B2 (ja) 2001-04-24 2012-02-01 ブルックス・インストルメント・エルエルシー 質量流量コントローラのシステムおよび方法
US20050016592A1 (en) * 2001-11-13 2005-01-27 Jeromson Peter James Process control valve
US6712084B2 (en) * 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
JP2004157719A (ja) * 2002-11-06 2004-06-03 Stec Inc マスフローコントローラ
US6973375B2 (en) * 2004-02-12 2005-12-06 Mykrolis Corporation System and method for flow monitoring and control
KR101572407B1 (ko) 2006-11-02 2015-11-26 가부시키가이샤 호리바 에스텍 차압식 매스 플로우 컨트롤러에 있어서 진단 기구
KR101485887B1 (ko) * 2007-12-05 2015-01-26 히다치 조센 가부시키가이샤 진공 용기의 압력 제어 방법 및 압력 제어 장치
JP5395451B2 (ja) * 2009-02-10 2014-01-22 サーパス工業株式会社 流量コントローラ
TWI435196B (zh) * 2009-10-15 2014-04-21 Pivotal Systems Corp 氣體流量控制方法及裝置
KR101599343B1 (ko) * 2011-05-10 2016-03-03 가부시키가이샤 후지킨 유량 모니터 부착 압력식 유량 제어 장치
US9188989B1 (en) * 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
JP2014098560A (ja) * 2012-11-13 2014-05-29 Azbil Corp 差圧／圧力複合センサの異常診断方法
US9454158B2 (en) * 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
CN105518419B (zh) * 2013-09-06 2019-10-18 伊利诺斯工具制品有限公司 绝压和差压传感器
JP6254815B2 (ja) * 2013-10-11 2017-12-27 アドバンス電気工業株式会社 流量制御弁及びこれを用いた流量制御装置
CN204459324U (zh) * 2013-12-31 2015-07-08 新歌阀门有限公司 自动流量控制系统及导阀组件
JP6415889B2 (ja) * 2014-08-01 2018-10-31 株式会社堀場エステック 流量制御装置、流量制御装置用プログラム、及び、流量制御方法
CN104236641A (zh) * 2014-09-19 2014-12-24 兰州空间技术物理研究所 基于恒压法的多介质气体配样标准流量计及流量提供方法
JP6659692B2 (ja) * 2014-12-04 2020-03-04 イリノイ トゥール ワークス インコーポレイティド ワイヤレス流量制限器
WO2017057129A1 (ja) 2015-09-30 2017-04-06 日立金属株式会社 質量流量制御装置、及び差圧式流量計の診断方法
US9638559B1 (en) 2016-02-10 2017-05-02 Sensata Technologies Inc. System, devices and methods for measuring differential and absolute pressure utilizing two MEMS sense elements
JP6871721B2 (ja) * 2016-11-17 2021-05-12 株式会社堀場エステック 圧力式流量計
CN106679925A (zh) * 2016-12-15 2017-05-17 中国航空工业集团公司沈阳空气动力研究所 一种微质量射流流量高精度控制装置和控制方法
CN106990798A (zh) * 2017-06-01 2017-07-28 上海昶艾电子科技有限公司 流体流量控制器以及干湿球测湿法中控制流量的方法
US12379238B2 (en) * 2018-10-26 2025-08-05 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics

Similar Documents

Publication Publication Date Title
JP2021513147A5 (enExample)
CN105940357A (zh) 压力式流量控制装置及其流量控制开始时的超量防止方法
WO2008057596A3 (en) Rotary valve
WO2010100792A1 (ja) 流体制御装置
MX2008001730A (es) Aparato para controlar el afluente de fluidos de produccion provenientes de un pozo subterraneo.
JP2022093651A5 (enExample)
WO2009045259A3 (en) Apparatus for adjustably controlling the inflow of production fluids from a subterranean well
WO2001067048A3 (en) Miniature pulsatile flow controller
WO2008006707A3 (en) Selfcompensated adjustable fluid emitter, particularly in irrigation systems.
EP3770518A3 (en) Valve control in an hvac system with sensors
JP2016503861A5 (enExample)
RU2015124599A (ru) Способ ограничения питающего потока в системе теплопередачи
US10260774B2 (en) Low pressure drop water heating system
GB2602459A8 (en) A hydraulic unit
WO2013134642A3 (en) Venturi valve and control system
JP2010525468A5 (enExample)
EP3223106A3 (en) A control valve
WO2009133482A3 (en) Pressure differential metering device
CN103615555B (zh) 气动恒流量蒸汽调节阀
RU2009109694A (ru) Система регулирования расхода газа для литейных форм для расплавленного металла с проницаемыми стенками периметра
RU2013100183A (ru) Система регулирования температуры и способ регулирования температуры в помещении
CN104534122A (zh) 一种新型恒温燃气热水器的自动调气机构
GB2616519A (en) Fluid flow control system with a wide range of flow
CN108958305A (zh) 一种8421编码可控流量高压气体压力精确控制结构
CN204512524U (zh) 一种恒温燃气热水器阀体