CN111902786B - 具有绝对压力和差压换能器的质量流量控制器 - Google Patents

具有绝对压力和差压换能器的质量流量控制器 Download PDF

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Publication number
CN111902786B
CN111902786B CN201880091709.3A CN201880091709A CN111902786B CN 111902786 B CN111902786 B CN 111902786B CN 201880091709 A CN201880091709 A CN 201880091709A CN 111902786 B CN111902786 B CN 111902786B
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China
Prior art keywords
flow
cavity
differential pressure
absolute
mass flow
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CN201880091709.3A
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English (en)
Chinese (zh)
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CN111902786A (zh
Inventor
约翰·勒尔
安东尼·基奥
伯温·班纳斯
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Illinois Tool Works Inc
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Illinois Tool Works Inc
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Publication of CN111902786A publication Critical patent/CN111902786A/zh
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/001—Means for regulating or setting the meter for a predetermined quantity
    • G01F15/003—Means for regulating or setting the meter for a predetermined quantity using electromagnetic, electric or electronic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Electromagnetism (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
CN201880091709.3A 2018-01-30 2018-11-20 具有绝对压力和差压换能器的质量流量控制器 Active CN111902786B (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862624059P 2018-01-30 2018-01-30
US62/624,059 2018-01-30
US16/195,432 US11073846B2 (en) 2018-01-30 2018-11-19 Mass flow controller with absolute and differential pressure transducer
US16/195,432 2018-11-19
PCT/US2018/062127 WO2019152089A1 (en) 2018-01-30 2018-11-20 Mass flow controller with absolute and differential pressure transducer

Publications (2)

Publication Number Publication Date
CN111902786A CN111902786A (zh) 2020-11-06
CN111902786B true CN111902786B (zh) 2024-09-03

Family

ID=67392855

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201880091709.3A Active CN111902786B (zh) 2018-01-30 2018-11-20 具有绝对压力和差压换能器的质量流量控制器

Country Status (7)

Country Link
US (2) US11073846B2 (enExample)
EP (1) EP3746860B1 (enExample)
JP (1) JP7216736B2 (enExample)
KR (1) KR102691172B1 (enExample)
CN (1) CN111902786B (enExample)
TW (1) TWI796417B (enExample)
WO (1) WO2019152089A1 (enExample)

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JP2022047815A (ja) * 2020-09-14 2022-03-25 アズビル株式会社 マスフローコントローラ
US11940307B2 (en) 2021-06-08 2024-03-26 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
DE102021130134A1 (de) * 2021-11-18 2023-05-25 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Vorrichtung zur Fluidbegrenzung und Vorrichtung zum Messen einer Eigenschaft eines Prozessfluids
US12000723B2 (en) 2022-02-18 2024-06-04 Mks Instruments, Inc. Method and apparatus for pressure based mass flow control
US12436049B2 (en) 2023-02-16 2025-10-07 Te Connectivity Solutions Gmbh Sensor die with a diaphragm
US12313483B2 (en) 2023-03-31 2025-05-27 Te Connectivity Solutions Gmbh Sensor having a plurality of diaphragms
US12449322B2 (en) 2023-04-05 2025-10-21 Te Connectivity Solutions Gmbh Sensor assembly
US20250130600A1 (en) * 2023-10-20 2025-04-24 Illinois Took Works Inc. Valve assembly and system used to control flow rate of a fluid
CN117148877B (zh) * 2023-11-01 2024-01-02 苏芯物联技术(南京)有限公司 一种高精度管道流量测量控制装置及设计方法

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Also Published As

Publication number Publication date
KR20200115555A (ko) 2020-10-07
KR102691172B1 (ko) 2024-08-01
US11073846B2 (en) 2021-07-27
TW201937322A (zh) 2019-09-16
WO2019152089A1 (en) 2019-08-08
JP2021513147A (ja) 2021-05-20
EP3746860B1 (en) 2023-01-04
JP7216736B2 (ja) 2023-02-01
US20210318698A1 (en) 2021-10-14
US11526181B2 (en) 2022-12-13
EP3746860A1 (en) 2020-12-09
TWI796417B (zh) 2023-03-21
US20190235533A1 (en) 2019-08-01
CN111902786A (zh) 2020-11-06

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