GB2373054B - Wide range gas flow system with real time flow measurement and correction - Google Patents
Wide range gas flow system with real time flow measurement and correctionInfo
- Publication number
- GB2373054B GB2373054B GB0125642A GB0125642A GB2373054B GB 2373054 B GB2373054 B GB 2373054B GB 0125642 A GB0125642 A GB 0125642A GB 0125642 A GB0125642 A GB 0125642A GB 2373054 B GB2373054 B GB 2373054B
- Authority
- GB
- United Kingdom
- Prior art keywords
- correction
- real time
- wide range
- gas flow
- range gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/50—Correcting or compensating means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/76—Devices for measuring mass flow of a fluid or a fluent solid material
- G01F1/86—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure
- G01F1/88—Indirect mass flowmeters, e.g. measuring volume flow and density, temperature or pressure with differential-pressure measurement to determine the volume flow
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
- G01F15/02—Compensating or correcting for variations in pressure, density or temperature
- G01F15/04—Compensating or correcting for variations in pressure, density or temperature of gases to be measured
- G01F15/043—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means
- G01F15/046—Compensating or correcting for variations in pressure, density or temperature of gases to be measured using electrical means involving digital counting
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09/318,880 US6119710A (en) | 1999-05-26 | 1999-05-26 | Method for wide range gas flow system with real time flow measurement and correction |
GB0122961A GB2365980B (en) | 1999-05-26 | 1999-12-04 | Wide range gas flow system with real time flow measurement and correction |
Publications (3)
Publication Number | Publication Date |
---|---|
GB0125642D0 GB0125642D0 (en) | 2001-12-19 |
GB2373054A GB2373054A (en) | 2002-09-11 |
GB2373054B true GB2373054B (en) | 2003-03-26 |
Family
ID=26246573
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0125642A Expired - Fee Related GB2373054B (en) | 1999-05-26 | 1999-12-04 | Wide range gas flow system with real time flow measurement and correction |
GB0300312A Expired - Fee Related GB2381589B (en) | 1999-05-26 | 1999-12-04 | Wide range gas flow system with real time flow measurement and correction |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB0300312A Expired - Fee Related GB2381589B (en) | 1999-05-26 | 1999-12-04 | Wide range gas flow system with real time flow measurement and correction |
Country Status (1)
Country | Link |
---|---|
GB (2) | GB2373054B (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100447537C (en) * | 2004-09-24 | 2008-12-31 | 深圳市建恒工业自控系统有限公司 | Dynamic transmission type capacity determining system and method |
NL2002365C2 (en) * | 2008-05-26 | 2011-04-05 | Avantium Holding B V | Flow splitter and reaction assembly. |
US8528427B2 (en) | 2010-10-29 | 2013-09-10 | Becton, Dickinson And Company | Dual feedback vacuum fluidics for a flow-type particle analyzer |
WO2019010350A1 (en) * | 2017-07-07 | 2019-01-10 | The Johns Hopkins University | Barotrauma and volutrauma prevention device |
US11073846B2 (en) | 2018-01-30 | 2021-07-27 | Illinois Tool Works Inc. | Mass flow controller with absolute and differential pressure transducer |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997034208A1 (en) * | 1996-03-11 | 1997-09-18 | Applied Materials, Inc. | Gas flow control method |
-
1999
- 1999-12-04 GB GB0125642A patent/GB2373054B/en not_active Expired - Fee Related
- 1999-12-04 GB GB0300312A patent/GB2381589B/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1997034208A1 (en) * | 1996-03-11 | 1997-09-18 | Applied Materials, Inc. | Gas flow control method |
Also Published As
Publication number | Publication date |
---|---|
GB2373054A (en) | 2002-09-11 |
GB2381589B (en) | 2003-09-10 |
GB2381589A (en) | 2003-05-07 |
GB0300312D0 (en) | 2003-02-05 |
GB0125642D0 (en) | 2001-12-19 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PCNP | Patent ceased through non-payment of renewal fee |
Effective date: 20071204 |