KR102691172B1 - 절대압 및 차압 변환기를 지닌 질량 유량 제어기 - Google Patents

절대압 및 차압 변환기를 지닌 질량 유량 제어기 Download PDF

Info

Publication number
KR102691172B1
KR102691172B1 KR1020207024225A KR20207024225A KR102691172B1 KR 102691172 B1 KR102691172 B1 KR 102691172B1 KR 1020207024225 A KR1020207024225 A KR 1020207024225A KR 20207024225 A KR20207024225 A KR 20207024225A KR 102691172 B1 KR102691172 B1 KR 102691172B1
Authority
KR
South Korea
Prior art keywords
cavity
differential pressure
flow
absolute
mass flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
KR1020207024225A
Other languages
English (en)
Korean (ko)
Other versions
KR20200115555A (ko
Inventor
존 룰
앤서니 키호
버윈 바나레스
Original Assignee
일리노이즈 툴 워크스 인코포레이티드
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 일리노이즈 툴 워크스 인코포레이티드 filed Critical 일리노이즈 툴 워크스 인코포레이티드
Publication of KR20200115555A publication Critical patent/KR20200115555A/ko
Application granted granted Critical
Publication of KR102691172B1 publication Critical patent/KR102691172B1/ko
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/001—Means for regulating or setting the meter for a predetermined quantity
    • G01F15/003—Means for regulating or setting the meter for a predetermined quantity using electromagnetic, electric or electronic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Electromagnetism (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
KR1020207024225A 2018-01-30 2018-11-20 절대압 및 차압 변환기를 지닌 질량 유량 제어기 Active KR102691172B1 (ko)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201862624059P 2018-01-30 2018-01-30
US62/624,059 2018-01-30
US16/195,432 2018-11-19
US16/195,432 US11073846B2 (en) 2018-01-30 2018-11-19 Mass flow controller with absolute and differential pressure transducer
PCT/US2018/062127 WO2019152089A1 (en) 2018-01-30 2018-11-20 Mass flow controller with absolute and differential pressure transducer

Publications (2)

Publication Number Publication Date
KR20200115555A KR20200115555A (ko) 2020-10-07
KR102691172B1 true KR102691172B1 (ko) 2024-08-01

Family

ID=67392855

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020207024225A Active KR102691172B1 (ko) 2018-01-30 2018-11-20 절대압 및 차압 변환기를 지닌 질량 유량 제어기

Country Status (7)

Country Link
US (2) US11073846B2 (enExample)
EP (1) EP3746860B1 (enExample)
JP (1) JP7216736B2 (enExample)
KR (1) KR102691172B1 (enExample)
CN (1) CN111902786B (enExample)
TW (1) TWI796417B (enExample)
WO (1) WO2019152089A1 (enExample)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7495742B2 (ja) * 2019-04-25 2024-06-05 株式会社フジキン 流量制御装置および流量制御方法
WO2022022814A1 (de) * 2020-07-28 2022-02-03 Festo Se & Co. Kg Sortierverfahren und sortiervorrichtung
JP2022047815A (ja) * 2020-09-14 2022-03-25 アズビル株式会社 マスフローコントローラ
US11940307B2 (en) 2021-06-08 2024-03-26 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
DE102021130134A1 (de) * 2021-11-18 2023-05-25 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Vorrichtung zur Fluidbegrenzung und Vorrichtung zum Messen einer Eigenschaft eines Prozessfluids
US12000723B2 (en) 2022-02-18 2024-06-04 Mks Instruments, Inc. Method and apparatus for pressure based mass flow control
US12436049B2 (en) 2023-02-16 2025-10-07 Te Connectivity Solutions Gmbh Sensor die with a diaphragm
US12313483B2 (en) 2023-03-31 2025-05-27 Te Connectivity Solutions Gmbh Sensor having a plurality of diaphragms
US12449322B2 (en) 2023-04-05 2025-10-21 Te Connectivity Solutions Gmbh Sensor assembly
US20250076141A1 (en) * 2023-09-01 2025-03-06 Te Connectivity Solutions Gmbh Sensor Having a Package with a Sensor Die
US20250130600A1 (en) * 2023-10-20 2025-04-24 Illinois Took Works Inc. Valve assembly and system used to control flow rate of a fluid
CN117148877B (zh) * 2023-11-01 2024-01-02 苏芯物联技术(南京)有限公司 一种高精度管道流量测量控制装置及设计方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004157719A (ja) * 2002-11-06 2004-06-03 Stec Inc マスフローコントローラ
JP2014098560A (ja) * 2012-11-13 2014-05-29 Azbil Corp 差圧／圧力複合センサの異常診断方法

Family Cites Families (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69212129T2 (de) * 1991-12-18 1997-01-23 Pierre Delajoud Massenströmungsmesser mit einschnürendem Element
US5868159A (en) * 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
GB2373054B (en) * 1999-05-26 2003-03-26 Cyber Instr Technology Llc Wide range gas flow system with real time flow measurement and correction
US6503280B2 (en) * 2000-12-26 2003-01-07 John A. Repicci Prosthetic knee and method of inserting
JP4864280B2 (ja) 2001-04-24 2012-02-01 ブルックス・インストルメント・エルエルシー 質量流量コントローラのシステムおよび方法
US20050016592A1 (en) * 2001-11-13 2005-01-27 Jeromson Peter James Process control valve
US6712084B2 (en) * 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
US6973375B2 (en) * 2004-02-12 2005-12-06 Mykrolis Corporation System and method for flow monitoring and control
WO2008053839A1 (fr) 2006-11-02 2008-05-08 Horiba Stec, Co., Ltd. Mécanisme de diagnostic dans un régulateur de débit massique à pression différentielle
KR101485887B1 (ko) * 2007-12-05 2015-01-26 히다치 조센 가부시키가이샤 진공 용기의 압력 제어 방법 및 압력 제어 장치
JP5395451B2 (ja) * 2009-02-10 2014-01-22 サーパス工業株式会社 流量コントローラ
TWI435196B (zh) * 2009-10-15 2014-04-21 Pivotal Systems Corp 氣體流量控制方法及裝置
JP5605969B2 (ja) * 2011-05-10 2014-10-15 株式会社フジキン 流量モニタ付圧力式流量制御装置と、これを用いた流体供給系の異常検出方法並びにモニタ流量異常時の処置方法
US9188989B1 (en) * 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
US9454158B2 (en) * 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
WO2015034663A2 (en) 2013-09-06 2015-03-12 Illinois Tool Works Inc. Absolute and differential pressure transducer
JP6254815B2 (ja) * 2013-10-11 2017-12-27 アドバンス電気工業株式会社 流量制御弁及びこれを用いた流量制御装置
CN104806797B (zh) * 2013-12-31 2018-02-23 缪勒Sv有限公司 自动流量控制系统及导阀组件
JP6415889B2 (ja) * 2014-08-01 2018-10-31 株式会社堀場エステック 流量制御装置、流量制御装置用プログラム、及び、流量制御方法
CN104236641A (zh) * 2014-09-19 2014-12-24 兰州空间技术物理研究所 基于恒压法的多介质气体配样标准流量计及流量提供方法
WO2016089552A1 (en) * 2014-12-04 2016-06-09 Illinois Tool Works Inc. Wireless flow restrictor of a flowmeter
US10459458B2 (en) * 2015-09-30 2019-10-29 Hitachi Metals, Ltd. Mass flow controller and diagnostic method for differential pressure type flow meter
US9638559B1 (en) * 2016-02-10 2017-05-02 Sensata Technologies Inc. System, devices and methods for measuring differential and absolute pressure utilizing two MEMS sense elements
JP6871721B2 (ja) * 2016-11-17 2021-05-12 株式会社堀場エステック 圧力式流量計
CN106679925A (zh) * 2016-12-15 2017-05-17 中国航空工业集团公司沈阳空气动力研究所 一种微质量射流流量高精度控制装置和控制方法
CN106990798A (zh) * 2017-06-01 2017-07-28 上海昶艾电子科技有限公司 流体流量控制器以及干湿球测湿法中控制流量的方法
US12379238B2 (en) * 2018-10-26 2025-08-05 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004157719A (ja) * 2002-11-06 2004-06-03 Stec Inc マスフローコントローラ
JP2014098560A (ja) * 2012-11-13 2014-05-29 Azbil Corp 差圧／圧力複合センサの異常診断方法

Also Published As

Publication number Publication date
US11526181B2 (en) 2022-12-13
JP7216736B2 (ja) 2023-02-01
US20210318698A1 (en) 2021-10-14
EP3746860B1 (en) 2023-01-04
KR20200115555A (ko) 2020-10-07
EP3746860A1 (en) 2020-12-09
WO2019152089A1 (en) 2019-08-08
JP2021513147A (ja) 2021-05-20
US20190235533A1 (en) 2019-08-01
TWI796417B (zh) 2023-03-21
CN111902786A (zh) 2020-11-06
TW201937322A (zh) 2019-09-16
US11073846B2 (en) 2021-07-27
CN111902786B (zh) 2024-09-03

Similar Documents

Publication Publication Date Title
KR102691172B1 (ko) 절대압 및 차압 변환기를 지닌 질량 유량 제어기
JP6064599B2 (ja) ガス・フロー制御のための方法及び装置
JP7216425B2 (ja) 流量制御装置
KR102371907B1 (ko) 가스 흐름 제어 방법 및 장치
JP4594728B2 (ja) より高い正確度の圧力に基づく流れコントローラ
KR102250967B1 (ko) 압력식 유량 제어 장치 및 유량 제어 방법
KR102240813B1 (ko) 절대 압력 및 차압 변환기
KR102084447B1 (ko) 유량 제어 기기, 유량 제어 기기의 유량 교정 방법, 유량 측정 기기 및 유량 측정 기기를 사용한 유량 측정 방법
WO2005003694A1 (ja) 差圧式流量計及び差圧式流量制御装置
CN101356481A (zh) 远程区域中的压力调节
KR20020000867A (ko) 실시간 유동 측정 및 수정용 광범위 가스 유동 시스템
US12174647B2 (en) Flow rate control device
JP2001005536A (ja) 排気装置の圧力制御システム
JP4753251B2 (ja) ガス流量計、及びガス流量制御装置
JP2025019670A (ja) 流量制御装置

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20200821

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20210927

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20230912

Patent event code: PE09021S01D

E701 Decision to grant or registration of patent right
PE0701 Decision of registration

Patent event code: PE07011S01D

Comment text: Decision to Grant Registration

Patent event date: 20240528

GRNT Written decision to grant
PR0701 Registration of establishment

Comment text: Registration of Establishment

Patent event date: 20240730

Patent event code: PR07011E01D

PR1002 Payment of registration fee

Payment date: 20240730

End annual number: 3

Start annual number: 1

PG1601 Publication of registration