TWI796417B - 具有絕對和差分壓力變換器之質量流量控制器及其相關方法 - Google Patents

具有絕對和差分壓力變換器之質量流量控制器及其相關方法 Download PDF

Info

Publication number
TWI796417B
TWI796417B TW108101485A TW108101485A TWI796417B TW I796417 B TWI796417 B TW I796417B TW 108101485 A TW108101485 A TW 108101485A TW 108101485 A TW108101485 A TW 108101485A TW I796417 B TWI796417 B TW I796417B
Authority
TW
Taiwan
Prior art keywords
flow
cavity
differential pressure
absolute
mass flow
Prior art date
Application number
TW108101485A
Other languages
English (en)
Chinese (zh)
Other versions
TW201937322A (zh
Inventor
約翰 洛
安東尼 奇侯
柏溫 貝納斯
Original Assignee
美商伊利諾工具工程公司
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 美商伊利諾工具工程公司 filed Critical 美商伊利諾工具工程公司
Publication of TW201937322A publication Critical patent/TW201937322A/zh
Application granted granted Critical
Publication of TWI796417B publication Critical patent/TWI796417B/zh

Links

Images

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
    • G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
    • G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
    • G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
    • G01F1/38—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule
    • G01F1/383—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction the pressure or differential pressure being measured by means of a movable element, e.g. diaphragm, piston, Bourdon tube or flexible capsule with electrical or electro-mechanical indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/001—Means for regulating or setting the meter for a predetermined quantity
    • G01F15/003—Means for regulating or setting the meter for a predetermined quantity using electromagnetic, electric or electronic means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F15/00—Details of, or accessories for, apparatus of groups G01F1/00 - G01F13/00 insofar as such details or appliances are not adapted to particular types of such apparatus
    • G01F15/005—Valves
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Electromagnetism (AREA)
  • Flow Control (AREA)
  • Measuring Volume Flow (AREA)
TW108101485A 2018-01-30 2019-01-15 具有絕對和差分壓力變換器之質量流量控制器及其相關方法 TWI796417B (zh)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US201862624059P 2018-01-30 2018-01-30
US62/624,059 2018-01-30
US16/195,432 US11073846B2 (en) 2018-01-30 2018-11-19 Mass flow controller with absolute and differential pressure transducer
US16/195,432 2018-11-19

Publications (2)

Publication Number Publication Date
TW201937322A TW201937322A (zh) 2019-09-16
TWI796417B true TWI796417B (zh) 2023-03-21

Family

ID=67392855

Family Applications (1)

Application Number Title Priority Date Filing Date
TW108101485A TWI796417B (zh) 2018-01-30 2019-01-15 具有絕對和差分壓力變換器之質量流量控制器及其相關方法

Country Status (7)

Country Link
US (2) US11073846B2 (enExample)
EP (1) EP3746860B1 (enExample)
JP (1) JP7216736B2 (enExample)
KR (1) KR102691172B1 (enExample)
CN (1) CN111902786B (enExample)
TW (1) TWI796417B (enExample)
WO (1) WO2019152089A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102771309B1 (ko) 2019-04-25 2025-02-24 가부시키가이샤 후지킨 유량 제어 장치
US12240017B2 (en) * 2020-07-28 2025-03-04 Festo Se & Co. Kg Sorting method and sorting device
JP2022047815A (ja) * 2020-09-14 2022-03-25 アズビル株式会社 マスフローコントローラ
US11940307B2 (en) 2021-06-08 2024-03-26 Mks Instruments, Inc. Methods and apparatus for pressure based mass flow ratio control
DE102021130134A1 (de) * 2021-11-18 2023-05-25 Gemü Gebr. Müller Apparatebau Gmbh & Co. Kommanditgesellschaft Vorrichtung zur Fluidbegrenzung und Vorrichtung zum Messen einer Eigenschaft eines Prozessfluids
US12000723B2 (en) 2022-02-18 2024-06-04 Mks Instruments, Inc. Method and apparatus for pressure based mass flow control
US12436049B2 (en) 2023-02-16 2025-10-07 Te Connectivity Solutions Gmbh Sensor die with a diaphragm
US12313483B2 (en) 2023-03-31 2025-05-27 Te Connectivity Solutions Gmbh Sensor having a plurality of diaphragms
US12449322B2 (en) 2023-04-05 2025-10-21 Te Connectivity Solutions Gmbh Sensor assembly
US20250130600A1 (en) * 2023-10-20 2025-04-24 Illinois Took Works Inc. Valve assembly and system used to control flow rate of a fluid
CN117148877B (zh) * 2023-11-01 2024-01-02 苏芯物联技术(南京)有限公司 一种高精度管道流量测量控制装置及设计方法

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050016592A1 (en) * 2001-11-13 2005-01-27 Jeromson Peter James Process control valve
US8307845B2 (en) * 2009-02-10 2012-11-13 Surpass Industry Co., Ltd. Flow rate controller
JP5111519B2 (ja) * 2007-12-05 2013-01-09 日立造船株式会社 真空容器の圧力制御方法および圧力制御装置
CN104236641A (zh) * 2014-09-19 2014-12-24 兰州空间技术物理研究所 基于恒压法的多介质气体配样标准流量计及流量提供方法
TW201520457A (zh) * 2013-10-11 2015-06-01 Advance Denki Kogyo Kabushiki Kaisha 流量控制閥及使用該控制閥之流量控制裝置
CN204459324U (zh) * 2013-12-31 2015-07-08 新歌阀门有限公司 自动流量控制系统及导阀组件
US9562796B2 (en) * 2013-09-06 2017-02-07 Illinois Tool Works Inc. Absolute and differential pressure transducer
CN106679925A (zh) * 2016-12-15 2017-05-17 中国航空工业集团公司沈阳空气动力研究所 一种微质量射流流量高精度控制装置和控制方法
CN106990798A (zh) * 2017-06-01 2017-07-28 上海昶艾电子科技有限公司 流体流量控制器以及干湿球测湿法中控制流量的方法

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0547617B1 (en) * 1991-12-18 1996-07-10 Pierre Delajoud Mass flow meter and method
US5868159A (en) * 1996-07-12 1999-02-09 Mks Instruments, Inc. Pressure-based mass flow controller
GB2373054B (en) * 1999-05-26 2003-03-26 Cyber Instr Technology Llc Wide range gas flow system with real time flow measurement and correction
US6503280B2 (en) * 2000-12-26 2003-01-07 John A. Repicci Prosthetic knee and method of inserting
JP4864280B2 (ja) 2001-04-24 2012-02-01 ブルックス・インストルメント・エルエルシー 質量流量コントローラのシステムおよび方法
US6712084B2 (en) * 2002-06-24 2004-03-30 Mks Instruments, Inc. Apparatus and method for pressure fluctuation insensitive mass flow control
JP2004157719A (ja) * 2002-11-06 2004-06-03 Stec Inc マスフローコントローラ
US6973375B2 (en) * 2004-02-12 2005-12-06 Mykrolis Corporation System and method for flow monitoring and control
KR101572407B1 (ko) 2006-11-02 2015-11-26 가부시키가이샤 호리바 에스텍 차압식 매스 플로우 컨트롤러에 있어서 진단 기구
TWI435196B (zh) * 2009-10-15 2014-04-21 Pivotal Systems Corp 氣體流量控制方法及裝置
KR101599343B1 (ko) * 2011-05-10 2016-03-03 가부시키가이샤 후지킨 유량 모니터 부착 압력식 유량 제어 장치
US9188989B1 (en) * 2011-08-20 2015-11-17 Daniel T. Mudd Flow node to deliver process gas using a remote pressure measurement device
JP2014098560A (ja) * 2012-11-13 2014-05-29 Azbil Corp 差圧／圧力複合センサの異常診断方法
US9454158B2 (en) * 2013-03-15 2016-09-27 Bhushan Somani Real time diagnostics for flow controller systems and methods
JP6415889B2 (ja) * 2014-08-01 2018-10-31 株式会社堀場エステック 流量制御装置、流量制御装置用プログラム、及び、流量制御方法
JP6659692B2 (ja) * 2014-12-04 2020-03-04 イリノイ トゥール ワークス インコーポレイティド ワイヤレス流量制限器
WO2017057129A1 (ja) 2015-09-30 2017-04-06 日立金属株式会社 質量流量制御装置、及び差圧式流量計の診断方法
US9638559B1 (en) 2016-02-10 2017-05-02 Sensata Technologies Inc. System, devices and methods for measuring differential and absolute pressure utilizing two MEMS sense elements
JP6871721B2 (ja) * 2016-11-17 2021-05-12 株式会社堀場エステック 圧力式流量計
US12379238B2 (en) * 2018-10-26 2025-08-05 Illinois Tool Works Inc. Mass flow controller with advanced back streaming diagnostics

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050016592A1 (en) * 2001-11-13 2005-01-27 Jeromson Peter James Process control valve
JP5111519B2 (ja) * 2007-12-05 2013-01-09 日立造船株式会社 真空容器の圧力制御方法および圧力制御装置
US8307845B2 (en) * 2009-02-10 2012-11-13 Surpass Industry Co., Ltd. Flow rate controller
US9562796B2 (en) * 2013-09-06 2017-02-07 Illinois Tool Works Inc. Absolute and differential pressure transducer
TW201520457A (zh) * 2013-10-11 2015-06-01 Advance Denki Kogyo Kabushiki Kaisha 流量控制閥及使用該控制閥之流量控制裝置
CN204459324U (zh) * 2013-12-31 2015-07-08 新歌阀门有限公司 自动流量控制系统及导阀组件
CN104236641A (zh) * 2014-09-19 2014-12-24 兰州空间技术物理研究所 基于恒压法的多介质气体配样标准流量计及流量提供方法
CN106679925A (zh) * 2016-12-15 2017-05-17 中国航空工业集团公司沈阳空气动力研究所 一种微质量射流流量高精度控制装置和控制方法
CN106990798A (zh) * 2017-06-01 2017-07-28 上海昶艾电子科技有限公司 流体流量控制器以及干湿球测湿法中控制流量的方法

Also Published As

Publication number Publication date
KR20200115555A (ko) 2020-10-07
KR102691172B1 (ko) 2024-08-01
US11073846B2 (en) 2021-07-27
TW201937322A (zh) 2019-09-16
CN111902786B (zh) 2024-09-03
WO2019152089A1 (en) 2019-08-08
JP2021513147A (ja) 2021-05-20
EP3746860B1 (en) 2023-01-04
JP7216736B2 (ja) 2023-02-01
US20210318698A1 (en) 2021-10-14
US11526181B2 (en) 2022-12-13
EP3746860A1 (en) 2020-12-09
US20190235533A1 (en) 2019-08-01
CN111902786A (zh) 2020-11-06

Similar Documents

Publication Publication Date Title
TWI796417B (zh) 具有絕對和差分壓力變換器之質量流量控制器及其相關方法
KR101843378B1 (ko) 유량계 및 그것을 구비한 유량 제어 장치
JP6522624B2 (ja) 絶対圧差圧圧力トランスデューサー
JP4594728B2 (ja) より高い正確度の圧力に基づく流れコントローラ
WO2005003694A1 (ja) 差圧式流量計及び差圧式流量制御装置
CN104350443A (zh) 带有降落方式流量监测器的流量控制装置
US12174647B2 (en) Flow rate control device
JP4977669B2 (ja) 差圧式流量計
KR20190102241A (ko) 유량 측정 방법 및 유량 측정 장치
JP7244940B2 (ja) 流量制御システム及び流量測定方法
JP4753251B2 (ja) ガス流量計、及びガス流量制御装置
JP2025019670A (ja) 流量制御装置