JP2017191090A5 - - Google Patents

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Publication number
JP2017191090A5
JP2017191090A5 JP2017013426A JP2017013426A JP2017191090A5 JP 2017191090 A5 JP2017191090 A5 JP 2017191090A5 JP 2017013426 A JP2017013426 A JP 2017013426A JP 2017013426 A JP2017013426 A JP 2017013426A JP 2017191090 A5 JP2017191090 A5 JP 2017191090A5
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JP
Japan
Prior art keywords
hole
introduction
flow control
base
pressure sensor
Prior art date
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Application number
JP2017013426A
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English (en)
Japanese (ja)
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JP2017191090A (ja
JP6819863B2 (ja
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Publication date
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Priority to US15/480,476 priority Critical patent/US10310521B2/en
Publication of JP2017191090A publication Critical patent/JP2017191090A/ja
Publication of JP2017191090A5 publication Critical patent/JP2017191090A5/ja
Application granted granted Critical
Publication of JP6819863B2 publication Critical patent/JP6819863B2/ja
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JP2017013426A 2016-04-07 2017-01-27 バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置 Active JP6819863B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
US15/480,476 US10310521B2 (en) 2016-04-07 2017-04-06 Bypass unit, a base for a flow meter, a base for a flow controller, a flow meter, and a flow controller

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2016077332 2016-04-07
JP2016077332 2016-04-07

Publications (3)

Publication Number Publication Date
JP2017191090A JP2017191090A (ja) 2017-10-19
JP2017191090A5 true JP2017191090A5 (enExample) 2020-01-30
JP6819863B2 JP6819863B2 (ja) 2021-01-27

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ID=60085827

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017013426A Active JP6819863B2 (ja) 2016-04-07 2017-01-27 バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置

Country Status (1)

Country Link
JP (1) JP6819863B2 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101993208B1 (ko) * 2018-02-28 2019-06-27 엠케이프리시젼 주식회사 유량 측정 장치
JPWO2021033780A1 (enExample) * 2019-08-22 2021-02-25
US12203493B2 (en) * 2022-01-10 2025-01-21 Horiba Stec, Co., Ltd. Flow restrictor for fluid flow device
KR20250139292A (ko) 2023-01-31 2025-09-23 구와나 메탈스, 엘티디. 층류 소자, 유량 센서 및 매스 플로 컨트롤러

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0222647Y2 (enExample) * 1985-05-09 1990-06-19
JPH0222648Y2 (enExample) * 1985-05-09 1990-06-19
JP3715920B2 (ja) * 2001-12-26 2005-11-16 シーケーディ株式会社 熱式流量計
JP6731594B2 (ja) * 2015-10-06 2020-07-29 アルメックスコーセイ株式会社 気体流量制御装置、気体流量計および気体流量センサ

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