JP6819863B2 - バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置 - Google Patents
バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置 Download PDFInfo
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- JP6819863B2 JP6819863B2 JP2017013426A JP2017013426A JP6819863B2 JP 6819863 B2 JP6819863 B2 JP 6819863B2 JP 2017013426 A JP2017013426 A JP 2017013426A JP 2017013426 A JP2017013426 A JP 2017013426A JP 6819863 B2 JP6819863 B2 JP 6819863B2
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- 239000012530 fluid Substances 0.000 claims description 87
- 238000011144 upstream manufacturing Methods 0.000 claims description 65
- 238000001514 detection method Methods 0.000 claims description 62
- 238000013459 approach Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 description 45
- 230000008569 process Effects 0.000 description 33
- 230000000694 effects Effects 0.000 description 22
- 230000009471 action Effects 0.000 description 16
- 238000010586 diagram Methods 0.000 description 14
- 238000004519 manufacturing process Methods 0.000 description 14
- 239000000463 material Substances 0.000 description 13
- 238000012856 packing Methods 0.000 description 12
- 238000005530 etching Methods 0.000 description 10
- 238000010030 laminating Methods 0.000 description 8
- 239000011148 porous material Substances 0.000 description 7
- 238000012545 processing Methods 0.000 description 7
- 238000009795 derivation Methods 0.000 description 4
- 238000005520 cutting process Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000005304 joining Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 239000000470 constituent Substances 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 238000004663 powder metallurgy Methods 0.000 description 2
- 229910000975 Carbon steel Inorganic materials 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910000856 hastalloy Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US15/480,476 US10310521B2 (en) | 2016-04-07 | 2017-04-06 | Bypass unit, a base for a flow meter, a base for a flow controller, a flow meter, and a flow controller |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
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| JP2016077332 | 2016-04-07 | ||
| JP2016077332 | 2016-04-07 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2017191090A JP2017191090A (ja) | 2017-10-19 |
| JP2017191090A5 JP2017191090A5 (enExample) | 2020-01-30 |
| JP6819863B2 true JP6819863B2 (ja) | 2021-01-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| JP2017013426A Active JP6819863B2 (ja) | 2016-04-07 | 2017-01-27 | バイパスユニット、流量計用ベース、流量制御装置用ベース、流量計、及び流量制御装置 |
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| JP (1) | JP6819863B2 (enExample) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101993208B1 (ko) * | 2018-02-28 | 2019-06-27 | 엠케이프리시젼 주식회사 | 유량 측정 장치 |
| JPWO2021033780A1 (enExample) * | 2019-08-22 | 2021-02-25 | ||
| US12203493B2 (en) * | 2022-01-10 | 2025-01-21 | Horiba Stec, Co., Ltd. | Flow restrictor for fluid flow device |
| KR20250139292A (ko) | 2023-01-31 | 2025-09-23 | 구와나 메탈스, 엘티디. | 층류 소자, 유량 센서 및 매스 플로 컨트롤러 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0222647Y2 (enExample) * | 1985-05-09 | 1990-06-19 | ||
| JPH0222648Y2 (enExample) * | 1985-05-09 | 1990-06-19 | ||
| JP3715920B2 (ja) * | 2001-12-26 | 2005-11-16 | シーケーディ株式会社 | 熱式流量計 |
| JP6731594B2 (ja) * | 2015-10-06 | 2020-07-29 | アルメックスコーセイ株式会社 | 気体流量制御装置、気体流量計および気体流量センサ |
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| JP2017191090A (ja) | 2017-10-19 |
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