JP2016508898A - フレキシブル基板の薄膜窒化ケイ素バリア層 - Google Patents
フレキシブル基板の薄膜窒化ケイ素バリア層 Download PDFInfo
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- 230000004888 barrier function Effects 0.000 title claims abstract description 87
- 229910052581 Si3N4 Inorganic materials 0.000 title claims abstract description 40
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims abstract description 40
- 239000000758 substrate Substances 0.000 title claims abstract description 19
- 239000010409 thin film Substances 0.000 title description 8
- 230000003287 optical effect Effects 0.000 claims abstract description 51
- 229920000307 polymer substrate Polymers 0.000 claims abstract description 32
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims description 26
- 238000005229 chemical vapour deposition Methods 0.000 claims description 16
- 229920000139 polyethylene terephthalate Polymers 0.000 claims description 11
- 239000005020 polyethylene terephthalate Substances 0.000 claims description 11
- -1 polyethylene terephthalate Polymers 0.000 claims description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 8
- 230000005540 biological transmission Effects 0.000 claims description 7
- 238000000151 deposition Methods 0.000 claims description 6
- 238000005538 encapsulation Methods 0.000 claims description 6
- 229920002313 fluoropolymer Polymers 0.000 claims description 5
- 239000004811 fluoropolymer Substances 0.000 claims description 5
- 239000011112 polyethylene naphthalate Substances 0.000 claims description 5
- 239000004952 Polyamide Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 229920003229 poly(methyl methacrylate) Polymers 0.000 claims description 3
- 229920002647 polyamide Polymers 0.000 claims description 3
- 229920000515 polycarbonate Polymers 0.000 claims description 3
- 239000004417 polycarbonate Substances 0.000 claims description 3
- 239000004926 polymethyl methacrylate Substances 0.000 claims description 3
- 239000004814 polyurethane Substances 0.000 claims description 3
- 229920002635 polyurethane Polymers 0.000 claims description 3
- 229920005570 flexible polymer Polymers 0.000 abstract description 3
- 239000002184 metal Substances 0.000 description 10
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000000178 monomer Substances 0.000 description 9
- 238000000231 atomic layer deposition Methods 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 6
- 230000003746 surface roughness Effects 0.000 description 5
- 239000004812 Fluorinated ethylene propylene Substances 0.000 description 4
- 239000002033 PVDF binder Substances 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 4
- 229920000840 ethylene tetrafluoroethylene copolymer Polymers 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 229920009441 perflouroethylene propylene Polymers 0.000 description 4
- 229920002493 poly(chlorotrifluoroethylene) Polymers 0.000 description 4
- 239000005023 polychlorotrifluoroethylene (PCTFE) polymer Substances 0.000 description 4
- 229920000642 polymer Polymers 0.000 description 4
- 229920002981 polyvinylidene fluoride Polymers 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 238000012360 testing method Methods 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000015556 catabolic process Effects 0.000 description 3
- 238000006731 degradation reaction Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 230000008021 deposition Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 229910052735 hafnium Inorganic materials 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 229920000620 organic polymer Polymers 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 239000000523 sample Substances 0.000 description 2
- 229920001169 thermoplastic Polymers 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 239000004416 thermosoftening plastic Substances 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229920007925 Ethylene chlorotrifluoroethylene (ECTFE) Polymers 0.000 description 1
- 241000532412 Vitex Species 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 235000009347 chasteberry Nutrition 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 230000000593 degrading effect Effects 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- XUCNUKMRBVNAPB-UHFFFAOYSA-N fluoroethene Chemical group FC=C XUCNUKMRBVNAPB-UHFFFAOYSA-N 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000005382 thermal cycling Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K50/00—Organic light-emitting devices
- H10K50/80—Constructional details
- H10K50/84—Passivation; Containers; Encapsulations
- H10K50/844—Encapsulations
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K30/00—Organic devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation
- H10K30/80—Constructional details
- H10K30/88—Passivation; Containers; Encapsulations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L2031/0344—Organic materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/12—Passive devices, e.g. 2 terminal devices
- H01L2924/1204—Optical Diode
- H01L2924/12044—OLED
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K2102/00—Constructional details relating to the organic devices covered by this subclass
- H10K2102/301—Details of OLEDs
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/549—Organic PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/26—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension
- Y10T428/269—Web or sheet containing structurally defined element or component, the element or component having a specified physical dimension including synthetic resin or polymer layer or component
Abstract
Description
応力<S・密度+I
Sは、550MPa・cm3/g以下、例えば、540MPa・cm3/g以下、530MPa・cm3/g以下、520MPa・cm3/g以下、510MPa・cm3/g以下、500MPa・cm3/g以下、490MPa・cm3/g以下、470MPa・cm3/g以下、450MPa・cm3/g以下、430MPa・cm3/g以下、410MPa・cm3/g以下、350MPa・cm3/g以下、300MPa・cm3/g以下、または250MPa・cm3/g以下の値を有し、Iは、−400MPa以下、例えば、−500MPa以下、−600MPa以下、−700MPa以下、−800MPa以下、−900MPa以下、最大で−1000MPaであり、好ましくは、Sは、539MPa・cm3/gであり、Iは、−915MPaである。
Claims (15)
- ポリマー基板と、
少なくとも1つの無機バリア層と、
を備える物品であって、
前記無機バリア層は、約400MPa以下の応力および少なくとも約1.5g/cm3の密度を有する、物品。 - 電子部品と、
該電子部品を覆うバリアスタックと、
を備えるカプセル封止光学デバイスであって、
前記バリアスタックは、
ポリマー基板と、
約400MPa以下の応力および少なくとも約1.5g/cm3の密度を有する無機バリア層とを備える、カプセル封止光学デバイス。 - 前記カプセル封止光学デバイスは、有機発光ダイオード(OLED)または太陽電池(PV)モジュールである、請求項2記載のカプセル封止光学デバイス。
- 前記基板はフレキシブルである、請求項1から3までのいずれか1項記載の物品またはカプセル封止光学デバイス。
- 前記応力は、約390MPa以下である、請求項1から4までのいずれか1項記載の物品またはカプセル封止光学デバイス。
- 前記密度は、少なくとも約2g/cm3であり、かつ約2.85g/cm3以下である、請求項1から4までのいずれか1項記載の物品またはカプセル封止光学デバイス。
- 応力および密度は、以下の数式
応力<S*密度+I、によって関連し、
Sは、550MPa・cm3/g以下の値を有し、かつIは、−400MPa以下である、請求項1から4までのいずれか1項記載の物品またはカプセル封止光学デバイス。 - Sは、539MPa・cm3/gであり、かつIは、−915MPaである、請求項7記載の物品またはカプセル封止光学デバイス。
- 前記無機バリア層は、約350MPa以下の応力および少なくとも約2.0g/cm3の密度を有する、請求項7記載の物品またはカプセル封止光学デバイス。
- 前記ポリマー基板は、ポリエチレンテレフタレート(PET)、ポリエチレンナフタレート(PEN)、ポリカーボネート、ポリウレタン、ポリメチルメタクリレート、ポリアミド、フルオロポリマー、またはこれらの任意の組み合わせを含む、請求項1から4までのいずれか1項記載の物品またはカプセル封止光学デバイス。
- 前記無機バリア層は、実質的に、窒化ケイ素からなる、請求項1から4までのいずれか1項記載の物品またはカプセル封止光学デバイス。
- 前記無機バリア層は、0.005g/m2/日以下の水蒸気透過率(WVTR)を有する、請求項1から4までのいずれか1項記載の物品またはカプセル封止光学デバイス。
- 前記少なくとも1つの無機バリア層の厚さは、少なくとも約30nmである、請求項1から4までのいずれか1項記載の物品またはカプセル封止光学デバイス。
- ポリマー基板に窒化ケイ素層を形成する方法であって、前記窒化ケイ素層は、約400MPa以下の応力および少なくとも約1.5g/cm3の密度を有し、前記ポリマー基板に、プラズマ化学気相堆積法(PECVD)により窒化ケイ素を堆積させることを含む、ポリマー基板に窒化ケイ素層を形成する方法。
- 前記PECVDは、リアクタを有するチャンバにおいて実施され、
SiH4とNH3とを、SiH4/NH3のモル比が約0.4〜約1.0で前記チャンバに加えることと、
前記チャンバを、約70℃〜約130℃の温度に加熱することと、
前記チャンバの圧力を約225μbar〜約500μbarで調整することと、
前記リアクタから、約200W〜約450Wの電力で無線周波数を放出することと、
をさらに含む、請求項20記載のポリマー基板に窒化ケイ素層を形成する方法。
Applications Claiming Priority (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR1262975 | 2012-12-31 | ||
FR12/62975 | 2012-12-31 | ||
US201361805782P | 2013-03-27 | 2013-03-27 | |
US61/805,782 | 2013-03-27 | ||
PCT/US2013/077104 WO2014105734A1 (en) | 2012-12-31 | 2013-12-20 | Thin film silicon nitride barrier layers on flexible substrate |
Publications (2)
Publication Number | Publication Date |
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JP2016508898A true JP2016508898A (ja) | 2016-03-24 |
JP6154913B2 JP6154913B2 (ja) | 2017-06-28 |
Family
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Family Applications (1)
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JP2015550703A Expired - Fee Related JP6154913B2 (ja) | 2012-12-31 | 2013-12-20 | フレキシブル基板の薄膜窒化ケイ素バリア層 |
Country Status (5)
Country | Link |
---|---|
US (1) | US20140183498A1 (ja) |
JP (1) | JP6154913B2 (ja) |
KR (2) | KR101892433B1 (ja) |
CN (1) | CN104995716B (ja) |
WO (1) | WO2014105734A1 (ja) |
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KR102110918B1 (ko) * | 2013-10-29 | 2020-05-14 | 엘지디스플레이 주식회사 | 유기전계발광 표시장치 및 그 제조방법 |
KR102313361B1 (ko) * | 2014-11-17 | 2021-10-18 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치, 이를 포함하는 전자 기기, 및 유기 발광 표시 장치의 제조 방법 |
KR20180002123A (ko) | 2016-06-28 | 2018-01-08 | 삼성디스플레이 주식회사 | 표시장치 |
CN107993918A (zh) * | 2017-11-09 | 2018-05-04 | 信利半导体有限公司 | 一种柔性显示器的制备方法 |
CN114318292B (zh) * | 2021-12-31 | 2024-03-29 | 中储粮成都储藏研究院有限公司 | 一种利用化学气相沉积法包覆阻燃性膜层的方法 |
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- 2013-12-20 JP JP2015550703A patent/JP6154913B2/ja not_active Expired - Fee Related
- 2013-12-20 US US14/136,951 patent/US20140183498A1/en not_active Abandoned
- 2013-12-20 KR KR1020177018936A patent/KR101892433B1/ko active IP Right Grant
- 2013-12-20 CN CN201380072957.0A patent/CN104995716B/zh not_active Expired - Fee Related
- 2013-12-20 WO PCT/US2013/077104 patent/WO2014105734A1/en active Application Filing
- 2013-12-20 KR KR1020157019878A patent/KR20150097796A/ko active Application Filing
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Also Published As
Publication number | Publication date |
---|---|
US20140183498A1 (en) | 2014-07-03 |
CN104995716B (zh) | 2018-05-11 |
WO2014105734A1 (en) | 2014-07-03 |
KR20150097796A (ko) | 2015-08-26 |
CN104995716A (zh) | 2015-10-21 |
KR20170084350A (ko) | 2017-07-19 |
KR101892433B1 (ko) | 2018-08-30 |
JP6154913B2 (ja) | 2017-06-28 |
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