JP2016507752A5 - - Google Patents
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- JP2016507752A5 JP2016507752A5 JP2015557062A JP2015557062A JP2016507752A5 JP 2016507752 A5 JP2016507752 A5 JP 2016507752A5 JP 2015557062 A JP2015557062 A JP 2015557062A JP 2015557062 A JP2015557062 A JP 2015557062A JP 2016507752 A5 JP2016507752 A5 JP 2016507752A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- test object
- spectral light
- image
- spectral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 238000009826 distribution Methods 0.000 claims 51
- 230000003595 spectral effect Effects 0.000 claims 45
- 238000003384 imaging method Methods 0.000 claims 10
- 238000005286 illumination Methods 0.000 claims 9
- 230000003287 optical effect Effects 0.000 claims 7
- 238000005305 interferometry Methods 0.000 claims 5
- 238000000034 method Methods 0.000 claims 5
- 238000001454 recorded image Methods 0.000 claims 4
- 238000000691 measurement method Methods 0.000 claims 2
- 238000005259 measurement Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201361763911P | 2013-02-12 | 2013-02-12 | |
| US61/763,911 | 2013-02-12 | ||
| PCT/US2014/015078 WO2014126778A2 (en) | 2013-02-12 | 2014-02-06 | Surface topography interferometer with surface color |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016507752A JP2016507752A (ja) | 2016-03-10 |
| JP2016507752A5 true JP2016507752A5 (enExample) | 2016-04-21 |
Family
ID=51297243
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015557062A Pending JP2016507752A (ja) | 2013-02-12 | 2014-02-06 | 表面色を備えた表面トポグラフィ干渉計 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9541381B2 (enExample) |
| EP (1) | EP2956742A4 (enExample) |
| JP (1) | JP2016507752A (enExample) |
| KR (1) | KR102048793B1 (enExample) |
| TW (1) | TWI509220B (enExample) |
| WO (1) | WO2014126778A2 (enExample) |
Families Citing this family (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101462848B1 (ko) * | 2013-03-18 | 2014-11-18 | 에스엔유 프리시젼 주식회사 | 색정보를 측정할 수 있는 3차원 형상 측정 장치 |
| US9719777B1 (en) | 2014-05-30 | 2017-08-01 | Zygo Corporation | Interferometer with real-time fringe-free imaging |
| US9282304B1 (en) * | 2014-06-02 | 2016-03-08 | Bruker Nano Inc. | Full-color images produced by white-light interferometry |
| US9746315B1 (en) * | 2014-06-02 | 2017-08-29 | Bruker Nano Inc. | Side illumination in interferometry |
| EP3213298B1 (en) * | 2014-10-30 | 2018-12-12 | Koninklijke Philips N.V. | Texture analysis map for image data |
| JP6511263B2 (ja) * | 2014-12-22 | 2019-05-15 | 株式会社トプコンテクノハウス | 平面分光干渉計 |
| WO2016127173A1 (en) * | 2015-02-06 | 2016-08-11 | The University Of Akron | Optical imaging system and methods thereof |
| KR101637252B1 (ko) * | 2015-03-26 | 2016-07-07 | 에스엔유 프리시젼 주식회사 | 백색광 위상천이 간섭계의 간섭신호 차수 오차 보정방법 |
| JP2017099616A (ja) * | 2015-12-01 | 2017-06-08 | ソニー株式会社 | 手術用制御装置、手術用制御方法、およびプログラム、並びに手術システム |
| JP6674619B2 (ja) * | 2015-12-11 | 2020-04-01 | 株式会社東京精密 | 画像生成方法及び画像生成装置 |
| US10502556B2 (en) * | 2016-07-20 | 2019-12-10 | Mura Inc. | Systems and methods for 3D surface measurements |
| CN109906370B (zh) * | 2016-10-28 | 2021-07-27 | 富士胶片株式会社 | 光学相干断层图像摄像装置及测量方法 |
| JP6766995B2 (ja) * | 2016-11-09 | 2020-10-14 | 株式会社ミツトヨ | 位相シフト干渉計 |
| US10197781B2 (en) * | 2016-12-29 | 2019-02-05 | Asm Technology Singapore Pte Ltd | Vertical chromatic confocal scanning method and system |
| FR3067108B1 (fr) | 2017-06-01 | 2020-12-04 | Unity Semiconductor | Procede et systeme pour reconstituer une information de couleur d'un echantillon mesure par profilometrie optique en lumiere blanche, et applications de ce procede |
| CN117731237A (zh) * | 2017-06-29 | 2024-03-22 | 登塔尔图像科技公司 | 具有彩色纹理的口内oct |
| TWI638132B (zh) * | 2017-08-25 | 2018-10-11 | 三星科技股份有限公司 | 物件多面取像裝置 |
| US10805034B2 (en) * | 2018-02-22 | 2020-10-13 | Nokia Solutions And Networks Oy | Protection of channel connections in an optical network |
| WO2020215046A1 (en) * | 2019-04-19 | 2020-10-22 | Arizona Board Of Regents On Behalf Of The University Of Arizona | On-chip signal processing method and pixel-array sensor |
| US11910104B2 (en) | 2019-04-19 | 2024-02-20 | ARIZONA BOARD OF REGENTS on behalf of THE UNIVERSITY OF ARIZONA, A BODY CORPORATE | All-in-focus imager and associated method |
| FR3101702B1 (fr) * | 2019-10-07 | 2021-11-19 | Fogale Nanotech | Dispositif et procédé de mesures d’imagerie et d’interférométrie |
| US20230003578A1 (en) * | 2019-12-03 | 2023-01-05 | ams Sensors Germany GmbH | Color measurement |
| JP7001947B2 (ja) * | 2020-12-24 | 2022-01-20 | 株式会社東京精密 | 表面形状測定方法 |
| CN115035015B (zh) * | 2021-02-23 | 2025-09-05 | 京东方科技集团股份有限公司 | 图片处理方法、装置、计算机设备及存储介质 |
| DE102022101631B3 (de) * | 2022-01-25 | 2023-01-05 | Heidelberger Druckmaschinen Aktiengesellschaft | Verfahren zur Anpassung eines Lab-Sollfarbwertes mehrfarbiger Druckprodukte |
| CN117538658B (zh) * | 2023-11-16 | 2024-08-16 | 深圳市美信检测技术股份有限公司 | 基于红外光谱及热成像的人工智能故障定位方法及装置 |
Family Cites Families (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59225305A (ja) * | 1983-06-06 | 1984-12-18 | Ricoh Co Ltd | 干渉測定機におけるアライメント装置 |
| JPH02260886A (ja) * | 1989-03-31 | 1990-10-23 | Ricoh Co Ltd | カラー画像読取装置 |
| US5398113A (en) | 1993-02-08 | 1995-03-14 | Zygo Corporation | Method and apparatus for surface topography measurement by spatial-frequency analysis of interferograms |
| JP3637165B2 (ja) * | 1996-10-15 | 2005-04-13 | ペンタックス株式会社 | 表面測定装置 |
| JP2001078085A (ja) * | 1999-09-03 | 2001-03-23 | Ricoh Co Ltd | 画像処理装置 |
| JP3980823B2 (ja) * | 1999-11-06 | 2007-09-26 | 三星電子株式会社 | 単一の液晶ディスプレーパネルを用いたディスプレー装置及び方法 |
| JP2002168697A (ja) * | 2000-11-28 | 2002-06-14 | Fuji Xerox Co Ltd | 光量測定装置、および画像形成装置 |
| US6714307B2 (en) | 2001-10-16 | 2004-03-30 | Zygo Corporation | Measurement of complex surface shapes using a spherical wavefront |
| JP3861666B2 (ja) * | 2001-11-15 | 2006-12-20 | セイコーエプソン株式会社 | 形状測定方法及び装置 |
| US6781699B2 (en) | 2002-10-22 | 2004-08-24 | Corning-Tropel | Two-wavelength confocal interferometer for measuring multiple surfaces |
| US7324214B2 (en) | 2003-03-06 | 2008-01-29 | Zygo Corporation | Interferometer and method for measuring characteristics of optically unresolved surface features |
| EP1716388A4 (en) * | 2004-02-20 | 2009-01-21 | Univ South Florida | OPTICAL COHERENCE TOMOGRAPHY METHOD WITH PURE COLOR |
| JP2007033216A (ja) * | 2005-07-26 | 2007-02-08 | Keyence Corp | 白色干渉計測装置及び白色干渉計測方法 |
| EP1892501A3 (en) * | 2006-08-23 | 2009-10-07 | Heliotis AG | Colorimetric three-dimensional microscopy |
| KR101254161B1 (ko) | 2007-12-14 | 2013-04-18 | 지고 코포레이션 | 주사 간섭계를 사용해서 표면 구조를 분석하는 방법 및 장치 |
| JP2010112865A (ja) * | 2008-11-07 | 2010-05-20 | Ryoka Systems Inc | 白色干渉計測装置及び方法 |
| US8120781B2 (en) | 2008-11-26 | 2012-02-21 | Zygo Corporation | Interferometric systems and methods featuring spectral analysis of unevenly sampled data |
| US8654343B2 (en) * | 2009-02-13 | 2014-02-18 | National University Corporation Kyoto Institute Of Technology | Interference measurement apparatus and method for measuring interference |
| US7978346B1 (en) | 2009-02-18 | 2011-07-12 | University Of Central Florida Research Foundation, Inc. | Methods and systems for realizing high resolution three-dimensional optical imaging |
| TWI425188B (zh) | 2009-08-31 | 2014-02-01 | Zygo Corp | 顯微鏡系統和成像干涉儀系統 |
| WO2012018991A2 (en) * | 2010-08-05 | 2012-02-09 | Bioptigen, Inc. | Compact multimodality optical coherence tomography imaging systems and related methods and computer program products |
| KR101174274B1 (ko) | 2010-09-13 | 2012-08-16 | 케이맥(주) | 간섭계와 2차원-반사광도계의 측정이 가능한 복합시편 표면특성 측정장치 |
| US8649024B2 (en) | 2010-12-03 | 2014-02-11 | Zygo Corporation | Non-contact surface characterization using modulated illumination |
-
2014
- 2014-02-06 US US14/174,352 patent/US9541381B2/en active Active
- 2014-02-06 WO PCT/US2014/015078 patent/WO2014126778A2/en not_active Ceased
- 2014-02-06 KR KR1020157025091A patent/KR102048793B1/ko active Active
- 2014-02-06 JP JP2015557062A patent/JP2016507752A/ja active Pending
- 2014-02-06 EP EP14751290.9A patent/EP2956742A4/en not_active Withdrawn
- 2014-02-10 TW TW103104214A patent/TWI509220B/zh active
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