WO2013105922A3 - Non-contact surface characterization using modulated illumination - Google Patents

Non-contact surface characterization using modulated illumination Download PDF

Info

Publication number
WO2013105922A3
WO2013105922A3 PCT/US2011/064417 US2011064417W WO2013105922A3 WO 2013105922 A3 WO2013105922 A3 WO 2013105922A3 US 2011064417 W US2011064417 W US 2011064417W WO 2013105922 A3 WO2013105922 A3 WO 2013105922A3
Authority
WO
WIPO (PCT)
Prior art keywords
test object
focus
imaging optic
contact surface
light
Prior art date
Application number
PCT/US2011/064417
Other languages
French (fr)
Other versions
WO2013105922A2 (en
Inventor
Xavier M. Colonna De Lega
Original Assignee
Zygo Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zygo Corporation filed Critical Zygo Corporation
Priority to EP11879165.6A priority Critical patent/EP2791618A4/en
Priority to PCT/US2011/064417 priority patent/WO2013105922A2/en
Priority to JP2014545870A priority patent/JP2015505039A/en
Publication of WO2013105922A2 publication Critical patent/WO2013105922A2/en
Publication of WO2013105922A3 publication Critical patent/WO2013105922A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2527—Projection by scanning of the object with phase change by in-plane movement of the patern

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

Methods for forming a three-dimensional image of a test object include directing light to a surface of best-focus of an imaging optic, where the light has an intensity modulation in at least one direction in the surface of best-focus, scanning a test object relative to the imaging optic so that a surface of the measurement object passes through the surface of best-focus of the imaging optic as the test object is scanned, acquiring, for each of a series of positions of the test object during the scan, a single image of the measurement object using the imaging optic, in which the intensity modulation of the light in the surface of best-focus is different for successive images, and forming a three-dimensional image of the test object based on the acquired images.
PCT/US2011/064417 2011-12-12 2011-12-12 Non-contact surface characterization using modulated illumination WO2013105922A2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP11879165.6A EP2791618A4 (en) 2011-12-12 2011-12-12 Non-contact surface characterization using modulated illumination
PCT/US2011/064417 WO2013105922A2 (en) 2011-12-12 2011-12-12 Non-contact surface characterization using modulated illumination
JP2014545870A JP2015505039A (en) 2011-12-12 2011-12-12 Non-contact surface shape evaluation using modulated light

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2011/064417 WO2013105922A2 (en) 2011-12-12 2011-12-12 Non-contact surface characterization using modulated illumination

Publications (2)

Publication Number Publication Date
WO2013105922A2 WO2013105922A2 (en) 2013-07-18
WO2013105922A3 true WO2013105922A3 (en) 2013-09-19

Family

ID=48782047

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2011/064417 WO2013105922A2 (en) 2011-12-12 2011-12-12 Non-contact surface characterization using modulated illumination

Country Status (3)

Country Link
EP (1) EP2791618A4 (en)
JP (1) JP2015505039A (en)
WO (1) WO2013105922A2 (en)

Families Citing this family (9)

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Publication number Priority date Publication date Assignee Title
DE102013218231A1 (en) * 2013-09-11 2015-03-12 Sirona Dental Systems Gmbh Optical system for generating a time-varying pattern for a confocal microscope
KR102332214B1 (en) * 2014-08-15 2021-11-26 지고 코포레이션 Optical evaluation of lenses and lens molds
TWI702732B (en) 2014-10-20 2020-08-21 加拿大商奧羅拉太陽能技術（加拿大）有限公司 Mapping of measurement data to production tool location and batch or time of processing
DE102015209402A1 (en) * 2015-05-22 2016-11-24 Sirona Dental Systems Gmbh Device for optical 3D measurement of an object
KR101677585B1 (en) * 2015-05-27 2016-11-18 선문대학교 산학협력단 3-D Shape Mesuring Apparatus Using Multi Frequency light Source For High Speed Foucs Position Movement
JP6627871B2 (en) 2015-06-08 2020-01-08 株式会社ニコン Structured illumination microscope system, method and program
US10445894B2 (en) * 2016-05-11 2019-10-15 Mitutoyo Corporation Non-contact 3D measuring system
CN112804513B (en) * 2021-01-05 2023-02-17 暨南大学 Light field camera and imaging method
WO2024081846A1 (en) * 2022-10-14 2024-04-18 Cyberoptics Corporation Synchronous modulate, gate and integrate 3d sensor

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EP1935620A2 (en) * 2006-12-22 2008-06-25 Sony Corporation Optical modeling apparatus
WO2008151266A2 (en) * 2007-06-05 2008-12-11 Zygo Corporation Interferometry for determining characteristics of an object surface, with spatially coherent illumination
WO2009149178A1 (en) * 2008-06-05 2009-12-10 Trustees Of Boston University System and method for producing an optically sectioned image using both structured and uniform illumination
KR20110029475A (en) * 2009-09-15 2011-03-23 광주과학기술원 Confocal laser scanning microscope
US7978346B1 (en) * 2009-02-18 2011-07-12 University Of Central Florida Research Foundation, Inc. Methods and systems for realizing high resolution three-dimensional optical imaging

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JPS5837507U (en) * 1981-09-08 1983-03-11 株式会社リコー Curvature tester
AU2035597A (en) * 1996-03-22 1997-10-17 Loughborough University Innovations Limited Method and apparatus for measuring shape of objects
JP3616999B2 (en) * 2001-12-04 2005-02-02 レーザーテック株式会社 Confocal microscope
US7286246B2 (en) * 2003-03-31 2007-10-23 Mitutoyo Corporation Method and apparatus for non-contact three-dimensional surface measurement
JP2006276561A (en) * 2005-03-30 2006-10-12 Hamamatsu Univ School Of Medicine Objective lens for living bodies for fiber confocal microscope
EP2051042B1 (en) * 2007-10-18 2010-11-03 Nectar Imaging S.r.l. Device for tomographically recording objects
US20100268069A1 (en) * 2009-04-16 2010-10-21 Rongguang Liang Dental surface imaging using polarized fringe projection
BR112012000189B1 (en) * 2009-06-17 2020-01-21 3Shape As scanner with focus.
IN2012DN03206A (en) * 2009-10-19 2015-10-23 Sumitomo Electric Industries
EP2327956B1 (en) * 2009-11-20 2014-01-22 Mitutoyo Corporation Method and apparatus for determining the height of a number of spatial positions on a sample

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1935620A2 (en) * 2006-12-22 2008-06-25 Sony Corporation Optical modeling apparatus
WO2008151266A2 (en) * 2007-06-05 2008-12-11 Zygo Corporation Interferometry for determining characteristics of an object surface, with spatially coherent illumination
WO2009149178A1 (en) * 2008-06-05 2009-12-10 Trustees Of Boston University System and method for producing an optically sectioned image using both structured and uniform illumination
US7978346B1 (en) * 2009-02-18 2011-07-12 University Of Central Florida Research Foundation, Inc. Methods and systems for realizing high resolution three-dimensional optical imaging
KR20110029475A (en) * 2009-09-15 2011-03-23 광주과학기술원 Confocal laser scanning microscope

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2791618A4 *

Also Published As

Publication number Publication date
JP2015505039A (en) 2015-02-16
WO2013105922A2 (en) 2013-07-18
EP2791618A4 (en) 2015-07-29
EP2791618A2 (en) 2014-10-22

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