JP2016506629A5 - - Google Patents
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- Publication number
- JP2016506629A5 JP2016506629A5 JP2015550007A JP2015550007A JP2016506629A5 JP 2016506629 A5 JP2016506629 A5 JP 2016506629A5 JP 2015550007 A JP2015550007 A JP 2015550007A JP 2015550007 A JP2015550007 A JP 2015550007A JP 2016506629 A5 JP2016506629 A5 JP 2016506629A5
- Authority
- JP
- Japan
- Prior art keywords
- acid
- medium
- getter
- printed
- oxide
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000000203 mixture Substances 0.000 claims description 5
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims description 4
- 150000001875 compounds Chemical class 0.000 claims description 3
- 239000002019 doping agent Substances 0.000 claims description 3
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims description 2
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 claims description 2
- 239000004327 boric acid Substances 0.000 claims description 2
- 239000002904 solvent Substances 0.000 claims description 2
- 238000000034 method Methods 0.000 claims 16
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 6
- 229910052710 silicon Inorganic materials 0.000 claims 6
- 239000010703 silicon Substances 0.000 claims 6
- 235000012431 wafers Nutrition 0.000 claims 5
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 claims 4
- 229910052698 phosphorus Inorganic materials 0.000 claims 4
- 239000011574 phosphorus Substances 0.000 claims 4
- 239000000758 substrate Substances 0.000 claims 4
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 claims 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 claims 3
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 claims 3
- 229910052796 boron Inorganic materials 0.000 claims 3
- 238000009792 diffusion process Methods 0.000 claims 3
- 150000002148 esters Chemical class 0.000 claims 3
- 239000000499 gel Substances 0.000 claims 3
- 238000010438 heat treatment Methods 0.000 claims 3
- 238000004519 manufacturing process Methods 0.000 claims 3
- LCTONWCANYUPML-UHFFFAOYSA-N Pyruvic acid Chemical compound CC(=O)C(O)=O LCTONWCANYUPML-UHFFFAOYSA-N 0.000 claims 2
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical class [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims 2
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical class [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims 2
- DTQVDTLACAAQTR-UHFFFAOYSA-N Trifluoroacetic acid Chemical compound OC(=O)C(F)(F)F DTQVDTLACAAQTR-UHFFFAOYSA-N 0.000 claims 2
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical class [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 claims 2
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical class [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 claims 2
- 239000002253 acid Substances 0.000 claims 2
- 125000002723 alicyclic group Chemical group 0.000 claims 2
- 125000001931 aliphatic group Chemical group 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical class [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- 125000004429 atom Chemical group 0.000 claims 2
- 230000004888 barrier function Effects 0.000 claims 2
- 150000001735 carboxylic acids Chemical class 0.000 claims 2
- 238000009833 condensation Methods 0.000 claims 2
- 230000005494 condensation Effects 0.000 claims 2
- 238000001035 drying Methods 0.000 claims 2
- 230000000694 effects Effects 0.000 claims 2
- 238000001879 gelation Methods 0.000 claims 2
- 229910052732 germanium Inorganic materials 0.000 claims 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical class [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims 2
- 238000005247 gettering Methods 0.000 claims 2
- HHLFWLYXYJOTON-UHFFFAOYSA-N glyoxylic acid Chemical compound OC(=O)C=O HHLFWLYXYJOTON-UHFFFAOYSA-N 0.000 claims 2
- 150000004679 hydroxides Chemical class 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 claims 2
- 229920006395 saturated elastomer Polymers 0.000 claims 2
- 239000011135 tin Chemical class 0.000 claims 2
- 229910052718 tin Inorganic materials 0.000 claims 2
- 229910052719 titanium Inorganic materials 0.000 claims 2
- 239000010936 titanium Chemical class 0.000 claims 2
- 238000004017 vitrification Methods 0.000 claims 2
- 239000011701 zinc Chemical class 0.000 claims 2
- 229910052725 zinc Inorganic materials 0.000 claims 2
- 229910052726 zirconium Inorganic materials 0.000 claims 2
- BJEPYKJPYRNKOW-REOHCLBHSA-N (S)-malic acid Chemical compound OC(=O)[C@@H](O)CC(O)=O BJEPYKJPYRNKOW-REOHCLBHSA-N 0.000 claims 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 claims 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 claims 1
- 101001073212 Arabidopsis thaliana Peroxidase 33 Proteins 0.000 claims 1
- FEWJPZIEWOKRBE-JCYAYHJZSA-N Dextrotartaric acid Chemical compound OC(=O)[C@H](O)[C@@H](O)C(O)=O FEWJPZIEWOKRBE-JCYAYHJZSA-N 0.000 claims 1
- 101001123325 Homo sapiens Peroxisome proliferator-activated receptor gamma coactivator 1-beta Proteins 0.000 claims 1
- 102100028961 Peroxisome proliferator-activated receptor gamma coactivator 1-beta Human genes 0.000 claims 1
- 229910004298 SiO 2 Inorganic materials 0.000 claims 1
- FEWJPZIEWOKRBE-UHFFFAOYSA-N Tartaric acid Natural products [H+].[H+].[O-]C(=O)C(O)C(O)C([O-])=O FEWJPZIEWOKRBE-UHFFFAOYSA-N 0.000 claims 1
- 235000011054 acetic acid Nutrition 0.000 claims 1
- 150000001242 acetic acid derivatives Chemical class 0.000 claims 1
- BJEPYKJPYRNKOW-UHFFFAOYSA-N alpha-hydroxysuccinic acid Natural products OC(=O)C(O)CC(O)=O BJEPYKJPYRNKOW-UHFFFAOYSA-N 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 229910052810 boron oxide Inorganic materials 0.000 claims 1
- 150000001642 boronic acid derivatives Chemical class 0.000 claims 1
- 229910052794 bromium Inorganic materials 0.000 claims 1
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 claims 1
- 239000002800 charge carrier Substances 0.000 claims 1
- 239000003795 chemical substances by application Substances 0.000 claims 1
- 229910052801 chlorine Inorganic materials 0.000 claims 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 claims 1
- 235000019253 formic acid Nutrition 0.000 claims 1
- 239000011521 glass Substances 0.000 claims 1
- 125000005842 heteroatom Chemical group 0.000 claims 1
- 230000002209 hydrophobic effect Effects 0.000 claims 1
- 229940046892 lead acetate Drugs 0.000 claims 1
- VZCYOOQTPOCHFL-UPHRSURJSA-N maleic acid Chemical compound OC(=O)\C=C/C(O)=O VZCYOOQTPOCHFL-UPHRSURJSA-N 0.000 claims 1
- 239000011976 maleic acid Substances 0.000 claims 1
- 239000001630 malic acid Substances 0.000 claims 1
- 235000011090 malic acid Nutrition 0.000 claims 1
- 238000004377 microelectronic Methods 0.000 claims 1
- 238000002156 mixing Methods 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 235000006408 oxalic acid Nutrition 0.000 claims 1
- 229910052760 oxygen Inorganic materials 0.000 claims 1
- 230000003071 parasitic effect Effects 0.000 claims 1
- 150000003014 phosphoric acid esters Chemical class 0.000 claims 1
- 229910001392 phosphorus oxide Inorganic materials 0.000 claims 1
- 229920000137 polyphosphoric acid Polymers 0.000 claims 1
- 238000002360 preparation method Methods 0.000 claims 1
- 229940107700 pyruvic acid Drugs 0.000 claims 1
- 238000011084 recovery Methods 0.000 claims 1
- -1 siloxane functional groups Chemical group 0.000 claims 1
- 239000011877 solvent mixture Substances 0.000 claims 1
- 229910052717 sulfur Inorganic materials 0.000 claims 1
- 239000011975 tartaric acid Substances 0.000 claims 1
- 235000002906 tartaric acid Nutrition 0.000 claims 1
- VSAISIQCTGDGPU-UHFFFAOYSA-N tetraphosphorus hexaoxide Chemical compound O1P(O2)OP3OP1OP2O3 VSAISIQCTGDGPU-UHFFFAOYSA-N 0.000 claims 1
- 238000007669 thermal treatment Methods 0.000 claims 1
- 239000002562 thickening agent Substances 0.000 claims 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 claims 1
- 230000032258 transport Effects 0.000 claims 1
- YNJBWRMUSHSURL-UHFFFAOYSA-N trichloroacetic acid Chemical compound OC(=O)C(Cl)(Cl)Cl YNJBWRMUSHSURL-UHFFFAOYSA-N 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 1
- 238000009489 vacuum treatment Methods 0.000 description 1
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP12008660.8 | 2012-12-28 | ||
| EP12008660 | 2012-12-28 | ||
| EP13005736 | 2013-12-10 | ||
| EP13005736.7 | 2013-12-10 | ||
| PCT/EP2013/003837 WO2014101988A1 (de) | 2012-12-28 | 2013-12-18 | Oxidmedien zum gettern von verunreinigungen aus siliziumwafern |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016506629A JP2016506629A (ja) | 2016-03-03 |
| JP2016506629A5 true JP2016506629A5 (cg-RX-API-DMAC7.html) | 2017-02-16 |
Family
ID=49956119
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015550007A Pending JP2016506629A (ja) | 2012-12-28 | 2013-12-18 | シリコンウェハから不純物をゲッタリングするための酸化物媒体 |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US20150357508A1 (cg-RX-API-DMAC7.html) |
| EP (1) | EP2938762A1 (cg-RX-API-DMAC7.html) |
| JP (1) | JP2016506629A (cg-RX-API-DMAC7.html) |
| KR (1) | KR20150103129A (cg-RX-API-DMAC7.html) |
| CN (1) | CN104884684A (cg-RX-API-DMAC7.html) |
| SG (2) | SG10201705329RA (cg-RX-API-DMAC7.html) |
| TW (1) | TW201443108A (cg-RX-API-DMAC7.html) |
| WO (1) | WO2014101988A1 (cg-RX-API-DMAC7.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107112373A (zh) * | 2014-12-30 | 2017-08-29 | 默克专利股份有限公司 | 半导体的激光掺杂 |
| WO2016150548A2 (de) * | 2015-03-23 | 2016-09-29 | Merck Patent Gmbh | Druckbare pastöse diffusions- und legierungsbarriere zur herstellung von hocheffizienten kristallinen siliziumsolarzellen |
| JP6737066B2 (ja) * | 2016-08-22 | 2020-08-05 | 株式会社Sumco | エピタキシャルシリコンウェーハの製造方法、エピタキシャルシリコンウェーハ、及び固体撮像素子の製造方法 |
Family Cites Families (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3837873A (en) * | 1972-05-31 | 1974-09-24 | Texas Instruments Inc | Compositions for use in forming a doped oxide film |
| JPS5534258A (en) * | 1978-09-01 | 1980-03-10 | Tokyo Denshi Kagaku Kabushiki | Coating solution for forming silica film |
| DE19910816A1 (de) * | 1999-03-11 | 2000-10-05 | Merck Patent Gmbh | Dotierpasten zur Erzeugung von p,p+ und n,n+ Bereichen in Halbleitern |
| DE10045249A1 (de) * | 2000-09-13 | 2002-04-04 | Siemens Ag | Photovoltaisches Bauelement und Verfahren zum Herstellen des Bauelements |
| US7393469B2 (en) * | 2003-07-31 | 2008-07-01 | Ramazan Benrashid | High performance sol-gel spin-on glass materials |
| US20090239363A1 (en) * | 2008-03-24 | 2009-09-24 | Honeywell International, Inc. | Methods for forming doped regions in semiconductor substrates using non-contact printing processes and dopant-comprising inks for forming such doped regions using non-contact printing processes |
| US7951696B2 (en) * | 2008-09-30 | 2011-05-31 | Honeywell International Inc. | Methods for simultaneously forming N-type and P-type doped regions using non-contact printing processes |
| JP2011211036A (ja) * | 2010-03-30 | 2011-10-20 | Shin-Etsu Chemical Co Ltd | 基板処理方法、基板の製造方法及び太陽電池の製造方法 |
| SG193303A1 (en) * | 2011-03-08 | 2013-10-30 | Merck Patent Gmbh | Aluminium oxide pastes and method for the use thereof |
| KR20150103131A (ko) * | 2012-12-28 | 2015-09-09 | 메르크 파텐트 게엠베하 | 실리콘 웨이퍼들의 국부적 도핑을 위한 도핑 매질들 |
-
2013
- 2013-12-18 JP JP2015550007A patent/JP2016506629A/ja active Pending
- 2013-12-18 EP EP13821068.7A patent/EP2938762A1/de not_active Withdrawn
- 2013-12-18 KR KR1020157020273A patent/KR20150103129A/ko not_active Withdrawn
- 2013-12-18 SG SG10201705329RA patent/SG10201705329RA/en unknown
- 2013-12-18 CN CN201380067927.0A patent/CN104884684A/zh active Pending
- 2013-12-18 US US14/655,366 patent/US20150357508A1/en not_active Abandoned
- 2013-12-18 WO PCT/EP2013/003837 patent/WO2014101988A1/de not_active Ceased
- 2013-12-18 SG SG11201505028XA patent/SG11201505028XA/en unknown
- 2013-12-27 TW TW102148894A patent/TW201443108A/zh unknown
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