JP2016505863A5 - - Google Patents

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Publication number
JP2016505863A5
JP2016505863A5 JP2015540706A JP2015540706A JP2016505863A5 JP 2016505863 A5 JP2016505863 A5 JP 2016505863A5 JP 2015540706 A JP2015540706 A JP 2015540706A JP 2015540706 A JP2015540706 A JP 2015540706A JP 2016505863 A5 JP2016505863 A5 JP 2016505863A5
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JP
Japan
Prior art keywords
viewport
protector
holder
motomeko
radiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015540706A
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English (en)
Japanese (ja)
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JP2016505863A (ja
JP6388869B2 (ja
Filing date
Publication date
Priority claimed from US13/671,378 external-priority patent/US9341752B2/en
Application filed filed Critical
Publication of JP2016505863A publication Critical patent/JP2016505863A/ja
Publication of JP2016505863A5 publication Critical patent/JP2016505863A5/ja
Application granted granted Critical
Publication of JP6388869B2 publication Critical patent/JP6388869B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015540706A 2012-11-07 2013-10-22 極紫外光源のためのビューポートプロテクタ Expired - Fee Related JP6388869B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US13/671,378 US9341752B2 (en) 2012-11-07 2012-11-07 Viewport protector for an extreme ultraviolet light source
US13/671,378 2012-11-07
PCT/US2013/066239 WO2014074302A1 (en) 2012-11-07 2013-10-22 Viewport protector for an extreme ultraviolet light source

Publications (3)

Publication Number Publication Date
JP2016505863A JP2016505863A (ja) 2016-02-25
JP2016505863A5 true JP2016505863A5 (enExample) 2016-11-04
JP6388869B2 JP6388869B2 (ja) 2018-09-12

Family

ID=50622109

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015540706A Expired - Fee Related JP6388869B2 (ja) 2012-11-07 2013-10-22 極紫外光源のためのビューポートプロテクタ

Country Status (6)

Country Link
US (1) US9341752B2 (enExample)
JP (1) JP6388869B2 (enExample)
KR (2) KR102081862B1 (enExample)
CN (1) CN104781705B (enExample)
TW (1) TWI612849B (enExample)
WO (1) WO2014074302A1 (enExample)

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US9241395B2 (en) * 2013-09-26 2016-01-19 Asml Netherlands B.V. System and method for controlling droplet timing in an LPP EUV light source
JP2017520010A (ja) * 2014-05-01 2017-07-20 エーエスエムエル ネザーランズ ビー．ブイ． クリーニング装置及び関連する低圧チャンバ装置
US10186416B2 (en) 2014-05-15 2019-01-22 Excelitas Technologies Corp. Apparatus and a method for operating a variable pressure sealed beam lamp
EP3457430B1 (en) 2014-05-15 2023-10-25 Excelitas Technologies Corp. Laser driven sealed beam lamp with dual focus regions
US9741553B2 (en) 2014-05-15 2017-08-22 Excelitas Technologies Corp. Elliptical and dual parabolic laser driven sealed beam lamps
US9357625B2 (en) * 2014-07-07 2016-05-31 Asml Netherlands B.V. Extreme ultraviolet light source
US10008378B2 (en) 2015-05-14 2018-06-26 Excelitas Technologies Corp. Laser driven sealed beam lamp with improved stability
US9576785B2 (en) * 2015-05-14 2017-02-21 Excelitas Technologies Corp. Electrodeless single CW laser driven xenon lamp
US10057973B2 (en) * 2015-05-14 2018-08-21 Excelitas Technologies Corp. Electrodeless single low power CW laser driven plasma lamp
US10429314B2 (en) * 2017-07-31 2019-10-01 Taiwan Semiconductor Manufacturing Co., Ltd. EUV vessel inspection method and related system
US10109473B1 (en) 2018-01-26 2018-10-23 Excelitas Technologies Corp. Mechanically sealed tube for laser sustained plasma lamp and production method for same
US11466228B1 (en) * 2018-11-02 2022-10-11 Endress+Hauser Optical Analysis, Inc. Friction control and captive sealant for pressed windows
RU188876U1 (ru) * 2018-12-25 2019-04-25 Федеральное государственное бюджетное научное учреждение "Федеральный исследовательский центр Институт прикладной физики Российской академии наук" (ИПФ РАН) Пространственный фильтр для мощных многокаскадных лазерных усилителей
JP7630515B2 (ja) * 2019-12-23 2025-02-17 エーエスエムエル ネザーランズ ビー．ブイ． コレクタ流リング
WO2022002560A1 (en) * 2020-07-01 2022-01-06 Asml Netherlands B.V. Precise vacuum window viewports and pellicles for rapid metrology recovery
KR102476767B1 (ko) 2021-03-17 2022-12-09 피에스케이홀딩스 (주) 플라즈마 감지 장치
US11647578B2 (en) 2021-08-31 2023-05-09 Taiwan Semiconductor Manufacturing Co., Ltd. Lithography thermal control
KR20250022035A (ko) * 2022-06-13 2025-02-14 에이에스엠엘 네델란즈 비.브이. 극자외선 광원을 위한 뷰포트 어셈블리

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JP5534910B2 (ja) * 2009-04-23 2014-07-02 ギガフォトン株式会社 極端紫外光源装置
CN101694287A (zh) * 2009-10-13 2010-04-14 中国航天科技集团公司第五研究院第五一〇研究所 一种近紫外辐照设备中过滤红外光和可见光的装置
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US8263953B2 (en) * 2010-04-09 2012-09-11 Cymer, Inc. Systems and methods for target material delivery protection in a laser produced plasma EUV light source

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