JP2016502595A5 - - Google Patents

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Publication number
JP2016502595A5
JP2016502595A5 JP2015539665A JP2015539665A JP2016502595A5 JP 2016502595 A5 JP2016502595 A5 JP 2016502595A5 JP 2015539665 A JP2015539665 A JP 2015539665A JP 2015539665 A JP2015539665 A JP 2015539665A JP 2016502595 A5 JP2016502595 A5 JP 2016502595A5
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JP
Japan
Prior art keywords
gas
gas injection
extraction
conduit
substrate support
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JP2015539665A
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English (en)
Japanese (ja)
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JP6514106B2 (ja
JP2016502595A (ja
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Priority claimed from US14/052,049 external-priority patent/US10174422B2/en
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Publication of JP2016502595A5 publication Critical patent/JP2016502595A5/ja
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Publication of JP6514106B2 publication Critical patent/JP6514106B2/ja
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JP2015539665A 2012-10-25 2013-10-17 選択的なガス注入及び抽出のための装置 Active JP6514106B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261718413P 2012-10-25 2012-10-25
US61/718,413 2012-10-25
US14/052,049 US10174422B2 (en) 2012-10-25 2013-10-11 Apparatus for selective gas injection and extraction
US14/052,049 2013-10-11
PCT/US2013/065354 WO2014066123A1 (en) 2012-10-25 2013-10-17 Apparatus for selective gas injection and extraction

Publications (3)

Publication Number Publication Date
JP2016502595A JP2016502595A (ja) 2016-01-28
JP2016502595A5 true JP2016502595A5 (enExample) 2016-12-08
JP6514106B2 JP6514106B2 (ja) 2019-05-15

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ID=50545120

Family Applications (1)

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JP2015539665A Active JP6514106B2 (ja) 2012-10-25 2013-10-17 選択的なガス注入及び抽出のための装置

Country Status (6)

Country Link
US (2) US10174422B2 (enExample)
JP (1) JP6514106B2 (enExample)
KR (2) KR102208882B1 (enExample)
CN (1) CN104718603B (enExample)
TW (1) TWI596230B (enExample)
WO (1) WO2014066123A1 (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
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US10954597B2 (en) * 2015-03-17 2021-03-23 Asm Ip Holding B.V. Atomic layer deposition apparatus
KR102420015B1 (ko) * 2015-08-28 2022-07-12 삼성전자주식회사 Cs-ald 장치의 샤워헤드
AT518081B1 (de) * 2015-12-22 2017-07-15 Sico Tech Gmbh Injektor aus Silizium für die Halbleiterindustrie
US11919189B2 (en) 2020-12-10 2024-03-05 Bobst Mex Sa Positioning device and positioning assembly for holding a flat flexible part, and sheet material processing machine
GB2624388B (en) * 2022-11-15 2025-02-05 Edwards Ltd Vacuum chamber and vacuum system
CN117802480A (zh) * 2024-01-23 2024-04-02 哈尔滨工业大学 用于半球形曲面内表面均匀镀膜的原子层沉积装置

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JP2001262351A (ja) * 2000-03-23 2001-09-26 Ebara Corp シャワーヘッド及び成膜装置
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JP4741430B2 (ja) 2006-06-30 2011-08-03 京セラ株式会社 成膜装置および成膜方法
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