JP2016225594A - 半導体構造及びその製造方法 - Google Patents
半導体構造及びその製造方法 Download PDFInfo
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 75
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 19
- 239000000463 material Substances 0.000 claims abstract description 112
- 239000003989 dielectric material Substances 0.000 claims abstract description 87
- 230000007704 transition Effects 0.000 claims abstract description 12
- 239000010410 layer Substances 0.000 claims description 205
- 239000002356 single layer Substances 0.000 claims description 35
- 239000013078 crystal Substances 0.000 claims description 27
- 238000000151 deposition Methods 0.000 claims description 25
- 230000008021 deposition Effects 0.000 claims description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 16
- 229910052710 silicon Inorganic materials 0.000 claims description 16
- 239000000758 substrate Substances 0.000 claims description 16
- 239000010703 silicon Substances 0.000 claims description 15
- 230000005533 two-dimensional electron gas Effects 0.000 claims description 3
- 238000000231 atomic layer deposition Methods 0.000 claims 3
- 239000002178 crystalline material Substances 0.000 abstract 2
- 229910002704 AlGaN Inorganic materials 0.000 abstract 1
- 239000002243 precursor Substances 0.000 description 56
- 238000000034 method Methods 0.000 description 18
- 229910002601 GaN Inorganic materials 0.000 description 12
- JMASRVWKEDWRBT-UHFFFAOYSA-N Gallium nitride Chemical compound [Ga]#N JMASRVWKEDWRBT-UHFFFAOYSA-N 0.000 description 12
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 9
- 238000004140 cleaning Methods 0.000 description 8
- 238000005137 deposition process Methods 0.000 description 7
- 230000010287 polarization Effects 0.000 description 7
- 229910052782 aluminium Inorganic materials 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical group [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 238000011065 in-situ storage Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 238000003631 wet chemical etching Methods 0.000 description 3
- GPXJNWSHGFTCBW-UHFFFAOYSA-N Indium phosphide Chemical compound [In]#P GPXJNWSHGFTCBW-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- MDPILPRLPQYEEN-UHFFFAOYSA-N aluminium arsenide Chemical compound [As]#[Al] MDPILPRLPQYEEN-UHFFFAOYSA-N 0.000 description 2
- RNQKDQAVIXDKAG-UHFFFAOYSA-N aluminum gallium Chemical compound [Al].[Ga] RNQKDQAVIXDKAG-UHFFFAOYSA-N 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 2
- 230000005669 field effect Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 230000000737 periodic effect Effects 0.000 description 2
- PIGFYZPCRLYGLF-UHFFFAOYSA-N Aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 238000010849 ion bombardment Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
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Abstract
【解決手段】本開示は、III−V族材料系で使用する誘電材料を含む新規な半導体構造、及び当該構造の製造方法を提示する。より具体的には、本開示では、III−V族材料の上部表面に形成される新規な誘電体層を記載し、誘電体層は、III−V族結晶性材料の上部表面に接触する第1領域と、第1領域に隣接し誘電体層の上側にある第2領域と、を含む。誘電体層は、結晶及び非晶質構造の両方から構成されているため、従来の誘電体層とは異なる材料特性を有する。結晶構造はIII−V族材料(AlGaN又はGaN等)との界面にあるが、徐々に非晶質構造に転移し、両者は同じ層内にあり、また同じ材料を含む。
【選択図】図2
Description
表1は、誘電体の下にある材料層の抵抗が減少したことを示し、これは半導体の導電率の向上を意味する。2DEG濃度の増加は、堆積したAlNの分極効果及びその結晶性を示唆する。2DEG濃度の増加は、分極材料の厚さの増加を示す。
Claims (19)
- 第1のIII−V族半導体層上に誘電材料の1つの層を含む半導体構造の製造方法であって、
前記第1のIII−V族材料半導体層を形成する工程と、
前記第1のIII−V族材料半導体層上に、前記誘電材料の1つの層を形成する工程と、
を備え、
前記誘電材料の1つの層は、前記誘電材料の1つの層の下面に位置する第1領域を含み、
前記第1領域は、前記誘電材料の1つの層と前記第1のIII−V族材料半導体層との間の界面に位置し、
前記誘電材料の1つの層内で、前記第1領域は、前記誘電材料の1つの層の上面に隣接する第2領域に転移し、前記上面は前記下面の反対にあり、
前記第1領域は結晶構造を有し、前記第2領域は非晶質構造を有する、半導体構造の製造方法。 - 前記第1のIII−V族材料半導体層と前記誘電材料層の1つの層との間において第2のIII−V族材料半導体層を形成する工程と、
前記第1のIII−V族材料半導体層と前記第2のIII−V族材料半導体層との界面に2次元電子ガス(2DEG)領域を形成する工程と、
をさらに備えた、請求項1記載の半導体構造の製造方法。 - シリコン基板上に前記第1のIII−V族材料半導体層を形成する工程をさらに備えた、請求項1記載の半導体構造の製造方法。
- 前記誘電材料の格子定数は、前記第2のIII−V族材料半導体層の格子定数とは異なる、請求項1記載の半導体構造の製造方法。
- 前記誘電材料の1つの層を形成する工程は、
前記第1のIII−V族材料半導体層上に原子層堆積により誘電材料を堆積させる工程をさらに含む、請求項1記載の半導体構造の製造方法。 - 前記堆積工程は、200℃と500℃との間の温度で行われる、請求項5記載の半導体構造の製造方法。
- 前記第1のIII−V族材料半導体層上に、原子層堆積により誘電材料を堆積させる前記工程は、前記第1のIII−V族材料半導体層上に前記誘電材料の少なくとも1つのモノレイヤーを堆積させる工程をさらに含む、請求項5記載の半導体構造の製造方法。
- 前記誘電材料の1つの層が望ましい厚さに達するまで、前記誘電材料の少なくとも1つのモノレイヤーを堆積させる前記工程を繰り返す工程をさらに含む、請求項7記載の半導体構造の製造方法。
- 前記第1領域と前記第2領域との間において界面領域を形成する工程をさらに備えた、請求項1記載の半導体構造の製造方法。
- 前記第1領域から前記第2領域への転移は、前記誘電材料の1つの層の所定の厚さで生じる、請求項1記載の半導体構造の製造方法。
- 第1のIII−V族材料半導体層と、
前記第1のIII−V族材料半導体層上に形成される誘電材料の1つの層と、
を備えた半導体構造であって、
前記誘電材料の1つの層は、
前記1つの層と前記第1のIII−V族材料半導体層との間の界面において結晶構造を有する第1領域と、
非晶質構造を有する第2領域と、
をさらに含む、半導体構造。 - 前記第2領域は、前記第1領域と、前記誘電材料の1つの層の上面と、の両方に隣接する、請求項11記載の半導体構造。
- 前記半導体構造は、前記第1のIII−V族材料半導体層と前記誘電材料の1つの層との間に形成される第2のIII−V族材料半導体層と、前記第1のIII−V族材料半導体層と前記第2のIII−V族材料半導体層との界面に形成される2次元電子ガス(2DEG)領域と、をさらに含む、請求項11記載の半導体構造。
- 前記第1のIII−V族材料半導体層は、シリコン基板上に形成される、請求項11記載の半導体構造。
- 前記誘電材料の格子定数は、前記第2のIII−V族材料半導体層の格子定数とは異なる、請求項11記載の半導体構造。
- 前記誘電材料の1つの層は、前記第2のIII−V族材料半導体層上に、原子層堆積を用いて、誘電材料を堆積させる工程により形成される、請求項11記載の半導体構造。
- 前記誘電材料の1つの層は、1つよりも多いモノレイヤーを含む、請求項11記載の半導体構造。
- 前記結晶−非晶質誘電材料の1つの層は、前記第1領域と前記第2領域との間に、界面領域をさらに含む、請求項11記載の半導体構造。
- 前記第1領域から前記第2領域への転移は、前記誘電材料の1つの層の所定の厚さで生じる、請求項11記載の半導体構造。
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