JP2016171141A5 - - Google Patents
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- Publication number
- JP2016171141A5 JP2016171141A5 JP2015048725A JP2015048725A JP2016171141A5 JP 2016171141 A5 JP2016171141 A5 JP 2016171141A5 JP 2015048725 A JP2015048725 A JP 2015048725A JP 2015048725 A JP2015048725 A JP 2015048725A JP 2016171141 A5 JP2016171141 A5 JP 2016171141A5
- Authority
- JP
- Japan
- Prior art keywords
- protective film
- nitride
- nitride semiconductor
- substrate
- nitride light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- TWXTWZIUMCFMSG-UHFFFAOYSA-N nitride(3-) Chemical compound [N-3] TWXTWZIUMCFMSG-UHFFFAOYSA-N 0.000 claims 22
- 230000001681 protective Effects 0.000 claims 22
- 239000004065 semiconductor Substances 0.000 claims 15
- 239000000758 substrate Substances 0.000 claims 12
- 229910017083 AlN Inorganic materials 0.000 claims 4
- 229910002601 GaN Inorganic materials 0.000 claims 4
- PIGFYZPCRLYGLF-UHFFFAOYSA-N aluminum nitride Chemical compound [Al]#N PIGFYZPCRLYGLF-UHFFFAOYSA-N 0.000 claims 4
- 238000004519 manufacturing process Methods 0.000 claims 4
- 238000010438 heat treatment Methods 0.000 claims 3
- 229910052594 sapphire Inorganic materials 0.000 claims 2
- 239000010980 sapphire Substances 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 2
- 229910052814 silicon oxide Inorganic materials 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015048725A JP2016171141A (ja) | 2015-03-11 | 2015-03-11 | 窒化物発光素子および窒化物発光素子の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015048725A JP2016171141A (ja) | 2015-03-11 | 2015-03-11 | 窒化物発光素子および窒化物発光素子の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2016171141A JP2016171141A (ja) | 2016-09-23 |
| JP2016171141A5 true JP2016171141A5 (de) | 2018-04-19 |
Family
ID=56983991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015048725A Pending JP2016171141A (ja) | 2015-03-11 | 2015-03-11 | 窒化物発光素子および窒化物発光素子の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2016171141A (de) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7011163B2 (ja) | 2018-02-22 | 2022-02-10 | 日亜化学工業株式会社 | 半導体素子の製造方法 |
| JP7370437B1 (ja) | 2022-10-05 | 2023-10-27 | 日機装株式会社 | 半導体発光素子および半導体発光素子の製造方法 |
| JP7370438B1 (ja) | 2022-10-05 | 2023-10-27 | 日機装株式会社 | 半導体発光素子および半導体発光素子の製造方法 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3491903B2 (ja) * | 1990-05-18 | 2004-02-03 | セイコーエプソン株式会社 | 薄膜半導体装置の製造方法 |
| EP0539804B1 (de) * | 1991-10-15 | 1998-03-04 | Canon Kabushiki Kaisha | Trägermaterial für Flüssigkeitsaufzeichnungskopf, Herstellungsverfahren dafür, Flüssigkeitsaufzeichnungskopf und Flüssigkeitsaufzeichnungsvorrichtung |
| JPH0764030A (ja) * | 1993-08-24 | 1995-03-10 | Sumitomo Osaka Cement Co Ltd | 導波路型光素子実装筺体構造物 |
| JPH07304127A (ja) * | 1994-05-13 | 1995-11-21 | Toppan Printing Co Ltd | ガスバリヤー性包装材料およびその製造方法 |
| JPH098348A (ja) * | 1995-06-16 | 1997-01-10 | Stanley Electric Co Ltd | 発光ダイオード及びその製造方法 |
| JPH09116192A (ja) * | 1995-10-16 | 1997-05-02 | Toshiba Corp | 発光ダイオード |
| JPH10215003A (ja) * | 1997-01-31 | 1998-08-11 | Stanley Electric Co Ltd | Ｌｅｄチップ |
| JPH10303460A (ja) * | 1997-02-27 | 1998-11-13 | Toshiba Corp | 半導体素子およびその製造方法 |
| JP2001141950A (ja) * | 1999-09-02 | 2001-05-25 | Hitachi Cable Ltd | 光導波路及びその製造方法 |
| JP2001284644A (ja) * | 2000-03-30 | 2001-10-12 | Nichia Chem Ind Ltd | 発光素子および発光素子パッケージ |
| TWI344709B (en) * | 2007-06-14 | 2011-07-01 | Epistar Corp | Light emitting device |
| JP5379703B2 (ja) * | 2010-01-26 | 2013-12-25 | パナソニック株式会社 | 紫外半導体発光素子 |
| JP5319628B2 (ja) * | 2010-08-26 | 2013-10-16 | シャープ株式会社 | 窒化物半導体素子および半導体光学装置 |
-
2015
- 2015-03-11 JP JP2015048725A patent/JP2016171141A/ja active Pending
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