JP2016161425A5 - - Google Patents

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Publication number
JP2016161425A5
JP2016161425A5 JP2015040938A JP2015040938A JP2016161425A5 JP 2016161425 A5 JP2016161425 A5 JP 2016161425A5 JP 2015040938 A JP2015040938 A JP 2015040938A JP 2015040938 A JP2015040938 A JP 2015040938A JP 2016161425 A5 JP2016161425 A5 JP 2016161425A5
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JP
Japan
Prior art keywords
signal
movable member
position signal
signals
detection
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JP2015040938A
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English (en)
Japanese (ja)
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JP2016161425A (ja
JP6544945B2 (ja
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Priority to JP2015040938A priority Critical patent/JP6544945B2/ja
Priority claimed from JP2015040938A external-priority patent/JP6544945B2/ja
Priority to US15/056,740 priority patent/US10113888B2/en
Priority to CN201610122228.7A priority patent/CN105937917A/zh
Publication of JP2016161425A publication Critical patent/JP2016161425A/ja
Publication of JP2016161425A5 publication Critical patent/JP2016161425A5/ja
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Publication of JP6544945B2 publication Critical patent/JP6544945B2/ja
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JP2015040938A 2015-03-03 2015-03-03 位置検出装置、これを用いた装置及び位置検出方法 Active JP6544945B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015040938A JP6544945B2 (ja) 2015-03-03 2015-03-03 位置検出装置、これを用いた装置及び位置検出方法
US15/056,740 US10113888B2 (en) 2015-03-03 2016-02-29 Position detection apparatus, apparatus including the same and position detection method
CN201610122228.7A CN105937917A (zh) 2015-03-03 2016-03-03 位置检测设备、包括位置检测设备的设备和位置检测方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015040938A JP6544945B2 (ja) 2015-03-03 2015-03-03 位置検出装置、これを用いた装置及び位置検出方法

Publications (3)

Publication Number Publication Date
JP2016161425A JP2016161425A (ja) 2016-09-05
JP2016161425A5 true JP2016161425A5 (enExample) 2018-04-12
JP6544945B2 JP6544945B2 (ja) 2019-07-17

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ID=56845046

Family Applications (1)

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JP2015040938A Active JP6544945B2 (ja) 2015-03-03 2015-03-03 位置検出装置、これを用いた装置及び位置検出方法

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JP (1) JP6544945B2 (enExample)

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104151A (en) * 1976-02-26 1977-09-01 Toshiba Corp Position detector device
GB2230666B (en) * 1989-04-19 1993-04-28 Mitutoyo Corp Displacement detector
JPH0754260B2 (ja) * 1991-03-07 1995-06-07 株式会社ミツトヨ アブソリュートエンコーダ
JPH10318791A (ja) * 1997-05-14 1998-12-04 Sony Precision Technol Inc スケール装置
JP2004037275A (ja) * 2002-07-03 2004-02-05 Okuma Corp 光学式エンコーダ
JP2005345375A (ja) * 2004-06-04 2005-12-15 Mitsutoyo Corp 電磁誘導式absエンコーダ
US8493572B2 (en) * 2010-05-05 2013-07-23 Mitutoyo Corporation Optical encoder having contamination and defect resistant signal processing
JP2012013654A (ja) * 2010-07-05 2012-01-19 Canon Inc アブソリュートエンコーダ及び撮像装置
JP2013156120A (ja) * 2012-01-30 2013-08-15 Canon Inc 位置検出装置およびレンズ鏡筒
JP6032936B2 (ja) * 2012-05-07 2016-11-30 キヤノン株式会社 バーニア方式位置検出エンコーダ用スケール、バーニア方式位置検出エンコーダおよびこれを備えた装置

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