JP2016161433A5 - - Google Patents

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Publication number
JP2016161433A5
JP2016161433A5 JP2015041111A JP2015041111A JP2016161433A5 JP 2016161433 A5 JP2016161433 A5 JP 2016161433A5 JP 2015041111 A JP2015041111 A JP 2015041111A JP 2015041111 A JP2015041111 A JP 2015041111A JP 2016161433 A5 JP2016161433 A5 JP 2016161433A5
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JP
Japan
Prior art keywords
signal
position signal
movable member
signals
detection
Prior art date
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Application number
JP2015041111A
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English (en)
Japanese (ja)
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JP6494330B2 (ja
JP2016161433A (ja
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Publication date
Application filed filed Critical
Priority to JP2015041111A priority Critical patent/JP6494330B2/ja
Priority claimed from JP2015041111A external-priority patent/JP6494330B2/ja
Priority to US15/056,740 priority patent/US10113888B2/en
Priority to CN201610122228.7A priority patent/CN105937917A/zh
Publication of JP2016161433A publication Critical patent/JP2016161433A/ja
Publication of JP2016161433A5 publication Critical patent/JP2016161433A5/ja
Application granted granted Critical
Publication of JP6494330B2 publication Critical patent/JP6494330B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015041111A 2015-03-03 2015-03-03 位置検出装置およびこれを用いた装置 Active JP6494330B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2015041111A JP6494330B2 (ja) 2015-03-03 2015-03-03 位置検出装置およびこれを用いた装置
US15/056,740 US10113888B2 (en) 2015-03-03 2016-02-29 Position detection apparatus, apparatus including the same and position detection method
CN201610122228.7A CN105937917A (zh) 2015-03-03 2016-03-03 位置检测设备、包括位置检测设备的设备和位置检测方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2015041111A JP6494330B2 (ja) 2015-03-03 2015-03-03 位置検出装置およびこれを用いた装置

Publications (3)

Publication Number Publication Date
JP2016161433A JP2016161433A (ja) 2016-09-05
JP2016161433A5 true JP2016161433A5 (enExample) 2018-04-12
JP6494330B2 JP6494330B2 (ja) 2019-04-03

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ID=56845015

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015041111A Active JP6494330B2 (ja) 2015-03-03 2015-03-03 位置検出装置およびこれを用いた装置

Country Status (1)

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JP (1) JP6494330B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12366470B2 (en) * 2021-06-28 2025-07-22 Asahi Kasei Microdevices Corporation Calibration apparatus, calibration method, and non-transitory computer readable medium having recorded thereon calibration program
JP7281778B1 (ja) 2022-01-20 2023-05-26 ソフトロニクス株式会社 絶対位置エンコーダ

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0754260B2 (ja) * 1991-03-07 1995-06-07 株式会社ミツトヨ アブソリュートエンコーダ
JP3137552B2 (ja) * 1995-02-27 2001-02-26 株式会社ミツトヨ アブソリュートエンコーダ
JP5286584B2 (ja) * 2007-06-19 2013-09-11 株式会社ミツトヨ 絶対位置測長型エンコーダ
JP2009036637A (ja) * 2007-08-01 2009-02-19 Sony Corp 変位測定装置

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