JP2016157493A - 磁気記録媒体 - Google Patents
磁気記録媒体 Download PDFInfo
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- JP2016157493A JP2016157493A JP2015033336A JP2015033336A JP2016157493A JP 2016157493 A JP2016157493 A JP 2016157493A JP 2015033336 A JP2015033336 A JP 2015033336A JP 2015033336 A JP2015033336 A JP 2015033336A JP 2016157493 A JP2016157493 A JP 2016157493A
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- 230000005291 magnetic effect Effects 0.000 title claims abstract description 364
- 239000000956 alloy Substances 0.000 claims abstract description 97
- 229910045601 alloy Inorganic materials 0.000 claims abstract description 95
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 229910052697 platinum Inorganic materials 0.000 claims abstract description 21
- 229910052742 iron Inorganic materials 0.000 claims abstract description 20
- 229910052707 ruthenium Inorganic materials 0.000 claims abstract description 20
- 239000013078 crystal Substances 0.000 claims description 80
- 239000000463 material Substances 0.000 claims description 47
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 14
- 229910052799 carbon Inorganic materials 0.000 claims description 14
- 150000004767 nitrides Chemical class 0.000 claims description 9
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 claims description 8
- 229910052796 boron Inorganic materials 0.000 claims description 8
- 238000010438 heat treatment Methods 0.000 abstract description 27
- 238000000034 method Methods 0.000 abstract description 25
- 230000007704 transition Effects 0.000 abstract description 9
- 230000008569 process Effects 0.000 abstract description 5
- 239000010410 layer Substances 0.000 description 259
- 239000000203 mixture Substances 0.000 description 19
- 230000008859 change Effects 0.000 description 18
- 230000005415 magnetization Effects 0.000 description 17
- 238000004544 sputter deposition Methods 0.000 description 14
- 230000008878 coupling Effects 0.000 description 13
- 238000010168 coupling process Methods 0.000 description 13
- 238000005859 coupling reaction Methods 0.000 description 13
- 239000010408 film Substances 0.000 description 13
- 229910005335 FePt Inorganic materials 0.000 description 12
- 239000000696 magnetic material Substances 0.000 description 12
- 239000011241 protective layer Substances 0.000 description 9
- 230000000694 effects Effects 0.000 description 7
- 238000001755 magnetron sputter deposition Methods 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 7
- 239000002184 metal Substances 0.000 description 7
- 239000002356 single layer Substances 0.000 description 7
- 229910052759 nickel Inorganic materials 0.000 description 6
- 229910015187 FePd Inorganic materials 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 229910052737 gold Inorganic materials 0.000 description 5
- 238000007885 magnetic separation Methods 0.000 description 5
- 229910052763 palladium Inorganic materials 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 239000003575 carbonaceous material Substances 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 4
- 229910052748 manganese Inorganic materials 0.000 description 4
- 238000001771 vacuum deposition Methods 0.000 description 4
- 229910018936 CoPd Inorganic materials 0.000 description 3
- 229910018979 CoPt Inorganic materials 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 239000000654 additive Substances 0.000 description 3
- 230000000996 additive effect Effects 0.000 description 3
- 230000005290 antiferromagnetic effect Effects 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 230000006872 improvement Effects 0.000 description 3
- 229910052741 iridium Inorganic materials 0.000 description 3
- 239000010687 lubricating oil Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 229910019222 CoCrPt Inorganic materials 0.000 description 2
- 229910003321 CoFe Inorganic materials 0.000 description 2
- 229910000684 Cobalt-chrome Inorganic materials 0.000 description 2
- 229910010413 TiO 2 Inorganic materials 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 230000005316 antiferromagnetic exchange Effects 0.000 description 2
- 239000010952 cobalt-chrome Substances 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 239000000470 constituent Substances 0.000 description 2
- -1 etc.) Substances 0.000 description 2
- 230000005294 ferromagnetic effect Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000011160 research Methods 0.000 description 2
- 229910052703 rhodium Inorganic materials 0.000 description 2
- 229910000702 sendust Inorganic materials 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910052726 zirconium Inorganic materials 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910021364 Al-Si alloy Inorganic materials 0.000 description 1
- 229910000521 B alloy Inorganic materials 0.000 description 1
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910019233 CoFeNi Inorganic materials 0.000 description 1
- 230000005355 Hall effect Effects 0.000 description 1
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910002367 SrTiO Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000002547 anomalous effect Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 239000013590 bulk material Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000003618 dip coating Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000005350 ferromagnetic resonance Effects 0.000 description 1
- 230000005307 ferromagnetism Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052735 hafnium Inorganic materials 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000000314 lubricant Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000013080 microcrystalline material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052758 niobium Inorganic materials 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 239000010702 perfluoropolyether Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052761 rare earth metal Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 239000005341 toughened glass Substances 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C5/00—Alloys based on noble metals
- C22C5/04—Alloys based on a platinum group metal
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/657—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing inorganic, non-oxide compound of Si, N, P, B, H or C, e.g. in metal alloy or compound
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/66—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers
- G11B5/672—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent the record carriers consisting of several layers having different compositions in a plurality of magnetic layers, e.g. layer compositions having differing elemental components or differing proportions of elements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/73—Base layers, i.e. all non-magnetic layers lying under a lowermost magnetic recording layer, e.g. including any non-magnetic layer in between a first magnetic recording layer and either an underlying substrate or a soft magnetic underlayer
- G11B5/739—Magnetic recording media substrates
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/12—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys
- H01F10/123—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being metals or alloys having a L10 crystallographic structure, e.g. [Co,Fe][Pt,Pd] thin films
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B2005/0002—Special dispositions or recording techniques
- G11B2005/0005—Arrangements, methods or circuits
- G11B2005/0021—Thermally assisted recording using an auxiliary energy source for heating the recording layer locally to assist the magnetization reversal
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Materials Engineering (AREA)
- Power Engineering (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Engineering (AREA)
- Organic Chemistry (AREA)
- Magnetic Record Carriers (AREA)
- Manufacturing & Machinery (AREA)
- Electromagnetism (AREA)
- Inorganic Chemistry (AREA)
- Recording Or Reproducing By Magnetic Means (AREA)
Abstract
【解決手段】非磁性基板と磁気記録層とを含み、磁気記録層はFe、PtおよびRuを含む規則合金を含み、規則合金は、Fe、PtおよびRuの総原子数を基準として、x原子%のFeと、y原子%のPtと、z原子%のRuとを含み、前記x、yおよびzは、以下の式(i)〜(v):(i)0.85≦x/y≦1.3;(ii)x≦53;(iii)y≦51;(iv)0.6≦z≦20;および(v)x+y+z=100を満たすことを特徴とする磁気記録媒体。
【選択図】 図4
Description
(i) 0.85≦x/y≦1.3;
(ii) x≦53;
(iii) y≦51;
(iv) 0.6≦z≦20;および
(v) x+y+z=100
を満たすことを特徴とする。ここで、前記規則合金は、L10型規則合金であってもよい。また、前記磁気記録層は、前記規則合金を含む磁性結晶粒と、非磁性結晶粒界とを備えたグラニュラー構造を有してもよい。前記非磁性結晶粒界は、炭素、ホウ素、炭化物、酸化物および窒化物からなる群から選択される少なくとも1種の材料を含んでもよい。
(i) 0.85≦x/y≦1.3;
(ii) x≦53;
(iii) y≦51;
(iv) 0.6≦z≦20;および
(v) x+y+z=100
を満たす。たとえば、図1に示す構成例では、磁気記録媒体は非磁性基板10、磁気記録層30、および任意選択的に設けてもよいシード層20を含む。
平滑な表面を有する(001)MgO単結晶基板を洗浄し、非磁性基板10を準備した。洗浄後の非磁性基板10を、スパッタ装置内に導入した。非磁性基板10を350℃に加熱した後に、圧力0.44PaのArガス中で、非磁性基板10から320mmの距離に配置したPtターゲットを用いたRFマグネトロンスパッタ法により、膜厚20nmのPtシード層20を形成した。
図3に示されるように、磁気記録層30中のRuの含有量が増大するほど、磁気記録層30のキュリー温度Tcが低下する傾向がある。また、同程度のRuを用いた場合、x/yが約1.15の付近に、磁気記録層30のキュリー温度Tcの最大値が存在する。そして、最大値を示す組成からFeの含有量xが増加しても、Ptの含有量yが増加しても、キュリー温度Tcが低下する。なお、規則合金中のFeをRuで置換する場合よりも、PtをRuで置換する場合の方が、キュリー温度Tcの値の変化が小さいことが分かる。
20 シード層
30 磁気記録層
31 第1磁性層
32 第2磁性層
40 保護層
Claims (6)
- 非磁性基板と磁気記録層とを含み、前記磁気記録層はFe、PtおよびRuを含む規則合金を含み、前記規則合金は、Fe、PtおよびRuの総原子数を基準として、x原子%のFeと、y原子%のPtと、z原子%のRuとを含み、前記x、yおよびzは、以下の式(i)〜(v):
(i) 0.85≦x/y≦1.3;
(ii) x≦53;
(iii) y≦51;
(iv) 0.6≦z≦20;および
(v) x+y+z=100
を満たすことを特徴とする磁気記録媒体。 - 前記規則合金は、L10型規則合金であることを特徴とする請求項1に記載の磁気記録媒体。
- 前記磁気記録層は、前記規則合金を含む磁性結晶粒と、非磁性結晶粒界とを備えたグラニュラー構造を有し、前記非磁性結晶粒界は、炭素、ホウ素、炭化物、酸化物および窒化物からなる群から選択される少なくとも1種の材料を含むことを特徴とする請求項1に記載の磁気記録媒体。
- 前記磁気記録層は、複数の磁性層を含み、前記複数の磁性層の少なくとも1つが前記規則合金を含む磁性層であることを特徴とする請求項1に記載の磁気記録媒体。
- 前記規則合金は、L10型規則合金であることを特徴とする請求項4に記載の磁気記録媒体。
- 前記規則合金を含む磁性層は、磁性結晶粒と非磁性結晶粒界とを備えたグラニュラー構造を有し、前記非磁性結晶粒界は、炭素、ホウ素、炭化物、酸化物および窒化物からなる群から選択される少なくとも1種の材料を含むことを特徴とする請求項4に記載の磁気記録媒体。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015033336A JP6594633B2 (ja) | 2015-02-23 | 2015-02-23 | 磁気記録媒体 |
SG11201702542VA SG11201702542VA (en) | 2015-02-23 | 2016-01-04 | Magnetic recording medium |
PCT/JP2016/000009 WO2016136118A1 (ja) | 2015-02-23 | 2016-01-04 | 磁気記録媒体 |
CN201680003018.4A CN107077864B (zh) | 2015-02-23 | 2016-01-04 | 磁记录介质 |
MYPI2017701076A MY180974A (en) | 2015-02-23 | 2016-01-04 | Magnetic recording medium |
US15/477,434 US20170206918A1 (en) | 2015-02-23 | 2017-04-03 | Magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015033336A JP6594633B2 (ja) | 2015-02-23 | 2015-02-23 | 磁気記録媒体 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2018152434A Division JP6607291B2 (ja) | 2018-08-13 | 2018-08-13 | 磁気記録媒体 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2016157493A true JP2016157493A (ja) | 2016-09-01 |
JP6594633B2 JP6594633B2 (ja) | 2019-10-23 |
Family
ID=56788132
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2015033336A Active JP6594633B2 (ja) | 2015-02-23 | 2015-02-23 | 磁気記録媒体 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20170206918A1 (ja) |
JP (1) | JP6594633B2 (ja) |
CN (1) | CN107077864B (ja) |
MY (1) | MY180974A (ja) |
SG (1) | SG11201702542VA (ja) |
WO (1) | WO2016136118A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018147548A (ja) * | 2017-03-07 | 2018-09-20 | 昭和電工株式会社 | アシスト磁気記録媒体及び磁気記憶装置 |
WO2019187226A1 (ja) * | 2018-03-28 | 2019-10-03 | Jx金属株式会社 | 垂直磁気記録媒体 |
JP7388226B2 (ja) | 2020-02-13 | 2023-11-29 | 株式会社レゾナック | 磁気記録媒体およびその製造方法ならびに磁気記憶装置 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
SG11201706138VA (en) * | 2015-08-24 | 2017-08-30 | Fuji Electric Co Ltd | Magnetic recording medium |
CN113571632B (zh) * | 2021-09-23 | 2021-12-10 | 南开大学 | 一种反常霍尔元件及其制备方法 |
Citations (4)
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JP2010129163A (ja) * | 2008-12-01 | 2010-06-10 | Showa Denko Kk | 熱アシスト磁気記録媒体及び磁気記録再生装置 |
WO2013187217A1 (ja) * | 2012-06-14 | 2013-12-19 | 国立大学法人秋田大学 | FePt系合金における強磁性-常磁性相変化を利用した磁気記録媒体 |
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Family Cites Families (5)
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CN104205217B (zh) * | 2012-03-22 | 2017-10-13 | 富士电机株式会社 | 热辅助磁记录用的磁记录介质 |
JP5575172B2 (ja) * | 2012-03-28 | 2014-08-20 | 株式会社東芝 | 磁気記録媒体,磁気記録再生装置,および磁気記録媒体の製造方法 |
MY167287A (en) * | 2012-12-06 | 2018-08-15 | Fuji Electric Co Ltd | Perpendicular magnetic recording medium |
CN105637585B (zh) * | 2014-04-03 | 2019-04-23 | 富士电机株式会社 | 磁记录介质 |
US9940962B2 (en) * | 2014-08-29 | 2018-04-10 | Seagate Technology Llc | Low power thermally assisted data recording media |
-
2015
- 2015-02-23 JP JP2015033336A patent/JP6594633B2/ja active Active
-
2016
- 2016-01-04 SG SG11201702542VA patent/SG11201702542VA/en unknown
- 2016-01-04 WO PCT/JP2016/000009 patent/WO2016136118A1/ja active Application Filing
- 2016-01-04 CN CN201680003018.4A patent/CN107077864B/zh active Active
- 2016-01-04 MY MYPI2017701076A patent/MY180974A/en unknown
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2017
- 2017-04-03 US US15/477,434 patent/US20170206918A1/en not_active Abandoned
Patent Citations (4)
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JP2010129163A (ja) * | 2008-12-01 | 2010-06-10 | Showa Denko Kk | 熱アシスト磁気記録媒体及び磁気記録再生装置 |
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MY180974A (en) | 2020-12-14 |
JP6594633B2 (ja) | 2019-10-23 |
US20170206918A1 (en) | 2017-07-20 |
CN107077864A (zh) | 2017-08-18 |
WO2016136118A1 (ja) | 2016-09-01 |
CN107077864B (zh) | 2019-05-21 |
SG11201702542VA (en) | 2017-05-30 |
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