JP2016145731A - Measurement system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a measurement system capable of detecting a contact failure by a measuring device.SOLUTION: A measurement system 10 includes a tester body 20 that measures the electrical characteristics of a device 11 by making a force terminal 13 and sense terminal 14 come into contact with a device pin 12 in a Kelvin contact method and outputting a predetermined voltage to the force terminal 13. The measurement system is provided with first and second paths 21 and 22 for detecting whether or not the force terminal 13 and sense terminal 14 are in contact with the device pin 12 of the device 11; and measures voltages generated at the force terminal 13 and sense terminal 14 via the first and second paths 21 and 22 so as to detect that either one of the force terminal 13 and sense terminal 14 is not in contact with it.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a measurement system.

  2. Description of the Related Art Conventionally, a measuring apparatus that measures an electrical characteristic of an integrated circuit by a Kelvin contact method is known (see Patent Document 1).

  Such a measuring device measures using a Kelvin-type socket. The Kelvin-type socket has a pair of contact pieces that sandwich an IC pin to be inserted, a force terminal is connected to one contact piece, and a sense terminal is connected to the other contact piece.

  Before measuring the electrical characteristics with this measuring device, the contact failure between the IC pin and the contact piece is inspected, and this inspection is a special purpose in which a metal pad is provided at a position corresponding to each contact piece. The measurement substrate is used.

  As described above, the inspection of the contact failure between the IC pin and the contact piece detects the contact failure using the dedicated measurement substrate, and there is a problem that the contact failure cannot be detected on the measuring device side.

  An object of the present invention is to provide a measurement system capable of detecting a contact failure with a measurement device.

According to the first aspect of the present invention, a force measuring device and a sense terminal are brought into contact with a terminal of an object to be measured by a Kelvin contact method, and a predetermined voltage is output to the force terminal to measure an electrical characteristic of the object to be measured. A measuring system comprising:
Providing a path for measuring the voltage of the force terminal and the sense terminal;
By measuring the voltage generated at the force terminal and the sense terminal through the path, it is detected that one of the force terminal and the sense terminal is not in contact.

  According to this invention, a contact failure can be detected by the measuring device.

It is the block diagram which showed the structure of the Example of the measurement system which concerns on this invention. It is the block diagram which showed the structure of the measurement system of 2nd Example. It is the block diagram which showed the structure of the measurement system of 3rd Example.

  Hereinafter, an embodiment as an embodiment of a measurement system according to the present invention will be described with reference to the drawings.

[First embodiment]
FIG. 1 shows a measurement system 10 that measures the electrical characteristics of, for example, a device (device under test) 11 by the Kelvin contact method. The measurement system 10 includes a force terminal 13 and a sense terminal 14 that are brought into contact with a device pin (terminal) 12 of the device 11 by a Kelvin contact method, and a tester body 20 that is a measurement apparatus.

The tester body 20 includes a measuring unit 30 that measures the electrical characteristics of the device 11, a voltage output circuit (voltage output unit) 40, a first path 21, and a second path 22. The measuring device 30 and the voltage output circuit 40 constitute a measuring device. Since the measuring means 30 measures the electrical characteristics of the device 11 in the same manner as in the prior art, description thereof is omitted.
[Voltage output circuit]
The voltage output circuit 40 outputs a desired voltage (predetermined voltage) to the force terminal 13 in order to measure the electrical characteristics of the device 11, and includes an operational amplifier 41, two diodes 42 and 43, and resistors R1 and R2. have. The resistors R1 and R2 are both 10 [kΩ], for example. The voltage output circuit 40 has the same structure as the current buffer in principle.

  The non-inverting terminal of the operational amplifier 41 is grounded, and the inverting terminal is connected to the terminal VE via the resistor R1. When the desired voltage applied to the device pin 12 is 1 [V], for example, the terminal VE is connected to a power supply circuit that outputs a voltage of −1 [V].

  The inverting terminal is connected to the output terminal via the resistor R2 and the diodes 42 and 43. The diodes 42 and 43 are connected in parallel, the cathode of the diode 42 is connected to the resistor R2, and the anode of the diode 42 is connected to the output terminal of the operational amplifier 41. The cathode of the diode 43 is connected to the output terminal of the operational amplifier 41, and the anode of the diode 43 is connected to the resistor R2.

  The output terminal of the operational amplifier 41 is connected to the force terminal 13, and the resistor R 2 is connected to the sense terminal 14. The resistor R3 indicates the contact resistance or wiring resistance of the sense terminal 14. Further, here, the forward voltage Vf of the diodes 42 and 43 is assumed to be 1 [V] for convenience of explanation.

  Here, the case where only the sense terminal 14 is in contact with the device pin 12 as shown in FIG. 1 will be described.

  Since the voltage at the terminal VE is -1 [V] and the resistor R1 is 10 [kΩ], the current flowing through the resistor R1 is 1 [mA], the current flowing through the resistor R2 is also 1 [mA], and both ends of the resistor R2 are connected. The voltage difference is 1 [V]. Since the non-inverting terminal of the operational amplifier 41 is grounded, the inverting terminal has the same voltage as the non-inverting terminal and thus becomes 0 [V], and one terminal (terminal on the non-inverting terminal side) of the resistor R2 is 0 [V]. The other terminal of the resistor R2 is 1 [V].

  For this reason, the voltage of the sense terminal 14 is 1 [V], and the forward voltage Vf of the diode 42 is 1 [V], whereby the voltage of the output terminal of the operational amplifier 41 is 2 [V]. Thereby, the voltage of the force terminal 13 becomes 2 [V].

  When only the force terminal 13 is in contact with the device pin 12, the voltage at the sense terminal 14 is 1 [V] and the voltage at the output terminal of the operational amplifier 41 is 2 [V], as described above. Thereby, the voltage of the force terminal 13 becomes 2 [V].

When both the force terminal 13 and the sense terminal 14 are in contact with the device pin 12, the voltage of the sense terminal 14 remains 1 [V], and the force terminal 13 is short-circuited to the sense terminal 14, whereby the force terminal The voltage of 13 is 1 [V]. That is, when both the force terminal 13 and the sense terminal 14 are in contact with the device pin 12, a voltage of 1 [V] that is a desired voltage (predetermined voltage) is applied to the device pin 12.
[First and second routes]
The 1st path | route 21 is for measuring the voltage of the force terminal 13, and is connected to the tester measurement pin P1.

  The second path 22 is for measuring the voltage of the sense terminal 14, and is connected to the tester measurement pin P2.

  The voltages input to the tester measuring pins P1 and P2 are measured by voltage measuring units (first and second voltage measuring means) 50 and 51. The voltage measuring units 50 and 51 measure voltages generated at the force terminal 13 and the sense terminal 14 by the voltage output from the voltage output circuit 40 via the first and second paths 21 and 22. The voltage measuring units 50 and 51 measure, for example, by processing by a test program software of the controller provided in the tester body 20.

The voltage measuring units 50 and 51 obtain a difference between a preset setting voltage (for example, 1 [V]) and the measurement voltage by software processing. In addition, when either one of the voltage measuring units 50 and 51 obtains a predetermined voltage difference, the device 11 is incorporated in the test program so as not to proceed to the next process.
[Operation]
Next, the operation of the measurement system 10 configured as described above will be described.

  First, as shown in FIG. 1, the force terminal 13 and the sense terminal 14 of the tester body 20 are brought into contact with the device pin 12 of the device 11 to be measured. Here, description will be made assuming that the force terminal 13 is not in contact with the device pin 12.

  Now, when a voltage of -1 [V] is applied to the terminal VE, as described above, the voltage of the force terminal 13 is 2 [V], the voltage of the sense terminal 14 is 1 [V], and these voltages are the first. , Input to the tester measurement pins P1 and P2 via the second paths 21 and 22.

  The voltage measuring units 50 and 51 measure the voltage of the tester measurement pins P1 and P2 with the software of the test program, and obtain the difference between the measured voltage and the set voltage (1 [V]) with the software. Here, when the voltage at the force terminal 13 is 2 [V], the voltage measuring unit 50 detects a difference of 1 [V]. Based on the difference voltage 1 [V], the tester body 20 detects that one of the force terminal 13 and the sense terminal 14 is not in contact with the device pin 12.

  When only the force terminal 13 is in contact with the device pin 12, the voltage of the sense terminal 14 is 1 [V] and the voltage of the output terminal of the operational amplifier 41 is 2 [V]. Only the unit 50 detects a difference of 1 [V]. Then, the tester body 20 detects that one of the force terminal 13 and the sense terminal 14 is not in contact with the device pin 12.

  In this case, it is possible to detect that a voltage of 2 [V], that is, an undesired voltage is applied to the device pin 12.

  When both the force terminal 13 and the sense terminal 14 are in contact with the device pin 12, the voltages of the force terminal 13 and the sense terminal 14 are 1 [V], respectively, so that the voltage measuring units 50 and 51 are 1 [V]. Measure. As a result, the voltage measuring units 50 and 51 do not detect a difference from the set voltage (1 [V]), and the controller of the tester body 20 has both the force terminal 13 and the sense terminal 14 in contact with the device pin 12. Judge that you are doing. That is, the tester body 20 detects that both the force terminal 13 and the sense terminal 14 are in contact with the device pin 12.

  In this case, the voltage measuring units 50 and 51 measure 1 [V], which indicates that a desired voltage (1 [V]) is applied to the device pin 12.

As described above, the voltage generated at the force terminal 13 and the sense terminal 14 by the voltage of the voltage output circuit 40 is measured via the first and second paths 21 and 22. For this reason, the tester body 20 can detect that one of the force terminal 13 and the sense terminal 14 is not in contact with the device pin 12. Moreover, unlike the prior art, a dedicated measurement substrate for detecting contact is not required.
[Second Embodiment]
A measuring system 100 shown in FIG. 2 is a tester body 120 provided with measuring means 30, a voltage output circuit 40, a changeover switch 121, and one voltage measuring unit 52. In the measurement system 100, the voltage at the force terminal 13 and the sense terminal 14 can be measured by one voltage measurement unit 52 by selecting one of the first and second paths 21 and 22 by switching the changeover switch 121. It is a thing. Since other configurations are the same as those of the first embodiment, description thereof is omitted.
[Third embodiment]
FIG. 3 shows a measurement system 200 of the third embodiment. The measurement system 200 includes a tester body 220 and a test jig 230.

  The tester body 220 has the measuring means 30 and the voltage output circuit 40, and the test jig 230 has first and second paths 21 and 22. The voltage measuring units 50 and 51 measure the voltages at the force terminal 13 and the sense terminal 14 by processing by the test program software of the controller of the tester main body 220. Others are the same as those of the first embodiment, and the description thereof is omitted.

  The present invention is not limited to the above-described embodiments, and design changes and additions are permitted without departing from the scope of the claimed invention.

10 Measurement System 11 Device 12 Device Pin (Terminal)
13 Force terminal 14 Sense terminal 20 Tester body 21 First path 22 Second path 30 Measuring means 40 Voltage output circuit (voltage output means)
50 Voltage measurement unit (first voltage measurement means)
51 Voltage measurement unit (second voltage measurement means)
100 Measuring System 120 Tester Body 121 Changeover Switch 220 Tester Body 230 Test Jig

JP-A-62-182677

Claims (4)

The measuring system includes a measuring device that contacts a force terminal and a sense terminal with a terminal of the object to be measured by a Kelvin contact method, and outputs a predetermined voltage to the force terminal to measure an electrical characteristic of the object to be measured. And
Providing a path for measuring the voltage of the force terminal and the sense terminal;
A measurement system that detects that one of the force terminal and the sense terminal is not in contact by measuring a voltage generated at the force terminal and the sense terminal through the path. The path has a first path connected to the force terminal and a second path connected to the sense terminal;
The measuring device includes first voltage measuring means for measuring the voltage of the force terminal via the first path, and second voltage measuring means for measuring the voltage of the sense terminal via the second path,
The first and second voltage measuring means obtains a difference between a preset set voltage and the measured measurement voltage, and detects that one of the force terminal and the sense terminal is not in contact based on the difference. The measurement system according to claim 1, wherein:   The measuring apparatus includes a tester body having a voltage output means for outputting a predetermined voltage to a force terminal, a measuring means for measuring the electrical characteristics of the object to be measured, a test jig having first and second paths, The measurement system according to claim 2, comprising: The path has a first path connected to the force terminal and a second path connected to the sense terminal;
The measuring device includes a changeover switch for switching to one of the first and second paths, and voltage measurement means for measuring the voltages of the force terminal and the sense terminal by switching the changeover switch. The measurement system according to claim 1, wherein it is detected that one of the force terminal and the sense terminal is not in contact based on the voltage measured by the measurement unit.