JP6417716B2 - Substrate inspection device and inspection jig - Google Patents

Description

  The present invention relates to a substrate inspection apparatus for inspecting a substrate and an inspection jig provided with a probe for inspecting.

  Conventionally, two probes are brought into contact with two inspection points on the wiring pattern of the substrate, and when a current is passed between these probes, the voltage generated between these probes is measured. A substrate inspection apparatus using a so-called two-terminal method for inspecting pattern conduction or the like is known.

  However, according to the two-terminal method, since a probe for passing a current also serves as a probe for measuring a voltage, the measured voltage includes a voltage generated by a current flowing through the probe. Therefore, the two-terminal method cannot accurately measure the resistance value of the wiring pattern.

  On the other hand, a substrate inspection apparatus using a four-terminal method capable of measuring a resistance value of a wiring pattern with high accuracy is known (for example, see Patent Document 1). For example, there is a defect in which a part of the via hole formed in the substrate is missing. In this case, the via hole itself is conductive, but its resistance value is increased due to the defect. In order to detect such a defect, it is necessary to accurately measure the resistance value of the via hole, and an inspection by the four-terminal method is effective.

JP 2007-178318 A

  In order to perform resistance measurement by the four-terminal method as described above, two probes for current supply and two probes for voltage measurement are required, for a total of four probes. Therefore, the four-terminal method requires twice as many probes as the two-terminal method. Since the arrangement of the probe needs to match the arrangement of the wiring pattern to be inspected, an inspection jig in which the probe is arranged in accordance with the inspection object is created for each substrate to be inspected. The number of probes is several thousand.

  However, the inspection jig for the four-terminal method has twice as many probes as the inspection jig for the two-terminal method, and it is necessary to bring a large number of probes into contact with fine inspection points at high density. Therefore, the inspection jig for the four-terminal method is very expensive because the production cost is five times that of the inspection jig for the two-terminal method, for example, exceeding 5 million yen.

  Therefore, when inspecting a board that requires high-precision resistance measurement with a single board inspection device, use an expensive four-terminal inspection jig to inspect a board that does not require much resistance measurement accuracy. Sometimes there is a need to use an inexpensive two-terminal inspection jig. Furthermore, there is a need to improve the substrate inspection accuracy as much as possible even when an inexpensive two-terminal inspection jig is used.

  An object of the present invention is to use an inspection jig for a two-terminal method while using an inspection jig for a four-terminal method and an inspection jig for a two-terminal method with a single board inspection apparatus. An object of the present invention is to provide a substrate inspection apparatus and an inspection jig that can easily improve the substrate inspection accuracy.

  The substrate inspection apparatus according to the present invention includes first and second probes that contact inspection points provided on a substrate to be inspected, and first and second connection terminals connected to the first and second probes, respectively. A two-terminal jig comprising: a four-terminal jig comprising: a third probe that contacts an inspection point provided on a substrate to be inspected; and third and fourth connection terminals connected to the third probe When the four-terminal jig is connected to the connection portion, the connection portion to which the jig can be selectively attached and detached, and the inspection of the substrate based on the four-terminal method is performed using the first and second probes. A four-terminal mode for performing and a two-terminal mode for inspecting the substrate based on the two-terminal method using the third probe when the two-terminal jig is connected to the connection portion. An inspection main body portion, and the connection portion includes the four terminals. When the jig is connected, the first and second main body side connection terminals that can be connected to the first and second connection terminals, respectively, are provided, and the first and second main body side connection terminals include the two-terminal jig. When connected, the third and fourth connection terminals can be connected to each other, and the inspection main body can supply currents to the first and second main body side connection terminals, respectively. A current supply unit, a voltage detection unit for detecting a voltage, and when executing the two-terminal mode, the first and second current supply units supply current to the first and second main body side connection terminals, respectively. When the voltage detection unit detects the voltage of at least one of the first and second main body side connection terminals and executes the four-terminal mode, the second current supply unit supplies a current to the second main body side connection terminal. Supplying the first current supply. Part prohibits the current supply to the first body-side connection terminal by, and a mode control unit for detecting a voltage of the first body-side connection terminal by the voltage detection unit.

  According to this configuration, since the four-terminal jig and the two-terminal jig can be selectively attached / detached, the inspection treatment for the four-terminal method can be performed with one board inspection apparatus. Tools and inspection jigs for the two-terminal method are available. Since the four-terminal jig includes the first and second probes that contact one inspection point, and the first and second connection terminals connected to the first and second probes, respectively, one inspection is performed. On the other hand, by using one of the first and second probes as a current supply probe and using the other probe as a voltage detection probe, resistance measurement by the four-terminal method is enabled. The two-terminal jig is provided with a third probe that comes into contact with the inspection point, and is cheaper than the four-terminal jig because there is one probe that comes into contact with one inspection point. Two connection terminals, a third connection terminal and a fourth connection terminal, are connected to the third probe. The inspection main body portion can execute a four-terminal mode for performing a substrate inspection based on the four-terminal method and a two-terminal mode for performing a substrate inspection based on the two-terminal method. A terminal and first and second current supply units;

  When a four-terminal jig is connected to the inspection main body and the four-terminal mode is executed, the mode control section causes the second current supply section to supply current to the second main body side connection terminal, and the first current supply. The current supply to the first main body side connection terminal by the unit is prohibited. Further, the voltage of the first main body side connection terminal is detected by the voltage detection unit. As a result, the second probe of the four-terminal jig is used as a current supply probe, and the first probe is used as a voltage detection probe, so that it is possible to perform substrate inspection by the four-terminal method.

  On the other hand, when the two-terminal jig is connected to the inspection main body and the two-terminal mode is executed, the mode control unit supplies currents to the first and second main body side connection terminals by the first and second current supply units, respectively. To supply. Since the first and second body-side connection terminals are connected to the third and fourth connection terminals, and the third and fourth connection terminals are connected to the third probe, they are supplied from the first and second current supply units. The total current is supplied to the third probe. Therefore, the current supplied from the third probe to the inspection point to be inspected can be increased. In addition, the voltage detection unit detects at least one voltage of the first and second main body side connection terminals (which are conductive in the two-terminal jig). When the current flowing through the inspection object increases, the amount of change in the voltage with respect to the change in the resistance value of the inspection object increases, so that the inspection accuracy based on the voltage detected by the voltage detector improves. Also, in failure modes in which the inspection target is partially missing (thinned), current concentration occurs in the defective portion. Therefore, when a large current is applied, for example, the current concentrated portion is disconnected and the failure becomes apparent. It becomes possible to make it. As a result, the inspection accuracy based on the voltage detected by the voltage detector is improved. Therefore, it is possible to use an inspection jig for the four-terminal method and an inspection jig for the two-terminal method with a single substrate inspection apparatus, while using an inspection jig for the two-terminal method. It becomes easy to improve accuracy.

  In addition, the connection unit further includes first and second pair probes that are in contact with other inspection points that are paired with the inspection point, and first and second pairs that are connected to the first and second pair probes, respectively. A four-terminal pair jig provided with a pair of connection terminals and used as a pair with the four-terminal jig, a third pair probe that contacts another inspection point paired with the inspection point, and the third A third pair connection terminal connected to the pair probe, and configured to be detachable from a two-terminal pair jig used as a pair with the two-terminal jig, and the first pair connection terminal A first body-side pair terminal that can be selectively connected to the third pair connection terminal; a second body-side pair terminal that can be connected to the second pair connection terminal; and the mode control unit further includes: When executing the two-terminal mode, the first and second bodies are provided by the first and second current supply units. The current is caused to flow between a connection terminal and the first body side pair terminal, and at least one of the first and second body side connection terminals and the first body side pair terminal are caused by the voltage detection unit. When detecting the voltage between and executing the four-terminal mode, the second current supply unit causes the current to flow between the second body-side connection terminal and the second body-side pair terminal, and It is preferable that a voltage between the first main body side connection terminal and the first main body side counter terminal is detected by a voltage detection unit.

  According to this configuration, when the four-terminal jig and the four-terminal pair jig are connected to the connection portion and the four-terminal mode is executed, the second main body side connection terminal and the second terminal are connected by the second current supply portion. Since a current flows between the second pair of probes and the second pair of probes when a current flows between the main body side paired terminals, the second probe and the second pair of probes can be used as current probes. In addition, since the voltage detection unit detects the voltage between the first main body side connection terminal and the first main body side pair terminal, the voltage between the first probe and the first pair probe is detected. One probe and a first pair of probes can be used as voltage probes. As a result, it is possible to perform inspection by the four-terminal method using the four-terminal jig and the four-terminal pair jig.

  On the other hand, when the two-terminal jig and the two-terminal pair jig are connected to the connection portion and the two-terminal mode is executed, the first and second main body side connection terminals are By causing a current to flow between the first main body side paired terminals, the total supply current of the first and second current supply units flows between the third probe and the third pair of probes to the inspection target. Further, the voltage detection unit detects a voltage between at least one of the first and second main body side connection terminals (which are conductive in the two-terminal jig) and the first main body side counter terminal. Thus, the voltage between the third probe and the third pair of probes is detected. As a result, using a two-terminal jig and a two-terminal pair jig each equipped with a probe, while performing inspection by the two-terminal method using two probes, increasing the current for inspection Inspection accuracy can be improved.

  The two-terminal jig further includes a third pair probe that contacts another inspection point paired with the inspection point, and a third pair connection terminal connected to the third pair probe. The connection unit further includes a first body-side pair terminal that can be connected to the third pair connection terminal, and the mode control unit further includes the first and second currents when executing the two-terminal mode. The supply unit causes the current to flow between the first and second main body side connection terminals and the first main body side pair terminal, and at least one of the first and second main body side connection terminals by the voltage detection unit. You may make it detect the voltage between one side and the said 1st main body side counter terminal.

  According to this configuration, since the two-terminal jig includes the third probe and the third pair of probes, the two-terminal jig including the two probes is used, and the two terminals are used. While performing inspection by the method, it is possible to increase inspection current and improve inspection accuracy.

  The currents supplied by the first and second current supply units are preferably substantially equal to each other.

  According to this configuration, the current supply amount when executing the two-terminal mode can be doubled.

  Further, an inspection jig according to the present invention is an inspection jig used as the two-terminal jig in the board inspection apparatus according to any one of the above, and an inspection point provided on a substrate to be inspected. A third probe contacting the third probe; and third and fourth connection terminals connected to the third probe.

  According to this configuration, since the third probe and the third and fourth connection terminals are provided, the currents supplied from the third and fourth connection terminals can be merged and supplied to the third probe. As a result, it is possible to increase the current that flows to the inspection object that contacts the third probe, so that the current for inspection is increased while performing the inspection by the two-terminal method in which one probe is in contact with one inspection point. Thus, the inspection accuracy can be improved. Further, since the two connection terminals are provided as in the case of the four-terminal jig, it is easy to attach to the connection portion of the inspection apparatus instead of the four-terminal jig.

  An inspection jig according to the present invention is an inspection jig for connecting a probe that contacts an inspection point provided on a substrate to be inspected to a substrate inspection apparatus for inspecting the substrate, The probe includes a plurality of connection terminals for connecting the probe to the substrate inspection apparatus.

  According to this configuration, since the probe and the plurality of connection terminals are provided, the currents supplied from the plurality of connection terminals can be merged and supplied to the probe. As a result, it is possible to increase the current flowing to the inspection object that contacts the probe, so that the current for inspection can be increased while performing the inspection by the two-terminal method in which one probe is in contact with one inspection point. Inspection accuracy can be improved. Moreover, since a plurality of connection terminals are provided in the same manner as the four-terminal jig, it is easy to attach to the connection portion of the inspection apparatus instead of the four-terminal jig.

  The board inspection apparatus and inspection jig having such a configuration are a single board inspection apparatus, and can use the inspection jig for the four-terminal method and the inspection jig for the two-terminal method. It is easy to improve the substrate inspection accuracy when using a legal inspection jig.

It is a front view showing roughly the composition of the substrate inspection device and inspection jig concerning one embodiment of the present invention. It is a perspective view which shows an example of a structure of the inspection jig shown in FIG. 1 is a block diagram conceptually showing an example of an electrical configuration of a substrate inspection apparatus and an inspection jig according to a first embodiment of the present invention. A state where a four-terminal jig for a four-terminal method is attached as an inspection jig is shown. 1 is a block diagram conceptually showing an example of an electrical configuration of a substrate inspection apparatus and an inspection jig according to a first embodiment of the present invention. A state where a two-terminal jig for the two-terminal method is attached as an inspection jig is shown. It is a block diagram which shows the modification of the inspection jig shown in FIG. It is a block diagram which shows notionally an example of the electrical structure of the board | substrate inspection apparatus which concerns on 2nd Embodiment of this invention, the jig | tool for two terminals, and the jig | tool for two terminals. It is a flowchart which shows an example of operation | movement of the board | substrate inspection apparatus shown in FIG. It is a flowchart which shows an example of operation | movement of the board | substrate inspection apparatus shown in FIG. It is a block diagram which shows the modification of the inspection jig shown in FIG. It is a perspective view which shows an example of the external appearance of the jig | tool for two terminals, and the jig | tool for two terminals.

Embodiments according to the present invention will be described below with reference to the drawings. In addition, the structure which attached | subjected the same code | symbol in each figure shows that it is the same structure, The description is abbreviate | omitted.
(First embodiment)

  FIG. 1 is a front view schematically showing a configuration of a substrate inspection apparatus and an inspection jig according to an embodiment of the present invention. A substrate inspection apparatus 1 shown in FIG. 1 is an apparatus for inspecting a circuit pattern formed on a substrate 100 to be inspected.

  The substrate 100 is, for example, a printed wiring board. The substrate 100 may be various substrates such as a flexible substrate, a ceramic multilayer wiring substrate, an electrode plate for a liquid crystal display or a plasma display, a package substrate for a semiconductor package, or a film carrier.

  A board inspection apparatus 1 shown in FIG. 1 includes an inspection apparatus main body 2 and inspection jigs 3U and 3D. The inspection jig 3U includes a four-terminal jig 3Ua that is an inspection jig for the four-terminal method and a two-terminal jig 3Ub that is a jig for the two-terminal method. The inspection jig 3D includes a four-terminal pair jig 3Da used as a pair with the four-terminal jig 3Ua and a two-terminal pair jig 3Db used as a pair with the two-terminal jig 3Ub. The inspection apparatus main body 2 mainly includes inspection units 4U and 4D, inspection unit moving mechanisms 5U and 5D, a substrate fixing device 6, and a housing 7 that accommodates these units. The substrate fixing device 6 is configured to fix the substrate 100 to be inspected at a predetermined position. The inspection unit moving mechanisms 5U and 5D appropriately move the inspection units 4U and 4D within the housing 7.

  The inspection unit 4U is located above the substrate 100 fixed to the substrate fixing device 6. The inspection unit 4D is located below the substrate 100 fixed to the substrate fixing device 6. The inspection units 4U and 4D are configured to be detachable from inspection jigs 3U and 3D for inspecting a circuit pattern formed on the substrate 100. The inspection unit 4U can selectively attach either the four-terminal jig 3Ua or the two-terminal jig 3Ub as the inspection jig 3U. The inspection unit 4D can selectively attach either the four-terminal pair jig 3Da or the two-terminal pair jig 3Db as the inspection jig 3D. The inspection units 4U and 4D include connectors 41U and 41D (connection units) connected to the inspection jigs 3U and 3D, respectively. A portion obtained by removing the connectors 41U and 41D from the inspection apparatus main body 2 corresponds to an example of the inspection main body. Hereinafter, the inspection units 4U and 4D are collectively referred to as an inspection unit 4.

  FIG. 2 is a perspective view showing an example of the configuration of the inspection jigs 3U and 3D shown in FIG. Each of the inspection jigs 3U and 3D includes a support block 31, a pedestal 32, a base 33, and a plurality of wirings 34. The inspection jig 3U includes a plurality of probes Pr, and the inspection jig 3D includes a plurality of paired probes Ps.

  The probe Pr and the counter-probe Ps are made of a tough metal such as tungsten (W), high-speed steel (SKH), beryllium copper (BeCu), or other conductors, and bendable elasticity (flexibility). It has a wire shape (bar shape). The diameters of the probe Pr and the paired probe Ps are, for example, about 100 μm.

  A plurality of guide holes for supporting the probe Pr or the paired probe Ps are formed in the support block 31. Each guide hole is arranged so as to correspond to the position of the inspection point set on the wiring pattern of the substrate 100 to be inspected. Thereby, the tips of the probe Pr and the pair of probes Ps are brought into contact with the inspection point of the substrate 100.

  The support block 31 of the inspection jig 3U is provided with the probe Pr corresponding to the inspection point on the upper surface of the substrate 100, and the support block 31 of the inspection jig 3D is provided with the counter probe Ps corresponding to the inspection point on the lower surface of the substrate 100. Is arranged. Hereinafter, the inspection jigs 3U and 3D are collectively referred to as an inspection jig 3.

  Since each guide hole of the support block 31 is formed according to the wiring pattern of the substrate 100, it is necessary to use the inspection jig 3 corresponding to the substrate 100. Therefore, when the board inspection apparatus 1 inspects a board having a different wiring pattern, it is necessary to replace the inspection jig 3 with one corresponding to the board.

  The pedestal 32 includes a plate 321 to which the support block 31 is attached, and, for example, four connecting rods 322 that connect the plate 321 to the base 33. The connecting rod 322 supports the plate 321 with a space between it and the base 33. As a result, a wiring space for wiring the wiring 34 is secured between the base 33 and the plate 321.

  The base 33 is, for example, a flat rectangular parallelepiped member. The base 33 is provided with connectors 35U and 35D that are detachably connected to the connectors 41U and 41D. The connector 35U includes a plurality of connection terminals Ta for electrically connecting the probe Pr to the inspection unit 4, and the connector 35D includes a plurality of pair connection terminals for electrically connecting the pair probe Ps to the inspection unit 4. Ts is included.

  The connection terminal Ta and the pair connection terminal Ts are, for example, needle-like connection terminals that penetrate the base 33 in the thickness direction. The rear end portion of each connection terminal Ta is connected to each probe Pr on the first surface 33a side by the wiring 34, and the front end portion of each connection terminal Ta is the second surface 33b opposite to the first surface 33a. Protruding from. The rear end portion of each pair connection terminal Ts is connected to each pair probe Ps by the wiring 34 on the first surface 33a side, and the front end portion of each pair connection terminal Ts is the second side opposite to the first surface 33a. It protrudes from the second surface 33b.

  Thereby, when the inspection jigs 3U and 3D are attached to the inspection portions 4U and 4D, the connection terminal Ta of the connector 35U is connected to the connector 41U, and the pair connection terminal Ts of the connector 35D is connected to the connector 41D.

  3 and 4 are block diagrams conceptually showing an example of the electrical configuration of the substrate inspection apparatus and the inspection jig according to the first embodiment of the present invention. FIG. 3 shows a state where a four-terminal jig 3Ua and a four-terminal jig 3Ua for the four-terminal method are attached to the inspection apparatus body 2. The inspection apparatus body 2 shown in FIG. 3 includes connectors 41U and 41D, a first current supply unit 21, a second current supply unit 22, a voltage detection unit 23, a current detection unit 26, and switching elements SW1 to SW4. The input unit 24 and the control unit 25 are provided.

  The connector 41U includes a plurality of main body side connection terminals Tb1 (first main body side connection terminals) and a plurality of main body side connection terminals Tb2 (second main body side connection terminals). 3, illustration is abbreviate | omitted and the main body side connection terminal Tb1 and the main body side connection terminal Tb2 are described one each. The connector 41D includes a plurality of body-side pair connection terminals Tc1 (first body-side pair terminals) and a plurality of body-side pair connection terminals Tc2 (second body-side pair terminals). 3, illustration is abbreviate | omitted and the main body side pair connection terminal Tc1 and the main body side pair connection terminal Tc2 are described one each.

  The switching elements SW1 to SW4 are configured using semiconductor switching elements such as transistors, for example.

  The first current supply unit 21 and the second current supply unit 22 are configured by, for example, constant current circuits. The first current supply unit 21 and the second current supply unit 22 are configured by the same components (components). Thereby, the inspection device main body 2 can be configured by diverting the hardware of the conventional inspection device main body for the four-terminal method. The first current supply unit 21 and the second current supply unit 22 output currents corresponding to control signals from the control unit 25 to the main body side connection terminal Tb1 and the main body side connection terminal Tb2 via the switching elements SW1 and SW2, respectively. To do.

  The main body side connection terminal Tc1 is connected to the circuit ground via the switching element SW3 and the current detection unit 26. The main body side connection terminal Tc2 is connected to the circuit ground via the switching element SW4 and the current detection unit 26.

  The voltage detection unit 23 is a voltage measurement circuit configured using, for example, an analog / digital converter. The voltage detection unit 23 detects a voltage between the main body side connection terminal Tb1 and the main body side pair connection terminal Tc1, and transmits the voltage value to the control unit 25.

  The current detection unit 26 is a current measurement circuit configured using, for example, a shunt resistor, a Hall element, an analog / digital converter, or the like. The current detection unit 26 detects a current flowing through the wiring pattern to be inspected, and transmits the current value to the control unit 25.

  The input unit 24 is an operation unit such as a push button switch or a touch panel. The input unit 24 receives a mode setting instruction from the user in the four-terminal mode and the two-terminal mode.

  The control unit 25 includes, for example, a CPU (Central Processing Unit) that performs predetermined arithmetic processing, a RAM (Random Access Memory) that temporarily stores data, a ROM (Read Only Memory) that stores predetermined control programs, and the like. A storage unit such as an HDD (Hard Disk Drive) and the peripheral circuits are provided. The control unit 25 functions as a mode control unit 251 and a determination unit 252 by executing a predetermined control program.

  In the example shown in FIG. 3, the substrate 100 is formed with through holes TH1 and TH2 penetrating the substrate. Hereinafter, an example of inspecting the through hole TH1 will be described. The through hole TH1 has an annular land 101 formed at the peripheral edge of the opening on the upper surface side of the through hole penetrating the substrate 100, an annular land 102 formed at the peripheral edge of the opening on the lower surface side of the substrate, A cylindrical portion 103 that connects the land 101 and the land 102 is provided on the inner surface of the through hole. The lands 101 and 102 are used as inspection points.

  The four-terminal jig 3Ua includes a plurality of probes Pr1 (first probe) and a plurality of probes Pr2 (second probe) as the probes Pr. In FIG. 3, illustration is abbreviate | omitted and the probes Pr1 and Pr2 are described one each. The four-terminal jig 3Ua includes a plurality of connection terminals Ta1 (first connection terminals) and a plurality of connection terminals Ta2 (second connection terminals) as connection terminals Ta. 3, illustration is abbreviate | omitted and connecting terminal Ta1, Ta2 is described one each.

  The connection terminal Ta1 is electrically connected to the probe Pr1 through a wiring 34, and the connection terminal Ta2 is electrically connected to the probe Pr2 through a wiring 34. That is, in the four-terminal jig 3Ua, the connection terminal Ta and the probe Pr are connected one-to-one. The probes Pr1 and Pr2 are disposed so as to contact the land 101.

  Then, when the four-terminal jig 3Ua is attached to the inspection apparatus main body 2, the connection terminal Ta1 and the main body side connection terminal Tb1 are connected, and the first current supply unit 21 includes the switching element SW1, the main body side connection terminal Tb1, The probe Pr1 is electrically connected via the connection terminal Ta1. Further, the connection terminal Ta2 and the main body side connection terminal Tb2 are connected, and the second current supply unit 22 is electrically connected to the probe Pr2 via the switching element SW2, the main body side connection terminal Tb2, and the connection terminal Ta2. .

  The four-terminal pair jig 3Da includes a plurality of paired probes Ps1 (first paired probes) and a plurality of paired probes Ps2 (second paired probes) as the probes Pr. In FIG. 3, illustration is abbreviate | omitted and the pair probes Ps1 and Ps2 are described one each. The four-terminal pair jig 3Da includes a plurality of pair connection terminals Ts1 (first pair connection terminals) and a plurality of pair connection terminals Ts2 (second pair connection terminals) as the pair connection terminals Ts. 3, illustration is abbreviate | omitted and the pair connection terminal Ts1, Ts2 is described one each.

  The pair connection terminal Ts1 is electrically connected to the pair probe Ps1 through a wiring 34, and the pair connection terminal Ts2 is electrically connected to the pair probe Ps2 through a wiring 34. That is, in the four-terminal pair jig 3Da, the pair connection terminals Ts and the pair probes Ps are connected on a one-to-one basis as in the four-terminal jig 3Ua. The pair probes Ps1, Ps2 are arranged so as to contact the land 102.

  When the four-terminal pair jig 3Da is attached to the inspection apparatus body 2, the pair connection terminal Ts1 and the body side pair connection terminal Tc1 are connected, and the circuit ground is the current detection unit 26, the switching element SW3, and the body side. The pair connection terminal Tc1 and the pair connection terminal Ts1 are electrically connected to the pair probe Ps1. The pair connection terminal Ts2 and the main body side connection terminal Tc2 are connected, and the circuit ground is connected to the pair probe Ps2 via the current detection unit 26, the switching element SW4, the main body side connection terminal Tc2, and the pair connection terminal Ts2. Electrically connected.

  FIG. 4 shows a state in which a two-terminal jig 3Ub and a two-terminal pair jig 3Db for the two-terminal method are attached to the inspection apparatus body 2 shown in FIG.

  The two-terminal jig 3Ub includes a plurality of probes Pr3 (third probes) as the probes Pr. In FIG. 4, illustration is omitted and one probe Pr3 is shown. The two-terminal jig 3Ub includes a plurality of connection terminals Ta3 (third connection terminals) and a plurality of connection terminals Ta4 (fourth connection terminals) as connection terminals Ta. 4, illustration is abbreviate | omitted and connecting terminal Ta3, Ta4 is described one each.

  The connection terminals Ta3 and Ta4 are electrically connected to the probe Pr3 by the wiring 34. That is, in the two-terminal jig 3Ub, the wiring 34 is branched, and the connection terminals Ta3 and Ta4 and the probe Pr3 are connected on a two-to-one basis. The probe Pr3 is disposed so as to contact the land 101.

Then, when the two-terminal jig 3Ub is attached to the inspection apparatus main body 2, the connection terminal Ta3 and the main body side connection terminal Tb1 are connected, and the first current supply unit 21 has the switching element SW1, the main body side connection terminal Tb1, The probe Pr3 is electrically connected via the connection terminal Ta3. The connection terminals Ta4 and is a body-side connection terminal Tb2 is connected, a second current supply unit 22 is electrically connected to the probe Pr 3 through the switching element SW2, the main body-side connection terminal Tb2, and the connection terminal Ta4 The

  The two-terminal pair jig 3Db includes a plurality of pair probes Ps3 (third pair probes) as the pair probes Ps. In FIG. 4, illustration is abbreviate | omitted and one pair probe Ps3 is described. The two-terminal pair jig 3Db includes a plurality of pair connection terminals Ts3 (third pair connection terminals) as the pair connection terminals Ts. In FIG. 4, illustration is abbreviate | omitted and one pair connection terminal Ts3 is described.

  The pair connection terminal Ts3 is electrically connected to the pair probe Ps3 by the wiring 34. That is, in the two-terminal pair jig 3Db, the pair connection terminal Ts3 and the pair probe Ps3 are connected on a one-to-one basis. The pair probe Ps3 is disposed so as to contact the land 102.

  When the two-terminal pair jig 3Db is attached to the inspection apparatus body 2, the pair connection terminal Ts3 and the body side pair connection terminal Tc1 are connected, and the circuit ground is the current detection unit 26, the switching element SW3, and the body side. It is electrically connected to the pair probe Ps3 via the pair connection terminal Tc1 and the pair connection terminal Ts3.

  The mode control unit 251 sets the inspection execution mode to either the four-terminal mode or the two-terminal mode according to the mode setting instruction received by the input unit 24.

  The four-terminal mode is an inspection mode for inspecting the substrate 100 based on the four-terminal method using the probes Pr1 and Pr2 when the four-terminal jig 3Ua is connected to the connector 41U. The two-terminal mode is an inspection mode for inspecting the substrate 100 based on the two-terminal method using the probe Pr3 (third probe) when the two-terminal jig 3Ub is connected to the connector 41U.

  When the two-terminal mode (FIG. 4) is set, the mode control unit 251 turns on the switching elements SW1, SW2, and SW3, and the main body side connection terminals Tb1 and Tb2 by the first and second current supply units 21 and 22. To supply current to each. When the four-terminal mode (FIG. 3) is set, the mode control unit 251 turns off the switching elements SW1 and SW3 and turns on the switching elements SW2 and SW4. A current is supplied to the connection terminal Tb2.

  Based on the voltage value detected by the voltage detection unit 23 and the current value detected by the current detection unit 26, the determination unit 252 determines the wiring pattern to be inspected (through hole TH1 in the examples of FIGS. 3 and 4). Judge the quality.

  Next, the operation of the substrate inspection apparatus 1 configured as described above will be described. For example, when the user intends to perform a high-precision inspection, the user attaches a four-terminal jig 3Ua and a four-terminal pair jig 3Da to the inspection apparatus body 2 as shown in FIG. 24 is operated to set the four-terminal mode.

  Then, the mode control unit 251 executes the four-terminal mode operation, turns off the switching elements SW1 and SW3, turns on the switching elements SW2 and SW4, and causes the second current supply unit 22 to output a predetermined current Ia. Then, the current Ia flows through the probe Pr2, the through hole TH1, the pair probe Ps2, and the current detection unit 26, and the current value is measured by the current detection unit 26 and transmitted to the control unit 25. At this time, the voltage between the probe Pr1 and the probe Ps1, that is, the voltage generated in the through hole TH1, is detected by the voltage detection unit 23, and the voltage value is transmitted to the control unit 25.

  The determination unit 252 calculates the resistance value of the through hole TH1 from the current value detected by the current detection unit 26 and the voltage value detected by the voltage detection unit 23. Then, the determination unit 252 compares the calculated resistance value with a reference resistance value range set in advance as the resistance value of the through hole TH1, and if the calculated resistance value is within the reference resistance value range, the through hole TH1 is determined to be normal, and if the calculated resistance value is outside the reference resistance value range, the through-hole TH1 is determined to be defective. The determination result is displayed on a display unit (not shown), for example.

  For example, when a defect X occurs in a part of the cylindrical portion 103 as in the through hole TH1 shown in FIG. 3, the resistance value of the through hole TH1 slightly increases as compared with the non-defective product. According to the four-terminal mode, no current flows through the probe Pr1 and the paired probe Ps1 used for voltage detection, so that highly accurate resistance measurement can be performed by the four-terminal method. As a result, it is possible to detect a defect such as a defect X in which the resistance value changes only slightly.

  On the other hand, when the user wants to reduce the cost of the inspection jig, the user attaches the two-terminal jig 3Ub and the two-terminal pair jig 3Db to the inspection apparatus body 2 as shown in FIG. 24 is operated to set the two-terminal mode. The two-terminal jig 3Ub and the two-terminal pair jig 3Db have half the number of probes compared to the four-terminal jig 3Ua and the four-terminal pair jig 3Da, and the probe compared to the four-terminal method. Since it is not necessary to arrange them at high density, the cost of the inspection jig can be reduced.

  When the two-terminal mode is set by the input unit 24, the mode control unit 251 executes the operation of the two-terminal mode, turns on the switching elements SW1 to SW3, and the first current supply unit 21 and the second current supply unit 22 To output a predetermined current Ib. Then, the current Ib output from the first current supply unit 21 and the current Ib output from the second current supply unit 22 are combined with the probe Pr3, so that twice the current Ib, that is, the current of 2Ib is supplied to the probe Pr3. Supplied to.

  The current of 2Ib flows through the probe Pr3, the through hole TH1, the paired probe Ps3, and the current detection unit 26, and the current value is measured by the current detection unit 26 and transmitted to the control unit 25.

  At this time, the voltage between the probe Pr3 and the probe Ps3, that is, the voltage generated in the through hole TH1, is detected by the voltage detection unit 23, and the voltage value is transmitted to the control unit 25. The determination unit 252 calculates the resistance value of the through hole TH1 from the current value detected by the current detection unit 26 and the voltage value detected by the voltage detection unit 23. Then, the determination unit 252 compares the calculated resistance value with a reference resistance value range set in advance as the resistance value of the through hole TH1, and if the calculated resistance value is within the reference resistance value range, the through hole TH1 is determined to be normal, and if the calculated resistance value is outside the reference resistance value range, the through-hole TH1 is determined to be defective. The determination result is displayed on a display unit (not shown), for example.

  Note that, in the two-terminal mode, a path through which a current flows and a path used for voltage measurement partially overlap, and a voltage generated in the overlapping path is included in the voltage detection value of the voltage detector 23. Therefore, the calculation accuracy of the resistance value is lower than that in the four-terminal mode, and accordingly, the accuracy of determining the quality of the substrate 100 may be reduced. However, in the two-terminal mode, the total current of the output of the first current supply unit 21 and the output of the second current supply unit 22 is supplied to the through hole TH1, so that only the output of the second current supply unit 22 is supplied. The current supplied to the through hole TH1 can be increased as compared with the four-terminal mode.

  If the current flowing through the through hole TH1 increases, the amount of change in the voltage detection value that occurs according to the presence or absence of the defect X increases. Therefore, according to the two-terminal mode, it is easy to improve the inspection accuracy of the substrate 100 as compared with the case where the current supply is performed only by the second current supply unit 22.

  It is desirable to increase the output currents Ib of the first current supply unit 21 and the second current supply unit 22 in the two-terminal mode rather than the output current Ia of the second current supply unit 22 in the four-terminal mode. As a result, in the two-terminal mode, a large current exceeding twice that in the four-terminal mode can be passed through the through-hole TH1, so that the inspection accuracy can be further improved.

  Further, when a defect X occurs in a part of the cylindrical portion 103 of the through hole TH1, the current flowing through the through hole TH1 flows in a concentrated manner in the remaining narrow area where the defect X does not occur. At this time, if the current is increased, heat is generated in a narrow area where the current is concentrated, and the defect X can be enlarged. As a result, the resistance value of the through hole TH1 is further increased, the difference from the resistance value of the non-defective product is increased, and the defect becomes obvious. As a result, it becomes easy to detect a defect and the inspection accuracy can be improved.

  In order to make the defect of the through hole TH1 obvious in the two-terminal mode, the current (2Ib) flowing through the through-hole TH1 is more than 5 times the current value (Ia) in the four-terminal mode, for example, about 5 to 20 times. It is desirable to make it about 10 times. For example, when the current output from the second current supply unit 22 in the four-terminal mode is Ia, in order to output a current of 10 Ia from the second current supply unit 22 without using the two-terminal jig 3Ub, As the current supply unit 22 and the switching element SW2, it is necessary to use a component having a large current rating with a current rating, that is, an upper limit of a current value that can flow is 10 Ia, and the cost of the second current supply unit 22 and the switching element SW2 increases. .

  On the other hand, according to the two-terminal jig 3Ub, as the first current supply unit 21, the second current supply unit 22, and the switching elements SW1 and SW2, a current of 10 Ia is supplied to the through hole TH1 using components having a current rating of 5 Ia. Therefore, it becomes possible to make the defect manifest, so that the costs of the first current supply unit 21, the second current supply unit 22, and the switching elements SW1 and SW2 can be reduced.

  Further, as shown by a broken line in FIG. 4, the two-terminal jig 3Ub may further include a pair connection terminal Ts4 connected to the pair probe Ps3. In this way, the current from the pair probe Ps3 to the circuit ground via the current detection unit 26 is distributed and flows to the switching elements SW3 and SW4. Therefore, a component having a small current rating is used as the switching elements SW3 and SW4. Is possible.

  Note that the present invention is not limited to the example using the two-terminal pair jig 3Db. For example, as shown in FIG. 5, the two-terminal jig 3Ub may include a configuration of a two-terminal pair jig 3Db. The wiring pattern to be inspected is not limited to a through hole. For example, as illustrated in FIG. 5, a wiring pattern P extending on the surface of the substrate 100 may be an inspection target. Then, both ends of the wiring pattern P may be used as inspection points, and the probe Pr3 and the paired probe Ps3 may be brought into contact with both ends of the wiring pattern P, respectively.

The two-terminal jig 3Ub has two examples of the connection terminals Ta connected to the probe Pr3. However, the number of the connection terminals Ta connected to the probe Pr3 may be three or more. It may be configured to be branched and connected to three or more connection terminals.
(Second Embodiment)

  Next, a substrate inspection apparatus and inspection jig according to a second embodiment of the present invention will be described. FIG. 6 is a block diagram conceptually showing an example of the electrical configuration of the substrate inspection apparatus 1a, the two-terminal jig 3Ub, and the two-terminal pair jig 3Dc according to the second embodiment of the present invention. The external appearances of the board inspection apparatus 1a, the two-terminal jig 3Ub, and the two-terminal pair jig 3Dc are the same as those of the board inspection apparatus 1a and the inspection jigs 3U and 3D shown in FIGS. Description is omitted.

  The board inspection apparatus 1a shown in FIG. 6 is configured by attaching a two-terminal jig 3Ub (inspection jig) and a two-terminal pair jig 3Dc (pair inspection jig) to the inspection apparatus body 2a. Yes. The inspection apparatus main body 2a differs from the inspection apparatus main body 2 shown in FIG. 4 in the configuration of the control unit 25a, and is configured in the same manner as the inspection apparatus main body 2 except for the control unit 25a.

  The two-terminal jig 3Ub is configured similarly to the two-terminal jig 3Ub shown in FIG. The two-terminal pair jig 3Dc is further provided with a pair connection terminal Ts4 electrically connected to the pair probe Ps3 (pair contact) and the wiring 34 to the two-terminal pair jig 3Db shown in FIG. It is configured. The pair connection terminal Ts4 is connected to the main body side pair connection terminal Tc2. A portion obtained by removing the connectors 41U and 41D from the inspection apparatus main body 2a corresponds to an example of the inspection main body.

  In the two-terminal jig 3Ub, the wiring 34 connected to the probe Pr3 branches into two at the branch point P1, one of which is connected to the connection terminal Ta3 and the other is connected to the connection terminal Ta4. In the two-terminal pair jig 3Dc, the wiring 34 connected to the pair probe Ps3 branches into two at the branch point P2, one of which is connected to the pair connection terminal Ts3 and the other is connected to the pair connection terminal Ts4. ing.

  Since the other configuration is the same as that of the substrate inspection apparatus 1 shown in FIG. 4, the description thereof will be omitted, and the characteristic points of the substrate inspection apparatus 1a will be described below.

  The control unit 25a is different from the control unit 25 in that it functions as the first processing unit 51, the high current supply processing unit 52, the second processing unit 53, and the determination unit 54.

  The first processing unit 51 causes the second current supply unit 22 to supply current to the main body side connection terminal Tb2, and prohibits the first current supply unit 21 from supplying current to the main body side connection terminal Tb1 (no current flows). A voltage detection process for detecting a voltage by the voltage detection unit 23 is executed during the period, and a first process for acquiring the voltage detected by the voltage detection process as the first voltage V1 is executed.

  After the execution of the first process, the high current supply processing unit 52 executes a high current supply process in which current is supplied to the main body side connection terminals Tb1 and Tb2 by the first current supply unit 21 and the second current supply unit 22, respectively.

  The second processing unit 53 executes the above-described voltage detection process after executing the high current supply process, and executes a second process for acquiring the voltage detected by the voltage detection process as the second voltage V2.

  The determination unit 54 determines pass / fail of the through hole TH1 based on the first voltage V1 and the second voltage V2.

  Next, the operation of the substrate inspection apparatus 1a configured as described above will be described. 7 and 8 are flowcharts showing an example of the operation of the substrate inspection apparatus 1a shown in FIG.

  First, the first processing unit 51 turns on the switching elements SW2 and SW4, turns off the switching elements SW1 and SW3 (step S1), and outputs the current Ia from the second current supply unit 22 (step S2). Next, the 1st process part 51 acquires the detection voltage of the voltage detection part 23 as 1st voltage V1, and memorize | stores it in above-mentioned RAM, for example (step S3). Next, the 1st process part 51 acquires the detection electric current of the electric current detection part 26 as 1st electric current I1, and memorize | stores it in above-mentioned RAM, for example (step S4). In this case, steps S1 to S4 correspond to an example of a first process.

Next, the determination part 54 calculates 1st resistance value R1 based on following formula (1) (step S5).
R1 = V1 / I1 (1)

  According to the processing of steps S1 to S4, the current path through which the current Ia output from the second current supply unit 22 flows is the switching element SW2, the main body side connection terminal Tb2, the connection terminal Ta4, the branch point P1, the probe Pr3 (contact Child), through hole TH1, pair probe Ps3 (pair contact), branch point P2, pair connection terminal Ts4, body side pair connection terminal Tc2, switching element SW4, and path returning to circuit ground via the current detection unit 26 It becomes.

  On the other hand, the voltage detection path through which the voltage detection unit 23 detects the voltage is from the voltage detection unit 23 to the main body side connection terminal Tb1, the connection terminal Ta3, the branch point P1, the probe Pr3 (contact), the through hole TH1, and the probe Ps3 ( The contact point), the branch point P2, the pair connection terminal Ts3, and the main body side pair connection terminal Tc1. Accordingly, in the voltage detection path, a path from the branch point P1 to the branch point P2 via the connection terminal Ta3, the main body side connection terminal Tb1, the voltage detection unit 23, the main body side connection terminal Tc1, and the pair connection terminal Ts1 (hereinafter, referred to as the following) No current flows in the no-current path).

  As a result, the first resistance value R1 calculated in step S5 corresponds to the resistance value between the branch point P1 and the branch point P2 measured by the four probe method. That is, the first resistance value R1 is the sum of the resistance value Rx of the through hole TH1, the resistance value Ra from the branch point P1 to the tip of the probe Pr3, and the resistance value Rb from the branch point P2 to the tip of the probe Ps3. It becomes the value.

  In this case, the first resistance value R1 includes an error of the resistance value Ra + Rb. However, since the first resistance value R1 does not include the resistance of the above-described no-current path, the normal two-terminal method is used. Resistance measurement accuracy can be improved as compared with the case where resistance measurement is performed.

  Next, the high current supply processing unit 52 turns on the switching elements SW1 to SW4 (step S6), and outputs the current Ib from the first current supply unit 21 and the second current supply unit 22 (step S7). Steps S6 and S7 correspond to an example of a high current supply process. As described above, it is desirable that the current Ib has a larger current value than the current Ia. Through steps S6 and S7, a current that is 5 times or more, for example, about 5 to 20 times, more preferably about 10 times the current Ia is passed through the through hole TH1.

  As a result, when the defect X occurs in the through hole TH1, it is possible to enlarge the defect X and increase the resistance value Rx of the through hole TH1. If the through hole TH1 has a fine crack, the crack is welded by passing a large current through the through hole TH1, and the resistance value Rx of the through hole TH1 may decrease. As described above, the resistance value Rx of the through hole TH1 can be changed when there is a defect in the through hole TH1 by the high current supply processing in steps S6 and S7.

  Further, according to the two-terminal jig 3Ub and the two-terminal pair jig 3Dc, as in the case of the board inspection apparatus 1, the first current supply unit 21, the second current supply unit 22, and the switching elements SW1 to SW4 are used. Since a large current can be passed through the through-hole TH1 using a component with a small current rating, the cost of the substrate inspection apparatus 1a can be reduced.

  Next, the second processing unit 53 turns on the switching elements SW2 and SW4, turns off the switching elements SW1 and SW3 (step S11), and outputs the current Ia from the second current supply unit 22 (step S12). Next, the second processing unit 53 acquires the detection voltage of the voltage detection unit 23 as the second voltage V2, and stores it in, for example, the above-described RAM (step S13). Next, the second processing unit 53 acquires the detection current of the current detection unit 26 as the second current I2, and stores it in, for example, the above-described RAM (step S14). In this case, steps S11 to S14 correspond to an example of a second process.

Next, the determination part 54 calculates 2nd resistance value R2 based on following formula (2) (step S15).
R2 = V2 / I2 (2)

  The second resistance value R2 includes an error of the resistance value Ra + Rb as in the case of the first process described above, but the second resistance value R2 does not include the resistance of the above-described no-current path. The resistance measurement accuracy can be improved as compared with the case where the resistance measurement is performed by the normal two-terminal method.

  Next, the determination unit 54 compares the difference | R1−R2 | between the first resistance value R1 and the second resistance value R2 with a preset reference value Ref (step S15). The reference value Ref is a value by which, for example, a change in the resistance value Rx occurring before and after a large current caused by a high current supply process is passed through a defective wiring pattern can be experimentally determined to determine such a resistance change. Can be set as appropriate.

  If the difference | R1−R2 | is equal to or smaller than the reference value Ref (NO in step S16), the resistance value Rx has not changed even by the high current process. It determines with it being favorable (step S17), and complete | finishes a process. On the other hand, if the difference | R1−R2 | exceeds the reference value Ref (YES in step S16), the resistance value Rx has changed due to the high current process, so the determination unit 54 determines that the through hole TH1 is defective. Is determined (step S18), and the process is terminated.

  According to step S16, the error Ra + Rb included in the first resistance value R1 and the error Ra + Rb included in the second resistance value R2 are canceled out, so that the determination accuracy is improved.

  As described above, according to the processing in steps S1 to S18, the two-terminal jig 3Ub, and the two-terminal pair jig 3Dc, the inspection treatment is performed by the two-terminal method using two probes (Pr3, Ps3) for one-point resistance measurement. Inspection accuracy can be improved while reducing the cost of the tool.

  The substrate inspection apparatus 1a is not necessarily limited to the example using the two-terminal pair jig 3Dc. For example, as shown in FIG. 9, the two-terminal jig 3Ub may include a configuration of a two-terminal pair jig 3Dc. The wiring pattern to be inspected is not limited to a through hole. For example, as illustrated in FIG. 9, a wiring pattern P extending on the surface of the substrate 100 may be an inspection target. Then, both ends of the wiring pattern P may be used as inspection points, and the probe Pr3 and the paired probe Ps3 may be brought into contact with both ends of the wiring pattern P, respectively.

  Further, the two-terminal pair jig 3Dc shown in FIG. 6 is used instead of the two-terminal pair jig 3Db shown in FIG. 4, or the two-terminal pair shown in FIG. 9 is used instead of the two-terminal jig 3Ub shown in FIG. The control unit 25 illustrated in FIG. 4 may further include a first processing unit 51, a high current supply processing unit 52, a second processing unit 53, and a determination unit 54 using the jig 3Ub. In the two-terminal mode, steps S1 to S18 may be executed.

  Further, the current detection unit 26 may not necessarily be provided, and steps S4 and S14 may not be executed. In steps S5 and S15, the first resistance value R1 and the second resistance value R2 may be calculated using the current value of the current Ia instead of the first current I1 and the second current I2. Further, steps S5 and S15 are not necessarily executed. If the current Ia in the first process (step S2) is equal to the current Ia in the second process (step S12), the change in the resistance value Rx generated in the high current supply process (steps S6 and S7) It appears as a change in the detection voltage of 23. Therefore, steps S5 and S15 are not executed, and in step S16, the difference | V1-V2 | between the first voltage V1 and the second voltage V2 is compared with, for example, an experimentally obtained reference voltage value, thereby You may make it determine the quality of object.

  That is, a substrate inspection apparatus according to the present invention includes an inspection treatment provided with a contact that contacts an inspection point provided on a substrate to be inspected, and first and second jig terminals connected to the contact. Connected to a pair of inspection jigs comprising a tool, a pair contact that contacts another inspection point paired with the inspection point, and first and second pair jig terminals connected to the pair contact An inspection main body for inspecting the substrate through the inspection jig connected to the connection part and the pair of inspection jigs. The first and second main body side connection terminals respectively connected to the two jig terminals, and the first and second main body side pair terminals connected to the first and second pair jig terminals, respectively. The main body includes first and second current supply units capable of supplying current to the first and second main body side connection terminals, respectively. A voltage detection unit that detects a voltage between the first main body side connection terminal and the first main body side pair terminal; and a current is supplied to the second main body side connection terminal by the second current supply unit; and A voltage detection process for detecting a voltage by the voltage detection unit during a period in which current supply to the first main body side connection terminal by the first current supply unit is prohibited is performed, and the voltage detected by the voltage detection process is detected. A first processing unit that executes a first process acquired as a first voltage, and after execution of the first process, currents are respectively supplied to the first and second main body side connection terminals by the first and second current supply units. A high current supply processing unit that executes a high current supply process to be supplied; and a voltage detection process that is executed after the high current supply process is executed, and a voltage detected by the voltage detection process is acquired as a second voltage. Second to execute 2 processing Comprising a processing section, and a judging section that judges acceptability based on the first voltage and the second voltage.

  Further, the substrate inspection apparatus according to the present invention includes a contact that contacts an inspection point provided on a substrate to be inspected, first and second jig terminals connected to the contact, and the inspection point. A connection portion connectable to an inspection jig, comprising: a pair contact that contacts another pair of inspection points; and first and second pair jig terminals connected to the pair contact; and the connection portion And an inspection main body for inspecting the substrate via the inspection jig and the pair of inspection jigs, wherein the connection parts are respectively connected to the first and second jig terminals. The first and second main body side connection terminals and the first and second main body side pair terminals connected to the first and second pair jig terminals, respectively, and the inspection main body portion includes the first and second main body side connection terminals. Two first and second current supply units capable of supplying current to each of the two main body side connection terminals, and the first main body side connection terminal; A voltage detection unit for detecting a voltage between the first main body side pair terminal, a current supplied to the second main body side connection terminal by the second current supply unit, and the first current supply unit by the first current supply unit A voltage detection process for detecting a voltage by the voltage detection unit during a period in which current supply to the main body side connection terminal is prohibited is performed, and a voltage detected by the voltage detection process is acquired as a first voltage. A first processing unit that executes processing, and a high current supply process that causes the first and second current supply units to supply current to the first and second main body side connection terminals after the execution of the first processing, respectively. And a second process for executing a second process for executing the voltage detection process and obtaining a voltage detected by the voltage detection process as a second voltage after the execution of the high current supply process. Part, the first voltage and the front And a judging section that judges acceptability based on the second voltage.

  According to these configurations, the first and second jig terminals, which are two connection terminals, are connected to the contact. In this case, the connection path for connecting the contact to the first and second jig terminals branches in the middle. Moreover, the first and second pair jig terminals, which are two connection terminals, are connected to the pair contact. In this case, the connection path for connecting the pair of contacts to the first and second pair of jig terminals is branched in the middle. Then, first, the first process is executed, the current is supplied to the second main body side connection terminal by the second current supply unit, and the current supply to the first main body side connection terminal by the first current supply unit is prohibited. A voltage detection process in which the voltage is detected by the voltage detection unit is executed. In this case, since the path from the contact to the branch point and the path from the contact to the branch point are used for both current supply and voltage detection, the voltage generated on the path in this part is the detection voltage. It becomes an error. However, since no current flows through the path from the branch point to the voltage detection unit, the voltage between the branch point and the branch point is measured by the four-terminal method. Therefore, according to the first process, the detection accuracy of the first voltage can be improved.

  Next, when current is supplied to the first and second main body side connection terminals by the first and second current supply units by the high current supply process, the first and second main body side connection terminals are connected to the first and second main body side connection terminals. Since the first and second jig terminals are connected to the contact, the total of the supply currents of the first and second current supply units for the inspection object that is in contact with the contact is connected to the two jig terminals. Current is supplied. That is, a large current flows through the inspection target. In failure modes in which the inspection target is partially missing (thin) or has a fine crack, current concentration occurs in the defective portion. For example, when a large current is applied, the current concentrated portion is disconnected. Or the resistance value to be inspected is likely to change due to, for example, melting and welding of cracks. Accordingly, when such a defect that is not completely disconnected occurs, the resistance value can be changed by the high current supply process.

  Next, the second voltage is detected with high accuracy by the second process as in the first process. Then, if there is a difference between the first voltage and the second voltage, it is considered that the resistance value of the inspection object has changed due to the high current supply process, and therefore it is considered that the inspection object has a defect. Therefore, the determination unit can determine pass / fail based on the first voltage and the second voltage. Therefore, according to these configurations, it is easy to improve the inspection accuracy while reducing the cost of the inspection jig by the two-terminal method using the two contacts of the contact and the contact.

  In addition, the determination unit calculates a resistance value between the inspection point and the other inspection point based on the first voltage as a first resistance value, and determines the inspection point and the other resistance based on the second voltage. It is preferable to calculate a resistance value between the inspection point as a second resistance value and determine the quality based on a difference between the first resistance value and the second resistance value.

  According to this configuration, the resistance value to be inspected before and after the high current supply process is calculated as the first and second resistance values, and pass / fail is determined based on the difference between the first resistance value and the second resistance value. Therefore, the accuracy of the pass / fail judgment is improved.

  The first processing unit further includes a current detection unit that detects a current flowing between the second main body side connection terminal and the second main body side pair terminal, and the first processing unit further includes the first processing unit in the first processing. The current detected by the current detection unit during the period during execution of the process is acquired as a first current, and the second processing unit further includes the second process in the execution of the second process. A current detected by the current detection unit during a period is acquired as a second current, and the determination unit determines whether the current between the inspection point and the other inspection point is based on the first voltage and the first current. A resistance value is calculated as a first resistance value, a resistance value between the inspection point and the other inspection point is calculated as a second resistance value based on the second voltage and the second current, and the first resistance value is calculated. The quality is determined based on a difference between the resistance value and the second resistance value. It is preferable to determine.

  According to this configuration, the current that actually flows when the first voltage is detected is detected as the first current, and the current that actually flows when the second voltage is detected is detected as the second current. Therefore, the first resistance value is calculated based on the first voltage and the first current, and the second resistance value is calculated based on the second voltage and the second current, thereby calculating the first and second resistance values. Will improve. As a result, the pass / fail judgment accuracy is improved.

  The inspection jig is preferably further provided.

  According to this configuration, the substrate inspection apparatus includes the inspection jig.

  Further, an inspection jig according to the present invention is an inspection jig connected to the connection portion in the substrate inspection apparatus described above, and a contact that contacts an inspection point provided on a substrate to be inspected, First and second jig terminals connected to the contact are provided.

  According to this configuration, since the two first and second jig terminals are connected to the contact, the branch of the current path connecting the contact and the first and second jig terminals occurs, and the first In the second process, the same effect as when the four-terminal method is performed on the branch point can be obtained, and the detection accuracy of the first and second voltages can be improved. In the high current supply process, the currents supplied from the first and second jig terminals can be merged and supplied to the contacts. As a result, it is possible to increase the current that flows to the inspection object that contacts the contact, and when the predetermined failure mode occurs in the inspection object, it is possible to change the resistance value of the inspection object. As a result, it is easy to improve the inspection accuracy while reducing the cost of the inspection jig by the two-terminal method using one contact that contacts one inspection point.

  Moreover, the inspection jig according to the present invention is an inspection jig for connecting a contact that contacts an inspection point provided on a substrate to be inspected to a substrate inspection apparatus for inspecting the substrate. The contactor and a plurality of jig terminals for connecting the contactor to the substrate inspection apparatus.

  According to this configuration, since a plurality of jig terminals are connected to the contactor, a branch of a current path connecting the contactor and the plurality of jig terminals occurs, and the branching occurs in the first and second processes. The same effect as that obtained by executing the four-terminal method on the point can be obtained, and the detection accuracy of the first and second voltages can be improved. Further, in the high current supply process, the currents supplied from the plurality of jig terminals can be merged and supplied to the contacts. As a result, it is possible to increase the current that flows to the inspection object that contacts the contact, and when the predetermined failure mode occurs in the inspection object, it is possible to change the resistance value of the inspection object. As a result, it is easy to improve the inspection accuracy while reducing the cost of the inspection jig by the two-terminal method using one contact that contacts one inspection point.

  The two-terminal jig 3Ub (inspection jig) configured as described above is a single board inspection apparatus in the substrate inspection apparatus 1, and includes an inspection jig for the four-terminal method and an inspection for the two-terminal method. The board inspection accuracy in the case of using the two-terminal jig 3Ub for the two-terminal method can be improved while the jig can be used. Further, the two-terminal jig 3Ub (inspection jig) and the two-terminal pair jig 3Dc (pair inspection jig) configured as described above are inspected by the two-terminal method in the substrate inspection apparatus 1a. The inspection accuracy can be improved while reducing the cost.

  FIG. 10 is a perspective view showing an example of the appearance of the two-terminal jig 3Ub and the two-terminal pair jig 3Dc. In the two-terminal jig 3Ub shown in FIG. 10A, the probe Pr3 and the connection terminal Ta3 are connected by a wiring 34, and the connection terminal Ta3 and the connection terminal Ta4 are connected by a crossover wiring 34a. In this case, the connection point between the connection terminal Ta3 and the crossover wiring 34a is the branch point P1. Note that the two-terminal jig 3Ub is not limited to the example shown in FIG. For example, two wires 34 may be connected to each probe Pr3, and each wire 34 may be connected to the connection terminals Ta3 and Ta4, or another wiring method may be used.

  In the two-terminal pair jig 3Dc shown in FIG. 10B, the pair probe Ps3 and the pair connection terminal Ts3 are connected by the wiring 34, and the pair connection terminal Ts3 and the pair connection terminal Ts4 are connected by the crossover wiring 34a. Yes. In this case, the connection point between the pair connection terminal Ts3 and the crossover wiring 34a is the branch point P2. The two-terminal pair jig 3Dc is not limited to the example shown in FIG. For example, two wires 34 may be connected to each pair of probes Ps3, and each wire 34 may be connected to the pair connection terminals Ts3 and Ta4, or another wiring method may be used.

1, 1a Substrate inspection device 2, 2a Inspection device body 3, 3U, 3D Inspection jig 3Da Four-terminal pair jig 3Db Two-terminal pair jig 3Dc Two-terminal pair jig (pair inspection jig)
3Ua Four-terminal jig 3Ub Two-terminal jig (inspection jig)
21 1st current supply part 22 2nd current supply part 23 Voltage detection part 24 Input part 25, 25a Control part 26 Current detection part 34 Wiring 35U, 35D Connector 41U, 41D Connector (connection part)
51 First Processing Unit 52 High Current Supply Processing Unit 53 Second Processing Unit 54 Determination Unit 100 Substrate 101, 102 Land (Inspection Point)
103 cylindrical section 251 mode control section 252 determination section I1 first current I2 second current Ia, Ib current P wiring patterns P1, P2 branch point Pr probe Pr1 probe (first probe)
Pr2 probe (second probe)
Pr3 probe (third probe, contact)
Ps pair probe Ps1 pair probe (first pair probe)
Ps2 pair probe (second pair probe)
Ps3 pair probe (third probe, pair contact)
R1 first resistance value R2 second resistance value Ref reference value Rx resistance values SW1 to SW4 switching element Ta connection terminal Ta1 connection terminal (first connection terminal)
Ta2 connection terminal (second connection terminal)
Ta3 connection terminal (third connection terminal, first jig terminal)
Ta4 connection terminal (4th connection terminal, 2nd jig terminal)
Tb1 body side connection terminal (first body side connection terminal)
Tb2 Body side connection terminal (second body side connection terminal)
Tc1 Body side pair connection terminal (first body side pair terminal)
Tc2 Body side connection terminal (2nd body side pair terminal)
TH1, TH2 Through-hole Ts Pair connection terminal Ts1 Pair connection terminal (First pair connection terminal)
Ts2 pair connection terminal (second pair connection terminal)
Ts3 pair connection terminal (third pair connection terminal, first pair jig terminal)
Ts4 pair connection terminal (second jig terminal)
V1 First voltage V2 Second voltage X Missing

Claims (5)

A four-terminal jig comprising first and second probes that contact inspection points provided on a substrate to be inspected, and first and second connection terminals connected to the first and second probes, respectively. A two-terminal jig having a third probe that contacts an inspection point provided on a substrate to be inspected and third and fourth connection terminals connected to the third probe can be selectively detached. With a good connection,
A four-terminal mode for inspecting the substrate based on a four-terminal method using the first and second probes when the four-terminal jig is connected to the connection; and An inspection main body capable of executing a two-terminal mode for inspecting the substrate based on a two-terminal method using the third probe when a terminal jig is connected;
The connecting portion is
When the four-terminal jig is connected, the first and second main body side connection terminals that can be connected to the first and second connection terminals, respectively, are provided, and the first and second main body side connection terminals are the two terminals. When the jig is connected, it can be connected to the third and fourth connection terminals,
The inspection body part is:
First and second current supply units capable of supplying current to the first and second body side connection terminals, respectively;
A voltage detector for detecting the voltage;
When executing the two-terminal mode, the first and second current supply units supply current to the first and second main body side connection terminals, respectively, and the voltage detection unit connects the first and second main body side connections. When the voltage of at least one of the terminals is detected and the four-terminal mode is executed, a current is supplied to the second main body side connection terminal by the second current supply unit, and the first main body by the first current supply unit A board inspection apparatus comprising: a mode control unit that prohibits current supply to the side connection terminal and causes the voltage detection unit to detect the voltage of the first main body side connection terminal. The connection unit further includes first and second pair probes that contact other inspection points that are paired with the inspection point, and first and second pair connections that are connected to the first and second pair probes, respectively. A four-terminal pair jig provided with a terminal and used as a pair with the four-terminal jig, a third pair probe that contacts another inspection point paired with the inspection point, and the third pair probe A third pair of connection terminals connected to the two-terminal jig, and configured to be detachable from the two-terminal pair jig used as a pair, the first pair of connection terminals and the first A first body-side pair terminal that can be selectively connected to a three-pair connection terminal; and a second body-side pair terminal that can be connected to the second pair connection terminal;
The mode control unit further includes:
When executing the two-terminal mode, the first and second current supply sections cause the current to flow between the first and second body-side connection terminals and the first body-side pair terminal, and the voltage The detection unit detects a voltage between at least one of the first and second main body side connection terminals and the first main body side counter terminal,
When executing the four-terminal mode, the second current supply unit causes the current to flow between the second main body side connection terminal and the second main body side pair terminal, and the voltage detection unit causes the first current to flow. The substrate inspection apparatus according to claim 1, wherein a voltage between a main body side connection terminal and the first main body side counter terminal is detected. The two-terminal jig further includes a third pair probe that contacts another inspection point paired with the inspection point, and a third pair connection terminal connected to the third pair probe,
The connection portion further includes a first body-side pair terminal that can be connected to the third pair connection terminal,
The mode control unit further includes:
When executing the two-terminal mode, the first and second current supply sections cause the current to flow between the first and second body-side connection terminals and the first body-side pair terminal, and the voltage The substrate inspection apparatus according to claim 1, wherein a voltage between at least one of the first and second main body side connection terminals and the first main body side pair terminal is detected by the detection unit.   The substrate inspection apparatus according to claim 1, wherein currents supplied by the first and second current supply units are substantially equal to each other. An inspection jig used as the two-terminal jig in the board inspection apparatus according to claim 1,
An inspection jig comprising a third probe that contacts an inspection point provided on a substrate to be inspected, and third and fourth connection terminals connected to the third probe.

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