JP4417762B2 - Circuit wiring inspection method and apparatus - Google Patents

Circuit wiring inspection method and apparatus Download PDF

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JP4417762B2
JP4417762B2 JP2004113744A JP2004113744A JP4417762B2 JP 4417762 B2 JP4417762 B2 JP 4417762B2 JP 2004113744 A JP2004113744 A JP 2004113744A JP 2004113744 A JP2004113744 A JP 2004113744A JP 4417762 B2 JP4417762 B2 JP 4417762B2
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end points
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signal
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JP2005300240A (en
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義典 佐藤
和俊 細谷
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Hioki EE Corp
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本発明は回路配線検査方法およびその装置に関し、さらに詳しく言えば、幹配線から分岐されている複数の枝配線の断線および枝配線間の短絡の有無を検査する技術に関するものである。   The present invention relates to a circuit wiring inspection method and an apparatus therefor, and more specifically, to a technique for inspecting the disconnection of a plurality of branch wirings branched from a trunk wiring and the presence or absence of a short circuit between the branch wirings.

回路配線の検査項目の一つに配線パターンの断線(オープン)検査と、隣接する配線パターン間の短絡(ショート)検査とがある。すなわち、回路基板に隣接して形成されている配線パターンがある場合、断線検査は各配線パターンの端点間の各抵抗値Rを測定しR≒0であれば断線なし、R≒∞であれば断線ありと判定される。   One inspection item of circuit wiring is a wiring pattern disconnection (open) inspection and a short-circuit inspection between adjacent wiring patterns. That is, when there is a wiring pattern formed adjacent to the circuit board, the disconnection inspection measures each resistance value R between the end points of each wiring pattern, and if R≈0, there is no disconnection; if R≈∞, It is determined that there is a break.

また、配線パターン間の短絡検査は一方の配線パターンの端点と他方の配線パターンの端点との間の抵抗値Rを測定しR≒∞であればパターン間に短絡なし、R≒0であればパターン間に短絡ありと判定される。   In addition, the short-circuit inspection between the wiring patterns is performed by measuring the resistance value R between the end point of one wiring pattern and the end point of the other wiring pattern, and if R≈∞, there is no short circuit between the patterns, and if R≈0. It is determined that there is a short circuit between the patterns.

ところで、例えばスルーホールを有する両面回路基板(多層回路基板)においては、図3(a)に示すように幹配線Mから複数の枝配線P1〜PNが分岐して引き出されている回路パターンがよく見掛けられる。   By the way, for example, in a double-sided circuit board (multilayer circuit board) having through holes, a circuit pattern in which a plurality of branch wirings P1 to PN are branched out from the trunk wiring M as shown in FIG. It can be seen.

すなわち、枝配線P1〜PNの各々が回路基板の表裏両面で図示しないスルーホールを介してつなげられる配線であるとすると、電解めっきによってそのスルーホール内にめっき配線を形成する場合、各枝配線P1〜PNに対して共通に電解めっき用の幹配線Mが形成される。なお、幹配線Mは捨て基板部に形成され最終的に各枝配線P1〜PNから切り離される。   That is, assuming that each of the branch wirings P1 to PN is a wiring that is connected to both front and back surfaces of the circuit board through a through hole (not shown), when the plating wiring is formed in the through hole by electrolytic plating, each branch wiring P1 A trunk wiring M for electrolytic plating is formed in common for PN. Note that the trunk wiring M is formed on the discarded substrate portion and is finally disconnected from the branch wirings P1 to PN.

この場合、枝配線P1〜PNはそれらの各一端(幹側端点)が幹配線Mにより相互に接続されているが、やはり抵抗測定により各枝配線P1〜PNの断線検査と枝配線間の短絡検査とが行われる。例えば、図3(a)に示すように隣接する枝配線P1とP2の断線・短絡を検査するには、それらの反幹側端点P1aとP2a間の抵抗値を低抵抗測定器にて測定する。   In this case, each of the branch wirings P1 to PN is connected to the trunk wiring M at one end thereof (the trunk side end point). Inspection is performed. For example, as shown in FIG. 3A, in order to inspect the disconnection / short circuit of the adjacent branch wirings P1 and P2, the resistance value between the opposite trunk end points P1a and P2a is measured by a low resistance measuring instrument. .

そして、その測定値Rと、あらかじめ設定されている所定のしきい値±Thとを比較することにより、断線・短絡の有無が検査される。なお、しきい値±Thは良品基板から得た基準値に基づいて設定される。   Then, by comparing the measured value R with a predetermined threshold value ± Th set in advance, the presence / absence of disconnection / short circuit is inspected. The threshold value ± Th is set based on a reference value obtained from a non-defective substrate.

すなわち、図3(b)に示すように枝配線P1,P2間が短絡していると、抵抗値Rが低くなりしきい値±Thから外れる。これにより枝配線間に短絡ありと判定される。また、図3(c)に示すようにいずれか一方の枝配線(この例では枝配線P2)が断線していればR≒∞となるため、これをもって断線ありと判定される。   That is, as shown in FIG. 3B, when the branch wirings P1 and P2 are short-circuited, the resistance value R becomes low and deviates from the threshold value ± Th. Thereby, it is determined that there is a short circuit between the branch wirings. Further, as shown in FIG. 3C, if any one of the branch wirings (branch wiring P2 in this example) is disconnected, R≈∞, so that it is determined that there is a disconnection.

抵抗測定は、抵抗測定器の測定プローブを配線パターンの端点に接触させることにより行われるが、図3(d)に模式的に示すように、例えば端点P1aに対するプローブの接触位置が良品基板から基準値を得た際には図示実線位置であるのに対して、実際の検査時に図示鎖線位置のようにずれるとプローブ間の抵抗値が変わってしまうため、正確な測定ができず判定ミスが生ずることがある。   The resistance measurement is performed by bringing the measurement probe of the resistance measuring instrument into contact with the end point of the wiring pattern. As schematically shown in FIG. 3D, for example, the contact position of the probe with respect to the end point P1a is the reference from the non-defective substrate. When the value is obtained, it is the position indicated by the solid line, but if it is shifted as indicated by the chain line position during actual inspection, the resistance value between the probes changes, so that accurate measurement cannot be performed and a determination error occurs. Sometimes.

また、プローブの接触位置に上記のようなずれがなく、正確に配線パターンの抵抗値が測定できたとしても、配線パターン形成時の製造誤差(線幅のばらつきなど)が大きいと、基準値に対する最適なしきい値を設定することが困難となる。   Further, even if the probe contact position does not have the above-described deviation and the resistance value of the wiring pattern can be measured accurately, if a manufacturing error (such as variation in line width) at the time of wiring pattern formation is large, It becomes difficult to set an optimum threshold value.

ちなみに、配線パターン形成時の製造誤差により、例えば線幅が広く形成された場合には、短絡してしまっているパターンの抵抗値とほぼ同値になることがあり、このような場合にはしきい値を設定できなくなる。   By the way, due to manufacturing errors at the time of wiring pattern formation, for example, when the line width is wide, it may be almost the same as the resistance value of the short-circuited pattern. The value cannot be set.

一例として、配線パターンの抵抗値100mΩを基準として、そのしきい値を±10%の90〜110mΩに設定したとして、例えば120mΩ位の抵抗値をもつ配線パターンが隣の配線パターンと短絡して110mΩになると、短絡しているにもかかわらず良品と判断されることになる。   As an example, if the resistance value of a wiring pattern is set to 100 mΩ as a reference and the threshold value is set to 90 to 110 mΩ of ± 10%, for example, a wiring pattern having a resistance value of about 120 mΩ is short-circuited to an adjacent wiring pattern to 110 mΩ. If it becomes, it will be judged that it is non-defective although it is short-circuited.

また、しきい値を設定するうえで、あらかじめ良品である配線パターンをもった回路基板をビジュアル検査などにより探し出して、その抵抗値を測定しておく必要があるため、作成された回路基板の検査を1枚目から行うことができない。   In addition, when setting the threshold value, it is necessary to find a circuit board with a non-defective wiring pattern in advance by visual inspection and measure its resistance value. Cannot be performed from the first sheet.

さらに、抵抗測定による短絡検出は微小な抵抗変化を捉える必要があるため、測定プローブの接触抵抗の影響が問題となる。そのため、微小抵抗の測定には4端子法が用いられるが4端子法の測定プローブは他のプローブよりも高価であり、また、狭いピッチの配線パターンへのプロービングが困難となる。   Furthermore, since the short circuit detection by resistance measurement needs to capture a minute resistance change, the influence of the contact resistance of the measurement probe becomes a problem. For this reason, the four-terminal method is used for measuring minute resistance, but the measurement probe of the four-terminal method is more expensive than other probes, and probing to a wiring pattern with a narrow pitch becomes difficult.

これらの問題点を解決するため、本出願人は特許文献1において次のような発明を提案している。図4を参照して、特許文献1による発明では幹配線Mに接続されている複数の枝配線P1〜PNの隣接する枝配線間の短絡および断線を検査するにあたって、電圧発生器11により一方の枝配線P1の反幹側端点P1aに電圧を印加した状態の下で、幹配線M上の所定箇所に電圧測定基準点Xを設定し、電圧計21,22にて他方の枝配線P2の反幹側端点P2aと電圧測定基準点Xとの間の電圧V1と、同じく他方の枝配線P2の幹側端点P2bと電圧測定基準点Xとの間の電圧V2とを測定し、これらの電圧V1,V2により短絡・断線の有無を判断するようにしている。   In order to solve these problems, the present applicant has proposed the following invention in Patent Document 1. Referring to FIG. 4, in the invention according to Patent Document 1, when inspecting a short circuit and disconnection between adjacent branch wirings of a plurality of branch wirings P <b> 1 to PN connected to the trunk wiring M, one voltage generator 11 is used. A voltage measurement reference point X is set at a predetermined location on the trunk wiring M under a state in which a voltage is applied to the opposite trunk end point P1a of the branch wiring P1, and the voltmeters 21 and 22 counteract the other branch wiring P2. The voltage V1 between the trunk side end point P2a and the voltage measurement reference point X and the voltage V2 between the trunk side end point P2b of the other branch wiring P2 and the voltage measurement reference point X are measured, and these voltages V1 , V2 is used to determine whether or not there is a short circuit / disconnection.

これによれば、配線パターンの端点に対するプロービング位置によって検査精度が左右されることなく、高精度の検査を行うことができる。また、あらかじめ良品基板から判定基準となるデータを収集する必要がないため、作成された回路基板の1枚目から隣接パターンの断線・短絡検査を行うことができる。   According to this, high-precision inspection can be performed without the inspection accuracy being affected by the probing position with respect to the end point of the wiring pattern. In addition, since it is not necessary to collect data that is a criterion for determination from non-defective substrates in advance, it is possible to perform a disconnection / short circuit inspection of an adjacent pattern from the first circuit board that is created.

さらには、測定プローブの接触抵抗による影響を受けないため、通常の安価な測定プローブを使用でき、しかも4端子法のように1ラインに付き4本の測定プローブをプロービングする必要もないため、狭いピッチの配線パターンの測定も容易にできる。   Furthermore, since it is not affected by the contact resistance of the measurement probe, a normal inexpensive measurement probe can be used, and it is not necessary to probe four measurement probes per line as in the 4-terminal method, so that it is narrow. Pitch wiring patterns can be easily measured.

特開2003−255007号公報JP 2003-255007 A

しかしながら、上記特許文献1による発明にも次のような問題がある。すなわち、幹配線Mには図4の想像線枠で示すようにレジスト膜が設けられていることが多い。したがって、このような場合には上記電圧測定基準点Xや枝配線の幹側端点にプロービングすることが不可能で短絡・断線の検査を行うことができないことになる。   However, the invention according to Patent Document 1 has the following problems. That is, the trunk wiring M is often provided with a resist film as shown by an imaginary line frame in FIG. Therefore, in such a case, it is impossible to probe the voltage measurement reference point X and the trunk side end point of the branch wiring, and it is impossible to inspect the short circuit / disconnection.

したがって、本発明の課題は、幹配線から複数の枝配線が引き出されている回路配線において、幹配線がレジスト膜により覆われている場合においても各枝配線の断線・短絡検査を行えるようにすることにある。   Accordingly, an object of the present invention is to enable disconnection / short-circuit inspection of each branch wiring even when the trunk wiring is covered with a resist film in the circuit wiring in which a plurality of branch wirings are drawn from the trunk wiring. There is.

上記課題を解決するため、本願の請求項1に係る発明は、幹配線と、上記幹配線から枝状に引き出されている複数の枝配線とを含み、上記枝配線の各々に実装部品のリード電極接続用もしくは信号の入出力部として用いられるランドとしての2つの端点が設けられている回路配線を検査対象とし、上記幹配線にプロービングすることなく、上記各枝配線の上記2つの端点間の断線の有無および隣接する2つの上記枝配線のうちの一方の枝配線側の2つの端点間と他方の枝配線側の2つの端点間との間の短絡の有無をそれぞれ検査する回路配線検査方法において、信号出力検出部を含む検査信号発生手段と検査信号検出手段とを備え、上記検査信号発生手段を上記一方の枝配線側の2つの端点間に接続して信号発生状態にするとともに、上記検査信号検出手段を上記他方の枝配線側の2つの端点間に接続し、上記信号出力検出部にて上記検査信号発生手段から上記一方の枝配線側の2つの端点間に供給される検査信号が検出されないときには上記一方の枝配線側の2つの端点間に断線有りと判定し、上記検査信号検出手段により上記他方の枝配線側の2つの端点間で上記検査信号が検出された場合には上記他方の枝配線側の2つの端点間と上記一方の枝配線側の2つの端点間との間に短絡有りと判定することを特徴としている。 In order to solve the above-described problem, an invention according to claim 1 of the present application includes a trunk wiring and a plurality of branch wirings led out from the trunk wiring in a branch shape, and each of the branch wirings has a lead of a mounting component. A circuit wiring provided with two end points as lands used for electrode connection or as signal input / output units is to be inspected, and without probing to the main wiring, between the two end points of each branch wiring. Circuit wiring inspection method for inspecting presence / absence of disconnection and presence / absence of short circuit between two end points on one branch wiring side and between two end points on the other branch wiring side of the two adjacent branch wirings The inspection signal generation means including a signal output detection unit, and an inspection signal detection means, and connecting the inspection signal generation means between the two end points on the one branch wiring side to make a signal generation state, the above Inspection signal detecting means is connected between the two end points on the other branch wiring side, and an inspection signal supplied between the two end points on the one branch wiring side from the inspection signal generating means in the signal output detection unit Is detected, it is determined that there is a break between the two end points on the one branch wiring side, and if the inspection signal is detected between the two end points on the other branch wiring side by the inspection signal detection means, It is characterized in that a short circuit is determined between the two end points on the other branch wiring side and between the two end points on the one branch wiring side.

また、上記課題を解決するため、本願の請求項2に係る発明は、幹配線と、上記幹配線から枝状に引き出されている複数の枝配線とを含み、上記枝配線の各々に実装部品のリード電極接続用もしくは信号の入出力部として用いられるランドとしての2つの端点が設けられている回路配線を検査対象とし、上記幹配線にプロービングすることなく、上記各枝配線の上記2つの端点間の断線の有無および隣接する第1,第2の2つの上記枝配線のうちの第1枝配線側の2つの端点間と第2枝配線側の2つの端点間との間の短絡の有無をそれぞれ検査する回路配線検査方法において、信号出力検出部を含む検査信号発生手段と検査信号検出手段とを備え、上記検査信号発生手段を上記第1枝配線のうちの反幹配線側に位置する一方の端点と所定の第3枝配線との間に接続して信号発生状態にするとともに、上記検査信号検出手段を上記他方の枝配線側の2つの端点間に接続し、上記信号出力検出部にて上記第1枝配線の上記一方の端点と上記第3枝配線との間に供給される検査信号が検出されないときには上記第1枝配線側の2つの端点間に断線有りと判定し、上記検査信号検出手段により上記他方の枝配線の2つの端点間で上記検査信号が検出された場合には上記他方の枝配線側の2つの端点間と上記一方の枝配線側の2つの端点間との間に短絡有りと判定することを特徴としている。 In order to solve the above problems, the invention according to claim 2 of the present application may include a trunk line and a plurality of branch wirings that are drawn to branch from the main wiring, mounted parts to each of the branch wirings The circuit wiring provided with two end points as lands used for connecting lead electrodes or as signal input / output parts is to be inspected, and the two end points of each branch wiring are not probed into the main wiring. And whether there is a short circuit between two end points on the first branch wiring side and between two end points on the second branch wiring side of the adjacent first and second branch wirings. In the circuit wiring inspection method, the inspection signal generation means including a signal output detection unit and the inspection signal detection means are provided, and the inspection signal generation means is positioned on the anti-trunk wiring side of the first branch wiring. One end point and a given The test signal detection means is connected between two end points on the other branch wiring side and connected to the three branch wirings, and the first branch wiring is connected by the signal output detection unit. When the inspection signal supplied between the one end point of the first branch wiring and the third branch wiring is not detected, it is determined that there is a disconnection between the two end points on the first branch wiring side, and the inspection signal detecting means detects the other If the inspection signal is detected between two end points of the other branch wiring, it is determined that there is a short circuit between the two end points on the other branch wiring side and between the two end points on the one branch wiring side. It is characterized by doing.

本願の請求項3に係る発明は、上記検査信号発生手段が電流発生器で、上記検査信号検出手段が電圧測定器であることを特徴としている。また、本願の請求項4に係る発明は、上記検査信号発生手段が電圧発生器で、上記検査信号検出手段が電圧測定器であることを特徴とし、本願の請求項5に係る発明は、上記信号出力検出部に電流検出抵抗が用いられることを特徴としている。   The invention according to claim 3 of the present application is characterized in that the inspection signal generating means is a current generator and the inspection signal detecting means is a voltage measuring device. The invention according to claim 4 of the present application is characterized in that the test signal generating means is a voltage generator and the test signal detecting means is a voltage measuring device, and the invention according to claim 5 of the present application is the above-described invention. A current detection resistor is used for the signal output detection unit.

また、上記課題を解決するため、本願の請求項6に係る発明は、幹配線と、上記幹配線から枝状に引き出されている複数の枝配線とを含み、上記枝配線の各々に実装部品のリード電極接続用もしくは信号の入出力部として用いられるランドとしての2つの端点が設けられている回路配線を検査対象とし、上記幹配線にプロービングすることなく、上記各枝配線の上記2つの端点間の断線の有無および隣接する2つの上記枝配線のうちの一方の枝配線側の2つの端点間と他方の枝配線側の2つの端点間との間の短絡の有無をそれぞれ検査する回路配線検査装置において、信号出力検出部を含み上記一方の枝配線側の2つの端点間に検査信号を供給する検査信号発生手段と、上記他方の枝配線側の2つの端点間に接続される検査信号検出手段と、上記信号出力検出部および上記検査信号検出手段からの検出信号に基づいて断線,短絡の有無を判定する制御手段とを備えていることを特徴としている。 In order to solve the above problems, the invention according to claim 6 of the present application includes a main wiring, and a plurality of branch wirings that are drawn to branch from the main wiring, mounted parts to each of the branch wirings The circuit wiring provided with two end points as lands used for connecting lead electrodes or as signal input / output parts is to be inspected, and the two end points of each branch wiring are not probed into the main wiring. Circuit wiring for inspecting whether there is a disconnection between them and whether there is a short circuit between two end points on one branch wiring side and between two end points on the other branch wiring side of the two adjacent branch wirings In the inspection apparatus, an inspection signal generating means that includes a signal output detector and supplies an inspection signal between the two end points on the one branch wiring side, and an inspection signal connected between the two end points on the other branch wiring side Detection means; Serial signal output detector and disconnection on the basis of the detection signal from the test signal detecting means, is characterized in that it comprises a determining control means the presence or absence of a short circuit.

また、上記課題を解決するため、本願の請求項7に係る発明は、幹配線と、上記幹配線から枝状に引き出されている複数の枝配線とを含み、上記枝配線の各々に実装部品のリード電極接続用もしくは信号の入出力部として用いられるランドとしての2つの端点が設けられている回路配線を検査対象とし、上記幹配線にプロービングすることなく、上記各枝配線の上記2つの端点間の断線の有無および隣接する2つの上記枝配線のうちの一方の枝配線側の2つの端点間と他方の枝配線側の2つの端点間との間の短絡の有無をそれぞれ検査する回路配線検査装置において、信号出力検出部を含み上記一方の枝配線のうちの反幹配線側に位置する一方の端点と所定の第3枝配線との間に検査信号を供給する検査信号発生手段と、上記他方の枝配線側の2つの端点間に接続される検査信号検出手段と、上記信号出力検出部および上記検査信号検出手段からの検出信号に基づいて断線,短絡の有無を判定する制御手段とを備えていることを特徴としている。 In order to solve the above-mentioned problem, an invention according to claim 7 of the present application includes a trunk wiring and a plurality of branch wirings led out from the trunk wiring in a branch shape, and each of the branch wirings is mounted. The circuit wiring provided with two end points as lands used for connecting lead electrodes or as signal input / output parts is to be inspected, and the two end points of each branch wiring are not probed into the main wiring. Circuit wiring for inspecting whether there is a disconnection between them and whether there is a short circuit between two end points on one branch wiring side and between two end points on the other branch wiring side of the two adjacent branch wirings In the inspection apparatus, an inspection signal generating unit that includes a signal output detection unit and supplies an inspection signal between one end point located on the anti-trunk wiring side of the one branch wiring and a predetermined third branch wiring; The other branch wiring side Inspection signal detection means connected between two end points, and control means for determining the presence or absence of a disconnection or a short circuit based on detection signals from the signal output detection unit and the inspection signal detection means It is said.

本願の請求項8に係る発明は、上記制御手段は上記信号出力検出部からの出力信号が上記検査信号を非検出とする信号である場合には上記一方の枝配線側の2つの端点間に断線有りと判定し、上記検査信号検出手段にて上記検査信号が検出された場合には上記他方の枝配線側の2つの端点間と上記一方の枝配線側の2つの端点間との間に短絡有りと判定することを特徴としている。   The invention according to claim 8 of the present application is that, when the output signal from the signal output detection unit is a signal that does not detect the inspection signal, the control means is between two end points on the one branch wiring side. When it is determined that there is a disconnection and the inspection signal is detected by the inspection signal detection means, between the two end points on the other branch wiring side and between the two end points on the one branch wiring side It is characterized by determining that there is a short circuit.

本願の請求項9に係る発明は、上記検査信号発生手段が電流発生器で、上記検査信号検出手段が電圧測定器であり、上記信号出力検出部に電流検出抵抗が用いられることを特徴としている。   The invention according to claim 9 of the present application is characterized in that the inspection signal generation means is a current generator, the inspection signal detection means is a voltage measurement device, and a current detection resistor is used for the signal output detection section. .

本発明によれば、検査信号発生手段および検査信号検出手段を各枝配線の端点に接続すればよく、幹配線にはプロービングする必要がないため、幹配線がレジスト膜により覆われていても各枝配線の断線・短絡を検査することができる。   According to the present invention, the inspection signal generation means and the inspection signal detection means need only be connected to the end points of each branch wiring, and it is not necessary to perform probing on the trunk wiring. Therefore, even if the trunk wiring is covered with a resist film, It is possible to inspect for disconnection / short circuit of branch wiring.

また、製品基板側に残されて実際に使用される各枝配線の端点間の断線の有無および隣接する2つの枝配線の一方の端点間と他方の端点間との間の短絡の有無を確実に検査することができる。   In addition, it is ensured that there is no disconnection between the end points of each branch wiring that is left on the product substrate side and is actually used, and whether there is a short circuit between one end point of the two adjacent branch wirings and the other end point. Can be inspected.

次に、本発明を図1の第1実施例および図2の第2実施例により説明するが、本発明はこれに限定されるものではない。   Next, the present invention will be described with reference to the first embodiment of FIG. 1 and the second embodiment of FIG. 2, but the present invention is not limited to this.

図1(a)は本発明が検査対象とする被検査回路配線の一例および本発明で使用する検査装置を示す模式図で、図1(b)に上記被検査回路配線が回路基板100に形成されている状態を斜視図状に模式的に示す。   FIG. 1A is a schematic view showing an example of a circuit wiring to be inspected by the present invention and an inspection apparatus used in the present invention. FIG. The state which is carried out is typically shown in a perspective view.

上記被検査回路配線には幹配線Mと同幹配線Mから枝状に引き出された複数の枝配線とが含まれているが、ここでは隣接する2つの枝配線P1,P2のみを示す。幹配線Mは各枝配線の部分に例えば電解めっきを施すために形成されるもので、この例では回路基板100の捨て基板部110に配線されており、最終的に回路基板100から切り離される。   The above-described circuit wiring to be inspected includes a trunk wiring M and a plurality of branch wirings drawn out from the trunk wiring M, but only two adjacent branch wirings P1 and P2 are shown here. The trunk wiring M is formed to perform, for example, electrolytic plating on each branch wiring portion. In this example, the trunk wiring M is wired to the discarded board portion 110 of the circuit board 100 and finally separated from the circuit board 100.

枝配線P1,P2はそれぞれ同一ライン上に2つの端点P1x,P1y;P2x,P2yを備えている。この例において回路基板100は両面基板で、一方の各端点P1x,P2xは基板表面101側に配置され、他方の各端点P1y,P2yは回路基板100の基板裏面102側に配置されている。なお、本発明には各枝配線にそれぞれ3つ以上の端点が設けられている場合も含まれる。   Each of the branch wirings P1 and P2 includes two end points P1x and P1y; P2x and P2y on the same line. In this example, the circuit board 100 is a double-sided board, one end point P1x, P2x is arranged on the substrate surface 101 side, and the other end point P1y, P2y is arranged on the substrate back surface 102 side of the circuit board 100. The present invention includes a case where each branch wiring has three or more end points.

枝配線P1側の端点P1xとP1yはスルーホール103内のめっき配線を介して接続されており、同じく枝配線P2側の端点P2xとP2yはスルーホール104内のめっき配線を介して接続されている。なお、端点とは実装部品のリード電極などに対する接続部もしくは信号の入出力部として用いられるランドであり、その形状は角形パターン,丸形パターンなど任意に設計されてよい。   The end points P1x and P1y on the branch wiring P1 side are connected via the plating wiring in the through hole 103, and the end points P2x and P2y on the branch wiring P2 side are similarly connected via the plating wiring in the through hole 104. . An end point is a land used as a connection part for a lead electrode of a mounted component or a signal input / output part, and its shape may be arbitrarily designed such as a square pattern or a round pattern.

本発明は各枝配線P1,P2が幹配線に接続された状態で、それらの断線・短絡を検査する。そのため、本発明の検査装置は信号出力検出部を含む検査信号発生手段,検査信号検出手段および制御手段を備えている。   In the present invention, in a state where the branch wirings P1 and P2 are connected to the main wiring, they are inspected for disconnection / short circuit. Therefore, the inspection apparatus of the present invention includes inspection signal generation means, inspection signal detection means, and control means including a signal output detection unit.

この例において、検査信号発生手段として電流発生器10を用いている。電流発生器10の場合、その信号出力検出部には一般的に電流検出抵抗11が用いられるが、通常、電流発生器10は抵抗を介して電流を出力するため、その出力側の抵抗を電流検出抵抗11として利用することができる。電流発生器10は直流,交流のいずれであってもよい。   In this example, the current generator 10 is used as the inspection signal generating means. In the case of the current generator 10, a current detection resistor 11 is generally used for the signal output detection unit. Usually, since the current generator 10 outputs a current through a resistor, the resistance on the output side is set as a current. It can be used as the detection resistor 11. The current generator 10 may be either direct current or alternating current.

この例において、検査信号検出手段には電圧測定器20が用いられている。また、制御手段としてはCPU(中央演算処理ユニット)やマイクロプロセッサそれにマイクロコンピュータなどいずれも使用可能であるが、ここでは制御手段を参照符号30が付されたブロックとして示す。   In this example, the voltage measuring device 20 is used as the inspection signal detecting means. As the control means, a CPU (Central Processing Unit), a microprocessor, or a microcomputer can be used. Here, the control means is shown as a block to which reference numeral 30 is attached.

制御手段30は電流発生器(検査信号発生手段)10と、電圧測定器(検査信号検出手段)20とから情報を得て断線・短絡の有無を判断し、その検査結果を表示手段31に表示する。表示手段31は液晶パネルなどのディスプレイやプリンタであってよい。   The control unit 30 obtains information from the current generator (inspection signal generation unit) 10 and the voltage measuring device (inspection signal detection unit) 20 to determine whether there is a disconnection or a short circuit, and displays the inspection result on the display unit 31. To do. The display means 31 may be a display such as a liquid crystal panel or a printer.

上記被検査回路配線に含まれている隣接する2つの枝配線P1,P2の断線・短絡を検査するにあたって、この第1実施例では電流発生器10から引き出されている2本の電流供給用プローブ10a,10bを一方の枝配線P1側の端点P1xとP1yとに接触させるとともに、電圧測定器20から引き出されている2本の電圧検出用プローブ20a,20bを他方の枝配線P2側の端点P2xとP2yとに接触させる。   When inspecting disconnection / short circuit of two adjacent branch wirings P1 and P2 included in the circuit wiring to be inspected, two current supply probes drawn from the current generator 10 in this first embodiment. 10a and 10b are brought into contact with the end points P1x and P1y on one branch wiring P1 side, and the two voltage detection probes 20a and 20b drawn from the voltage measuring device 20 are connected to the end point P2x on the other branch wiring P2 side. And P2y.

制御手段30は電流発生器10からの情報と電圧測定器20からの情報に基づいて枝配線P1,P2の断線・短絡の有無を判断する。すなわち、電流発生器10から電流が発生されている場合において、電流検出抵抗11に電圧が発生しており、かつ、電圧測定器20の読み値が0Vである場合には、一方の枝配線P1側の端点P1x,P1y間に電流I1が流れており、他方の枝配線P2側の端点P2x,P2y間には電流が流れていないことを意味する。   Based on information from the current generator 10 and information from the voltage measuring device 20, the control means 30 determines whether the branch wirings P <b> 1 and P <b> 2 are disconnected or short-circuited. That is, when a current is generated from the current generator 10, when a voltage is generated in the current detection resistor 11 and the reading value of the voltage measuring device 20 is 0V, one branch wiring P1 This means that the current I1 flows between the end points P1x and P1y on the side, and no current flows between the end points P2x and P2y on the other branch wiring P2 side.

したがって、制御手段30は一方の枝配線P1側の端点P1x,P1y間には断線なしと判定し、また、一方の枝配線P1側の端点P1x,P1y間と他方の枝配線側の端点P2x,P2y間との間に短絡なしと判定する。すなわち、良品と判定しその結果を表示手段31に表示する。   Therefore, the control means 30 determines that there is no disconnection between the end points P1x and P1y on the one branch wiring P1 side, and between the end points P1x and P1y on the one branch wiring P1 side and the end point P2x on the other branch wiring side. It is determined that there is no short circuit between P2y. That is, it is determined that the product is a non-defective product and the result is displayed on the display unit 31.

これに対して、電流検出抵抗11に電圧が発生していて電圧測定器20の読み値が0Vでない場合には、図1(a)に鎖線で示すように短絡箇所があり一方の枝配線P1側から他方の枝配線P2の端点P2x,P2y間に電流I2が流れていることを意味する。この短絡電流I2は枝配線P2から幹配線Mを介して枝配線P1側に戻される。   On the other hand, when a voltage is generated in the current detection resistor 11 and the reading value of the voltage measuring device 20 is not 0 V, there is a short-circuit portion as shown by a chain line in FIG. It means that the current I2 flows between the end points P2x and P2y of the other branch wiring P2 from the side. The short-circuit current I2 is returned from the branch wiring P2 to the branch wiring P1 via the trunk wiring M.

したがって、制御手段30は一方の枝配線P1側の端点P1x,P1y間と他方の枝配線P2側の端点P2x,P2y間との間に短絡があると判定し、表示手段31に不良品であることを表示する。   Therefore, the control means 30 determines that there is a short circuit between the end points P1x and P1y on the one branch wiring P1 side and between the end points P2x and P2y on the other branch wiring P2 side, and the display means 31 is defective. Display.

電流発生器10から電流が発生されているにもかかわらず電流検出抵抗11に電圧が発生していない場合、制御手段30は一方の枝配線P1側の端点P1x,P1y間に電流が流れていないためとして端点P1x,P1y間に断線有りと判定し、表示手段31に不良品であることを表示する。   When no current is generated in the current detection resistor 11 even though current is generated from the current generator 10, the control means 30 does not flow current between the end points P1x and P1y on the one branch wiring P1 side. For this reason, it is determined that there is a break between the end points P1x and P1y, and the display means 31 displays that the product is defective.

なお、電圧測定器20の読み値が0Vを示す要因として他方の枝配線P2側の端点P2x,P2y間が断線していることも考えられるため、枝配線P1,P2の検査が終了したら、次に枝配線P2とこれに隣接する図示しない枝配線P3とを検査する。これを順次繰り返す。   In addition, since it may be considered that the end points P2x and P2y on the other branch wiring P2 side are disconnected as a factor that the reading value of the voltage measuring device 20 indicates 0 V, the inspection of the branch wirings P1 and P2 is completed after the inspection. The branch wiring P2 and the branch wiring P3 (not shown) adjacent thereto are inspected. This is repeated sequentially.

次に、図2の第2実施例について説明する。この第2実施例においても、検査信号発生手段に電流発生器10を使用し、検査信号検出手段に電圧測定器20を使用する。なお、図2において制御手段30はその図示が省略されている。   Next, the second embodiment of FIG. 2 will be described. Also in the second embodiment, the current generator 10 is used as the inspection signal generating means, and the voltage measuring device 20 is used as the inspection signal detecting means. In FIG. 2, the control means 30 is not shown.

この第2実施例では、隣接する2つの枝配線P1,P2の断線・短絡を検査するにあたって、一方の枝配線P1を第1枝配線,他方の枝配線P2を第2枝配線とすると、これとは別に第3枝配線PNを利用する。第3枝配線PNは枝配線P1,P2の隣の枝配線であってもよいし末端に位置する枝配線でもよく、幹配線Mにつながっている枝配線であれば任意に選択されてよい。   In this second embodiment, when inspecting disconnection / short circuit of two adjacent branch wirings P1 and P2, if one branch wiring P1 is a first branch wiring and the other branch wiring P2 is a second branch wiring, Separately, the third branch wiring PN is used. The third branch wiring PN may be a branch wiring adjacent to the branch wirings P1 and P2, or may be a branch wiring positioned at the end, and may be arbitrarily selected as long as it is a branch wiring connected to the trunk wiring M.

電流発生器10の一方の電流供給用プローブ10aを第1,第2枝配線P1,P2のうちの第3枝配線PNから見て位置的に離れている方の枝配線の反幹配線M側の端点(この場合、第1枝配線P1の反幹配線M側の端点P1y)に接触させる。他方の電流供給用プローブ10bは第3枝配線PNに接触させる。第3枝配線PNに対する接触箇所は端点PNx,PNyのいずれでもよいが、幹配線M側の端点PNxが好ましい。   One of the current supply probes 10a of the current generator 10 is located on the side opposite to the main trunk line M of the branch wiring that is located far from the third branch wiring PN of the first and second branch wirings P1 and P2. (In this case, the end point P1y on the anti-trunk line M side of the first branch wiring P1). The other current supply probe 10b is brought into contact with the third branch wiring PN. The contact point with respect to the third branch wiring PN may be either the end point PNx or PNy, but the end point PNx on the main wiring M side is preferable.

電圧測定器20の電圧検出用プローブ20a,20bについては上記第1実施例と同じく第2枝配線P2の端点P2x,P2yに接触させる。断線・短絡の有無の判定の仕方は上記第1実施例と同じである。   The voltage detection probes 20a and 20b of the voltage measuring instrument 20 are brought into contact with the end points P2x and P2y of the second branch wiring P2 as in the first embodiment. The method for determining the presence or absence of disconnection / short circuit is the same as in the first embodiment.

すなわち、電流発生器10から電流が発生されている場合において、電流検出抵抗11に電圧が発生しており、かつ、電圧測定器20の読み値が0Vである場合には、第1枝配線P1の端点P1y→端点P1x→幹配線M→第3枝配線PNへと電流I3が流れ、第2枝配線P2側の端点P2x,P2y間には電流が流れていないことを意味する。   That is, when a current is generated from the current generator 10, a voltage is generated in the current detection resistor 11, and when the reading value of the voltage measuring device 20 is 0V, the first branch wiring P1. This means that the current I3 flows from the end point P1y to the end point P1x → the trunk line M → the third branch line PN, and no current flows between the end points P2x and P2y on the second branch line P2 side.

したがって、第1枝配線P1側の端点P1x,P1y間には断線なしと判定し、また、第1枝配線P1側の端点P1x,P1y間と第2枝配線側の端点P2x,P2y間との間に短絡なしと判定することができる。   Accordingly, it is determined that there is no disconnection between the end points P1x and P1y on the first branch wiring P1 side, and between the end points P1x and P1y on the first branch wiring P1 side and between the end points P2x and P2y on the second branch wiring side. It can be determined that there is no short circuit in between.

これに対して、電流検出抵抗11に電圧が発生していて電圧測定器20の読み値が0Vでない場合には、図2に鎖線で示すように短絡箇所があり第1枝配線P1側から第2枝配線P2の端点P2x,P2y間に電流I4が流れていることを意味する。この短絡電流I4は第2枝配線P2→幹配線M→第3枝配線PNへと流れる。したがって、第1枝配線P1側の端点P1x,P1y間と第2枝配線P2側の端点P2x,P2y間との間に短絡があると判定することができる。   On the other hand, when a voltage is generated in the current detection resistor 11 and the reading value of the voltage measuring device 20 is not 0 V, there is a short-circuited portion as shown by a chain line in FIG. It means that the current I4 flows between the end points P2x and P2y of the two-branch wiring P2. The short-circuit current I4 flows from the second branch wiring P2 → the trunk wiring M → the third branch wiring PN. Therefore, it can be determined that there is a short circuit between the end points P1x and P1y on the first branch wiring P1 side and the end points P2x and P2y on the second branch wiring P2 side.

また、電流発生器10から電流が発生されているにもかかわらず電流検出抵抗11に電圧が発生していない場合には、第1枝配線P1側の端点P1x,P1y間に電流が流れていないためであるとして端点P1x,P1y間に断線有りと判定してよい。第1枝配線P1と第2枝配線P2の検査が終了したら、上記第1実施例と同じくそのいずれか一方の枝配線とそれに隣接する枝配線との検査を行う。これを順次繰り返す。   When no current is generated in the current detection resistor 11 even though current is generated from the current generator 10, no current flows between the end points P1x and P1y on the first branch wiring P1 side. For this reason, it may be determined that there is a disconnection between the end points P1x and P1y. When the inspection of the first branch wiring P1 and the second branch wiring P2 is completed, the inspection of any one of the branch wirings and the branch wiring adjacent thereto is performed as in the first embodiment. This is repeated sequentially.

上記第1,第2実施例において、電流供給用プローブ10a,10bおよび電圧検出用プローブ20a,20bは、ピンボードに植設された固定プローブ,X−Y方向に移動可能なフライングプローブのいずれであってもよい。   In the first and second embodiments, the current supply probes 10a and 10b and the voltage detection probes 20a and 20b are either a fixed probe implanted in a pin board or a flying probe movable in the XY direction. There may be.

上記第2実施例において、フライングプローブを採用する場合には、第3枝配線PNを末端に配置されている枝配線とすることが好ましい。これによれば、他方の電流供給用プローブ10bを第3枝配線PNとそれに隣接する枝配線とを検査するときのみ他の枝配線に移動させればよいことになる。   In the second embodiment, when a flying probe is used, the third branch wiring PN is preferably a branch wiring arranged at the end. According to this, it is only necessary to move the other current supply probe 10b to another branch wiring when inspecting the third branch wiring PN and the branch wiring adjacent thereto.

上記第1,第2実施例では検査信号発生手段に電流発生器を使用しているが、電流発生器に代えて電圧発生器を用いてもよい。その場合においても、信号出力検出部として電流検出抵抗を使用することができる。   In the first and second embodiments, the current generator is used as the inspection signal generating means, but a voltage generator may be used instead of the current generator. Even in this case, a current detection resistor can be used as the signal output detection unit.

また、上記第1,第2実施例での被検査回路配線は図1(b)に示すようにスルーホール内配線を介して両面回路基板の表裏に跨って形成されているが、基板の片面に形成されている場合にも本発明にて検査可能である。   In addition, the circuit wiring to be inspected in the first and second embodiments is formed across the front and back surfaces of the double-sided circuit board via the through-hole wiring as shown in FIG. Even in the case of being formed, it can be inspected by the present invention.

(a)は本発明の第1実施例で検査対象とする被検査回路配線の一例および本発明で使用する検査装置を示す模式図、(b)は上記被検査回路配線が回路基板に形成されている状態を示す模式的な斜視図。(A) is a schematic diagram showing an example of a circuit wiring to be inspected in the first embodiment of the present invention and an inspection apparatus used in the present invention, and (b) is a diagram showing that the circuit wiring to be inspected is formed on a circuit board. FIG. 本発明の第2実施例を説明するための模式図。The schematic diagram for demonstrating 2nd Example of this invention. (a)〜(d)幹配線から分岐されている枝配線の抵抗測定法による断線・短絡検査を説明するため模式図。(A)-(d) The schematic diagram for demonstrating the disconnection and short circuit inspection by the resistance measuring method of the branch wiring branched from the trunk wiring. 幹配線から分岐されている枝配線の別の従来技術による断線・短絡検査を説明するため模式図。The schematic diagram for demonstrating the disconnection and short circuit inspection by another prior art of the branch wiring branched from the trunk wiring.

符号の説明Explanation of symbols

10 電流発生器
10a,10b 電流供給用プローブ
20 電圧測定器
20a,20b 電圧検出用プローブ
30 制御手段
31 表示手段
M 幹配線
P1,P2,PN 枝配線
P1x,P1y,P2x,P2y,PNx,PNy 端点
DESCRIPTION OF SYMBOLS 10 Current generator 10a, 10b Current supply probe 20 Voltage measuring device 20a, 20b Voltage detection probe 30 Control means 31 Display means M Trunk wiring P1, P2, PN Branch wiring P1x, P1y, P2x, P2y, PNx, PNy End point

Claims (9)

幹配線と、上記幹配線から枝状に引き出されている複数の枝配線とを含み、上記枝配線の各々に実装部品のリード電極接続用もしくは信号の入出力部として用いられるランドとしての2つの端点が設けられている回路配線を検査対象とし、上記幹配線にプロービングすることなく、上記各枝配線の上記2つの端点間の断線の有無および隣接する2つの上記枝配線のうちの一方の枝配線側の2つの端点間と他方の枝配線側の2つの端点間との間の短絡の有無をそれぞれ検査する回路配線検査方法において、
信号出力検出部を含む検査信号発生手段と検査信号検出手段とを備え、上記検査信号発生手段を上記一方の枝配線側の2つの端点間に接続して信号発生状態にするとともに、上記検査信号検出手段を上記他方の枝配線側の2つの端点間に接続し、
上記信号出力検出部にて上記検査信号発生手段から上記一方の枝配線側の2つの端点間に供給される検査信号が検出されないときには上記一方の枝配線側の2つの端点間に断線有りと判定し、
上記検査信号検出手段により上記他方の枝配線側の2つの端点間で上記検査信号が検出された場合には上記他方の枝配線側の2つの端点間と上記一方の枝配線側の2つの端点間との間に短絡有りと判定することを特徴とする回路配線検査方法。
A trunk wiring and a plurality of branch wirings led out from the trunk wiring, and each of the branch wirings has two lands used as lead electrodes for mounting components or as signal input / output portions . The circuit wiring provided with the end points is to be inspected, and without probing the trunk wiring, the presence or absence of disconnection between the two end points of each branch wiring and one of the two adjacent branch wirings In the circuit wiring inspection method for inspecting the presence or absence of a short circuit between the two end points on the wiring side and the two end points on the other branch wiring side,
A test signal generation means including a signal output detection unit; and a test signal detection means, wherein the test signal generation means is connected between two end points on the one branch wiring side to be in a signal generation state, and Connecting the signal detection means between the two end points on the other branch wiring side;
When the signal output detection unit does not detect the inspection signal supplied between the two end points on the one branch wiring side from the inspection signal generating means, it is determined that there is a break between the two end points on the one branch wiring side. And
When the inspection signal is detected between the two end points on the other branch wiring side by the inspection signal detection means, the two end points on the other branch wiring side and between the two end points on the other branch wiring side A circuit wiring inspection method characterized in that it is determined that there is a short circuit between the two.
幹配線と、上記幹配線から枝状に引き出されている複数の枝配線とを含み、上記枝配線の各々に実装部品のリード電極接続用もしくは信号の入出力部として用いられるランドとしての2つの端点が設けられている回路配線を検査対象とし、上記幹配線にプロービングすることなく、上記各枝配線の上記2つの端点間の断線の有無および隣接する第1,第2の2つの上記枝配線のうちの第1枝配線側の2つの端点間と第2枝配線側の2つの端点間との間の短絡の有無をそれぞれ検査する回路配線検査方法において、
信号出力検出部を含む検査信号発生手段と検査信号検出手段とを備え、上記検査信号発生手段を上記第1枝配線のうちの反幹配線側に位置する一方の端点と所定の第3枝配線との間に接続して信号発生状態にするとともに、上記検査信号検出手段を上記他方の枝配線側の2つの端点間に接続し、
上記信号出力検出部にて上記第1枝配線の上記一方の端点と上記第3枝配線との間に供給される検査信号が検出されないときには上記第1枝配線側の2つの端点間に断線有りと判定し、上記検査信号検出手段により上記他方の枝配線の2つの端点間で上記検査信号が検出された場合には上記他方の枝配線側の2つの端点間と上記一方の枝配線側の2つの端点間との間に短絡有りと判定することを特徴とする回路配線検査方法。
A trunk wiring and a plurality of branch wirings led out from the trunk wiring, and each of the branch wirings has two lands used as lead electrodes for mounting components or as signal input / output portions . The circuit wiring provided with the end points is to be inspected, and without probing the trunk wiring, the presence or absence of disconnection between the two end points of each branch wiring and the adjacent first and second two branch wirings Circuit wiring inspection method for inspecting whether or not there is a short circuit between two end points on the first branch wiring side and between two end points on the second branch wiring side,
A test signal generating means including a signal output detection section, the inspection and a signal detection means, one end point and a predetermined third branch located in the counter-trunk line side of the test signal generating means said first branch wirings A signal generating state by connecting to the wiring, and connecting the inspection signal detecting means between the two end points on the other branch wiring side,
When the inspection signal supplied between the one end point of the first branch wiring and the third branch wiring is not detected by the signal output detection unit, there is a break between the two end points on the first branch wiring side And when the inspection signal is detected between the two end points of the other branch wiring by the inspection signal detection means, the two end points on the other branch wiring side and the one branch wiring side A circuit wiring inspection method, characterized in that a short circuit is determined between two end points.
上記検査信号発生手段が電流発生器で、上記検査信号検出手段が電圧測定器であることを特徴とする請求項1または2に記載の回路配線検査方法。   3. The circuit wiring inspection method according to claim 1, wherein the inspection signal generating means is a current generator, and the inspection signal detecting means is a voltage measuring device. 上記検査信号発生手段が電圧発生器で、上記検査信号検出手段が電圧測定器であることを特徴とする請求項1または2に記載の回路配線検査方法。   3. The circuit wiring inspection method according to claim 1, wherein the inspection signal generating means is a voltage generator, and the inspection signal detecting means is a voltage measuring device. 上記信号出力検出部に電流検出抵抗が用いられることを特徴とする請求項3または4に記載の回路配線検査方法。   5. The circuit wiring inspection method according to claim 3, wherein a current detection resistor is used for the signal output detection unit. 幹配線と、上記幹配線から枝状に引き出されている複数の枝配線とを含み、上記枝配線の各々に実装部品のリード電極接続用もしくは信号の入出力部として用いられるランドとしての2つの端点が設けられている回路配線を検査対象とし、上記幹配線にプロービングすることなく、上記各枝配線の上記2つの端点間の断線の有無および隣接する2つの上記枝配線のうちの一方の枝配線側の2つの端点間と他方の枝配線側の2つの端点間との間の短絡の有無をそれぞれ検査する回路配線検査装置において、
信号出力検出部を含み上記一方の枝配線側の2つの端点間に検査信号を供給する検査信号発生手段と、上記他方の枝配線側の2つの端点間に接続される検査信号検出手段と、上記信号出力検出部および上記検査信号検出手段からの検出信号に基づいて断線,短絡の有無を判定する制御手段とを備えていることを特徴とする回路配線検査装置。
A trunk wiring and a plurality of branch wirings led out from the trunk wiring, and each of the branch wirings has two lands used as lead electrodes for mounting components or as signal input / output portions . The circuit wiring provided with the end points is to be inspected, and without probing the trunk wiring, the presence or absence of disconnection between the two end points of each branch wiring and one of the two adjacent branch wirings In the circuit wiring inspection apparatus for inspecting the presence or absence of a short circuit between the two end points on the wiring side and the two end points on the other branch wiring side,
A test signal generating means for supplying a test signal between the two end points on the one branch wiring side, including a signal output detection unit; and a test signal detection means connected between the two end points on the other branch wiring side; A circuit wiring inspection apparatus comprising: control means for determining the presence or absence of a disconnection or a short circuit based on detection signals from the signal output detection unit and the inspection signal detection means.
幹配線と、上記幹配線から枝状に引き出されている複数の枝配線とを含み、上記枝配線の各々に実装部品のリード電極接続用もしくは信号の入出力部として用いられるランドとしての2つの端点が設けられている回路配線を検査対象とし、上記幹配線にプロービングすることなく、上記各枝配線の上記2つの端点間の断線の有無および隣接する2つの上記枝配線のうちの一方の枝配線側の2つの端点間と他方の枝配線側の2つの端点間との間の短絡の有無をそれぞれ検査する回路配線検査装置において、
信号出力検出部を含み上記一方の枝配線のうちの反幹配線側に位置する一方の端点と所定の第3枝配線との間に検査信号を供給する検査信号発生手段と、上記他方の枝配線側の2つの端点間に接続される検査信号検出手段と、上記信号出力検出部および上記検査信号検出手段からの検出信号に基づいて断線,短絡の有無を判定する制御手段とを備えていることを特徴とする回路配線検査装置。
A trunk wiring and a plurality of branch wirings led out from the trunk wiring, and each of the branch wirings has two lands used as lead electrodes for mounting components or as signal input / output portions . The circuit wiring provided with the end points is to be inspected, and without probing the trunk wiring, the presence or absence of disconnection between the two end points of each branch wiring and one of the two adjacent branch wirings In the circuit wiring inspection apparatus for inspecting the presence or absence of a short circuit between the two end points on the wiring side and the two end points on the other branch wiring side,
A test signal generating means for supplying a test signal between one end point located on the side opposite to the trunk wiring of the one branch wiring and a predetermined third branch wiring, including a signal output detector; and the other branch Inspection signal detection means connected between two end points on the wiring side, and control means for determining the presence or absence of disconnection or short circuit based on detection signals from the signal output detection section and the inspection signal detection means. A circuit wiring inspection apparatus characterized by that.
上記制御手段は上記信号出力検出部からの出力信号が上記検査信号を非検出とする信号である場合には上記一方の枝配線側の2つの端点間に断線有りと判定し、上記検査信号検出手段にて上記検査信号が検出された場合には上記他方の枝配線側の2つの端点間と上記一方の枝配線側の2つの端点間との間に短絡有りと判定することを特徴とする請求項6または7に記載の回路配線検査装置。   If the output signal from the signal output detection unit is a signal that does not detect the inspection signal, the control means determines that there is a break between the two end points on the one branch wiring side, and detects the inspection signal. When the inspection signal is detected by the means, it is determined that there is a short circuit between the two end points on the other branch wiring side and between the two end points on the one branch wiring side. The circuit wiring inspection apparatus according to claim 6 or 7. 上記検査信号発生手段が電流発生器で、上記検査信号検出手段が電圧測定器であり、上記信号出力検出部に電流検出抵抗が用いられることを特徴とする請求項6ないし8のいずれか1項に記載の回路配線検査装置。   9. The method according to claim 6, wherein the inspection signal generation means is a current generator, the inspection signal detection means is a voltage measuring device, and a current detection resistor is used for the signal output detection unit. The circuit wiring inspection apparatus according to 1.
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