KR20100103456A - Test apparatus and measurement device - Google Patents

Test apparatus and measurement device Download PDF

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Publication number
KR20100103456A
KR20100103456A KR1020107008000A KR20107008000A KR20100103456A KR 20100103456 A KR20100103456 A KR 20100103456A KR 1020107008000 A KR1020107008000 A KR 1020107008000A KR 20107008000 A KR20107008000 A KR 20107008000A KR 20100103456 A KR20100103456 A KR 20100103456A
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KR
South Korea
Prior art keywords
voltage
power supply
unit
device under
under test
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KR1020107008000A
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Korean (ko)
Inventor
히로요시 와타나베
Original Assignee
가부시키가이샤 어드밴티스트
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Publication of KR20100103456A publication Critical patent/KR20100103456A/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2836—Fault-finding or characterising
    • G01R31/2839—Fault-finding or characterising using signal generators, power supplies or circuit analysers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/316—Testing of analog circuits
    • G01R31/3161—Marginal testing

Abstract

A test apparatus for testing a device under test, comprising: a performance board on which the device under test is mounted, and an applied voltage provided outside the performance board and applied to the device under test via sense wiring, and receiving the applied voltage. A power supply unit that adjusts a power supply voltage to the device under test based on the control unit; According to the measurement result in a measuring part, the test apparatus containing the determination part which determines the quality of a device under test is provided.

Figure P1020107008000

Description

TEST APPARATUS AND MEASUREMENT DEVICE}

The present invention relates to a test apparatus and a measuring apparatus. This application relates to the following Japanese application and is an application which claims the priority from the following Japanese application. Regarding a designated country where inclusion by reference to a document is recognized, the contents described in the following application are incorporated into the present application by reference, and are part of the present application.

1. Japanese Patent Application 2007-331107 Filed Date December 21, 2007

When a voltage is applied to a terminal of a device under test, such as an IC, an LSI, or a memory, a test apparatus capable of measuring whether a current intended for the terminal flows is known (see Patent Document 1, for example). .

Japanese Utility Model Application Publication No. 5-69690

In such a test apparatus, when measuring the power supply voltage of the device under test, for example, it was necessary to mount a voltage measuring unit in the test apparatus in addition to the power supply unit.

In one aspect of the present invention, an object of the present invention is to provide a test apparatus and a measuring apparatus that can solve the above problems. This object is achieved by a combination of the features described in the independent claims in the claims. The dependent claims also define further advantageous specific examples of the invention.

According to the first aspect of the present invention, in a test apparatus for testing a device under test, a performance board on which the device under test is mounted, and a sense wiring is applied to an applied voltage applied to the device under test, which is provided outside the performance board. A power supply unit which receives the power supply voltage and adjusts the power supply voltage to the device under test based on the received voltage, and receives the applied voltage through the sense wiring inside the power supply device, and measures the voltage value of the applied voltage received. Provided is a test apparatus including a voltage level measuring unit and a determining unit that determines whether or not the device under test is based on the measurement result in the voltage level measuring unit.

In addition, the summary of the above invention does not enumerate all of the necessary features of the present invention, and the subcombination of such a feature group can also be invented.

1 shows a circuit configuration of a test apparatus 10 according to an embodiment of the present invention.
2 shows an example of a circuit configuration of the current detector 200.

1 shows a circuit configuration of a test apparatus 10 according to an embodiment of the present invention. As shown in FIG. 1, the test apparatus 10 is an apparatus for testing the device under test 800, and includes an apparatus main body 20 and a performance board 30.

The apparatus main body 20 is provided with a power supply unit 50 having a power supply board 100 and a determination unit 300 and a plurality of test units 500-1 to 500-n. The device under test 800 is mounted on the performance board 30. The apparatus main body 20 and the performance board 30 are electrically connected by the cable 40 and the some signal lines 450-1 to 450-n.

The cable 40 has a force wiring 401 and a sense wiring 402, and a shield 42 provided around the force wiring 401 and the sense wiring 402. Each of the force wiring 401 and the sense wiring 402 is electrically connected to the terminal 810 of the device under test 800, and the other end thereof is electrically connected to the power supply unit 50. In addition, switches 411 and 412 are provided in the part of the apparatus main body 20 side of the force wiring 401 and the sense wiring 402, respectively. These switches 411 and 412 electrically cut off the power supply unit 50 and the device under test 800 when the power supply unit 50 is not used, and the power supply unit when the power supply unit 50 is used. (50) and the device under test 800 are electrically connected.

On the other hand, each of the plurality of signal lines 450-1 to 450-n is electrically connected to a terminal different from the terminal 810 of the device under test 800, and the other end thereof is the plurality of test units 500. Electrical connection to the corresponding test unit at -1 to 500-n). In this example, both ends of the signal line 450-1 are electrically connected to the terminal 811 and the test unit 500-1 of the device under test 800, respectively, and both ends of the signal line 450-n are respectively connected. And is electrically connected to a terminal 812 of the test device 800 and the test unit 500-n.

The power supply unit 50 applies a power supply voltage to the terminal 810 of the device under test 800 via the force wiring 401 and is applied to the corresponding terminal 810 of the device under test 800. The voltage is received through the sense wiring 402 and has a function of adjusting the power supply voltage based on the received applied voltage.

The voltage generator 120, the measurement switching unit 130, the voltage level measuring unit 140, and the current detection unit 200 are formed on the substrate of the power supply substrate 100. The other end of the force wiring 401 is connected to the output terminal of the voltage generator 120, and the other end of the sense wiring 402 is connected to the non-inverting input terminal of the buffer 110.

The voltage generator 120 includes a buffer 110, a voltage generator 122, an inverting amplifier 124, and a current buffer 126. The voltage generator 122 is connected to the inverting input terminal of the inverting amplifier 124 through a resistor and outputs a voltage having a predetermined magnitude.

The buffer 110 has a negative feedback connection between the output terminal and the inverting input terminal. In addition, the output terminal of the buffer 110 is connected to the inverting input terminal of the inverting amplifier 124 through a resistor, and the corresponding output terminal is connected to the input terminal of the voltage level measuring unit 140 through the measurement switching unit 130. Is also connected. When the buffer 110 receives the applied voltage applied to the terminal 810 of the device under test 800 through the sense wiring 402, the buffer 110 outputs the adjustment voltage according to the received applied voltage to the inverting amplifier 124. do. In this example, the buffer 110 is a voltage follower circuit and outputs to the inverting amplifier 124 a voltage for adjustment substantially the same as the received applied voltage.

The inverting amplifier 124 has an inverting input terminal connected to the output terminal of the buffer 110 and the voltage generator 122 through a resistor, respectively, and the non-inverting input terminal is grounded. The inverting amplifier 124 outputs a voltage obtained by inverting and amplifying the voltage output from the voltage generator 122 as a power supply voltage. This power supply voltage is set to a magnitude corresponding to the voltage (applied voltage) to be applied to the terminal 810 of the device under test 800.

The inverting amplifier 124 adjusts the magnitude of the power supply voltage to the device under test 800 so that the variation can be alleviated when the magnitude of the adjustment voltage output from the buffer 110 changes due to the magnitude of the applied voltage. do. For example, when the adjustment voltage is changed in a decreasing direction, the inverting amplifier 124 increases the magnitude of the power supply voltage. In addition, when the adjustment voltage is changed in a direction that increases, the inverting amplifier 124 reduces the magnitude of the power supply voltage.

A current buffer 126 may be further provided between the output terminal of the inverting amplifier 124 and the terminal 810 as in this example. The current buffer 126 flows a power supply current corresponding to the magnitude of the power supply voltage from the inverting amplifier 124 to the terminal 810 of the device under test 800.

The current detector 200 is provided between the current buffer 126 and the terminal 810. The current detection unit 200 detects the current set value of the power supply current for transmitting the force wiring 401 and outputs a signal in accordance with the detection result. The specific configuration of the current detection unit 200 will be described later separately.

The measurement switching unit 130 has terminals 131, 132, and 133, and is connected between the terminal 131 and the terminal 132, and connected between the terminal 131 and the terminal 133. You can switch states. In this example, the measurement switching unit 130 measures the applied voltage applied to the terminal 810 of the device under test 800, and the terminal 810 of the device under test 800. According to the case where the power supply current which flows into () is measured, the state which connected between the terminal 131 and the terminal 132, and the state which connected between the terminal 131 and the terminal 133 are switched. For example, when the power supply unit 50 measures the applied voltage, the measurement switching unit 130 switches to the state where the terminal 131 and the terminal 132 are connected. As a result, the output terminal of the buffer 110 is connected to the input terminal of the voltage level measuring unit 140, and the adjustment voltage is input from the buffer 110 to the voltage level measuring unit 140.

On the other hand, when the power supply unit 50 measures the power supply current, the measurement switching unit 130 switches to the state where the terminal 131 and the terminal 133 are connected. As a result, the output terminal of the current detector 200 is connected to the input terminal of the voltage level measurer 140, and the signal output from the current detector 200 is input to the voltage level measurer 140. The voltage level measuring unit 140 measures the voltage for adjustment from the buffer 110 when the measurement switching unit 130 switches to the state in which the measurement switching unit 130 is connected between the terminal 131 and the terminal 132. When the unit 130 is switched to the state in which the terminal 131 and the terminal 133 are connected, the signal from the differential circuit 204 is measured.

In addition, the measurement switching part 130 is a state which connected between the terminal 131 and the terminal 132, and the state which connected between the terminal 131 and the terminal 133 every predetermined period, for example. May be switched alternately. In this case, the voltage level measuring unit 140 may alternately measure the voltage for adjustment from the buffer 110 and the signal from the differential circuit 204 every predetermined period of time. The voltage level measuring unit 140 outputs the respective measurement results of the voltage for adjustment from the buffer 110 and the signal from the differential circuit 204 to the determination unit 300.

The determination part 300 determines the quality of the device under test 800 based on the measurement result from the voltage level measuring part 140. For example, the determination unit 300 detects the measurement result from the voltage level measuring unit 140 while the inverting amplifier 124 outputs the power supply voltage. And the determination part 300 calculates the applied voltage applied to the terminal 810 of the device under test 800, and the power supply current which flows through the said terminal 810 based on the said measurement result.

And the determination part 300 judges that the device under test 800 is defective, when the calculated power supply current continued for more than a predetermined time period more or less than the predetermined range, and said When the voltage for adjustment becomes a value within a predetermined range while being shorter than the time width, the device under test 800 is determined to be good.

In addition, when the calculated applied voltage is longer than the predetermined range or the state where the calculated applied voltage is longer than the predetermined time width, the determination unit 300 is supplied to the device under test 800 by the power supply unit 50. If it is determined that the application of the voltage has failed or the device under test 800 is determined to be defective, and the calculated applied voltage becomes a value within a predetermined range while being shorter than the time interval, the corresponding device to the device under test 800 corresponds to. It is determined that the application of the voltage was successful or the device under test 800 is determined to be good. In addition, the determination unit 300 may store the determination result as data, and may also display it on a display unit such as a display.

2 shows an example of a circuit configuration of the current detector 200. The current detection unit 200 uses a current detection resistor 202 and a differential circuit 204 provided on the force wiring 401 between the current buffer 126 and the terminal 810 of the device under test 800. Have In the differential circuit 204, each of the differential input terminals is connected to one of both ends of the current detecting resistor 202, and the output terminal is connected to the input terminal of the voltage level measuring unit 140 through the measurement switching unit 130. do. The differential circuit 204 detects the potential difference between both ends of the current detecting resistor 202 and outputs a signal corresponding to the potential difference to the voltage level measuring unit 140.

Although the test apparatus 10 has been described above, in the present example, the voltage level measuring unit 140 directly applies an applied voltage applied to the terminal 810 of the device under test 800 through the sense wiring 402. It may receive and output the measurement result to the determination part 300. In this case, the determination part 300 determines the quality of the device under test 800 based on the applied voltage received from the voltage level measuring part 140. In addition, the voltage level measuring unit 140 may stop the operation of the logic circuit of the device under test 800 and measure the signal from the differential circuit 204 in the stopped state. In this case, the determination unit 300 calculates the power supply current in the logic state, that is, the quiescent current IDDQ, based on the measurement result of the corresponding signal received from the voltage level measurement unit 140, The quality of the device under test 800 is determined based on the calculated stop current.

As another example of this embodiment, the determination unit 300 may be integrally provided on the power supply substrate 100 together with the voltage level measurement unit 140 and the voltage generation unit 120. As another example, the voltage level measuring unit 140 may be provided separately from the power supply board 100 inside the power supply unit 50. As another example, the voltage level measuring unit 140 may be provided outside the power supply unit 50.

As described above, in the test apparatus 10 according to the present embodiment, the voltage level measuring unit 140 measuring the applied voltage applied to the terminal 810 of the device under test 800 is supplied with the voltage generating unit 120. Since the power supply unit 50 provided integrally with the board | substrate 100 is provided, in order to measure the said applied voltage, the applied voltage is measured without connecting a dedicated measuring device to the terminal 810 of the device under test 800 separately. can do. The power supply unit 50 may also measure the power supply current flowing through the terminal 810 of the device under test 800 by the current detection unit 200 and the voltage level measurement unit 140. In order to measure, the power supply current can be measured without separately connecting a dedicated measuring device to the corresponding terminal 810.

As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It is apparent to those skilled in the art that various changes or improvements can be added to the above embodiments. It is clear from description of a claim that the form which added such a change or improvement can also be included in the technical scope of this invention.

The order of execution of each process such as operations, procedures, steps, and steps in the devices, systems, programs, and methods shown in the claims, the specification, and the drawings is not specifically stated before, before, and the like. It should be noted that the present invention can be realized in any order unless the output of the previous process is used in the subsequent process. Regarding the operation flow in the claims, the specification, and the drawings, the descriptions are made using "priority", "next," and the like for convenience, but it does not mean that the operation is performed in this order.

10 test device
20 Device Body
30 performance board
40 cables
42 shield
50 power units
100 power board
110 buffer
120 voltage generator
122 voltage generator
124 inverting amplifier
126 current buffer
130 measuring switch
131, 132, 133 terminals
140 voltage level measurement unit
200 current detector
202 Resistance for current detection
204 differential circuit
300 judgment
401 force wiring
402 sense wiring
411, 412 switch
450-1 to 450-n signal line
500-1 to 500-n test unit
800 device under test
810, 811, 812 terminals

Claims (8)

In a test apparatus for testing a device under test,
A performance board for mounting the device under test;
A power supply unit which is provided outside the performance board and receives an applied voltage applied to the device under test through a sense wiring and adjusts a power supply voltage based on the received applied voltage;
A voltage level measuring unit configured to receive the applied voltage through the sense wiring and measure a voltage value of the received voltage; And
A determination unit that determines whether the device under test is successful based on the measurement result in the voltage level measuring unit;
Including,
tester.
The method of claim 1,
The power supply unit,
A buffer which receives the applied voltage through the sense wiring and outputs a voltage for adjustment according to the received applied voltage; And
A voltage generator configured to generate the power supply voltage according to the adjustment voltage;
Including,
The voltage level measuring unit measures a voltage value of the voltage for adjustment output by the buffer,
tester.
The method of claim 2,
The power supply unit,
A power substrate on which the buffer and the voltage generator are formed;
More,
The voltage level measuring unit is provided on the power board,
tester.
The method of claim 2,
The power supply unit further includes a measurement switching unit for switching whether or not the output terminal of the buffer and the input terminal of the voltage level measurement unit are connected.
tester.
The method of claim 4, wherein
A force wiring for giving said power supply voltage generated inside said power supply unit to said device under test; And
A current detector which detects a current set value of a power current for transmitting the force wiring inside the power unit;
Further comprising,
tester.
The method of claim 5,
The current detector,
A current detecting resistor provided on the force wiring in the power supply unit; And
A differential circuit for detecting a potential difference across both ends of the current detecting resistor;
Including,
The measurement switching unit connects an output terminal of the buffer to an input terminal of the voltage level measuring unit when measuring the applied voltage, and outputs an output terminal of the differential circuit to an input terminal of the voltage level measuring unit when measuring the power current. To connect,
tester.
The method of claim 6,
The measurement switching unit switches which of the buffer and the differential circuit are connected to an input terminal of the voltage level measuring unit every predetermined period,
The determination unit calculates the applied voltage and the power supply current applied to the device under test, based on the measurement result in the voltage level measuring unit.
tester.
A measuring device for measuring an applied voltage applied to a device under measurement,
A performance board to mount the device under measurement;
A power supply unit provided outside the performance board and receiving an applied voltage applied to the device under measurement through a sense wiring and adjusting a power supply voltage to the device under measurement based on the received voltage; And
A voltage level measuring unit configured to receive the applied voltage through the sense wiring inside the power supply unit and measure a voltage value of the received voltage;
Including,
Measuring device.
KR1020107008000A 2007-12-21 2008-11-28 Test apparatus and measurement device KR20100103456A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPJP-P-2007-331107 2007-12-21
JP2007331107 2007-12-21

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KR20100103456A true KR20100103456A (en) 2010-09-27

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JP (1) JPWO2009081522A1 (en)
KR (1) KR20100103456A (en)
TW (1) TW200938860A (en)
WO (1) WO2009081522A1 (en)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102565679B (en) * 2011-12-22 2015-07-15 深圳创维数字技术有限公司 Method and device for detecting limit value of power supply voltage
CN102540055B (en) * 2011-12-22 2015-07-29 深圳创维数字技术有限公司 A kind of method and device detecting logic level limit value

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH022954A (en) * 1988-06-15 1990-01-08 Advantest Corp Ic testing apparatus
JPH0639344Y2 (en) * 1988-06-27 1994-10-12 株式会社アドバンテスト Current / voltage limiting circuit
JP2565866Y2 (en) * 1991-12-13 1998-03-25 株式会社アドバンテスト IC tester parallel connected device power supply
JP3281163B2 (en) * 1994-01-21 2002-05-13 株式会社アドバンテスト Current measuring device and method
JP2002168902A (en) * 2000-12-05 2002-06-14 Advantest Corp Testing device for direct current, and method of testing direct current using the same

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WO2009081522A1 (en) 2009-07-02
TW200938860A (en) 2009-09-16

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