JP2016133623A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2016133623A5 JP2016133623A5 JP2015008107A JP2015008107A JP2016133623A5 JP 2016133623 A5 JP2016133623 A5 JP 2016133623A5 JP 2015008107 A JP2015008107 A JP 2015008107A JP 2015008107 A JP2015008107 A JP 2015008107A JP 2016133623 A5 JP2016133623 A5 JP 2016133623A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- substrate processing
- cylindrical member
- pattern
- detection unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 85
- 238000001514 detection method Methods 0.000 claims description 56
- 238000005259 measurement Methods 0.000 claims description 20
- 230000002093 peripheral effect Effects 0.000 claims description 14
- 238000006073 displacement reaction Methods 0.000 claims description 6
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 2
- 238000005286 illumination Methods 0.000 claims 4
- 238000000059 patterning Methods 0.000 claims 2
- 239000011248 coating agent Substances 0.000 claims 1
- 238000000576 coating method Methods 0.000 claims 1
- 239000007788 liquid Substances 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015008107A JP6413784B2 (ja) | 2015-01-19 | 2015-01-19 | 基板処理装置及びデバイス製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2015008107A JP6413784B2 (ja) | 2015-01-19 | 2015-01-19 | 基板処理装置及びデバイス製造方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2018172644A Division JP6680330B2 (ja) | 2018-09-14 | 2018-09-14 | パターン形成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016133623A JP2016133623A (ja) | 2016-07-25 |
| JP2016133623A5 true JP2016133623A5 (enExample) | 2017-12-07 |
| JP6413784B2 JP6413784B2 (ja) | 2018-10-31 |
Family
ID=56426116
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015008107A Active JP6413784B2 (ja) | 2015-01-19 | 2015-01-19 | 基板処理装置及びデバイス製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP6413784B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI736621B (zh) * | 2016-10-04 | 2021-08-21 | 日商尼康股份有限公司 | 圖案描繪裝置及圖案描繪方法 |
| KR102630749B1 (ko) * | 2021-08-03 | 2024-01-30 | 주식회사 디에이테크놀로지 | 이차전지 제조 시스템의 전극 측정 장치 및 방법 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005197483A (ja) * | 2004-01-08 | 2005-07-21 | Nikon Corp | 撮像手段の回転誤差計測方法、及びこの回転誤差計測方法を用いた調整方法又は計測方法、及びこの回転誤差計測方法で計測された回転誤差を使用する位置計測装置、及びこの位置計測装置を備えた露光装置 |
| JP2006268032A (ja) * | 2005-02-24 | 2006-10-05 | Fuji Photo Film Co Ltd | 描画装置および描画装置の校正方法 |
| JP5210199B2 (ja) * | 2009-02-23 | 2013-06-12 | 大日本スクリーン製造株式会社 | 画像記録方法 |
| JP6123252B2 (ja) * | 2012-11-21 | 2017-05-10 | 株式会社ニコン | 処理装置及びデバイス製造方法 |
| KR101812857B1 (ko) * | 2012-08-28 | 2017-12-27 | 가부시키가이샤 니콘 | 기판 지지 장치, 및 노광 장치 |
| JP2014081452A (ja) * | 2012-10-16 | 2014-05-08 | Nikon Corp | 露光装置、およびデバイス製造方法 |
-
2015
- 2015-01-19 JP JP2015008107A patent/JP6413784B2/ja active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP2466271B1 (en) | Method, computer program product and rotary encoder for estimation of eccentric value | |
| EA027164B1 (ru) | Устройство для измерения внутреннего или внешнего профиля трубного элемента | |
| EP3316039A3 (en) | Wafer alignment method and apparatus for overlay measurement | |
| JP2014085123A5 (enExample) | ||
| JP2015017844A5 (enExample) | ||
| JP2017519203A5 (enExample) | ||
| TW201404603A (zh) | 用於偵測印刷板支撐件幾何參數之總成 | |
| CN104154885B (zh) | 一种小圆环零件微翘曲检测方法 | |
| JP2016133623A5 (enExample) | ||
| EP3223075A3 (en) | Measurement method, measurement apparatus, lithography apparatus, and method of manufacturing article | |
| JP2016008924A5 (enExample) | ||
| JP2011145171A5 (ja) | 形状算出装置 | |
| JP2015145971A5 (enExample) | ||
| KR950034645A (ko) | 스테이지 장치의 직교도 측정방법 | |
| JP5764189B2 (ja) | 精密角度位置決め装置 | |
| CN106949855B (zh) | 一种转轴角位移测量装置 | |
| JP6420041B2 (ja) | 画像処理を利用した絶対角度誤差算出 | |
| KR101328696B1 (ko) | 형상측정장치 및 형상측정방법 | |
| WO2010073817A1 (ja) | 基板位置決め装置、基板処理装置、基板位置決めプログラム及び電子デバイスの製造方法 | |
| JP2017106876A5 (enExample) | ||
| JP2013149928A5 (enExample) | ||
| JP2016138761A (ja) | 光切断法による三次元測定方法および三次元測定器 | |
| JP2014145640A (ja) | 円形ワークの径測定方法および径測定装置 | |
| US10871364B2 (en) | Measurement system | |
| JP2012225907A5 (enExample) |