JP2016100543A5 - - Google Patents

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Publication number
JP2016100543A5
JP2016100543A5 JP2014238318A JP2014238318A JP2016100543A5 JP 2016100543 A5 JP2016100543 A5 JP 2016100543A5 JP 2014238318 A JP2014238318 A JP 2014238318A JP 2014238318 A JP2014238318 A JP 2014238318A JP 2016100543 A5 JP2016100543 A5 JP 2016100543A5
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JP
Japan
Prior art keywords
roller
sticking
adhesive tape
wafer
heater
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JP2014238318A
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English (en)
Japanese (ja)
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JP6395573B2 (ja
JP2016100543A (ja
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Publication of JP2016100543A5 publication Critical patent/JP2016100543A5/ja
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JP2014238318A 2014-11-26 2014-11-26 基板への接着テープ貼り付け装置及び貼り付け方法 Expired - Fee Related JP6395573B2 (ja)

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Application Number Priority Date Filing Date Title
JP2014238318A JP6395573B2 (ja) 2014-11-26 2014-11-26 基板への接着テープ貼り付け装置及び貼り付け方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014238318A JP6395573B2 (ja) 2014-11-26 2014-11-26 基板への接着テープ貼り付け装置及び貼り付け方法

Publications (3)

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JP2016100543A JP2016100543A (ja) 2016-05-30
JP2016100543A5 true JP2016100543A5 (enExample) 2018-02-01
JP6395573B2 JP6395573B2 (ja) 2018-09-26

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JP2014238318A Expired - Fee Related JP6395573B2 (ja) 2014-11-26 2014-11-26 基板への接着テープ貼り付け装置及び貼り付け方法

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Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108470692B (zh) * 2017-02-23 2023-08-18 日东电工株式会社 粘合带粘贴方法和粘合带粘贴装置
JP7355568B2 (ja) * 2019-09-17 2023-10-03 株式会社ディスコ ウエーハの加工方法
CN112201600B (zh) * 2020-10-14 2024-03-08 北京中科镭特电子有限公司 一种晶圆劈裂扩片装置及晶圆裂片扩片方法
JP7781008B2 (ja) * 2022-03-30 2025-12-05 株式会社ディスコ はみ出し部除去機構及びエキスパンド装置

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3021645U (ja) * 1995-08-12 1996-02-27 リンテック株式会社 半導体製造工程用粘着シート
JP4637057B2 (ja) * 2006-05-25 2011-02-23 リンテック株式会社 シート貼付装置及び貼付方法
KR101006526B1 (ko) * 2008-10-22 2011-01-07 주식회사 하이닉스반도체 웨이퍼 마운트 테이프, 이를 이용한 웨이퍼 가공 장치 및 방법
JP4845063B2 (ja) * 2009-12-18 2011-12-28 古河電気工業株式会社 ウエハ加工用テープ及びその製造方法
JP6007071B2 (ja) * 2012-11-07 2016-10-12 リンテック株式会社 刃型、接着シート製造装置、剥離方法および接着シート製造方法

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