JP2016092247A - SiC基板の研磨方法 - Google Patents
SiC基板の研磨方法 Download PDFInfo
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- JP2016092247A JP2016092247A JP2014225757A JP2014225757A JP2016092247A JP 2016092247 A JP2016092247 A JP 2016092247A JP 2014225757 A JP2014225757 A JP 2014225757A JP 2014225757 A JP2014225757 A JP 2014225757A JP 2016092247 A JP2016092247 A JP 2016092247A
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- sic substrate
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- 238000005498 polishing Methods 0.000 title claims abstract description 147
- 239000000758 substrate Substances 0.000 title claims abstract description 50
- 238000000034 method Methods 0.000 title claims abstract description 13
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title description 41
- 229910010271 silicon carbide Inorganic materials 0.000 title description 41
- 239000007788 liquid Substances 0.000 claims abstract description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 6
- 230000001590 oxidative effect Effects 0.000 claims description 12
- 239000006061 abrasive grain Substances 0.000 claims description 10
- 150000003839 salts Chemical class 0.000 claims description 8
- 239000013078 crystal Substances 0.000 abstract description 11
- 229910017053 inorganic salt Inorganic materials 0.000 abstract description 2
- 230000001629 suppression Effects 0.000 abstract 1
- 238000007517 polishing process Methods 0.000 description 7
- XTEGARKTQYYJKE-UHFFFAOYSA-M Chlorate Chemical compound [O-]Cl(=O)=O XTEGARKTQYYJKE-UHFFFAOYSA-M 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- JYLNVJYYQQXNEK-UHFFFAOYSA-N 3-amino-2-(4-chlorophenyl)-1-propanesulfonic acid Chemical compound OS(=O)(=O)CC(CN)C1=CC=C(Cl)C=C1 JYLNVJYYQQXNEK-UHFFFAOYSA-N 0.000 description 2
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 2
- 229910002651 NO3 Inorganic materials 0.000 description 2
- NHNBFGGVMKEFGY-UHFFFAOYSA-N Nitrate Chemical compound [O-][N+]([O-])=O NHNBFGGVMKEFGY-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-L Sulfate Chemical compound [O-]S([O-])(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-L 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 239000011572 manganese Substances 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- -1 oxo acid salt Chemical class 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 239000012286 potassium permanganate Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000383 hazardous chemical Substances 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/0475—Changing the shape of the semiconductor body, e.g. forming recesses
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
- B24B37/044—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor characterised by the composition of the lapping agent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02002—Preparing wafers
- H01L21/02005—Preparing bulk and homogeneous wafers
- H01L21/02008—Multistep processes
- H01L21/0201—Specific process step
- H01L21/02024—Mirror polishing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/042—Lapping machines or devices; Accessories designed for working plane surfaces operating processes therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
- B24B37/07—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool
- B24B37/10—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping
- B24B37/105—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement
- B24B37/107—Lapping machines or devices; Accessories designed for working plane surfaces characterised by the movement of the work or lapping tool for single side lapping the workpieces or work carriers being actively moved by a drive, e.g. in a combined rotary and translatory movement in a rotary movement only, about an axis being stationary during lapping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic System
- H01L29/1608—Silicon carbide
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Materials Engineering (AREA)
Abstract
【解決手段】研磨液(15)を供給すると共に、研磨パッドをSiC基板(11)に接触させてSiC基板を研磨するSiC基板の研磨方法であって、研磨液は、過マンガン酸塩、酸化力を有する無機塩類、及び水を含有し、第1の研磨パッド(18)を使用してSiC基板を研磨する第1の研磨工程と、第1の研磨工程の後に、第1の研磨パッドより軟らかい第2の研磨パッド(38)を使用してSiC基板を研磨する第2の研磨工程と、を含む構成とした。
【選択図】図1
Description
4 チャックテーブル
4a 流路
6 保持板
6a 保持面
8 第1の研磨ユニット
10 第1のスピンドル
10a 縦穴
12 第1のホイールマウント
12a 縦穴
14 第1の研磨ホイール
16 第1のホイール基台
16a 縦穴
18 第1の研磨パッド
18a 縦穴
20 供給源
28 第2の研磨ユニット
30 第2のスピンドル
30a 縦穴
32 第2のホイールマウント
32a 縦穴
34 第2の研磨ホイール
36 第2のホイール基台
36a 縦穴
38 第2の研磨パッド
38a 縦穴
11 SiC基板
13 フィルム
15 研磨液
Claims (1)
- 砥粒を含有する研磨パッド、又は砥粒を含有しない研磨パッドに研磨液を供給すると共に、該研磨パッドをSiC基板に接触させてSiC基板を研磨するSiC基板の研磨方法であって、
該研磨液は、過マンガン酸塩、酸化力を有する無機塩類、及び水を含有し、
第1の研磨パッドを使用してSiC基板を研磨する第1の研磨工程と、
該第1の研磨工程の後に、該第1の研磨パッドより軟らかい第2の研磨パッドを使用してSiC基板を研磨する第2の研磨工程と、
を含むことを特徴とするSiC基板の研磨方法。
Priority Applications (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014225757A JP2016092247A (ja) | 2014-11-06 | 2014-11-06 | SiC基板の研磨方法 |
TW104131594A TW201618177A (zh) | 2014-11-06 | 2015-09-24 | SiC基板之硏磨方法 |
CN201510713060.2A CN105583720A (zh) | 2014-11-06 | 2015-10-28 | SiC基板的研磨方法 |
US14/924,938 US9761454B2 (en) | 2014-11-06 | 2015-10-28 | Method of polishing SiC substrate |
KR1020150153168A KR20160054409A (ko) | 2014-11-06 | 2015-11-02 | SiC 기판의 연마 방법 |
DE102015221392.7A DE102015221392A1 (de) | 2014-11-06 | 2015-11-02 | VERFAHREN ZUM POLIEREN EINES SiC-SUBSTRATS |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2014225757A JP2016092247A (ja) | 2014-11-06 | 2014-11-06 | SiC基板の研磨方法 |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2016092247A true JP2016092247A (ja) | 2016-05-23 |
Family
ID=55802986
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2014225757A Pending JP2016092247A (ja) | 2014-11-06 | 2014-11-06 | SiC基板の研磨方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US9761454B2 (ja) |
JP (1) | JP2016092247A (ja) |
KR (1) | KR20160054409A (ja) |
CN (1) | CN105583720A (ja) |
DE (1) | DE102015221392A1 (ja) |
TW (1) | TW201618177A (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106078493A (zh) * | 2016-06-23 | 2016-11-09 | 上海汉虹精密机械有限公司 | 陶瓷盘砂轮片双面研磨加工蓝宝石晶片的方法 |
US20200058482A1 (en) * | 2017-02-21 | 2020-02-20 | Fujimi Incorporated | Method for polishing silicon carbide substate |
JP6949424B2 (ja) * | 2017-08-22 | 2021-10-13 | 株式会社ディスコ | 研磨パッド |
JP7106209B2 (ja) * | 2018-04-05 | 2022-07-26 | 株式会社ディスコ | SiC基板の研磨方法 |
CN114686113A (zh) * | 2020-12-30 | 2022-07-01 | 安集微电子科技(上海)股份有限公司 | 一种化学机械抛光液及其使用方法 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11140427A (ja) * | 1997-11-13 | 1999-05-25 | Kobe Steel Ltd | 研磨液および研磨方法 |
JP2007520871A (ja) * | 2003-06-06 | 2007-07-26 | アプライド マテリアルズ インコーポレイテッド | 研磨用組成物及び導電性材料研磨方法 |
CN101602185A (zh) * | 2009-06-22 | 2009-12-16 | 中国科学院上海硅酸盐研究所 | 碳化硅单晶表面多级化学机械抛光方法 |
US20100279506A1 (en) * | 2009-05-04 | 2010-11-04 | Michael White | Polishing silicon carbide |
JP2012017409A (ja) * | 2010-07-08 | 2012-01-26 | Dic Corp | 発泡砥石用2液型ウレタン樹脂組成物、ポリウレタン発泡砥石、及びポリウレタン発泡砥石の製造方法 |
JP2012253259A (ja) * | 2011-06-06 | 2012-12-20 | Disco Abrasive Syst Ltd | 研磨方法及び酸性研磨液 |
WO2013150822A1 (ja) * | 2012-04-02 | 2013-10-10 | 住友電気工業株式会社 | 炭化珪素基板、半導体装置およびこれらの製造方法 |
JP2014180753A (ja) * | 2013-03-19 | 2014-09-29 | Siltronic Ag | 半導体材料ウェハを研磨するための方法 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP5336699B2 (ja) | 2006-09-15 | 2013-11-06 | 株式会社ノリタケカンパニーリミテド | 結晶材料の研磨加工方法 |
WO2012043704A1 (ja) * | 2010-09-30 | 2012-04-05 | Hoya株式会社 | 磁気記録媒体ガラス基板用ガラスブランク製造方法、磁気記録媒体ガラス基板製造方法、磁気記録媒体製造方法、および、磁気記録媒体ガラス基板用ガラスブランクの製造装置 |
US20120247155A1 (en) * | 2011-03-30 | 2012-10-04 | Hoya Corporation | Method of manufacturing glass blank for magnetic recording medium glass substrate, method of manufacturing magnetic recording medium glass substrate, method of manufacturing magnetic recording medium, and apparatus for manufacturing glass blank for magnetic recording medium glass substrate |
US9567492B2 (en) * | 2014-08-28 | 2017-02-14 | Sinmat, Inc. | Polishing of hard substrates with soft-core composite particles |
-
2014
- 2014-11-06 JP JP2014225757A patent/JP2016092247A/ja active Pending
-
2015
- 2015-09-24 TW TW104131594A patent/TW201618177A/zh unknown
- 2015-10-28 US US14/924,938 patent/US9761454B2/en active Active
- 2015-10-28 CN CN201510713060.2A patent/CN105583720A/zh active Pending
- 2015-11-02 DE DE102015221392.7A patent/DE102015221392A1/de not_active Withdrawn
- 2015-11-02 KR KR1020150153168A patent/KR20160054409A/ko unknown
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11140427A (ja) * | 1997-11-13 | 1999-05-25 | Kobe Steel Ltd | 研磨液および研磨方法 |
JP2007520871A (ja) * | 2003-06-06 | 2007-07-26 | アプライド マテリアルズ インコーポレイテッド | 研磨用組成物及び導電性材料研磨方法 |
US20100279506A1 (en) * | 2009-05-04 | 2010-11-04 | Michael White | Polishing silicon carbide |
CN101602185A (zh) * | 2009-06-22 | 2009-12-16 | 中国科学院上海硅酸盐研究所 | 碳化硅单晶表面多级化学机械抛光方法 |
JP2012017409A (ja) * | 2010-07-08 | 2012-01-26 | Dic Corp | 発泡砥石用2液型ウレタン樹脂組成物、ポリウレタン発泡砥石、及びポリウレタン発泡砥石の製造方法 |
JP2012253259A (ja) * | 2011-06-06 | 2012-12-20 | Disco Abrasive Syst Ltd | 研磨方法及び酸性研磨液 |
WO2013150822A1 (ja) * | 2012-04-02 | 2013-10-10 | 住友電気工業株式会社 | 炭化珪素基板、半導体装置およびこれらの製造方法 |
JP2014180753A (ja) * | 2013-03-19 | 2014-09-29 | Siltronic Ag | 半導体材料ウェハを研磨するための方法 |
Also Published As
Publication number | Publication date |
---|---|
US20160133466A1 (en) | 2016-05-12 |
TW201618177A (zh) | 2016-05-16 |
DE102015221392A1 (de) | 2016-05-12 |
KR20160054409A (ko) | 2016-05-16 |
US9761454B2 (en) | 2017-09-12 |
CN105583720A (zh) | 2016-05-18 |
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