JP2016044361A5 - - Google Patents
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- Publication number
- JP2016044361A5 JP2016044361A5 JP2015162483A JP2015162483A JP2016044361A5 JP 2016044361 A5 JP2016044361 A5 JP 2016044361A5 JP 2015162483 A JP2015162483 A JP 2015162483A JP 2015162483 A JP2015162483 A JP 2015162483A JP 2016044361 A5 JP2016044361 A5 JP 2016044361A5
- Authority
- JP
- Japan
- Prior art keywords
- ampoule
- precursor
- filling
- substrate
- substrate processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000003708 ampul Substances 0.000 claims description 82
- 239000002243 precursor Substances 0.000 claims description 73
- 239000000758 substrate Substances 0.000 claims description 68
- 238000000034 method Methods 0.000 claims description 46
- 238000000151 deposition Methods 0.000 claims description 16
- 230000008021 deposition Effects 0.000 claims description 16
- 238000003756 stirring Methods 0.000 claims description 5
- 230000001960 triggered effect Effects 0.000 claims description 4
- 238000013019 agitation Methods 0.000 claims description 3
- 238000000231 atomic layer deposition Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 claims 1
- 238000005137 deposition process Methods 0.000 description 4
- 239000006185 dispersion Substances 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201462040974P | 2014-08-22 | 2014-08-22 | |
| US62/040,974 | 2014-08-22 | ||
| US14/516,452 US20160052651A1 (en) | 2014-08-22 | 2014-10-16 | Fill on demand ampoule |
| US14/516,452 | 2014-10-16 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2016044361A JP2016044361A (ja) | 2016-04-04 |
| JP2016044361A5 true JP2016044361A5 (enExample) | 2018-09-27 |
| JP6857960B2 JP6857960B2 (ja) | 2021-04-14 |
Family
ID=55347636
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015162483A Active JP6857960B2 (ja) | 2014-08-22 | 2015-08-20 | オンデマンド充填アンプル |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20160052651A1 (enExample) |
| JP (1) | JP6857960B2 (enExample) |
| KR (1) | KR102414284B1 (enExample) |
| CN (1) | CN105390414B (enExample) |
| SG (1) | SG10201506630VA (enExample) |
| TW (1) | TWI684666B (enExample) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US11970772B2 (en) | 2014-08-22 | 2024-04-30 | Lam Research Corporation | Dynamic precursor dosing for atomic layer deposition |
| US10094018B2 (en) * | 2014-10-16 | 2018-10-09 | Lam Research Corporation | Dynamic precursor dosing for atomic layer deposition |
| US11072860B2 (en) | 2014-08-22 | 2021-07-27 | Lam Research Corporation | Fill on demand ampoule refill |
| US11718912B2 (en) * | 2019-07-30 | 2023-08-08 | Applied Materials, Inc. | Methods and apparatus for calibrating concentration sensors for precursor delivery |
| KR20230030576A (ko) | 2020-06-06 | 2023-03-06 | 램 리써치 코포레이션 | 반도체 프로세싱 툴들을 위한 제거 가능한 샤워헤드 대면 플레이트 (removable showerhead faceplate) |
| US12209310B2 (en) | 2020-07-29 | 2025-01-28 | Lam Research Corporation | Concentration control using a bubbler |
| US12084771B2 (en) | 2021-03-02 | 2024-09-10 | Applied Materials, Inc. | Control of liquid delivery in auto-refill systems |
| CN114777024B (zh) * | 2022-06-22 | 2022-10-28 | 国家管网集团北方管道有限责任公司 | 一种输油管线的一键启停控制方法 |
| WO2025155439A1 (en) * | 2024-01-19 | 2025-07-24 | Lam Research Corporation | Level monitoring of solid precursors |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1813318C3 (de) * | 1968-12-07 | 1974-01-03 | Alexander 2000 Hamburg Kueckens | Zeitgesteuerte Dosiervorrichtung für flüssige Medien aus festen und elastischen Behältern |
| JP2004031782A (ja) * | 2002-06-27 | 2004-01-29 | Sumitomo Chem Co Ltd | 有機金属ガス供給装置 |
| US6921062B2 (en) * | 2002-07-23 | 2005-07-26 | Advanced Technology Materials, Inc. | Vaporizer delivery ampoule |
| US20050252449A1 (en) * | 2004-05-12 | 2005-11-17 | Nguyen Son T | Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system |
| US20060121192A1 (en) * | 2004-12-02 | 2006-06-08 | Jurcik Benjamin J | Liquid precursor refill system |
| US8951478B2 (en) * | 2006-03-30 | 2015-02-10 | Applied Materials, Inc. | Ampoule with a thermally conductive coating |
| KR100855582B1 (ko) * | 2007-01-12 | 2008-09-03 | 삼성전자주식회사 | 액 공급 장치 및 방법, 상기 장치를 가지는 기판 처리설비, 그리고 기판 처리 방법 |
| JP5305328B2 (ja) * | 2007-06-07 | 2013-10-02 | 株式会社日立国際電気 | 基板処理装置 |
| US20090214777A1 (en) * | 2008-02-22 | 2009-08-27 | Demetrius Sarigiannis | Multiple ampoule delivery systems |
| KR20110122823A (ko) * | 2009-01-16 | 2011-11-11 | 비코 인스트루먼츠 인코포레이티드 | 루테늄의 저온 부착용 조성물 및 방법 |
| US20100305884A1 (en) * | 2009-05-22 | 2010-12-02 | Applied Materials, Inc. | Methods for determining the quantity of precursor in an ampoule |
| CN103688339B (zh) * | 2011-07-22 | 2016-09-28 | 应用材料公司 | 用于ald/cvd工艺的反应物输送系统 |
| KR102387359B1 (ko) * | 2014-04-18 | 2022-04-14 | 어플라이드 머티어리얼스, 인코포레이티드 | 자동-리필 앰풀 및 사용 방법들 |
-
2014
- 2014-10-16 US US14/516,452 patent/US20160052651A1/en not_active Abandoned
-
2015
- 2015-08-20 JP JP2015162483A patent/JP6857960B2/ja active Active
- 2015-08-21 SG SG10201506630VA patent/SG10201506630VA/en unknown
- 2015-08-21 KR KR1020150117794A patent/KR102414284B1/ko active Active
- 2015-08-21 TW TW104127252A patent/TWI684666B/zh active
- 2015-08-24 CN CN201510523984.6A patent/CN105390414B/zh active Active
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