SG10201506630VA - Fill on demand ampoule - Google Patents
Fill on demand ampouleInfo
- Publication number
- SG10201506630VA SG10201506630VA SG10201506630VA SG10201506630VA SG10201506630VA SG 10201506630V A SG10201506630V A SG 10201506630VA SG 10201506630V A SG10201506630V A SG 10201506630VA SG 10201506630V A SG10201506630V A SG 10201506630VA SG 10201506630V A SG10201506630V A SG 10201506630VA
- Authority
- SG
- Singapore
- Prior art keywords
- fill
- ampoule
- demand
- demand ampoule
- Prior art date
Links
- 239000003708 ampul Substances 0.000 title 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65B—MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
- B65B1/00—Packaging fluent solid material, e.g. powders, granular or loose fibrous material, loose masses of small articles, in individual containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, or jars
- B65B1/04—Methods of, or means for, filling the material into the containers or receptacles
- B65B1/08—Methods of, or means for, filling the material into the containers or receptacles by vibratory feeders
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201462040974P | 2014-08-22 | 2014-08-22 | |
US14/516,452 US20160052651A1 (en) | 2014-08-22 | 2014-10-16 | Fill on demand ampoule |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201506630VA true SG10201506630VA (en) | 2016-03-30 |
Family
ID=55347636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201506630VA SG10201506630VA (en) | 2014-08-22 | 2015-08-21 | Fill on demand ampoule |
Country Status (6)
Country | Link |
---|---|
US (1) | US20160052651A1 (en) |
JP (1) | JP6857960B2 (en) |
KR (1) | KR102414284B1 (en) |
CN (1) | CN105390414B (en) |
SG (1) | SG10201506630VA (en) |
TW (1) | TWI684666B (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11072860B2 (en) | 2014-08-22 | 2021-07-27 | Lam Research Corporation | Fill on demand ampoule refill |
US10094018B2 (en) * | 2014-10-16 | 2018-10-09 | Lam Research Corporation | Dynamic precursor dosing for atomic layer deposition |
US11718912B2 (en) | 2019-07-30 | 2023-08-08 | Applied Materials, Inc. | Methods and apparatus for calibrating concentration sensors for precursor delivery |
CN114777024B (en) * | 2022-06-22 | 2022-10-28 | 国家管网集团北方管道有限责任公司 | One-key start-stop control method for oil pipeline |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE1813318C3 (en) * | 1968-12-07 | 1974-01-03 | Alexander 2000 Hamburg Kueckens | Time-controlled dosing device for liquid media from solid and elastic containers |
JP2004031782A (en) * | 2002-06-27 | 2004-01-29 | Sumitomo Chem Co Ltd | Organic metal gas supply device |
US6921062B2 (en) * | 2002-07-23 | 2005-07-26 | Advanced Technology Materials, Inc. | Vaporizer delivery ampoule |
US20050252449A1 (en) * | 2004-05-12 | 2005-11-17 | Nguyen Son T | Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system |
US20060121192A1 (en) * | 2004-12-02 | 2006-06-08 | Jurcik Benjamin J | Liquid precursor refill system |
US8951478B2 (en) * | 2006-03-30 | 2015-02-10 | Applied Materials, Inc. | Ampoule with a thermally conductive coating |
KR100855582B1 (en) * | 2007-01-12 | 2008-09-03 | 삼성전자주식회사 | Liquid supplying unit and method, facility for treating substrates with the unit, and method for treating substrates |
JP5305328B2 (en) * | 2007-06-07 | 2013-10-02 | 株式会社日立国際電気 | Substrate processing equipment |
US20090214777A1 (en) * | 2008-02-22 | 2009-08-27 | Demetrius Sarigiannis | Multiple ampoule delivery systems |
GB2479322A (en) * | 2009-01-16 | 2011-10-05 | Veeco Instr Inc | Composition and method for low temperature deposition of ruthenium |
US20100305884A1 (en) * | 2009-05-22 | 2010-12-02 | Applied Materials, Inc. | Methods for determining the quantity of precursor in an ampoule |
KR102245759B1 (en) * | 2011-07-22 | 2021-04-27 | 어플라이드 머티어리얼스, 인코포레이티드 | Reactant delivery system for ald/cvd processes |
KR102387359B1 (en) * | 2014-04-18 | 2022-04-14 | 어플라이드 머티어리얼스, 인코포레이티드 | Auto-refill ampoule and methods of use |
-
2014
- 2014-10-16 US US14/516,452 patent/US20160052651A1/en not_active Abandoned
-
2015
- 2015-08-20 JP JP2015162483A patent/JP6857960B2/en active Active
- 2015-08-21 KR KR1020150117794A patent/KR102414284B1/en active IP Right Grant
- 2015-08-21 SG SG10201506630VA patent/SG10201506630VA/en unknown
- 2015-08-21 TW TW104127252A patent/TWI684666B/en active
- 2015-08-24 CN CN201510523984.6A patent/CN105390414B/en active Active
Also Published As
Publication number | Publication date |
---|---|
JP2016044361A (en) | 2016-04-04 |
KR20160023605A (en) | 2016-03-03 |
TWI684666B (en) | 2020-02-11 |
TW201623676A (en) | 2016-07-01 |
US20160052651A1 (en) | 2016-02-25 |
CN105390414B (en) | 2018-07-10 |
KR102414284B1 (en) | 2022-06-28 |
JP6857960B2 (en) | 2021-04-14 |
CN105390414A (en) | 2016-03-09 |
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