JP2016040846A - 光学的コーティングの部分的なリフトオフによる光起電力デバイスの細かいラインのメタライゼーション - Google Patents
光学的コーティングの部分的なリフトオフによる光起電力デバイスの細かいラインのメタライゼーション Download PDFInfo
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Abstract
Description
本願は、参照によって全体が本明細書に組み込まれている、2010年9月3日出願の米国特許仮出願第61/379,810号明細書の利益を主張するものである。
Claims (10)
- デバイス層を含むデバイスを設けるステップと、
前記デバイス層上にパターン形成されたレジストを設けるステップであって、前記パターン形成されたレジストが前記デバイス層の第1の部分を被覆している、ステップと、
前記パターン形成されたレジスト上および前記デバイス層の第2の部分上に誘電体層を設けるステップと、
前記パターン形成されたレジスト上の前記誘電体層に1または複数の開口部を形成して、前記パターン形成されたレジストの部分を露出させる、ステップと、
前記パターン形成されたレジストの前記露出部分を介して、前記パターン形成されたレジストを除去するステップであって、前記パターン形成されたレジストの除去により、前記デバイス層の前記第2の部分上の前記誘電体層を除去することなく前記パターン形成されたレジスト上の前記誘電体層を除去する、ステップと
を含む、方法。 - 前記誘電体層に1または複数の開口部を形成するステップが、前記パターン形成されたレジスト上の前記誘電体層の1または複数の部分を選択的にレーザ照射することを含む、請求項1に記載の方法。
- 前記誘電体層に1または複数の開口部を形成するステップが、前記誘電体層および前記パターン形成されたレジストを熱処理して、前記パターン形成されたレジストの体積を増大させることを含み、前記パターン形成されたレジストの体積の増大により、前記誘電体層において前記パターン形成されたレジストの部分を露出させる亀裂を形成する、請求項1に記載の方法。
- 前記パターン形成されたレジストを除去するステップが、前記パターン形成されたレジストの前記露出された部分を介して、前記パターン形成されたレジストをレジスト除去剤に露出させることを含む、請求項1に記載の方法。
- 前記パターン形成されたレジストを設ける前に、前記デバイス層上に導電性材料層を設けるステップと、
前記デバイス層上の前記導電性材料層上に前記パターン形成されたレジストを設けるステップであって、前記パターン形成されたレジストが、前記導電性材料層の第1の部分を露出させるとともに前記導電性材料層の第2の部分を被覆する、ステップと、
前記導電性材料層の前記露出された第1の部分を除去するステップであって、前記導電性材料層の残りの前記第2の部分が前記デバイス層上のパターン形成された導電性格子を含む、ステップと、
を更に含む、請求項1に記載の方法。 - 前記パターン形成されたレジストおよび前記パターン形成されたレジスト上の前記誘電体層を除去するステップが、前記パターン形成された導電性格子を露出させ、前記デバイス層の前記第2の部分上の前記誘電体層が、前記パターン形成された導電性格子と実質的に同一平面上にあり、かつ、前記誘電体層および前記パターン形成された導電性格子の間のギャップを伴うことなく、前記パターン形成された導電性格子に接触するようになっている、請求項5に記載の方法。
- 前記パターン形成された導電性格子上に金属のめっきを設けるステップを更に含み、前記パターン形成された導電性格子にギャップを伴うことなく接触する前記デバイス層の前記第2の部分上の前記誘電体層が、前記金属のめっきおよび前記デバイス層の間の接触を防いでいる、請求項6に記載の方法。
- 前記パターン形成されたレジストおよび前記パターン形成されたレジスト上の前記誘電体層を除去するステップが、前記デバイス層の前記第1の部分を露出させ、前記方法が、前記デバイス層の前記露出された第1の部分上に導電性材料を設けるステップを更に含み、前記導電性材料が、パターン形成された導電性格子および前記誘電体層の間のギャップを伴うことなく、前記パターン形成された導電性格子を形成する、請求項1に記載の方法。
- 前記誘電体層が、光学的な反射防止層を含む、請求項1に記載の方法。
- 前記誘電体層が、光学的な反射層を含む、請求項1に記載の方法。
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US37981010P | 2010-09-03 | 2010-09-03 | |
US61/379,810 | 2010-09-03 |
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EP (1) | EP2612366A4 (ja) |
JP (3) | JP5612771B2 (ja) |
KR (2) | KR20130108496A (ja) |
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CA (1) | CA2763142A1 (ja) |
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JP5844443B2 (ja) | 2016-01-20 |
JP6091587B2 (ja) | 2017-03-08 |
EP2612366A4 (en) | 2017-11-22 |
JP5612771B2 (ja) | 2014-10-22 |
KR20170070284A (ko) | 2017-06-21 |
AU2011282499A1 (en) | 2012-03-22 |
CN105609587B (zh) | 2017-12-22 |
US8236604B2 (en) | 2012-08-07 |
CN102576767B (zh) | 2016-02-10 |
TW201216492A (en) | 2012-04-16 |
JP2015038992A (ja) | 2015-02-26 |
CN102576767A (zh) | 2012-07-11 |
JP2013541835A (ja) | 2013-11-14 |
AU2011282499B2 (en) | 2014-06-19 |
KR101835293B1 (ko) | 2018-03-06 |
TWI529953B (zh) | 2016-04-11 |
AU2014224095B2 (en) | 2016-11-17 |
CA2763142A1 (en) | 2012-03-03 |
US20110132443A1 (en) | 2011-06-09 |
KR20130108496A (ko) | 2013-10-04 |
WO2012030407A1 (en) | 2012-03-08 |
CN105609587A (zh) | 2016-05-25 |
TW201622165A (zh) | 2016-06-16 |
HK1173556A1 (zh) | 2013-05-16 |
AU2014224095A1 (en) | 2014-10-02 |
EP2612366A1 (en) | 2013-07-10 |
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