JP2015533937A - 基板上に金属ホウ炭化物層を製造する方法 - Google Patents
基板上に金属ホウ炭化物層を製造する方法 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B32/00—Carbon; Compounds thereof
- C01B32/90—Carbides
- C01B32/907—Oxycarbides; Sulfocarbides; Mixture of carbides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0635—Carbides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/067—Borides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3485—Sputtering using pulsed power to the target
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
- H01J37/3405—Magnetron sputtering
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
- H01J37/3464—Operating strategies
- H01J37/3467—Pulsed operation, e.g. HIPIMS
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- Chemical & Material Sciences (AREA)
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- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
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- Metallurgy (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
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- Laminated Bodies (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Abstract
Description
Claims (10)
- マイクロ結晶金属ホウ炭化物相を少なくとも含む被膜で基板を被覆するためのPVD方法であって、
600℃未満の基板温度で堆積された層のX線スペクトルにおいて、金属ホウ炭化物のマイクロ結晶相が存在するという結論が得られる半値幅を有する少なくとも1つのピークが特定されるように、PVD方法において電源をパルス化することを特徴とする、方法。 - 前記PVD方法がスパッタリング法であることを特徴とする、請求項1に記載の方法。
- 前記スパッタリング法を、HIPIMS法として、100W/cm2より大きな電流密度で少なくとも一部に実施することを特徴とする、請求項2に記載の方法。
- 金属がセラミックス複合物として存在するターゲットを用いてPVD方法を実施することを特徴とする、請求項1から3のいずれか一項に記載の方法。
- 前記セラミックス複合物が金属ホウ炭化物であることを特徴とする、請求項4に記載の方法。
- 少なくとも前記PVD方法の一部の間に、被覆される基板に負バイアスを印加することを特徴とする、請求項1から5のいずれか一項に記載の方法。
- 金属ホウ炭化物が、一般式Me2BC、式中MeはCr、Zr、およびMoからなる群の中の元素、で示される材料であることを特徴とする、請求項1から6のいずれか一項に記載の方法。
- 少なくとも1つのピークが、2θX線スペクトルにおいて20°から70°で、ナノ結晶および/または非晶質相の存在が示唆される、測定値の振幅より少なくとも二倍大きな振幅を有するように、前記方法を実施することを特徴とする、請求項1から7のいずれか一項に記載の方法。
- 被膜のX線スペクトルにおいて、金属ホウ炭化物のマイクロ結晶相の存在を示唆する半値幅を有する少なくとも1つのピークが特定されることを特徴とする、金属ホウ炭化物被膜を有する工作物。
- 金属ホウ炭化物が、一般式Me2BC、式中MeはCr、Zr、およびMoからなる群の中の元素、で示される材料であることを特徴とする、請求項9に記載の工作物。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
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DE102012017809.3A DE102012017809A1 (de) | 2012-09-10 | 2012-09-10 | Verfahren zur Herstellung einer Metallborocarbidschicht auf einem Substrat |
DE102012017809.3 | 2012-09-10 | ||
PCT/EP2013/002700 WO2014053209A1 (de) | 2012-09-10 | 2013-09-09 | Verfahren zur herstellung einer metallborocarbidschicht auf einem substrat |
Related Child Applications (1)
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JP2019202423A Division JP6830992B2 (ja) | 2012-09-10 | 2019-11-07 | 基板上に金属ホウ炭化物層を製造する方法 |
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JP2015533937A true JP2015533937A (ja) | 2015-11-26 |
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JP2015530317A Pending JP2015533937A (ja) | 2012-09-10 | 2013-09-09 | 基板上に金属ホウ炭化物層を製造する方法 |
JP2019202423A Active JP6830992B2 (ja) | 2012-09-10 | 2019-11-07 | 基板上に金属ホウ炭化物層を製造する方法 |
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JP2019202423A Active JP6830992B2 (ja) | 2012-09-10 | 2019-11-07 | 基板上に金属ホウ炭化物層を製造する方法 |
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US (1) | US9624571B2 (ja) |
EP (1) | EP2893053B1 (ja) |
JP (2) | JP2015533937A (ja) |
KR (2) | KR20150053959A (ja) |
CN (1) | CN104781444B (ja) |
DE (1) | DE102012017809A1 (ja) |
MX (1) | MX361794B (ja) |
WO (1) | WO2014053209A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021091958A (ja) * | 2019-12-09 | 2021-06-17 | ザ・スウォッチ・グループ・リサーチ・アンド・ディベロップメント・リミテッド | 装飾的な面の作製方法 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN108028179A (zh) * | 2015-09-18 | 2018-05-11 | 应用材料公司 | 用于沉积共形bcn膜的方法 |
CN108350562B (zh) * | 2015-10-16 | 2020-03-10 | 欧瑞康表面处理解决方案股份公司普费菲孔 | 包含Hf-B-C三元相的新型涂覆材料 |
US11482404B2 (en) * | 2015-12-21 | 2022-10-25 | Ionquest Corp. | Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source |
US11823859B2 (en) | 2016-09-09 | 2023-11-21 | Ionquest Corp. | Sputtering a layer on a substrate using a high-energy density plasma magnetron |
US10957519B2 (en) | 2015-12-21 | 2021-03-23 | Ionquest Corp. | Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films |
US11359274B2 (en) | 2015-12-21 | 2022-06-14 | IonQuestCorp. | Electrically and magnetically enhanced ionized physical vapor deposition unbalanced sputtering source |
US9951414B2 (en) | 2015-12-21 | 2018-04-24 | IonQuest LLC | Magnetically enhanced high density plasma-chemical vapor deposition plasma source for depositing diamond and diamond-like films |
CN105441890B (zh) * | 2015-12-22 | 2018-04-17 | 西安交通大学 | 一种高温低摩擦系数硬质涂层及其制备方法 |
TW202140426A (zh) | 2020-02-14 | 2021-11-01 | 日商大鵬藥品工業股份有限公司 | 醯基硫脲化合物的製造方法 |
CN114560714A (zh) * | 2022-03-14 | 2022-05-31 | 宁波杭州湾新材料研究院 | 一种纤维增韧陶瓷基复合材料及其制备方法与应用 |
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2012
- 2012-09-10 DE DE102012017809.3A patent/DE102012017809A1/de not_active Withdrawn
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2013
- 2013-09-09 EP EP13802873.3A patent/EP2893053B1/de active Active
- 2013-09-09 KR KR1020157008824A patent/KR20150053959A/ko active Application Filing
- 2013-09-09 JP JP2015530317A patent/JP2015533937A/ja active Pending
- 2013-09-09 CN CN201380051231.9A patent/CN104781444B/zh not_active Expired - Fee Related
- 2013-09-09 KR KR1020217018261A patent/KR20210076171A/ko not_active Application Discontinuation
- 2013-09-09 MX MX2015003080A patent/MX361794B/es active IP Right Grant
- 2013-09-09 US US14/427,032 patent/US9624571B2/en active Active
- 2013-09-09 WO PCT/EP2013/002700 patent/WO2014053209A1/de active Application Filing
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- 2019-11-07 JP JP2019202423A patent/JP6830992B2/ja active Active
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2021091958A (ja) * | 2019-12-09 | 2021-06-17 | ザ・スウォッチ・グループ・リサーチ・アンド・ディベロップメント・リミテッド | 装飾的な面の作製方法 |
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Publication number | Publication date |
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DE102012017809A1 (de) | 2014-03-13 |
CN104781444B (zh) | 2018-08-07 |
US9624571B2 (en) | 2017-04-18 |
KR20210076171A (ko) | 2021-06-23 |
KR20150053959A (ko) | 2015-05-19 |
JP2020023754A (ja) | 2020-02-13 |
US20150232982A1 (en) | 2015-08-20 |
EP2893053A1 (de) | 2015-07-15 |
EP2893053B1 (de) | 2022-10-12 |
JP6830992B2 (ja) | 2021-02-17 |
MX2015003080A (es) | 2015-11-09 |
MX361794B (es) | 2018-12-17 |
WO2014053209A1 (de) | 2014-04-10 |
CN104781444A (zh) | 2015-07-15 |
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