JP2015530265A5 - - Google Patents

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Publication number
JP2015530265A5
JP2015530265A5 JP2015525532A JP2015525532A JP2015530265A5 JP 2015530265 A5 JP2015530265 A5 JP 2015530265A5 JP 2015525532 A JP2015525532 A JP 2015525532A JP 2015525532 A JP2015525532 A JP 2015525532A JP 2015530265 A5 JP2015530265 A5 JP 2015530265A5
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JP
Japan
Prior art keywords
major surface
carbide
abrasive
polishing
precisely shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2015525532A
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English (en)
Japanese (ja)
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JP2015530265A (ja
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Publication date
Application filed filed Critical
Priority claimed from PCT/US2013/052828 external-priority patent/WO2014022462A1/en
Publication of JP2015530265A publication Critical patent/JP2015530265A/ja
Publication of JP2015530265A5 publication Critical patent/JP2015530265A5/ja
Pending legal-status Critical Current

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JP2015525532A 2012-08-02 2013-07-31 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法 Pending JP2015530265A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261678665P 2012-08-02 2012-08-02
US61/678,665 2012-08-02
PCT/US2013/052828 WO2014022462A1 (en) 2012-08-02 2013-07-31 Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2018211596A Division JP2019063989A (ja) 2012-08-02 2018-11-09 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法

Publications (2)

Publication Number Publication Date
JP2015530265A JP2015530265A (ja) 2015-10-15
JP2015530265A5 true JP2015530265A5 (cg-RX-API-DMAC7.html) 2016-09-15

Family

ID=50028490

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2015525532A Pending JP2015530265A (ja) 2012-08-02 2013-07-31 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法
JP2018211596A Pending JP2019063989A (ja) 2012-08-02 2018-11-09 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2018211596A Pending JP2019063989A (ja) 2012-08-02 2018-11-09 精密に成形された形成部を有する研磨要素、その研磨要素から製造される研磨物品、及びそれらの作製方法

Country Status (8)

Country Link
US (1) US20150224625A1 (cg-RX-API-DMAC7.html)
EP (1) EP2879836B1 (cg-RX-API-DMAC7.html)
JP (2) JP2015530265A (cg-RX-API-DMAC7.html)
KR (1) KR20150039795A (cg-RX-API-DMAC7.html)
CN (2) CN115625629A (cg-RX-API-DMAC7.html)
SG (1) SG11201500713PA (cg-RX-API-DMAC7.html)
TW (1) TWI660816B (cg-RX-API-DMAC7.html)
WO (1) WO2014022462A1 (cg-RX-API-DMAC7.html)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BR112013016734A2 (pt) 2010-12-31 2019-09-24 Saint Gobain Ceramics partículas abrasivas com formas particulares e métodos de deformação de tais partículas
WO2013003831A2 (en) 2011-06-30 2013-01-03 Saint-Gobain Ceramics & Plastics, Inc. Liquid phase sintered silicon carbide abrasive particles
CN103702800B (zh) 2011-06-30 2017-11-10 圣戈本陶瓷及塑料股份有限公司 包括氮化硅磨粒的磨料制品
JP5802336B2 (ja) 2011-09-26 2015-10-28 サン−ゴバン セラミックス アンド プラスティクス,インコーポレイティド 研磨粒子材料を含む研磨製品、研磨粒子材料を使用する研磨布紙および形成方法
CN104114327B (zh) 2011-12-30 2018-06-05 圣戈本陶瓷及塑料股份有限公司 复合成型研磨颗粒及其形成方法
WO2013102177A1 (en) 2011-12-30 2013-07-04 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle and method of forming same
CA3056658C (en) 2012-01-10 2023-07-04 Doruk O. Yener Abrasive particles having complex shapes and methods of forming same
WO2013106602A1 (en) 2012-01-10 2013-07-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
WO2013149209A1 (en) 2012-03-30 2013-10-03 Saint-Gobain Abrasives, Inc. Abrasive products having fibrillated fibers
KR101888347B1 (ko) 2012-05-23 2018-08-16 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자들 및 이의 형성방법
US10106714B2 (en) 2012-06-29 2018-10-23 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
EP2879838B1 (en) 2012-08-02 2023-09-13 3M Innovative Properties Company Abrasive articles with precisely shaped features and method of making thereof
JP6474346B2 (ja) 2012-08-02 2019-02-27 スリーエム イノベイティブ プロパティズ カンパニー 精密に成形された形成部を有する研磨要素前駆体及びその作製方法
CN104822494B (zh) 2012-10-15 2017-11-28 圣戈班磨料磨具有限公司 具有特定形状的磨粒以及形成这种粒子的方法
EP2938459B1 (en) 2012-12-31 2021-06-16 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
CA2905551C (en) * 2013-03-12 2021-02-16 3M Innovative Properties Company Bonded abrasive article
ES2984562T3 (es) 2013-03-29 2024-10-29 Saint Gobain Abrasives Inc Partículas abrasivas que tienen formas particulares y métodos de formación de dichas partículas
TW201502263A (zh) 2013-06-28 2015-01-16 Saint Gobain Ceramics 包含成形研磨粒子之研磨物品
EP3052270B1 (en) 2013-09-30 2025-10-29 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and methods of forming same
EP3089851B1 (en) 2013-12-31 2019-02-06 Saint-Gobain Abrasives, Inc. Abrasive article including shaped abrasive particles
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
US9803119B2 (en) 2014-04-14 2017-10-31 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
EP4306610A3 (en) 2014-04-14 2024-04-03 Saint-Gobain Ceramics and Plastics, Inc. Abrasive article including shaped abrasive particles
WO2015184355A1 (en) 2014-05-30 2015-12-03 Saint-Gobain Abrasives, Inc. Method of using an abrasive article including shaped abrasive particles
US20160144477A1 (en) * 2014-11-21 2016-05-26 Diane Scott Coated compressive subpad for chemical mechanical polishing
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US9707529B2 (en) 2014-12-23 2017-07-18 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
US9676981B2 (en) 2014-12-24 2017-06-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle fractions and method of forming same
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
EP3277459B1 (en) 2015-03-31 2023-08-16 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
CN115781499A (zh) 2015-06-11 2023-03-14 圣戈本陶瓷及塑料股份有限公司 包括经成形研磨颗粒的研磨制品
KR102243356B1 (ko) 2016-05-10 2021-04-23 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 연마 입자 및 이의 형성 방법
CN109462993A (zh) 2016-05-10 2019-03-12 圣戈本陶瓷及塑料股份有限公司 磨料颗粒及其形成方法
TWI621502B (zh) * 2016-08-18 2018-04-21 中國砂輪企業股份有限公司 Double chemical mechanical polishing trimming system and method thereof
EP3519134B1 (en) 2016-09-29 2024-01-17 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
CN110719946B (zh) 2017-06-21 2022-07-15 圣戈本陶瓷及塑料股份有限公司 颗粒材料及其形成方法
CN110869206B (zh) * 2017-07-11 2023-06-30 3M创新有限公司 包括可适形涂层的磨料制品和由此形成的抛光系统
US12043785B2 (en) * 2017-07-11 2024-07-23 3M Innovative Properties Company Abrasive articles including conformable coatings and polishing system therefrom
JP7645802B2 (ja) * 2019-02-13 2025-03-14 スリーエム イノベイティブ プロパティズ カンパニー 精密に成形された特徴部を有する研磨要素、同研磨要素から製造された研磨物品、及び同研磨物品の製造方法
EP4081370A4 (en) 2019-12-27 2024-04-24 Saint-Gobain Ceramics & Plastics Inc. ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
CN119238386A (zh) 2019-12-27 2025-01-03 圣戈本陶瓷及塑料股份有限公司 磨料制品及其形成方法
CN114846112A (zh) 2019-12-27 2022-08-02 圣戈本陶瓷及塑料股份有限公司 磨料制品及其形成方法
TWI738304B (zh) * 2020-04-23 2021-09-01 台灣積體電路製造股份有限公司 半導體晶圓加工方法及清潔刷頭
CN111546247B (zh) * 2020-04-30 2022-03-25 郑州力弘超硬材料有限公司 一种用于光纤插针的金刚石磨具低温陶瓷结合剂及其制备方法
WO2022049818A1 (ja) * 2020-09-07 2022-03-10 日本碍子株式会社 耐火材
US11919115B2 (en) * 2021-10-13 2024-03-05 Dalian University Of Technology Flexible dot matrix bonding apparatus and adaptive clamping method for disk-type planar component
CN118541241A (zh) 2021-12-30 2024-08-23 圣戈班磨料磨具有限公司 磨料制品及其形成方法
WO2023130053A1 (en) 2021-12-30 2023-07-06 Saint-Gobain Abrasives, Inc. Abrasive articles and methods of forming same
TWI856689B (zh) * 2023-06-07 2024-09-21 吉而特科技股份有限公司 循環再使用的研磨裝置

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2488276A (en) * 1943-12-28 1949-11-15 Norton Co Grinding wheel
BE758965A (fr) * 1969-11-14 1971-05-13 Norton Co Elements de meulage abrasifs
US3966855A (en) * 1974-02-22 1976-06-29 The United States Of America As Represented By The Secretary Of The Air Force Method of fabricating silicon carbide articles
JPS61230871A (ja) * 1985-04-05 1986-10-15 Noritake Co Ltd 可撓性樹脂を用いた砥石
KR910002578B1 (ko) * 1988-01-19 1991-04-27 닙폰 가이시 카부시키카이샤 고밀도 SiC 소결체의 제조방법
DE4243864C2 (de) * 1991-12-24 1996-04-18 Schunk Ingenieurkeramik Gmbh Verfahren zur Herstellung von Formkörpern aus Siliciumcarbid
US5366523A (en) * 1992-07-23 1994-11-22 Minnesota Mining And Manufacturing Company Abrasive article containing shaped abrasive particles
US5453312A (en) * 1993-10-29 1995-09-26 Minnesota Mining And Manufacturing Company Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface
US5551959A (en) * 1994-08-24 1996-09-03 Minnesota Mining And Manufacturing Company Abrasive article having a diamond-like coating layer and method for making same
US5692950A (en) * 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
JPH10138120A (ja) * 1996-10-31 1998-05-26 Kyocera Corp ドレッシング用治具
US5840221A (en) * 1996-12-02 1998-11-24 Saint-Gobain/Norton Industrial Ceramics Corporation Process for making silicon carbide reinforced silicon carbide composite
CN1060424C (zh) * 1997-08-26 2001-01-10 汪宁 用于化学-机械抛光的抛光盘及其制造方法
US6214078B1 (en) * 1997-11-25 2001-04-10 Ferro Corporation High temperature ceramic filter
US20050260930A1 (en) * 1999-06-15 2005-11-24 Yuji Okuda Table of wafer of polishing apparatus, method for polishing semiconductor wafer, and method for manufacturing semiconductor wafer
US6364749B1 (en) * 1999-09-02 2002-04-02 Micron Technology, Inc. CMP polishing pad with hydrophilic surfaces for enhanced wetting
US6439986B1 (en) * 1999-10-12 2002-08-27 Hunatech Co., Ltd. Conditioner for polishing pad and method for manufacturing the same
JP2001121418A (ja) * 1999-10-29 2001-05-08 Noritake Diamond Ind Co Ltd ポリッシング用電着ドレッサ
US6451077B1 (en) * 2000-02-02 2002-09-17 3M Innovative Properties Company Fused abrasive particles, abrasive articles, and methods of making and using the same
US7384438B1 (en) * 2000-07-19 2008-06-10 3M Innovative Properties Company Fused Al2O3-Y2O3-ZrO2 eutectic abrasive particles, abrasive articles, and methods of making and using the same
CA2423597A1 (en) * 2000-10-16 2002-04-25 3M Innovative Properties Company Method of making ceramic aggregate particles
JP2004291165A (ja) * 2003-03-27 2004-10-21 Mitsubishi Materials Corp 軟質材加工用工具
CN100356516C (zh) * 2004-05-05 2007-12-19 智胜科技股份有限公司 单层研磨垫及其制造方法
JP4661098B2 (ja) * 2004-06-18 2011-03-30 三菱マテリアル株式会社 軟質材加工用切削工具
US7309672B2 (en) * 2005-07-05 2007-12-18 Ceradyne, Inc. Lightweight boron carbide materials with improved mechanical properties and process for their manufacture
JP4624293B2 (ja) * 2006-03-31 2011-02-02 株式会社ノリタケスーパーアブレーシブ Cmpパッドコンディショナー
US7410413B2 (en) * 2006-04-27 2008-08-12 3M Innovative Properties Company Structured abrasive article and method of making and using the same
US8323072B1 (en) * 2007-03-21 2012-12-04 3M Innovative Properties Company Method of polishing transparent armor
US20080287047A1 (en) * 2007-05-18 2008-11-20 Sang Fang Chemical Industry Co., Ltd. Polishing pad, use thereof and method for making the same
US8080073B2 (en) * 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
JP2010125567A (ja) * 2008-11-28 2010-06-10 Mitsubishi Materials Corp Cmpパッドコンディショナー
JP2010125586A (ja) * 2008-12-01 2010-06-10 Mitsubishi Materials Corp 半導体研磨布用コンディショナー及びその製造方法
WO2010063647A1 (en) * 2008-12-03 2010-06-10 Struers A/S Abrasive disc
CN103962943A (zh) * 2009-03-24 2014-08-06 圣戈班磨料磨具有限公司 用作化学机械平坦化垫修整器的研磨工具
MY155563A (en) * 2009-06-02 2015-10-30 Saint Gobain Abrasives Inc Corrosion-resistant cmp conditioning tools and methods for making and using same
KR101091030B1 (ko) * 2010-04-08 2011-12-09 이화다이아몬드공업 주식회사 감소된 마찰력을 갖는 패드 컨디셔너 제조방법
US20120171935A1 (en) * 2010-12-20 2012-07-05 Diamond Innovations, Inc. CMP PAD Conditioning Tool
US20130065490A1 (en) * 2011-09-12 2013-03-14 3M Innovative Properties Company Method of refurbishing vinyl composition tile

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