KR20150039795A - 정밀하게 형상화된 특징부를 갖는 연마 요소, 그로부터 제작되는 연마 물품, 및 그의 제조 방법 - Google Patents

정밀하게 형상화된 특징부를 갖는 연마 요소, 그로부터 제작되는 연마 물품, 및 그의 제조 방법 Download PDF

Info

Publication number
KR20150039795A
KR20150039795A KR20157004858A KR20157004858A KR20150039795A KR 20150039795 A KR20150039795 A KR 20150039795A KR 20157004858 A KR20157004858 A KR 20157004858A KR 20157004858 A KR20157004858 A KR 20157004858A KR 20150039795 A KR20150039795 A KR 20150039795A
Authority
KR
South Korea
Prior art keywords
abrasive
diamond
abrasive element
precisely shaped
major surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
KR20157004858A
Other languages
English (en)
Korean (ko)
Inventor
듀이 케이 리후우
노아 오 샨티
준칭 지에
캐스린 알 브렛셔
빈센트 더블유 네흐링
Original Assignee
쓰리엠 이노베이티브 프로퍼티즈 컴파니
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 쓰리엠 이노베이티브 프로퍼티즈 컴파니 filed Critical 쓰리엠 이노베이티브 프로퍼티즈 컴파니
Publication of KR20150039795A publication Critical patent/KR20150039795A/ko
Ceased legal-status Critical Current

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B53/00—Devices or means for dressing or conditioning abrasive surfaces
    • B24B53/017—Devices or means for dressing, cleaning or otherwise conditioning lapping tools
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D18/00—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for
    • B24D18/0009—Manufacture of grinding tools or other grinding devices, e.g. wheels, not otherwise provided for using moulds or presses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D3/00—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents
    • B24D3/02—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent
    • B24D3/04—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic
    • B24D3/14—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings
    • B24D3/18—Physical features of abrasive bodies, or sheets, e.g. abrasive surfaces of special nature; Abrasive bodies or sheets characterised by their constituents the constituent being used as bonding agent and being essentially inorganic ceramic, i.e. vitrified bondings for porous or cellular structure

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Carbon And Carbon Compounds (AREA)
KR20157004858A 2012-08-02 2013-07-31 정밀하게 형상화된 특징부를 갖는 연마 요소, 그로부터 제작되는 연마 물품, 및 그의 제조 방법 Ceased KR20150039795A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201261678665P 2012-08-02 2012-08-02
US61/678,665 2012-08-02
PCT/US2013/052828 WO2014022462A1 (en) 2012-08-02 2013-07-31 Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof

Publications (1)

Publication Number Publication Date
KR20150039795A true KR20150039795A (ko) 2015-04-13

Family

ID=50028490

Family Applications (1)

Application Number Title Priority Date Filing Date
KR20157004858A Ceased KR20150039795A (ko) 2012-08-02 2013-07-31 정밀하게 형상화된 특징부를 갖는 연마 요소, 그로부터 제작되는 연마 물품, 및 그의 제조 방법

Country Status (8)

Country Link
US (1) US20150224625A1 (cg-RX-API-DMAC7.html)
EP (1) EP2879836B1 (cg-RX-API-DMAC7.html)
JP (2) JP2015530265A (cg-RX-API-DMAC7.html)
KR (1) KR20150039795A (cg-RX-API-DMAC7.html)
CN (2) CN115625629A (cg-RX-API-DMAC7.html)
SG (1) SG11201500713PA (cg-RX-API-DMAC7.html)
TW (1) TWI660816B (cg-RX-API-DMAC7.html)
WO (1) WO2014022462A1 (cg-RX-API-DMAC7.html)

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
BR112013016734A2 (pt) 2010-12-31 2019-09-24 Saint Gobain Ceramics partículas abrasivas com formas particulares e métodos de deformação de tais partículas
WO2013003831A2 (en) 2011-06-30 2013-01-03 Saint-Gobain Ceramics & Plastics, Inc. Liquid phase sintered silicon carbide abrasive particles
CN103702800B (zh) 2011-06-30 2017-11-10 圣戈本陶瓷及塑料股份有限公司 包括氮化硅磨粒的磨料制品
JP5802336B2 (ja) 2011-09-26 2015-10-28 サン−ゴバン セラミックス アンド プラスティクス，インコーポレイティド 研磨粒子材料を含む研磨製品、研磨粒子材料を使用する研磨布紙および形成方法
CN104114327B (zh) 2011-12-30 2018-06-05 圣戈本陶瓷及塑料股份有限公司 复合成型研磨颗粒及其形成方法
WO2013102177A1 (en) 2011-12-30 2013-07-04 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle and method of forming same
CA3056658C (en) 2012-01-10 2023-07-04 Doruk O. Yener Abrasive particles having complex shapes and methods of forming same
WO2013106602A1 (en) 2012-01-10 2013-07-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
WO2013149209A1 (en) 2012-03-30 2013-10-03 Saint-Gobain Abrasives, Inc. Abrasive products having fibrillated fibers
KR101888347B1 (ko) 2012-05-23 2018-08-16 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 형상화 연마입자들 및 이의 형성방법
US10106714B2 (en) 2012-06-29 2018-10-23 Saint-Gobain Ceramics & Plastics, Inc. Abrasive particles having particular shapes and methods of forming such particles
EP2879838B1 (en) 2012-08-02 2023-09-13 3M Innovative Properties Company Abrasive articles with precisely shaped features and method of making thereof
JP6474346B2 (ja) 2012-08-02 2019-02-27 スリーエム イノベイティブ プロパティズ カンパニー 精密に成形された形成部を有する研磨要素前駆体及びその作製方法
CN104822494B (zh) 2012-10-15 2017-11-28 圣戈班磨料磨具有限公司 具有特定形状的磨粒以及形成这种粒子的方法
EP2938459B1 (en) 2012-12-31 2021-06-16 Saint-Gobain Ceramics & Plastics, Inc. Particulate materials and methods of forming same
CA2905551C (en) * 2013-03-12 2021-02-16 3M Innovative Properties Company Bonded abrasive article
ES2984562T3 (es) 2013-03-29 2024-10-29 Saint Gobain Abrasives Inc Partículas abrasivas que tienen formas particulares y métodos de formación de dichas partículas
TW201502263A (zh) 2013-06-28 2015-01-16 Saint Gobain Ceramics 包含成形研磨粒子之研磨物品
EP3052270B1 (en) 2013-09-30 2025-10-29 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and methods of forming same
EP3089851B1 (en) 2013-12-31 2019-02-06 Saint-Gobain Abrasives, Inc. Abrasive article including shaped abrasive particles
US9771507B2 (en) 2014-01-31 2017-09-26 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle including dopant material and method of forming same
US9803119B2 (en) 2014-04-14 2017-10-31 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
EP4306610A3 (en) 2014-04-14 2024-04-03 Saint-Gobain Ceramics and Plastics, Inc. Abrasive article including shaped abrasive particles
WO2015184355A1 (en) 2014-05-30 2015-12-03 Saint-Gobain Abrasives, Inc. Method of using an abrasive article including shaped abrasive particles
US20160144477A1 (en) * 2014-11-21 2016-05-26 Diane Scott Coated compressive subpad for chemical mechanical polishing
US9914864B2 (en) 2014-12-23 2018-03-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particles and method of forming same
US9707529B2 (en) 2014-12-23 2017-07-18 Saint-Gobain Ceramics & Plastics, Inc. Composite shaped abrasive particles and method of forming same
US9676981B2 (en) 2014-12-24 2017-06-13 Saint-Gobain Ceramics & Plastics, Inc. Shaped abrasive particle fractions and method of forming same
TWI634200B (zh) 2015-03-31 2018-09-01 聖高拜磨料有限公司 固定磨料物品及其形成方法
EP3277459B1 (en) 2015-03-31 2023-08-16 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
CN115781499A (zh) 2015-06-11 2023-03-14 圣戈本陶瓷及塑料股份有限公司 包括经成形研磨颗粒的研磨制品
KR102243356B1 (ko) 2016-05-10 2021-04-23 생-고뱅 세라믹스 앤드 플라스틱스, 인코포레이티드 연마 입자 및 이의 형성 방법
CN109462993A (zh) 2016-05-10 2019-03-12 圣戈本陶瓷及塑料股份有限公司 磨料颗粒及其形成方法
TWI621502B (zh) * 2016-08-18 2018-04-21 中國砂輪企業股份有限公司 Double chemical mechanical polishing trimming system and method thereof
EP3519134B1 (en) 2016-09-29 2024-01-17 Saint-Gobain Abrasives, Inc. Fixed abrasive articles and methods of forming same
US10759024B2 (en) 2017-01-31 2020-09-01 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
US10563105B2 (en) 2017-01-31 2020-02-18 Saint-Gobain Ceramics & Plastics, Inc. Abrasive article including shaped abrasive particles
CN110719946B (zh) 2017-06-21 2022-07-15 圣戈本陶瓷及塑料股份有限公司 颗粒材料及其形成方法
CN110869206B (zh) * 2017-07-11 2023-06-30 3M创新有限公司 包括可适形涂层的磨料制品和由此形成的抛光系统
US12043785B2 (en) * 2017-07-11 2024-07-23 3M Innovative Properties Company Abrasive articles including conformable coatings and polishing system therefrom
JP7645802B2 (ja) * 2019-02-13 2025-03-14 スリーエム イノベイティブ プロパティズ カンパニー 精密に成形された特徴部を有する研磨要素、同研磨要素から製造された研磨物品、及び同研磨物品の製造方法
EP4081370A4 (en) 2019-12-27 2024-04-24 Saint-Gobain Ceramics & Plastics Inc. ABRASIVE ARTICLES AND THEIR FORMATION PROCESSES
CN119238386A (zh) 2019-12-27 2025-01-03 圣戈本陶瓷及塑料股份有限公司 磨料制品及其形成方法
CN114846112A (zh) 2019-12-27 2022-08-02 圣戈本陶瓷及塑料股份有限公司 磨料制品及其形成方法
TWI738304B (zh) * 2020-04-23 2021-09-01 台灣積體電路製造股份有限公司 半導體晶圓加工方法及清潔刷頭
CN111546247B (zh) * 2020-04-30 2022-03-25 郑州力弘超硬材料有限公司 一种用于光纤插针的金刚石磨具低温陶瓷结合剂及其制备方法
WO2022049818A1 (ja) * 2020-09-07 2022-03-10 日本碍子株式会社 耐火材
US11919115B2 (en) * 2021-10-13 2024-03-05 Dalian University Of Technology Flexible dot matrix bonding apparatus and adaptive clamping method for disk-type planar component
CN118541241A (zh) 2021-12-30 2024-08-23 圣戈班磨料磨具有限公司 磨料制品及其形成方法
WO2023130053A1 (en) 2021-12-30 2023-07-06 Saint-Gobain Abrasives, Inc. Abrasive articles and methods of forming same
TWI856689B (zh) * 2023-06-07 2024-09-21 吉而特科技股份有限公司 循環再使用的研磨裝置

Family Cites Families (38)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2488276A (en) * 1943-12-28 1949-11-15 Norton Co Grinding wheel
BE758965A (fr) * 1969-11-14 1971-05-13 Norton Co Elements de meulage abrasifs
US3966855A (en) * 1974-02-22 1976-06-29 The United States Of America As Represented By The Secretary Of The Air Force Method of fabricating silicon carbide articles
JPS61230871A (ja) * 1985-04-05 1986-10-15 Noritake Co Ltd 可撓性樹脂を用いた砥石
KR910002578B1 (ko) * 1988-01-19 1991-04-27 닙폰 가이시 카부시키카이샤 고밀도 SiC 소결체의 제조방법
DE4243864C2 (de) * 1991-12-24 1996-04-18 Schunk Ingenieurkeramik Gmbh Verfahren zur Herstellung von Formkörpern aus Siliciumcarbid
US5366523A (en) * 1992-07-23 1994-11-22 Minnesota Mining And Manufacturing Company Abrasive article containing shaped abrasive particles
US5453312A (en) * 1993-10-29 1995-09-26 Minnesota Mining And Manufacturing Company Abrasive article, a process for its manufacture, and a method of using it to reduce a workpiece surface
US5551959A (en) * 1994-08-24 1996-09-03 Minnesota Mining And Manufacturing Company Abrasive article having a diamond-like coating layer and method for making same
US5692950A (en) * 1996-08-08 1997-12-02 Minnesota Mining And Manufacturing Company Abrasive construction for semiconductor wafer modification
JPH10138120A (ja) * 1996-10-31 1998-05-26 Kyocera Corp ドレッシング用治具
US5840221A (en) * 1996-12-02 1998-11-24 Saint-Gobain/Norton Industrial Ceramics Corporation Process for making silicon carbide reinforced silicon carbide composite
CN1060424C (zh) * 1997-08-26 2001-01-10 汪宁 用于化学－机械抛光的抛光盘及其制造方法
US6214078B1 (en) * 1997-11-25 2001-04-10 Ferro Corporation High temperature ceramic filter
US20050260930A1 (en) * 1999-06-15 2005-11-24 Yuji Okuda Table of wafer of polishing apparatus, method for polishing semiconductor wafer, and method for manufacturing semiconductor wafer
US6364749B1 (en) * 1999-09-02 2002-04-02 Micron Technology, Inc. CMP polishing pad with hydrophilic surfaces for enhanced wetting
US6439986B1 (en) * 1999-10-12 2002-08-27 Hunatech Co., Ltd. Conditioner for polishing pad and method for manufacturing the same
JP2001121418A (ja) * 1999-10-29 2001-05-08 Noritake Diamond Ind Co Ltd ポリッシング用電着ドレッサ
US6451077B1 (en) * 2000-02-02 2002-09-17 3M Innovative Properties Company Fused abrasive particles, abrasive articles, and methods of making and using the same
US7384438B1 (en) * 2000-07-19 2008-06-10 3M Innovative Properties Company Fused Al2O3-Y2O3-ZrO2 eutectic abrasive particles, abrasive articles, and methods of making and using the same
CA2423597A1 (en) * 2000-10-16 2002-04-25 3M Innovative Properties Company Method of making ceramic aggregate particles
JP2004291165A (ja) * 2003-03-27 2004-10-21 Mitsubishi Materials Corp 軟質材加工用工具
CN100356516C (zh) * 2004-05-05 2007-12-19 智胜科技股份有限公司 单层研磨垫及其制造方法
JP4661098B2 (ja) * 2004-06-18 2011-03-30 三菱マテリアル株式会社 軟質材加工用切削工具
US7309672B2 (en) * 2005-07-05 2007-12-18 Ceradyne, Inc. Lightweight boron carbide materials with improved mechanical properties and process for their manufacture
JP4624293B2 (ja) * 2006-03-31 2011-02-02 株式会社ノリタケスーパーアブレーシブ Ｃｍｐパッドコンディショナー
US7410413B2 (en) * 2006-04-27 2008-08-12 3M Innovative Properties Company Structured abrasive article and method of making and using the same
US8323072B1 (en) * 2007-03-21 2012-12-04 3M Innovative Properties Company Method of polishing transparent armor
US20080287047A1 (en) * 2007-05-18 2008-11-20 Sang Fang Chemical Industry Co., Ltd. Polishing pad, use thereof and method for making the same
US8080073B2 (en) * 2007-12-20 2011-12-20 3M Innovative Properties Company Abrasive article having a plurality of precisely-shaped abrasive composites
JP2010125567A (ja) * 2008-11-28 2010-06-10 Mitsubishi Materials Corp Ｃｍｐパッドコンディショナー
JP2010125586A (ja) * 2008-12-01 2010-06-10 Mitsubishi Materials Corp 半導体研磨布用コンディショナー及びその製造方法
WO2010063647A1 (en) * 2008-12-03 2010-06-10 Struers A/S Abrasive disc
CN103962943A (zh) * 2009-03-24 2014-08-06 圣戈班磨料磨具有限公司 用作化学机械平坦化垫修整器的研磨工具
MY155563A (en) * 2009-06-02 2015-10-30 Saint Gobain Abrasives Inc Corrosion-resistant cmp conditioning tools and methods for making and using same
KR101091030B1 (ko) * 2010-04-08 2011-12-09 이화다이아몬드공업 주식회사 감소된 마찰력을 갖는 패드 컨디셔너 제조방법
US20120171935A1 (en) * 2010-12-20 2012-07-05 Diamond Innovations, Inc. CMP PAD Conditioning Tool
US20130065490A1 (en) * 2011-09-12 2013-03-14 3M Innovative Properties Company Method of refurbishing vinyl composition tile

Also Published As

Publication number Publication date
SG11201500713PA (en) 2015-02-27
EP2879836A1 (en) 2015-06-10
TW201410391A (zh) 2014-03-16
EP2879836B1 (en) 2019-11-13
CN104684686A (zh) 2015-06-03
US20150224625A1 (en) 2015-08-13
JP2015530265A (ja) 2015-10-15
CN115625629A (zh) 2023-01-20
JP2019063989A (ja) 2019-04-25
TWI660816B (zh) 2019-06-01
EP2879836A4 (en) 2016-05-25
WO2014022462A1 (en) 2014-02-06

Similar Documents

Publication Publication Date Title
US11697185B2 (en) Abrasive articles with precisely shaped features and method of making thereof
KR102089382B1 (ko) 정밀하게 형상화된 특징부를 갖는 연마 요소 전구체 및 그의 제조 방법
KR20150039795A (ko) 정밀하게 형상화된 특징부를 갖는 연마 요소, 그로부터 제작되는 연마 물품, 및 그의 제조 방법
US20250326089A1 (en) Abrasive elements with precisely shaped features, abrasive articles fabricated therefrom and methods of making thereof

Legal Events

Date Code Title Description
PA0105 International application

Patent event date: 20150225

Patent event code: PA01051R01D

Comment text: International Patent Application

PG1501 Laying open of application
A201 Request for examination
PA0201 Request for examination

Patent event code: PA02012R01D

Patent event date: 20180625

Comment text: Request for Examination of Application

E902 Notification of reason for refusal
PE0902 Notice of grounds for rejection

Comment text: Notification of reason for refusal

Patent event date: 20190627

Patent event code: PE09021S01D

E601 Decision to refuse application
PE0601 Decision on rejection of patent

Patent event date: 20190902

Comment text: Decision to Refuse Application

Patent event code: PE06012S01D

Patent event date: 20190627

Comment text: Notification of reason for refusal

Patent event code: PE06011S01I

J201 Request for trial against refusal decision
PJ0201 Trial against decision of rejection

Patent event date: 20191023

Comment text: Request for Trial against Decision on Refusal

Patent event code: PJ02012R01D

Patent event date: 20190902

Comment text: Decision to Refuse Application

Patent event code: PJ02011S01I

Appeal kind category: Appeal against decision to decline refusal

Appeal identifier: 2019101003505

Request date: 20191023

J301 Trial decision

Free format text: TRIAL NUMBER: 2019101003505; TRIAL DECISION FOR APPEAL AGAINST DECISION TO DECLINE REFUSAL REQUESTED 20191023

Effective date: 20200923

PJ1301 Trial decision

Patent event code: PJ13011S01D

Patent event date: 20200923

Comment text: Trial Decision on Objection to Decision on Refusal

Appeal kind category: Appeal against decision to decline refusal

Request date: 20191023

Decision date: 20200923

Appeal identifier: 2019101003505