JP2015522939A5 - - Google Patents

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Publication number
JP2015522939A5
JP2015522939A5 JP2015509061A JP2015509061A JP2015522939A5 JP 2015522939 A5 JP2015522939 A5 JP 2015522939A5 JP 2015509061 A JP2015509061 A JP 2015509061A JP 2015509061 A JP2015509061 A JP 2015509061A JP 2015522939 A5 JP2015522939 A5 JP 2015522939A5
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JP
Japan
Prior art keywords
lamp
reflector
lamp head
passages
monolithic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2015509061A
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English (en)
Japanese (ja)
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JP2015522939A (ja
JP6637312B2 (ja
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Publication date
Priority claimed from US13/865,672 external-priority patent/US10202707B2/en
Application filed filed Critical
Publication of JP2015522939A publication Critical patent/JP2015522939A/ja
Publication of JP2015522939A5 publication Critical patent/JP2015522939A5/ja
Application granted granted Critical
Publication of JP6637312B2 publication Critical patent/JP6637312B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2015509061A 2012-04-26 2013-04-22 温度管理を備えるランプヘッドを有する基板処理システム Active JP6637312B2 (ja)

Applications Claiming Priority (7)

Application Number Priority Date Filing Date Title
US201261638619P 2012-04-26 2012-04-26
US61/638,619 2012-04-26
US201261707938P 2012-09-29 2012-09-29
US61/707,938 2012-09-29
US13/865,672 2013-04-18
US13/865,672 US10202707B2 (en) 2012-04-26 2013-04-18 Substrate processing system with lamphead having temperature management
PCT/US2013/037585 WO2013163080A1 (en) 2012-04-26 2013-04-22 Substrate processing system with lamphead having temperature management

Publications (3)

Publication Number Publication Date
JP2015522939A JP2015522939A (ja) 2015-08-06
JP2015522939A5 true JP2015522939A5 (enExample) 2016-06-30
JP6637312B2 JP6637312B2 (ja) 2020-01-29

Family

ID=49483801

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2015509061A Active JP6637312B2 (ja) 2012-04-26 2013-04-22 温度管理を備えるランプヘッドを有する基板処理システム

Country Status (6)

Country Link
US (1) US10202707B2 (enExample)
JP (1) JP6637312B2 (enExample)
KR (1) KR102108408B1 (enExample)
CN (1) CN104246969B (enExample)
TW (1) TWI646298B (enExample)
WO (1) WO2013163080A1 (enExample)

Families Citing this family (12)

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Publication number Priority date Publication date Assignee Title
CN107546157A (zh) * 2013-11-22 2018-01-05 应用材料公司 易取灯头
US10053777B2 (en) * 2014-03-19 2018-08-21 Applied Materials, Inc. Thermal processing chamber
CN107620893A (zh) * 2017-08-31 2018-01-23 江苏米优光电科技有限公司 一种透气散热型户外全彩led贴片灯组及其生产工艺
KR102699383B1 (ko) 2019-04-18 2024-08-26 삼성전자주식회사 웨이퍼 클리닝 장치
US11680338B2 (en) * 2019-12-19 2023-06-20 Applied Materials, Inc. Linear lamp array for improved thermal uniformity and profile control
US12091749B2 (en) 2021-05-11 2024-09-17 Applied Materials, Inc. Method for epitaxially depositing a material on a substrate by flowing a process gas across the substrate from an upper gas inlet to an upper gas outlet and flowing a purge gas from a lower gas inlet to a lower gas outlet
KR102811576B1 (ko) * 2021-05-11 2025-05-22 어플라이드 머티어리얼스, 인코포레이티드 에피택시 및 cvd 챔버용 가스 인젝터
US12060651B2 (en) 2021-05-11 2024-08-13 Applied Materials, Inc. Chamber architecture for epitaxial deposition and advanced epitaxial film applications
US20220367216A1 (en) * 2021-05-11 2022-11-17 Applied Materials, Inc. Multi-zone lamp heating and temperature monitoring in epitaxy process chamber
US12018372B2 (en) 2021-05-11 2024-06-25 Applied Materials, Inc. Gas injector for epitaxy and CVD chamber
JP7667310B2 (ja) * 2021-06-09 2025-04-22 アプライド マテリアルズ インコーポレイテッド 両口金形ランプを用いた軸対称加熱アセンブリレイアウト
CN115161764B (zh) * 2022-06-23 2024-02-06 江苏天芯微半导体设备有限公司 一种控温装置及其外延设备

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US4047496A (en) * 1974-05-31 1977-09-13 Applied Materials, Inc. Epitaxial radiation heated reactor
US5156820A (en) * 1989-05-15 1992-10-20 Rapro Technology, Inc. Reaction chamber with controlled radiant energy heating and distributed reactant flow
US5002630A (en) 1989-06-06 1991-03-26 Rapro Technology Method for high temperature thermal processing with reduced convective heat loss
US5108792A (en) 1990-03-09 1992-04-28 Applied Materials, Inc. Double-dome reactor for semiconductor processing
JPH04297581A (ja) 1991-03-15 1992-10-21 Mitsubishi Electric Corp 光気相成長装置
JPH0845863A (ja) 1994-07-27 1996-02-16 Touyoko Kagaku Kk 半導体基板の枚葉式熱処理装置
JPH09237763A (ja) 1996-02-28 1997-09-09 Tokyo Electron Ltd 枚葉式の熱処理装置
TW315493B (en) * 1996-02-28 1997-09-11 Tokyo Electron Co Ltd Heating apparatus and heat treatment apparatus
JP3616687B2 (ja) 1996-03-04 2005-02-02 東洋製罐株式会社 耐熱耐圧性に優れた自立性容器
US6007635A (en) * 1997-11-26 1999-12-28 Micro C Technologies, Inc. Platform for supporting a semiconductor substrate and method of supporting a substrate during rapid high temperature processing
JP3438658B2 (ja) * 1999-07-22 2003-08-18 ウシオ電機株式会社 ランプユニット及び光照射式加熱装置
JP2005222962A (ja) * 2000-04-20 2005-08-18 Tokyo Electron Ltd 熱処理装置及びその方法
WO2001082348A1 (en) 2000-04-20 2001-11-01 Tokyo Electron Limited Thermal processing system
US6476362B1 (en) * 2000-09-12 2002-11-05 Applied Materials, Inc. Lamp array for thermal processing chamber
JP2002270532A (ja) 2001-03-14 2002-09-20 Tokyo Electron Ltd 加熱装置及び熱処理装置
US7075037B2 (en) 2001-03-02 2006-07-11 Tokyo Electron Limited Heat treatment apparatus using a lamp for rapidly and uniformly heating a wafer
JP2002270533A (ja) 2001-03-14 2002-09-20 Tokyo Electron Ltd 熱処理装置及びランプ出力制御方法
JP2003022982A (ja) 2001-07-09 2003-01-24 Tokyo Electron Ltd 熱処理装置
US6818864B2 (en) * 2002-08-09 2004-11-16 Asm America, Inc. LED heat lamp arrays for CVD heating
US7691204B2 (en) * 2005-09-30 2010-04-06 Applied Materials, Inc. Film formation apparatus and methods including temperature and emissivity/pattern compensation
US20080072820A1 (en) * 2006-06-30 2008-03-27 Applied Materials, Inc. Modular cvd epi 300mm reactor
US7860379B2 (en) * 2007-01-15 2010-12-28 Applied Materials, Inc. Temperature measurement and control of wafer support in thermal processing chamber
US8314368B2 (en) * 2008-02-22 2012-11-20 Applied Materials, Inc. Silver reflectors for semiconductor processing chambers
JP5169299B2 (ja) 2008-02-22 2013-03-27 株式会社デンソー 半導体製造装置
KR101458001B1 (ko) 2008-06-17 2014-11-04 주성엔지니어링(주) 기판 처리 장치
US8294068B2 (en) * 2008-09-10 2012-10-23 Applied Materials, Inc. Rapid thermal processing lamphead with improved cooling
KR20120054636A (ko) 2009-08-18 2012-05-30 도쿄엘렉트론가부시키가이샤 열처리장치

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