JP2015505156A - 光起電力電池におけるi−iii−vi2族層と裏面コンタクト層の間の改善された接合部 - Google Patents
光起電力電池におけるi−iii−vi2族層と裏面コンタクト層の間の改善された接合部 Download PDFInfo
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- 239000010410 layer Substances 0.000 claims abstract description 161
- 229910052751 metal Inorganic materials 0.000 claims abstract description 60
- 239000002184 metal Substances 0.000 claims abstract description 60
- 230000004888 barrier function Effects 0.000 claims abstract description 45
- 229910021476 group 6 element Inorganic materials 0.000 claims abstract description 43
- 238000000034 method Methods 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims abstract description 25
- 238000010438 heat treatment Methods 0.000 claims abstract description 20
- 230000008021 deposition Effects 0.000 claims abstract description 17
- 239000002243 precursor Substances 0.000 claims abstract description 15
- 150000001875 compounds Chemical class 0.000 claims abstract description 13
- 238000009792 diffusion process Methods 0.000 claims abstract description 11
- 238000004519 manufacturing process Methods 0.000 claims abstract description 8
- 239000002344 surface layer Substances 0.000 claims abstract description 6
- 229910052750 molybdenum Inorganic materials 0.000 claims description 36
- 239000011733 molybdenum Substances 0.000 claims description 36
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 35
- IJGRMHOSHXDMSA-UHFFFAOYSA-N nitrogen Substances N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 30
- 239000011669 selenium Substances 0.000 claims description 25
- 229910052711 selenium Inorganic materials 0.000 claims description 24
- 238000000151 deposition Methods 0.000 claims description 23
- 229910052757 nitrogen Inorganic materials 0.000 claims description 17
- 238000004544 sputter deposition Methods 0.000 claims description 17
- 229910045601 alloy Inorganic materials 0.000 claims description 11
- 239000000956 alloy Substances 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 9
- 238000001465 metallisation Methods 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 6
- 239000001301 oxygen Substances 0.000 claims description 6
- 150000004767 nitrides Chemical class 0.000 claims description 3
- 125000003748 selenium group Chemical group *[Se]* 0.000 claims description 3
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 description 21
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 15
- 229910016001 MoSe Inorganic materials 0.000 description 12
- 239000000203 mixture Substances 0.000 description 11
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical compound [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 229910052717 sulfur Inorganic materials 0.000 description 9
- 239000011593 sulfur Substances 0.000 description 9
- 229910052786 argon Inorganic materials 0.000 description 8
- 230000008901 benefit Effects 0.000 description 7
- 239000010949 copper Substances 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 6
- 229910052733 gallium Inorganic materials 0.000 description 6
- 229910052738 indium Inorganic materials 0.000 description 6
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 239000010409 thin film Substances 0.000 description 6
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 5
- 239000007789 gas Substances 0.000 description 5
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000005240 physical vapour deposition Methods 0.000 description 4
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000000137 annealing Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000011651 chromium Substances 0.000 description 3
- 238000011109 contamination Methods 0.000 description 3
- 238000005868 electrolysis reaction Methods 0.000 description 3
- 230000000737 periodic effect Effects 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000004070 electrodeposition Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 238000010329 laser etching Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 230000005012 migration Effects 0.000 description 2
- 238000013508 migration Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 2
- 238000005546 reactive sputtering Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000000427 thin-film deposition Methods 0.000 description 2
- -1 (For example Chemical compound 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- GPBUGPUPKAGMDK-UHFFFAOYSA-N azanylidynemolybdenum Chemical compound [Mo]#N GPBUGPUPKAGMDK-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- DVRDHUBQLOKMHZ-UHFFFAOYSA-N chalcopyrite Chemical group [S-2].[S-2].[Fe+2].[Cu+2] DVRDHUBQLOKMHZ-UHFFFAOYSA-N 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 238000005486 sulfidation Methods 0.000 description 1
- 238000005987 sulfurization reaction Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
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Abstract
Description
−コンタクト層を形成するための、基板上への金属の堆積、
−コンタクト層上への、光起電力層の前駆体の堆積、および
−I−III−VI2層を形成するための、VI族元素の添加を伴う、前駆体の熱処理
を含む、光起電力特性を有するI−III−VI2族層の製造法を提案する。
−アルゴン、および、
−例えば窒素、
(例えば窒素が10から50%の割合で、特には15から25%の範囲内で)。
−VI族元素の拡散に対する障壁材料として窒化物を生成するための、窒素、
−VI族元素の拡散に対する障壁材料として酸化物を生成するための、酸素、および
−VI族元素の拡散に対する障壁材料として合金を生成するための、金属(例えばチタン、クロム、その他)。
−将来の光起電力電池のための良好な裏面コンタクトを確実にする、例えばモリブデンの、比較的厚い金属層、
−前記厚い層の上の、VI族元素の拡散に対する障壁を形成する、窒化モリブデンの薄層、および、
−前記表在層(例えば、VI族元素がセレンであればMoSe2)を形成するためにVI族元素と反応させるための、純モリブデンの、別の薄層。このときこの薄層は「犠牲(sacrificial)」層と呼ばれる。
−I族、III族及びVI族元素の合金層、この層は光起電力特性を有し、および、
−その光起電力層の下の、金属を含むコンタクト層。
該光起電力層と該コンタクト層との間に位置する中間層は、金属−VI族元素の化合物(例えばMoSe2)を含んでいる。
本発明の光起電力電池は、金属−VI族元素の化合物の層の下に、前記金属とともにVI族元素の拡散に対する障壁を形成する化合物を生成する追加の元素を含む層を、さらに含んでいる。
−150から200nmの厚さの銅層、
−300から500nmのインジウム層、
−100から200nmのガリウム層。
その積層体は、次に、約80℃から120℃の温度および数十分間(例えば約30分間)の時間のアニール条件で、アニールされ(図2における矢印T°)、最終的にI−III族前駆体の層C13が得られる。
−基板SUB上のモリブデンMo(比較的「純粋な」または少なくとも「導電性の」)、
−モリブデンと、ここに述べる形態例における窒素などの追加元素との混合物MO−EA、ここでこの混合物は、図3の熱処理の間に、VI族元素(例えばセレンおよび/または硫黄)のマイグレーションに対する障壁を形成するという利点を有する、
−熱処理の前の、将来のI−III族層(複数)との接合部における、SACと表示される、さらなるモリブデンMo(「犠牲の」)。
図5Bを参照すると、熱処理後に、障壁MO−EAの上に、「犠牲」層SACのモリブデンと例えばVI族元素の添加(「セレン化」工程の間)に由来するセレンとの反応生成物として、表在層SUPが形成され、これは通常観察される組成MoSe2を有する。
−基板SUB上のモリブデンMo(比較的「純粋な」または少なくとも「導電性の」)、−モリブデンと、ここに述べる形態例における窒素などの追加元素との混合物、ここでこの混合物は、図3の熱処理の間に、VI族元素(例えばセレンおよび/または硫黄)のマイグレーションに対する障壁MO−EAを形成するという利点を有する、
−熱処理の前の、将来のI−III族層(複数)との接合部における、SACと表示される、さらなるモリブデンMo(「犠牲の」)。
Claims (10)
- −コンタクト層を形成するための基板上への金属の堆積、
−該コンタクト層上への光起電力層の前駆体の堆積、および
−I−III−VI2族層を形成するためのVI族元素の添加を伴う該前駆体の熱処理
を含む、光起電力特性を有するI−III−VI2族層を製造する方法であって、
該熱処理の間に該VI族元素が該コンタクト層内に拡散して該金属と結合して、該コンタクト層上に表在層(SUP)を形成し、
該方法が、該コンタクト層中で該VI族元素の拡散に対する障壁として作用する化合物(MO−EA)を生成するために追加の元素を該金属に添加する工程を含む、該金属の堆積によって特徴づけられる方法。 - 前記工程の後に、前記追加の元素を用いること無く金属の堆積が行われる、請求項1に記載の方法。
- 前記工程が前記コンタクト層の堆積を終了させる、請求項1に記載の方法。
- 前記工程の前に、前記追加の元素を用いること無く前記金属の堆積が行われる、請求項1〜3のいずれかに記載の方法。
- 前記工程の間に、前記金属を含有するターゲット(CT)をスパッタリングすることによって前記金属が堆積され、該スパッタリングが前記追加の元素を含有するプラズマによって支援される、請求項1〜4のいずれかに記載の方法。
- 前記工程の間に、前記金属と前記追加の元素とを含有するターゲット(CT)をスパッタリングすることによって前記金属が堆積される、請求項1〜4のいずれかに記載の方法。
- 前記金属がモリブデンである、請求項1〜6のいずれかに記載の方法。
- 前記追加の元素が、
−前記VI族元素に対する障壁材料としての窒化物を生成するための窒素
−前記VI族元素に対する障壁材料としての酸化物を生成するための酸素、および
−前記VI族元素に対する障壁材料としての合金を生成するための金属
のうちの少なくとも1つの元素である、請求項1〜7のいずれかに記載の方法。 - 前記VI族元素がセレンである、請求項1〜8のいずれかに記載の方法。
- −I族、III族およびVI族の元素の合金層、該層は光起電力特性を有し、および
−該光起電力層の下の、金属を含むコンタクト層、
該光起電力層と該コンタクト層との間の、金属−VI族元素の化合物を含有する中間層、
を含む光起電力電池であって、
該金属−VI族元素の化合物の層の下に、該金属とともに該VI族元素に対する障壁を形成する化合物を生成する追加の元素を含む層をさらに含む、光起電力電池。
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CN104025253A (zh) | 2014-09-03 |
EP2801104B1 (fr) | 2021-06-09 |
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FR2983642B1 (fr) | 2014-01-03 |
US20140315346A1 (en) | 2014-10-23 |
US9478695B2 (en) | 2016-10-25 |
WO2013083897A1 (fr) | 2013-06-13 |
BR112014013407A2 (pt) | 2017-06-13 |
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