JP2015504164A5 - - Google Patents

Download PDF

Info

Publication number
JP2015504164A5
JP2015504164A5 JP2014551307A JP2014551307A JP2015504164A5 JP 2015504164 A5 JP2015504164 A5 JP 2015504164A5 JP 2014551307 A JP2014551307 A JP 2014551307A JP 2014551307 A JP2014551307 A JP 2014551307A JP 2015504164 A5 JP2015504164 A5 JP 2015504164A5
Authority
JP
Japan
Prior art keywords
patterned
elongate body
moves
area
contact area
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2014551307A
Other languages
English (en)
Japanese (ja)
Other versions
JP6387305B2 (ja
JP2015504164A (ja
Filing date
Publication date
Priority claimed from US13/732,922 external-priority patent/US10006938B2/en
Application filed filed Critical
Publication of JP2015504164A publication Critical patent/JP2015504164A/ja
Publication of JP2015504164A5 publication Critical patent/JP2015504164A5/ja
Application granted granted Critical
Publication of JP6387305B2 publication Critical patent/JP6387305B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2014551307A 2012-01-04 2013-01-03 プログラム可能な動作を有するプローブ Expired - Fee Related JP6387305B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201261583154P 2012-01-04 2012-01-04
US61/583,154 2012-01-04
US13/732,922 2013-01-02
US13/732,922 US10006938B2 (en) 2012-01-04 2013-01-02 Probes with programmable motion
PCT/US2013/020093 WO2013103681A1 (en) 2012-01-04 2013-01-03 Probes with programmable motion

Publications (3)

Publication Number Publication Date
JP2015504164A JP2015504164A (ja) 2015-02-05
JP2015504164A5 true JP2015504164A5 (enExample) 2018-04-12
JP6387305B2 JP6387305B2 (ja) 2018-09-05

Family

ID=48694336

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014551307A Expired - Fee Related JP6387305B2 (ja) 2012-01-04 2013-01-03 プログラム可能な動作を有するプローブ

Country Status (5)

Country Link
US (1) US10006938B2 (enExample)
JP (1) JP6387305B2 (enExample)
KR (1) KR20160004893A (enExample)
TW (1) TWI586965B (enExample)
WO (1) WO2013103681A1 (enExample)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6337633B2 (ja) 2014-06-16 2018-06-06 オムロン株式会社 プローブピン
CN105353260B (zh) * 2015-12-25 2019-01-08 东莞市海轮电子科技有限公司 一种连接端子的测试装置及测试方法
IT201600084921A1 (it) * 2016-08-11 2018-02-11 Technoprobe Spa Sonda di contatto e relativa testa di misura di un’apparecchiatura di test di dispositivi elettronici
IT201700017061A1 (it) * 2017-02-15 2018-08-15 Technoprobe Spa Scheda di misura perfezionata per applicazioni ad alta frequenza
JP6872960B2 (ja) * 2017-04-21 2021-05-19 株式会社日本マイクロニクス 電気的接続装置
CN112424615B (zh) * 2018-07-13 2025-02-07 日本电产理德股份有限公司 检查治具以及检查装置
IT201800007898A1 (it) * 2018-08-06 2020-02-06 Technoprobe Spa Sonda di contatto con prestazioni migliorate e relativa testa di misura
KR102145719B1 (ko) * 2019-04-12 2020-08-19 윌테크놀러지(주) 벤딩방향 제어가 가능한 수직형 프로브 카드용 니들유닛
IT201900024946A1 (it) 2019-12-20 2021-06-20 Technoprobe Spa Testa di misura con un contatto migliorato tra sonde di contatto e fori guida
KR102342806B1 (ko) * 2020-03-30 2021-12-23 (주)포인트엔지니어링 프로브 헤드 및 이를 구비하는 프로브 카드
JP7523994B2 (ja) * 2020-08-24 2024-07-29 株式会社日本マイクロニクス 電気的接触子の電気的接触構造及び電気的接続装置
JPWO2022059070A1 (enExample) * 2020-09-15 2022-03-24
EP4314847A4 (en) * 2021-03-23 2025-03-05 Nielson Scientific, LLC CRYOGENIC PROBE CARD

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR0150334B1 (ko) * 1995-08-17 1998-12-01 남재우 수직형니들을 가지는 프로브카드 및 그 제조방법
US6051982A (en) * 1996-08-02 2000-04-18 International Business Machines Corporation Electronic component test apparatus with rotational probe and conductive spaced apart means
JP2992512B1 (ja) * 1998-07-15 1999-12-20 日本電子材料株式会社 プローブカード
IT1317517B1 (it) * 2000-05-11 2003-07-09 Technoprobe S R L Testa di misura per microstrutture
CN100339715C (zh) * 2001-04-13 2007-09-26 住友电气工业株式会社 接触探针
JP4209696B2 (ja) * 2003-02-03 2009-01-14 株式会社日本マイクロニクス 電気的接続装置
JP4017004B2 (ja) 2004-04-27 2007-12-05 Ｊｓｒ株式会社 シート状プローブおよびその応用
US7946853B2 (en) * 2005-07-02 2011-05-24 Teradyne, Inc. Compliant electro-mechanical device
US20070007974A1 (en) * 2005-07-05 2007-01-11 Jinn-Tong Chiu Method for reducing integral stress of a vertical probe with specific structure
JP5005195B2 (ja) * 2005-07-13 2012-08-22 東京エレクトロン株式会社 プローブカード製造方法
JP4884753B2 (ja) * 2005-11-22 2012-02-29 日本発條株式会社 導電性接触子ユニットおよび導電性接触子
JP2007303826A (ja) * 2006-05-08 2007-11-22 Tokyo Electron Ltd プローブ
TW200900703A (en) 2007-06-15 2009-01-01 Nictech Co Ltd Probe, probe assembly and probe card having the same
JP2009008516A (ja) * 2007-06-28 2009-01-15 Nidec-Read Corp 基板検査治具及び基板検査方法
US7775804B2 (en) * 2008-04-15 2010-08-17 Amphenol Corporation Interposer assembly with flat contacts
DE102008023761B9 (de) * 2008-05-09 2012-11-08 Feinmetall Gmbh Elektrisches Kontaktelement zum Berührungskontaktieren von elektrischen Prüflingen sowie entsprechende Kontaktieranordnung
JP2010091349A (ja) * 2008-10-06 2010-04-22 Japan Electronic Materials Corp 垂直型プローブカード
US7960989B2 (en) 2008-12-03 2011-06-14 Formfactor, Inc. Mechanical decoupling of a probe card assembly to improve thermal response
US8222912B2 (en) * 2009-03-12 2012-07-17 Sv Probe Pte. Ltd. Probe head structure for probe test cards
KR101168147B1 (ko) 2010-04-26 2012-07-24 화인인스트루먼트 (주) 프로브 카드용 프로브 핀 및 그의 제조 방법
US9702904B2 (en) * 2011-03-21 2017-07-11 Formfactor, Inc. Non-linear vertical leaf spring

Similar Documents

Publication Publication Date Title
JP2015504164A5 (enExample)
Hennig et al. Adaptive mesh refinement strategies in isogeometric analysis—a computational comparison
EP3417309A4 (en) MOTION RECOGNITION BASED ON REPEATED WIRELESS TRANSMISSIONS
JP2013195432A5 (enExample)
JP2015528758A5 (enExample)
JP2014515954A5 (enExample)
EP2540203A3 (en) Robot cleaner and control method thereof
RU2015134100A (ru) Вспомогательное устройство при посадке для рельсового транспортного средства или безрельсового транспортного средства с установкой на три точки
RU2016106656A (ru) Площадка траволатора
JP2013540702A5 (enExample)
CN108602492A8 (zh) 带有清洗水管的轮胎清洗设备
JP2015064923A5 (enExample)
JP2015526255A5 (enExample)
RU2019101915A (ru) Улучшенное приспособление для прорезывания зубов
RU2010107557A (ru) Устройство и способ производства впитывающего изделия
JP2017020897A5 (enExample)
JP2015026370A5 (enExample)
JP2016200526A5 (enExample)
JP2015065809A5 (ja) アクチュエータ
JP2016046393A5 (enExample)
JP2015211142A5 (enExample)
JP2016111562A5 (ja) アンテナ装置およびアンテナ装置の取り付け構造
Guo et al. On Weierstrass elliptic function solutions for a (N+ 1) dimensional potential KdV equation
JP2015087403A5 (enExample)
RU2013114972A (ru) Незагрязняемое указательное устройство "мышь"