JP2015215586A - 可動反射素子 - Google Patents

可動反射素子 Download PDF

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Publication number
JP2015215586A
JP2015215586A JP2014234364A JP2014234364A JP2015215586A JP 2015215586 A JP2015215586 A JP 2015215586A JP 2014234364 A JP2014234364 A JP 2014234364A JP 2014234364 A JP2014234364 A JP 2014234364A JP 2015215586 A JP2015215586 A JP 2015215586A
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JP
Japan
Prior art keywords
layer
bridge
axis
mirror
axis direction
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Withdrawn
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JP2014234364A
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Japanese (ja)
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JP2015215586A5 (https=
Inventor
岡田　和廣
Kazuhiro Okada
和廣 岡田
美穂 岡田
Yoshio Okada
美穂 岡田
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Tri Force Management Corp
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Tri Force Management Corp
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Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=54752497&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=JP2015215586(A) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Tri Force Management Corp filed Critical Tri Force Management Corp
Priority to JP2014234364A priority Critical patent/JP2015215586A/ja
Publication of JP2015215586A publication Critical patent/JP2015215586A/ja
Publication of JP2015215586A5 publication Critical patent/JP2015215586A5/ja
Withdrawn legal-status Critical Current

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  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Micromachines (AREA)
JP2014234364A 2014-11-19 2014-11-19 可動反射素子 Withdrawn JP2015215586A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014234364A JP2015215586A (ja) 2014-11-19 2014-11-19 可動反射素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014234364A JP2015215586A (ja) 2014-11-19 2014-11-19 可動反射素子

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2014095774A Division JP5654158B1 (ja) 2014-05-07 2014-05-07 可動反射素子および二次元走査装置

Publications (2)

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JP2015215586A true JP2015215586A (ja) 2015-12-03
JP2015215586A5 JP2015215586A5 (https=) 2017-04-27

Family

ID=54752497

Family Applications (1)

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JP2014234364A Withdrawn JP2015215586A (ja) 2014-11-19 2014-11-19 可動反射素子

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JP (1) JP2015215586A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024509368A (ja) * 2021-02-10 2024-03-01 シンテフ ティーティーオー アクティーゼルスカブ 作動デバイス

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003209981A (ja) * 2002-01-16 2003-07-25 Seiko Instruments Inc 圧電アクチュエータ及びそれを備えた電子機器
US6736521B1 (en) * 2003-01-02 2004-05-18 Texas Instruments Incorporated On axis translational motion stops for movable structure having torsional hinge
JP2004294828A (ja) * 2003-03-27 2004-10-21 Anritsu Corp 光スキャナ
JP2007152497A (ja) * 2005-12-05 2007-06-21 Canon Inc 揺動体装置
JP2010197662A (ja) * 2009-02-25 2010-09-09 Panasonic Corp 光学反射素子
JP2010237519A (ja) * 2009-03-31 2010-10-21 Brother Ind Ltd 光スキャナ
JP2011085677A (ja) * 2009-10-14 2011-04-28 Panasonic Corp 光走査装置、光走査装置の製造方法及びこの光走査装置を用いたレーザプロジェクタ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003209981A (ja) * 2002-01-16 2003-07-25 Seiko Instruments Inc 圧電アクチュエータ及びそれを備えた電子機器
US6736521B1 (en) * 2003-01-02 2004-05-18 Texas Instruments Incorporated On axis translational motion stops for movable structure having torsional hinge
JP2004294828A (ja) * 2003-03-27 2004-10-21 Anritsu Corp 光スキャナ
JP2007152497A (ja) * 2005-12-05 2007-06-21 Canon Inc 揺動体装置
JP2010197662A (ja) * 2009-02-25 2010-09-09 Panasonic Corp 光学反射素子
JP2010237519A (ja) * 2009-03-31 2010-10-21 Brother Ind Ltd 光スキャナ
JP2011085677A (ja) * 2009-10-14 2011-04-28 Panasonic Corp 光走査装置、光走査装置の製造方法及びこの光走査装置を用いたレーザプロジェクタ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024509368A (ja) * 2021-02-10 2024-03-01 シンテフ ティーティーオー アクティーゼルスカブ 作動デバイス

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