JP2015215586A5 - - Google Patents

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Publication number
JP2015215586A5
JP2015215586A5 JP2014234364A JP2014234364A JP2015215586A5 JP 2015215586 A5 JP2015215586 A5 JP 2015215586A5 JP 2014234364 A JP2014234364 A JP 2014234364A JP 2014234364 A JP2014234364 A JP 2014234364A JP 2015215586 A5 JP2015215586 A5 JP 2015215586A5
Authority
JP
Japan
Prior art keywords
bridge
piezoelectric element
axis
intermediate connection
frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2014234364A
Other languages
English (en)
Japanese (ja)
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JP2015215586A (ja
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Publication date
Application filed filed Critical
Priority to JP2014234364A priority Critical patent/JP2015215586A/ja
Priority claimed from JP2014234364A external-priority patent/JP2015215586A/ja
Publication of JP2015215586A publication Critical patent/JP2015215586A/ja
Publication of JP2015215586A5 publication Critical patent/JP2015215586A5/ja
Withdrawn legal-status Critical Current

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JP2014234364A 2014-11-19 2014-11-19 可動反射素子 Withdrawn JP2015215586A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2014234364A JP2015215586A (ja) 2014-11-19 2014-11-19 可動反射素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2014234364A JP2015215586A (ja) 2014-11-19 2014-11-19 可動反射素子

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2014095774A Division JP5654158B1 (ja) 2014-05-07 2014-05-07 可動反射素子および二次元走査装置

Publications (2)

Publication Number Publication Date
JP2015215586A JP2015215586A (ja) 2015-12-03
JP2015215586A5 true JP2015215586A5 (https=) 2017-04-27

Family

ID=54752497

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2014234364A Withdrawn JP2015215586A (ja) 2014-11-19 2014-11-19 可動反射素子

Country Status (1)

Country Link
JP (1) JP2015215586A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB202101833D0 (en) * 2021-02-10 2021-03-24 Sintef Tto As Actuating device

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4146127B2 (ja) * 2002-01-16 2008-09-03 セイコーインスツル株式会社 圧電アクチュエータ及びそれを備えた電子機器
US6736521B1 (en) * 2003-01-02 2004-05-18 Texas Instruments Incorporated On axis translational motion stops for movable structure having torsional hinge
JP3761869B2 (ja) * 2003-03-27 2006-03-29 アンリツ株式会社 光スキャナ
JP2007152497A (ja) * 2005-12-05 2007-06-21 Canon Inc 揺動体装置
JP2010197662A (ja) * 2009-02-25 2010-09-09 Panasonic Corp 光学反射素子
JP2010237519A (ja) * 2009-03-31 2010-10-21 Brother Ind Ltd 光スキャナ
JP2011085677A (ja) * 2009-10-14 2011-04-28 Panasonic Corp 光走査装置、光走査装置の製造方法及びこの光走査装置を用いたレーザプロジェクタ

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