JP2015214460A5 - - Google Patents
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- Publication number
- JP2015214460A5 JP2015214460A5 JP2014098976A JP2014098976A JP2015214460A5 JP 2015214460 A5 JP2015214460 A5 JP 2015214460A5 JP 2014098976 A JP2014098976 A JP 2014098976A JP 2014098976 A JP2014098976 A JP 2014098976A JP 2015214460 A5 JP2015214460 A5 JP 2015214460A5
- Authority
- JP
- Japan
- Prior art keywords
- rotational speed
- oxygen concentration
- interstitial oxygen
- controlling
- increased
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 239000001301 oxygen Substances 0.000 description 3
- 229910052760 oxygen Inorganic materials 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014098976A JP6070626B2 (ja) | 2014-05-12 | 2014-05-12 | シリコン単結晶の育成方法 |
| CN201580027054.XA CN106460227B (zh) | 2014-05-12 | 2015-03-11 | 单晶硅的生长方法 |
| PCT/JP2015/001319 WO2015173998A1 (ja) | 2014-05-12 | 2015-03-11 | シリコン単結晶の育成方法 |
| KR1020167031305A KR102105366B1 (ko) | 2014-05-12 | 2015-03-11 | 실리콘 단결정의 육성방법 |
| US15/305,119 US9988736B2 (en) | 2014-05-12 | 2015-03-11 | Method for growing a silicon single crystal while suppressing a generation of slip dislocations in a tail portion |
| DE112015001883.2T DE112015001883B4 (de) | 2014-05-12 | 2015-03-11 | Verfahren zum Wachsenlassen eines Silizium-Einkristalls |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2014098976A JP6070626B2 (ja) | 2014-05-12 | 2014-05-12 | シリコン単結晶の育成方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015214460A JP2015214460A (ja) | 2015-12-03 |
| JP2015214460A5 true JP2015214460A5 (https=) | 2016-12-01 |
| JP6070626B2 JP6070626B2 (ja) | 2017-02-01 |
Family
ID=54479556
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2014098976A Active JP6070626B2 (ja) | 2014-05-12 | 2014-05-12 | シリコン単結晶の育成方法 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US9988736B2 (https=) |
| JP (1) | JP6070626B2 (https=) |
| KR (1) | KR102105366B1 (https=) |
| CN (1) | CN106460227B (https=) |
| DE (1) | DE112015001883B4 (https=) |
| WO (1) | WO2015173998A1 (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FI3940124T3 (fi) * | 2020-07-14 | 2024-04-03 | Siltronic Ag | Kidekappale yksikiteisestä piistä |
| KR102808187B1 (ko) * | 2021-11-29 | 2025-05-19 | 한국전자통신연구원 | 상이한 네트워크 로봇 컴포넌트들 간의 통신 구성 장치 및 방법 |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6153A (en) | 1849-03-10 | Loom eoe weaving brussels carpets | ||
| US9A (en) | 1836-08-10 | Thomas Blanchard | Method of riveting plank or made blocks | |
| EP0947611A3 (en) | 1998-03-17 | 2002-03-20 | Shin-Etsu Handotai Company Limited | A method for producing a silicon single crystal and the silicon single crystal produced thereby |
| JPH11268991A (ja) * | 1998-03-24 | 1999-10-05 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法およびシリコン単結晶 |
| JP3473477B2 (ja) | 1998-04-07 | 2003-12-02 | 信越半導体株式会社 | シリコン単結晶の製造方法 |
| JP4791073B2 (ja) * | 2005-04-26 | 2011-10-12 | Ｓｕｍｃｏ Ｔｅｃｈｘｉｖ株式会社 | シリコンウェーハの製造方法 |
| JP2009274916A (ja) * | 2008-05-15 | 2009-11-26 | Sumco Corp | シリコン単結晶及びその製造方法 |
| JP5088338B2 (ja) * | 2009-03-10 | 2012-12-05 | 信越半導体株式会社 | シリコン単結晶の引き上げ方法 |
| JP2010275137A (ja) * | 2009-05-27 | 2010-12-09 | Shin Etsu Handotai Co Ltd | シリコン単結晶の製造方法 |
-
2014
- 2014-05-12 JP JP2014098976A patent/JP6070626B2/ja active Active
-
2015
- 2015-03-11 US US15/305,119 patent/US9988736B2/en active Active
- 2015-03-11 CN CN201580027054.XA patent/CN106460227B/zh active Active
- 2015-03-11 KR KR1020167031305A patent/KR102105366B1/ko active Active
- 2015-03-11 DE DE112015001883.2T patent/DE112015001883B4/de active Active
- 2015-03-11 WO PCT/JP2015/001319 patent/WO2015173998A1/ja not_active Ceased
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