JP2015207559A5 - - Google Patents
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- Publication number
- JP2015207559A5 JP2015207559A5 JP2015085117A JP2015085117A JP2015207559A5 JP 2015207559 A5 JP2015207559 A5 JP 2015207559A5 JP 2015085117 A JP2015085117 A JP 2015085117A JP 2015085117 A JP2015085117 A JP 2015085117A JP 2015207559 A5 JP2015207559 A5 JP 2015207559A5
- Authority
- JP
- Japan
- Prior art keywords
- ray
- structures
- hadamard matrix
- high aspect
- aspect ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011159 matrix material Substances 0.000 claims description 54
- 239000000463 material Substances 0.000 claims description 19
- 238000010894 electron beam technology Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims 14
- 239000000758 substrate Substances 0.000 claims 4
- 230000001678 irradiating effect Effects 0.000 claims 3
- 238000003491 array Methods 0.000 claims 1
- 230000035945 sensitivity Effects 0.000 description 2
- 230000014509 gene expression Effects 0.000 description 1
Applications Claiming Priority (4)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461981330P | 2014-04-18 | 2014-04-18 | |
| US61/981,330 | 2014-04-18 | ||
| US14/645,689 US9934930B2 (en) | 2014-04-18 | 2015-03-12 | High aspect ratio x-ray targets and uses of same |
| US14/645,689 | 2015-03-12 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2015207559A JP2015207559A (ja) | 2015-11-19 |
| JP2015207559A5 true JP2015207559A5 (https=) | 2018-06-07 |
| JP6499498B2 JP6499498B2 (ja) | 2019-04-10 |
Family
ID=54322599
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2015085117A Expired - Fee Related JP6499498B2 (ja) | 2014-04-18 | 2015-04-17 | 高アスペクト比x線ターゲットおよびその使用 |
Country Status (3)
| Country | Link |
|---|---|
| US (2) | US9934930B2 (https=) |
| JP (1) | JP6499498B2 (https=) |
| CN (1) | CN105105779B (https=) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20150117599A1 (en) * | 2013-10-31 | 2015-04-30 | Sigray, Inc. | X-ray interferometric imaging system |
| US10295485B2 (en) | 2013-12-05 | 2019-05-21 | Sigray, Inc. | X-ray transmission spectrometer system |
| USRE48612E1 (en) | 2013-10-31 | 2021-06-29 | Sigray, Inc. | X-ray interferometric imaging system |
| WO2016028655A1 (en) | 2014-08-16 | 2016-02-25 | Fei Company | Correction of beam hardening artifacts in microtomography for samples imaged in containers |
| US10520454B2 (en) | 2017-05-02 | 2019-12-31 | Fei Company | Innovative X-ray source for use in tomographic imaging |
| EP3413691A1 (en) * | 2017-06-08 | 2018-12-12 | Koninklijke Philips N.V. | Apparatus for generating x-rays |
| EP3428928A1 (en) | 2017-07-11 | 2019-01-16 | FEI Company | Lamella-shaped targets for x-ray generation |
| US10566170B2 (en) * | 2017-09-08 | 2020-02-18 | Electronics And Telecommunications Research Institute | X-ray imaging device and driving method thereof |
| JP2021082374A (ja) * | 2018-03-09 | 2021-05-27 | 国立大学法人東北大学 | 位相イメージング用x線発生装置 |
| US10468230B2 (en) * | 2018-04-10 | 2019-11-05 | Bae Systems Information And Electronic Systems Integration Inc. | Nondestructive sample imaging |
| US10845491B2 (en) | 2018-06-04 | 2020-11-24 | Sigray, Inc. | Energy-resolving x-ray detection system |
| GB2591630B (en) | 2018-07-26 | 2023-05-24 | Sigray Inc | High brightness x-ray reflection source |
| US10656105B2 (en) * | 2018-08-06 | 2020-05-19 | Sigray, Inc. | Talbot-lau x-ray source and interferometric system |
| CN109255818B (zh) * | 2018-08-12 | 2021-05-28 | 浙江农林大学 | 一种新型标靶及其亚像素级角点的提取方法 |
| WO2020051061A1 (en) | 2018-09-04 | 2020-03-12 | Sigray, Inc. | System and method for x-ray fluorescence with filtering |
| WO2020051221A2 (en) | 2018-09-07 | 2020-03-12 | Sigray, Inc. | System and method for depth-selectable x-ray analysis |
| WO2021011209A1 (en) | 2019-07-15 | 2021-01-21 | Sigray, Inc. | X-ray source with rotating anode at atmospheric pressure |
| US11340179B2 (en) | 2019-10-21 | 2022-05-24 | Bae Systems Information And Electronic System Integration Inc. | Nanofabricated structures for sub-beam resolution and spectral enhancement in tomographic imaging |
| US11996259B2 (en) * | 2019-10-24 | 2024-05-28 | Nova Measuring Instruments Inc. | Patterned x-ray emitting target |
| US12046442B2 (en) | 2020-12-31 | 2024-07-23 | VEC Imaging GmbH & Co. KG | Hybrid multi-source x-ray source and imaging system |
| DE112023000574B4 (de) | 2022-01-13 | 2026-02-26 | Sigray, Inc. | Mikrofokus-röntgenquelle zur erzeugung von röntgenstrahlen mit hohem fluss und niedriger energie |
| WO2023168204A1 (en) | 2022-03-02 | 2023-09-07 | Sigray, Inc. | X-ray fluorescence system and x-ray source with electrically insulative target material |
| US12181423B1 (en) | 2023-09-07 | 2024-12-31 | Sigray, Inc. | Secondary image removal using high resolution x-ray transmission sources |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3610984A (en) * | 1967-12-28 | 1971-10-05 | Tokyo Shibaura Electric Co | Rotating-anode x-ray tube with multiple focal areas |
| US6545790B2 (en) * | 1999-11-08 | 2003-04-08 | Ralph W. Gerchberg | System and method for recovering phase information of a wave front |
| JP3847134B2 (ja) * | 2001-10-19 | 2006-11-15 | 三井造船株式会社 | 放射線検出装置 |
| US6793039B2 (en) * | 2002-03-13 | 2004-09-21 | Jerome R. Schmid, Jr. | Submerged water activity platform |
| US6947522B2 (en) * | 2002-12-20 | 2005-09-20 | General Electric Company | Rotating notched transmission x-ray for multiple focal spots |
| US6950495B2 (en) * | 2003-12-01 | 2005-09-27 | The Boeing Company | Backscatter imaging using Hadamard transform masking |
| US8229075B2 (en) * | 2005-09-12 | 2012-07-24 | Board Of Regents Of The Nevada System Of Higher Education, On Behalf Of The University Of Nevada, Reno | Targets and processes for fabricating same |
| WO2008063695A2 (en) * | 2006-04-21 | 2008-05-29 | American Science And Engineering, Inc. | X-ray imaging of baggage and personnel using arrays of discrete sources and multiple collimated beams |
| CA2665872C (en) * | 2006-10-24 | 2013-04-02 | Thermo Niton Analyzers Llc | Apparatus for inspecting objects using coded beam |
| KR20100071564A (ko) * | 2008-12-19 | 2010-06-29 | 삼성전기주식회사 | 엑스선 튜브 |
| JP2012522332A (ja) * | 2009-03-27 | 2012-09-20 | コーニンクレッカ フィリップス エレクトロニクス エヌ ヴィ | X線管を備えた符号化された線源イメージング用の構造を有する電子エミッタ |
| US20150117599A1 (en) | 2013-10-31 | 2015-04-30 | Sigray, Inc. | X-ray interferometric imaging system |
| JP6202484B2 (ja) * | 2012-08-10 | 2017-09-27 | 国立研究開発法人物質・材料研究機構 | 中性子撮像装置及びその使用方法 |
| JP2014038742A (ja) * | 2012-08-13 | 2014-02-27 | Tokyo Electron Ltd | X線発生用ターゲットの製造方法、及びx線発生用ターゲット |
| US20150092924A1 (en) | 2013-09-04 | 2015-04-02 | Wenbing Yun | Structured targets for x-ray generation |
| US9874531B2 (en) | 2013-10-31 | 2018-01-23 | Sigray, Inc. | X-ray method for the measurement, characterization, and analysis of periodic structures |
| EP3171163B1 (en) * | 2015-11-18 | 2022-05-04 | FEI Company | X-ray imaging technique |
-
2015
- 2015-03-12 US US14/645,689 patent/US9934930B2/en active Active
- 2015-04-17 CN CN201510398704.3A patent/CN105105779B/zh not_active Expired - Fee Related
- 2015-04-17 JP JP2015085117A patent/JP6499498B2/ja not_active Expired - Fee Related
-
2018
- 2018-02-21 US US15/901,858 patent/US10366860B2/en active Active
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